公开(公告)号：US20190279844A1

公开(公告)日：2019-09-12

申请号：US16295971

申请日：2019-03-07

Applicant: ASML Netherlands B.V.

Inventor： Weiming REN ,  Xuedong LIU ,  Xuerang HU ,  Zhong-wei CHEN

IPC: H01J37/317 ,  H01J37/147 ,  H01J37/30 ,  B82Y40/00 ,  B82Y10/00

Abstract: The present disclosure proposes a crossover-forming deflector array of an electro-optical system for directing a plurality of electron beams onto an electron detection device. The crossover-forming deflector array includes a plurality of crossover-forming deflectors positioned at or at least near an image plane of a set of one or more electro-optical lenses of the electro-optical system, wherein each crossover-forming deflector is aligned with a corresponding electron beam of the plurality of electron beams.