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    Liquid flow cells having graphene on nitride for microscopy
    5.
    发明授权
    Liquid flow cells having graphene on nitride for microscopy 有权
    具有用于显微镜的氮化物上的石墨烯的液体流动池

    公开(公告)号：US09449787B2

    公开(公告)日：2016-09-20

    申请号：US14817551

    申请日：2015-08-04

    Applicant: Vivekananda P. Adiga ,  Gabriel Dunn ,  Alexander K. Zettl ,  A. Paul Alivisatos

    Inventor： Vivekananda P. Adiga ,  Gabriel Dunn ,  Alexander K. Zettl ,  A. Paul Alivisatos

    IPC: G02B1/12 ,  H01J37/16 ,  H01J37/26 ,  H01J37/20 ,  H01L29/68 ,  H01L29/78 ,  H01L29/16 ,  C23C18/08 ,  H01L29/66 ,  G02B21/16

    CPC classification number: H01J37/20 ,  C23C18/08 ,  G02B1/12 ,  G02B21/16 ,  H01J37/26 ,  H01J2237/2003 ,  H01J2237/2004 ,  H01L29/1606 ,  H01L29/66045 ,  Y10T29/49002

    Abstract: This disclosure provides systems, methods, and apparatus related to liquid flow cells for microscopy. In one aspect, a device includes a substrate having a first and a second oxide layer disposed on surfaces of the substrate. A first and a second nitride layer are disposed on the first and second oxide layers, respectively. A cavity is defined in the first oxide layer, the first nitride layer, and the substrate, with the cavity including a third nitride layer disposed on walls of the substrate and the second oxide layer that define the cavity. A channel is defined in the second oxide layer. An inlet port and an outlet port are defined in the second nitride layer and in fluid communication with the channel. A plurality of viewports is defined in the second nitride layer. A first graphene sheet is disposed on the second nitride layer covering the plurality of viewports.

    Abstract translation: 本公开提供了与用于显微镜的液体流动池相关的系统，方法和装置。 一方面，一种器件包括具有设置在衬底表面上的第一和第二氧化物层的衬底。 第一和第二氮化物层分别设置在第一和第二氧化物层上。 在第一氧化物层，第一氮化物层和衬底中限定空腔，空腔包括设置在衬底的壁上的第三氮化物层和限定空腔的第二氧化物层。 在第二氧化物层中限定通道。 入口端口和出口限定在第二氮化物层中并与通道流体连通。 在第二氮化物层中限定多个视口。 第一石墨烯片被布置在覆盖多个视口的第二氮化物层上。

    Transmission electron microscope cells for use with liquid samples
    6.
    发明授权
    Transmission electron microscope cells for use with liquid samples 有权
    用于液体样品的透射电子显微镜细胞

    公开(公告)号：US09412556B2

    公开(公告)日：2016-08-09

    申请号：US14524866

    申请日：2014-10-27

    Applicant: Waqas Khalid ,  A. Paul Alivisatos ,  Alexander K. Zettl

    Inventor： Waqas Khalid ,  A. Paul Alivisatos ,  Alexander K. Zettl

    IPC: H01J37/16 ,  H01L29/66 ,  H01J37/20 ,  H01J37/26 ,  H01L29/78 ,  H01L29/16 ,  C23C18/08

    CPC classification number: H01J37/20 ,  C23C18/08 ,  H01J37/16 ,  H01J37/26 ,  H01J2237/2003 ,  H01J2237/204 ,  H01L29/1606 ,  H01L29/66045 ,  Y10T29/49002

    Abstract: This disclosure provides systems, methods, and devices related to transmission electron microscopy cells for use with liquids. In one aspect a device includes a substrate, a first graphene layer, and a second graphene layer. The substrate has a first surface and a second surface. The first surface defines a first channel, a second channel, and an outlet channel. The first channel and the second channel are joined to the outlet channel. The outlet channel defines a viewport region forming a though hole in the substrate. The first graphene layer overlays the first surface of the substrate, including an interior area of the first channel, the second channel, and the outlet channel. The second graphene layer overlays the first surface of the substrate, including open regions defined by the first channel, the second channel, and the outlet channel.

    Abstract translation: 本公开提供了与用于液体的透射电子显微镜细胞相关的系统，方法和装置。 在一个方面，一种器件包括衬底，第一石墨烯层和第二石墨烯层。 基板具有第一表面和第二表面。 第一表面限定第一通道，第二通道和出口通道。 第一通道和第二通道连接到出口通道。 出口通道限定在基板中形成通孔的视口区域。 第一石墨烯层覆盖基板的第一表面，包括第一通道，第二通道和出口通道的内部区域。 第二石墨烯层覆盖基板的第一表面，包括由第一通道，第二通道和出口通道限定的开放区域。

    Charged Particle Beam Device and Filter Member
    7.
    发明申请
    Charged Particle Beam Device and Filter Member 有权
    带电粒子束和过滤器

    公开(公告)号：US20160071685A1

    公开(公告)日：2016-03-10

    申请号：US14782695

    申请日：2014-03-05

    Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

    Inventor： Shinsuke KAWANISHI ,  Yusuke OMINAMI ,  Masahiko AJIMA ,  Hiroyuki SUZUKI

    IPC: H01J37/16 ,  H01J37/26

    CPC classification number: H01J37/16 ,  H01J37/026 ,  H01J37/18 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/0213 ,  H01J2237/022 ,  H01J2237/2003 ,  H01J2237/2006

    Abstract: In a SEM device which enables observations under an atmospheric pressure, in the event that a diaphragm is damaged during an observation of a sample, air flows into a charged particle optical barrel from the vicinity of the sample, due to the differential pressure between the inside of the charged particle optical barrel under vacuum and the vicinity of the sample under the atmospheric pressure. At this time, the sample may be sucked into the charged particle optical barrel. In this case, a charged particle optical system and a detector are contaminated thereby, which causes performance degradation or failures of the charged particle microscope. For coping therewith, it is necessary to prevent the charged particle optical barrel from being contaminated, without inducing a time lag, with a simple structure. In a charged particle beam device adapted to place a sample in a non-vacuum environment, there is provided a filter member which is placed on the path of a primary charged particle beam at least in a state where the primary charged particle beam is directed to the sample and, further, is adapted to transmit or pass, therethrough, the primary charged particle beam and secondary charged particles derived from the sample, while intercepting at least a portion of a scattering substance which is scattered in the event of a fracture of the diaphragm.

    Abstract translation: 在能够在大气压下进行观察的SEM装置中，在样品观察期间膜片损伤的情况下，由于内部的压差，空气从样品附近流入带电粒子光学镜筒 的带电粒子光学筒在真空下和样品在大气压附近。 此时，样品可以被吸入带电粒子光学筒中。 在这种情况下，带电粒子光学系统和检测器被污染，导致带电粒子显微镜的性能下降或失效。 为了应对，需要以简单的结构防止带电粒子光学筒被污染，而不会引起时间滞后。 在适于将样品置于非真空环境中的带电粒子束装置中，设置有过滤构件，其至少在初级带电粒子束被引导到 样品，并且还适于透射或通过从样品衍生的初级带电粒子束和二次带电粒子，同时截留至少一部分在发生断裂的情况下散射的散射物质 隔膜

    ELECTRON MICROSCOPE AND ELECTRON MICROSCOPE SAMPLE RETAINING DEVICE
    10.
    发明申请
    ELECTRON MICROSCOPE AND ELECTRON MICROSCOPE SAMPLE RETAINING DEVICE 有权
    电子显微镜和电子显微镜样品保留装置

    公开(公告)号：US20150179396A1

    公开(公告)日：2015-06-25

    申请号：US14417345

    申请日：2013-06-19

    Applicant: Hitachi High-Technologies Corporation

    Inventor： Toshie Yaguchi ,  Yasuhira Nagakubo

    IPC: H01J37/20 ,  H01J37/244 ,  H01J37/26

    CPC classification number: H01J37/20 ,  H01J37/244 ,  H01J37/26 ,  H01J37/261 ,  H01J2237/006 ,  H01J2237/063 ,  H01J2237/2001 ,  H01J2237/2002 ,  H01J2237/2003 ,  H01J2237/2007 ,  H01J2237/2448 ,  H01J2237/2602

    Abstract: An object of the invention is to provide an electron microscope which can easily and safely prepare a gas or liquid environment in the electron microscope and can observe a specimen in the environment and a reaction of the specimen at a high resolution and to provide a specimen holder for the electron microscope. In the electron microscope including specimen holding means (6) for holding a specimen (23), the specimen (23) is placed in a capillary (17) through which electron beams are transmittable, the electron microscope includes a supply device for supplying gas or liquid into the capillary (17) and a collection device for collecting the gas or the liquid, and the electron microscope obtains a specimen image of the specimen while flowing the gas or the liquid.

    Abstract translation: 本发明的目的是提供一种电子显微镜，其可以容易且安全地在电子显微镜中制备气体或液体环境，并且可以观察环境中的样品和高分辨率的样品的反应并提供样品架 用于电子显微镜。 在包括用于保持试样（23）的检体保持机构（6）的电子显微镜中，试样（23）被放置在可透射电子束的毛细管（17）中，电子显微镜包括用于供给气体的供给装置 液体进入毛细管（17）和用于收集气体或液体的收集装置，并且电子显微镜在流动气体或液体的同时获得样品的样本图像。

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