Method and mask for enhancing the resolution of patterning 2-row holes
    32.
    发明授权
    Method and mask for enhancing the resolution of patterning 2-row holes 有权
    用于提高图案化2排孔分辨率的方法和掩模

    公开(公告)号:US08465906B2

    公开(公告)日:2013-06-18

    申请号:US13081268

    申请日:2011-04-06

    CPC classification number: G03F7/70433 G03F1/26 G03F1/32 G03F1/36 G03F7/70091

    Abstract: A photolithography mask including a plurality of mask features. Adjacent mask features are separated by a gap and are offset from each other such that individual mask features have one-side dense portions and two-side dense portions. Also a photolithography method that includes a step of providing a substantially opaque mask having N stepped rows of offset, substantially transparent, rectangular mask features, where N is an integer and N≧2. The method also includes illuminating a photoresist layer located over an underlying material with dipole illumination through the substantially transparent, rectangular mask features in the substantially opaque mask to form 2N rows of exposed regions in the photoresist layer. The exposed regions have a substantially elliptical or substantially circular shape when viewed from above the photoresist layer.

    Abstract translation: 一种包括多个掩模特征的光刻掩模。 相邻的掩模特征由间隙分隔开并且彼此偏移,使得各个掩模特征具有单侧致密部分和两侧致密部分。 还有一种光刻方法,其包括提供具有偏移的,基本上透明的矩形掩模特征的N个阶梯行的基本不透明掩模的步骤,其中N是整数,N> = 2。 该方法还包括通过偶极照明通过基本上不透明掩模中的基本上透明的矩形掩模特征照亮位于下层材料上的光致抗蚀剂层,以在光致抗蚀剂层中形成2N排暴露区域。 当从光致抗蚀剂层的上方观察时,暴露区域具有基本上椭圆形或大致圆形形状。

    Handheld Device and Control Method Thereof
    33.
    发明申请
    Handheld Device and Control Method Thereof 审中-公开
    手持设备及其控制方法

    公开(公告)号:US20130120307A1

    公开(公告)日:2013-05-16

    申请号:US13314331

    申请日:2011-12-08

    CPC classification number: G06F3/0414 H04M1/6016 H04M2250/12 H04M2250/22

    Abstract: A handheld device includes a touch panel, a speaker, and a processor. The touch panel is operable to detect the touched area generated by an object touching the touch panel. The speaker is operable to provide sounds. The processor is connected to the touch panel and the speaker and controls the volume of the sounds provided by the speaker based on the touched area. The processor decreases the volume of the sounds when the value of the touched area is lower than a first predetermined value, and the processor increases the volume of the sounds when the value of the touched area is high than a second predetermined value. Furthermore, a method for controlling the handheld device is disclosed herein.

    Abstract translation: 手持设备包括触摸面板,扬声器和处理器。 触摸面板可操作以检测由触摸触摸面板的物体产生的触摸区域。 扬声器可操作以提供声音。 处理器连接到触摸面板和扬声器,并且基于触摸的区域来控制由扬声器提供的声音的音量。 当触摸区域的值低于第一预定值时,处理器减小声音的音量,并且当触摸区域的值高于第二预定值时,处理器增加声音的音量。 此外,本文公开了一种用于控制手持设备的方法。

    Method of making sub-resolution pillar structures using undercutting technique
    34.
    发明授权
    Method of making sub-resolution pillar structures using undercutting technique 有权
    使用底切技术制作分辨率柱状结构的方法

    公开(公告)号:US08076056B2

    公开(公告)日:2011-12-13

    申请号:US12285466

    申请日:2008-10-06

    CPC classification number: H01L21/0334 H01L21/0338

    Abstract: A method of making a device includes forming an underlying mask layer over an underlying layer, forming a first mask layer over the underlying mask layer, patterning the first mask layer to form first mask features, undercutting the underlying mask layer to form underlying mask features using the first mask features as a mask, removing the first mask features, and patterning the underlying layer using at least the underlying mask features as a mask.

    Abstract translation: 一种制造器件的方法包括在下面的层上形成下面的掩模层,在下面的掩模层之上形成第一掩模层,对第一掩模层进行图案化以形成第一掩模特征,利用下面的掩模层来切割下面的掩模特征,使用 第一掩模作为掩模,去除第一掩模特征,并使用至少底层掩模特征作为掩模来图案化底层。

    Method of forming contact hole arrays using a hybrid spacer technique
    35.
    发明授权
    Method of forming contact hole arrays using a hybrid spacer technique 有权
    使用混合间隔技术形成接触孔阵列的方法

    公开(公告)号:US08026172B2

    公开(公告)日:2011-09-27

    申请号:US12458017

    申请日:2009-06-29

    CPC classification number: H01L21/76816 H01L21/0337 H01L21/31144

    Abstract: One embodiment of the invention provides a method of forming a plurality of contact holes, including forming a first feature and a second feature over an underlying material, forming sidewall spacers on the first and second features, removing the first and second features without removing the sidewall spacers, forming a cover mask at least partially exposing the sidewall spacers, and etching the underlying material using the cover mask and the sidewall spacers as a mask to form the plurality of contact holes.

    Abstract translation: 本发明的一个实施例提供一种形成多个接触孔的方法,包括在下面的材料上形成第一特征和第二特征,在第一和第二特征上形成侧壁间隔物,去除第一和第二特征而不移除侧壁 间隔件,形成至少部分地暴露侧壁间隔物的覆盖掩模,以及使用覆盖掩模和侧壁间隔物作为掩模蚀刻下面的材料以形成多个接触孔。

    Device having thin black mask and method of fabricating the same
    37.
    发明授权
    Device having thin black mask and method of fabricating the same 有权
    具有薄黑色掩模的装置及其制造方法

    公开(公告)号:US07969638B2

    公开(公告)日:2011-06-28

    申请号:US12101073

    申请日:2008-04-10

    CPC classification number: G02B5/003 G02B5/201 G02B26/001

    Abstract: A thin black mask is created using a single mask process. A dielectric layer is deposited over a substrate. An absorber layer is deposited over the dielectric layer and a reflector layer is deposited over the absorber layer. The absorber layer and the reflector layer are patterned using a single mask process.

    Abstract translation: 使用单个掩码进程创建一个细黑色掩模。 介电层沉积在衬底上。 在电介质层上沉积吸收层,在吸收层上沉积反射层。 使用单个掩模工艺对吸收层和反射层进行构图。

    METHODS FOR FORMING LAYERS WITHIN A MEMS DEVICE USING LIFTOFF PROCESSES
    38.
    发明申请
    METHODS FOR FORMING LAYERS WITHIN A MEMS DEVICE USING LIFTOFF PROCESSES 审中-公开
    在使用提升过程的MEMS器件中形成层的方法

    公开(公告)号:US20110058243A1

    公开(公告)日:2011-03-10

    申请号:US12946583

    申请日:2010-11-15

    Applicant: Chun-Ming Wang

    Inventor: Chun-Ming Wang

    Abstract: Certain MEMS devices include layers patterned to have tapered edges. One method for forming layers having tapered edges includes the use of an etch leading layer. Another method for forming layers having tapered edges includes the deposition of a layer in which the upper portion is etchable at a faster rate than the lower portion. Another method for forming layers having tapered edges includes the use of multiple iterative etches. Another method for forming layers having tapered edges includes the use of a liftoff mask layer having an aperture including a negative angle, such that a layer can be deposited over the liftoff mask layer and the mask layer removed, leaving a structure having tapered edges.

    Abstract translation: 某些MEMS器件包括被图案化以具有渐缩边缘的层。 用于形成具有渐缩边缘的层的一种方法包括使用蚀刻引导层。 用于形成具有锥形边缘的层的另一种方法包括沉积一层,其中上部可以比下部更快的速度进行刻蚀。 用于形成具有渐缩边缘的层的另一种方法包括使用多个迭代蚀刻。 用于形成具有锥形边缘的层的另一种方法包括使用具有包括负角度的孔的剥离掩模层,使得可以在剥离掩模层上沉积一层,并且去除掩模层,留下具有渐缩边缘的结构。

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