公开(公告)号：US20220271504A1

公开(公告)日：2022-08-25

申请号：US17672758

申请日：2022-02-16

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Atsushi SUGIYAMA ,  Tadataka EDAMURA ,  Takahide OCHIAI ,  Naota AKIKUSA

IPC: H01S5/14 ,  H01S5/34 ,  H01S5/12

Abstract: The laser module includes a QCL element, a MEMS diffraction grating, a first lens holder disposed on a side opposite to a side on which the MEMS diffraction grating is disposed with respect to the QCL element, a second lens holder disposed between the QCL element and the MEMS diffraction grating, a package, an electrode terminal disposed along an inner wall surface of the package, and a wire for electrically connecting the electrode terminal and the QCL element. An end portion of the wire on a side where the QCL element is disposed is disposed at a position between the first lens holder and the second lens holder when viewed from a direction orthogonal to a facing direction in which the first lens holder and the second lens holder face each other.

公开(公告)号：US20220271491A1

公开(公告)日：2022-08-25

申请号：US17675166

申请日：2022-02-18

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tadataka EDAMURA ,  Atsushi SUGIYAMA ,  Naota AKIKUSA

IPC: H01S3/08 ,  H01S5/34 ,  H01S5/14

Abstract: An external resonance-type laser module includes: a quantum cascade laser; a MEMS diffraction grating including a movable portion capable of swinging around an axis and a diffraction grating portion formed on the movable portion; a lens; a magnet; and a yoke. The MEMS diffraction grating includes a pair of coils respectively disposed on one side and the other side with respect to the axis when viewed in a normal direction parallel to a normal line of the diffraction grating portion, and each of the pair of coils includes an inside part extending along the axis. A recess portion is formed in the magnet, and at least a part of the recess portion overlaps the inside part when viewed in the normal direction.

公开(公告)号：US20190265396A1

公开(公告)日：2019-08-29

申请号：US16285426

申请日：2019-02-26

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tadataka EDAMURA ,  Atsushi SUGIYAMA ,  Tatsuo DOUGAKIUCHI

IPC: G02B5/18

Abstract: A movable diffraction grating includes; a supporting portion; a movable portion which includes a first surface and is swingably connected with the supporting portion; a resin layer which is provided on the first surface and includes a diffraction grating pattern formed therein; a reflection layer which is provided on the resin layer an along the diffraction grating pattern and is formed of metal; and a stress regulation portion inducing stress on the movable portion, and the first surface is caused to bend concavely by stress.

公开(公告)号：US20130322480A1

公开(公告)日：2013-12-05

申请号：US13909672

申请日：2013-06-04

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tadataka EDAMURA ,  Atsushi SUGIYAMA ,  Naota AKIKUSA

IPC: H01S5/34

CPC classification number: H01S5/3401 ,  B82Y20/00 ,  H01S5/0071 ,  H01S5/028 ,  H01S5/0282 ,  H01S5/0287 ,  H01S5/12 ,  H01S5/141 ,  H01S5/3402

Abstract: A quantum cascade laser includes a semiconductor substrate, and an active layer that is provided on the substrate, and has a cascade structure in which emission layers and injection layers are alternately laminated by multistage-laminating unit laminate structures each consisting of the quantum well emission layer and the injection layer, and generates light by intersubband transition in a quantum well structure. Further, in a laser cavity structure for light with a predetermined wavelength to be generated in the active layer, CeO2 insulating films and reflection control films are formed in order on respective faces of a first end face and a second end face facing each other. Thereby, it is possible to realize a quantum cascade laser capable of preferably realizing reflectance control for light within a mid-infrared region on the laser device end face.

Abstract translation: 量子级联激光器包括半导体衬底和设置在衬底上的有源层，并且具有级联结构，其中发射层和注入层通过多级层压单元层叠结构交替层叠，每个层叠结构由量子阱发射层 和注入层，并通过量子阱结构中的子带间跃迁产生光。 此外，在有源层中产生具有预定波长的光的激光腔结构中，依次在彼此面对的第一端面和第二端面的相应面上依次形成CeO 2绝缘膜和反射控制膜。 由此，能够实现能够优选实现激光装置端面的中红外区域内的光的反射率控制的量子级联激光器。