I/O systems, methods and devices for interfacing a pump controller
    31.
    发明申请
    I/O systems, methods and devices for interfacing a pump controller 有权
    I / O系统,用于连接泵控制器的方法和设备

    公开(公告)号:US20070127511A1

    公开(公告)日:2007-06-07

    申请号:US11602449

    申请日:2006-11-20

    Abstract: Embodiments of the present invention provide I/O systems, methods, and devices for interfacing pump controller(s) with control device(s) which may have different interfaces and/or signaling formats. In one embodiment, an I/O interface module comprises a processor, a memory, and at least two data communications interfaces for communicating with a pumping controller and a control device. The I/O interface module can receive discrete signals from the control device, interpret them accordingly and send the packets to the pump controller. The pump controller reads the packets and takes appropriate actions at the pump. The I/O interface module can interpret packets of data received from the pump controller and assert corresponding discrete signals to the control device. The I/O interface module is customizable and allows a variety of interfaces and control schemes to be implemented with a particular multiple stage pump without changing the hardware of the pump.

    Abstract translation: 本发明的实施例提供了用于将泵控制器与可能具有不同接口和/或信令格式的控制设备接口的I / O系统,方法和设备。 在一个实施例中,I / O接口模块包括处理器,存储器和用于与泵送控制器和控制设备通信的至少两个数据通信接口。 I / O接口模块可以从控制设备接收离散信号,相应地解释它们,并将数据包发送到泵控制器。 泵控制器读取数据包,并在泵处采取适当的措施。 I / O接口模块可以解释从泵控制器接收的数据包,并将相应的离散信号声明给控制设备。 I / O接口模块是可定制的,允许使用特定的多级泵实现各种接口和控制方案,而无需更换泵的硬件。

    System and method for pressure compensation in a pump
    32.
    发明授权
    System and method for pressure compensation in a pump 有权
    泵中压力补偿的系统和方法

    公开(公告)号:US08870548B2

    公开(公告)日:2014-10-28

    申请号:US13251976

    申请日:2011-10-03

    CPC classification number: F04B49/08 F04B13/00 F04B49/065 F04B51/00 F04B2205/03

    Abstract: Systems and methods for maintaining substantially a baseline pressure in a chamber of a pumping apparatus are disclosed. Embodiments of the present invention may serve to control a motor to compensate or account for a pressure drift which may occur in a chamber of the pumping apparatus. More specifically, a dispense motor may be controlled to substantially maintain a baseline pressure in the dispense chamber before a dispense based on a pressure sensed in the dispense chamber. In one embodiment, before a dispense is initiated a control loop may be utilized such that it is repeatedly determined if the pressure in the dispense chamber is above a desired pressure and, if so, the movement of the pumping means regulated to maintain substantially the desired pressure in the dispense chamber until a dispense of fluid is initiated.

    Abstract translation: 公开了用于在泵送装置的腔室中基本维持基线压力的系统和方法。 本发明的实施例可以用于控制电动机以补偿或解释可能在泵送装置的腔室中发生的压力漂移。 更具体地,可以控制分配马达,以在基于在分配室中感测到的压力的分配之前基本维持分配室中的基准压力。 在一个实施例中,在分配开始之前,可以利用控制回路,使得重复地确定分配室中的压力是否高于期望的压力,并且如果是,调节泵送装置的运动以维持基本上所需的 在分配室内的压力直到开始分配流体。

    System and method for monitoring operation of a pump
    33.
    发明授权
    System and method for monitoring operation of a pump 有权
    用于监测泵运行的系统和方法

    公开(公告)号:US08662859B2

    公开(公告)日:2014-03-04

    申请号:US13615926

    申请日:2012-09-14

    Abstract: Systems and methods for monitoring operation of a pump, including verifying operation or actions of a pump, are disclosed. A baseline profile for one or more parameters of a pump may be established. An operating profile may then be created by recording one or more values for the same set of parameters during subsequent operation of the pump. The values of the baseline profile and the operating profile may then be compared at one or more points or sets of points. If the operating profile differs from the baseline profile by more than a certain tolerance an alarm may be sent or another action taken, for example the pumping system may shut down, etc.

    Abstract translation: 公开了用于监视泵的操作的系统和方法,包括验证泵的操作或动作。 可以建立泵的一个或多个参数的基线曲线。 然后可以通过在泵的后续操作期间记录用于相同参数集合的一个或多个值来创建操作简档。 然后可以在一个或多个点或一组点处比较基线轮廓和操作轮廓的值。 如果操作配置文件与基线配置文件的差异超过一定容差,则可能会发送报警或采取其他操作,例如泵送系统可能会关闭等。

    System and method for position control of a mechanical piston in a pump
    34.
    发明授权
    System and method for position control of a mechanical piston in a pump 有权
    泵中机械活塞的位置控制系统和方法

    公开(公告)号:US08083498B2

    公开(公告)日:2011-12-27

    申请号:US11602485

    申请日:2006-11-20

    CPC classification number: F04B17/03 F04B25/00 F04B49/065 Y10S417/90

    Abstract: Embodiments of the systems and methods disclosed herein utilize a brushless DC motor (BLDCM) to drive a single-stage or a multi-stage pump in a pumping system for real time, smooth motion, and extremely precise and repeatable position control over fluid movements and dispense amounts, useful in semiconductor manufacturing. The BLDCM may employ a position sensor for real time position feedback to a processor executing a custom field-oriented control scheme. Embodiments of the invention can reduce heat generation without undesirably compromising the precise position control of the dispense pump by increasing and decreasing, via a custom control scheme, the operating frequency of the BLDCM according to the criticality of the underlying function(s). The control scheme can run the BLDCM at very low speeds while maintaining a constant velocity, which enables the pumping system to operate in a wide range of speeds with minimal variation, substantially increasing dispense performance and operation capabilities.

    Abstract translation: 本文公开的系统和方法的实施例利用无刷直流电动机(BLDCM)来驱动泵送系统中的单级或多级泵,以实时,平稳地运动,以及对流体运动进行非常精确和可重复的位置控制, 分配量,用于半导体制造。 BLDCM可以使用位置传感器来实现位置反馈到执行定制的面向场的控制方案的处理器。 本发明的实施例可以通过根据底层功能的关键性,通过自定义控制方案增加和减少BLDCM的工作频率,而不会不期望地损害分配泵的精确位置控制而不发生损害。 该控制方案可以以非常低的速度运行BLDCM,同时保持恒定的速度,这使得泵送系统能够以较小的变化,大幅度增加的分配性能和操作能力在宽范围的速度下运行。

    System and method for valve sequencing in a pump
    35.
    发明授权
    System and method for valve sequencing in a pump 有权
    泵的排序系统和方法

    公开(公告)号:US08025486B2

    公开(公告)日:2011-09-27

    申请号:US11602465

    申请日:2006-11-20

    CPC classification number: F04B13/00 F04B7/0076 Y10T137/87885

    Abstract: Systems and methods for minimizing pressure fluctuations within a pumping apparatus are disclosed. Embodiments of the present invention may serve to reduce pressure variations within a fluid path of a pumping apparatus by avoiding closing a valve to create a closed or entrapped space in the fluid path and similarly, avoiding opening a valve between two entrapped spaces. More specifically, embodiments of the present invention may serve to operate a system of valves of the pumping apparatus according to a valve sequence configured to substantially minimize the time the fluid flow path through the pumping apparatus is closed (e.g. to an area external to the pumping apparatus).

    Abstract translation: 公开了一种用于最小化泵送装置内的压力波动的系统和方法。 本发明的实施例可以用于通过避免关闭阀门以在流体路径中产生闭合或夹带的空间来减少泵送装置的流体路径内的压力变化,并且类似地避免在两个被夹带的空间之间打开阀门。 更具体地,本发明的实施例可以用于根据阀顺序来操作泵送装置的阀的系统,所述阀顺序被配置为基本上最小化通过泵送装置的流体流动路径关闭的时间(例如,到泵送外部的区域 仪器)。

    I/O SYSTEMS, METHODS AND DEVICES FOR INTERFACING A PUMP CONTROLLER

    公开(公告)号:US20110208890A1

    公开(公告)日:2011-08-25

    申请号:US13081308

    申请日:2011-04-06

    Abstract: Embodiments of the present invention provide I/O systems, methods, and devices for interfacing pump controller(s) with control device(s) which may have different interfaces and/or signaling formats. In one embodiment, an I/O interface module comprises a processor, a memory, and at least two data communications interfaces for communicating with a pumping controller and a control device. The I/O interface module can receive discrete signals from the control device, interpret them accordingly and send the packets to the pump controller. The pump controller reads the packets and takes appropriate actions at the pump. The I/O interface module can interpret packets of data received from the pump controller and assert corresponding discrete signals to the control device. The I/O interface module is customizable and allows a variety of interfaces and control schemes to be implemented with a particular multiple stage pump without changing the hardware of the pump.

    SYSTEM AND METHOD FOR MONITORING OPERATION OF A PUMP
    37.
    发明申请
    SYSTEM AND METHOD FOR MONITORING OPERATION OF A PUMP 有权
    用于监测泵的操作的系统和方法

    公开(公告)号:US20110098864A1

    公开(公告)日:2011-04-28

    申请号:US12983737

    申请日:2011-01-03

    Abstract: Systems and methods for monitoring operation of a pump, including verifying operation or actions of a pump, are disclosed. A baseline profile for one or more parameters of a pump may be established. An operating profile may then be created by recording one or more values for the same set of parameters during subsequent operation of the pump. The values of the baseline profile and the operating profile may then be compared at one or more points or sets of points. If the operating profile differs from the baseline profile by more than a certain tolerance an alarm may be sent or another action taken, for example the pumping system may shut down, etc.

    Abstract translation: 公开了用于监视泵的操作的系统和方法,包括验证泵的操作或动作。 可以建立泵的一个或多个参数的基线曲线。 然后可以通过在泵的后续操作期间记录用于相同参数集合的一个或多个值来创建操作简档。 然后可以在一个或多个点或一组点处比较基线轮廓和操作轮廓的值。 如果操作配置文件与基线配置文件的差异超过一定容差,则可能会发送报警或采取其他操作,例如泵送系统可能会关闭等。

    System and method for monitoring operation of a pump
    38.
    发明授权
    System and method for monitoring operation of a pump 有权
    用于监测泵运行的系统和方法

    公开(公告)号:US07878765B2

    公开(公告)日:2011-02-01

    申请号:US11364286

    申请日:2006-02-28

    Abstract: Systems and methods for monitoring operation of a pump, including verifying operation or actions of a pump, are disclosed. A baseline profile for one or more parameters of a pump may be established. An operating profile may then be created by recording one or more values for the same set of parameters during subsequent operation of the pump. The values of the baseline profile and the operating profile may then be compared at one or more points or sets of points. If the operating profile differs from the baseline profile by more than a certain tolerance an alarm may be sent or another action taken, for example the pumping system may shut down, etc.

    Abstract translation: 公开了用于监视泵的操作的系统和方法,包括验证泵的操作或动作。 可以建立泵的一个或多个参数的基线曲线。 然后可以通过在泵的后续操作期间记录用于相同参数集合的一个或多个值来创建操作简档。 然后可以在一个或多个点或一组点处比较基线轮廓和操作轮廓的值。 如果操作配置文件与基线配置文件的差异超过一定容差,则可能会发送报警或采取其他操作,例如泵送系统可能会关闭等。

    System and method for control of fluid pressure
    39.
    发明授权
    System and method for control of fluid pressure 有权
    用于控制流体压力的系统和方法

    公开(公告)号:US07850431B2

    公开(公告)日:2010-12-14

    申请号:US11292559

    申请日:2005-12-02

    Abstract: Embodiments of the present invention are related to a pumping system that accurately dispenses fluid using a multiple stage (“multi-stage”) pump. More particularly, embodiments of the present invention provide for control of a feed stage pump to regulate fluid pressure at a downstream dispense stage pump. According to one embodiment of the present invention, a pressure sensor at the dispense stage pump determines the pressure in a dispense chamber. When the pressure reaches a predefined threshold, the dispense stage pump can begin to increase the available volume of the dispense chamber, thereby causing the pressure in the dispense chamber to drop. As the pressure decreases/increases at the downstream pump, the pressure applied by the upstream pump can bed increased/decreased.

    Abstract translation: 本发明的实施例涉及一种使用多级(“多级”)泵精确分配流体的泵送系统。 更具体地,本发明的实施例提供了用于控制进料级泵以调节下游分配级泵处的流体压力的装置。 根据本发明的一个实施例,分配级泵处的压力传感器确定分配室中的压力。 当压力达到预定阈值时,分配级泵可以开始增加分配室的可用体积,从而使分配室中的压力下降。 随着下游泵的压力下降/增加,上游泵施加的压力可以增加/减少。

    System and method for valve sequencing in a pump
    40.
    发明申请
    System and method for valve sequencing in a pump 有权
    泵的排序系统和方法

    公开(公告)号:US20100262304A1

    公开(公告)日:2010-10-14

    申请号:US11602465

    申请日:2006-11-20

    CPC classification number: F04B13/00 F04B7/0076 Y10T137/87885

    Abstract: Systems and methods for minimizing pressure fluctuations within a pumping apparatus are disclosed. Embodiments of the present invention may serve to reduce pressure variations within a fluid path of a pumping apparatus by avoiding closing a valve to create a closed or entrapped space in the fluid path and similarly, avoiding opening a valve between two entrapped spaces. More specifically, embodiments of the present invention may serve to operate a system of valves of the pumping apparatus according to a valve sequence configured to substantially minimize the time the fluid flow path through the pumping apparatus is closed (e.g. to an area external to the pumping apparatus).

    Abstract translation: 公开了一种用于最小化泵送装置内的压力波动的系统和方法。 本发明的实施例可以用于通过避免关闭阀门以在流体路径中产生闭合或夹带的空间来减少泵送装置的流体路径内的压力变化,并且类似地避免在两个被夹带的空间之间打开阀门。 更具体地,本发明的实施例可以用于根据阀顺序来操作泵送装置的阀的系统,所述阀顺序被配置为基本上最小化通过泵送装置的流体流动路径关闭的时间(例如,到泵送外部的区域 仪器)。

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