公开(公告)号：US07541580B2

公开(公告)日：2009-06-02

申请号：US11731743

申请日：2007-03-30

Applicant: William Ralph Knowles ,  Milos Toth

Inventor： William Ralph Knowles ,  Milos Toth

IPC: H01J37/252

CPC classification number: G01N23/225 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/2003 ,  H01J2237/2449 ,  H01J2237/2608

Abstract: A detector for use with a high pressure SEM, such as an ESEM® environmental SEM from FEI Company, extends the effective detection space above the PLA, thereby increasing secondary signal amplification without increasing working distance or pressure. Embodiments can therefore provide improved resolution and can operate at lower gas pressures.

Abstract translation: 用于高压SEM的检测器，如来自FEI公司的ESEM环境SEM，扩展了PLA上方的有效检测空间，从而在不增加工作距离或压力的情况下增加了二次信号放大。 因此，实施例可以提供改进的分辨率并且可以在较低的气体压力下操作。