公开(公告)号：US20170250625A1

公开(公告)日：2017-08-31

申请号：US15509782

申请日：2015-09-09

Applicant: BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM

Inventor： Donglei Fan ,  Kwanoh Kim ,  Jianhe Guo

IPC: H02N1/00 ,  C23C14/16 ,  C23C14/58 ,  H01F41/02 ,  C23C14/30 ,  H01F7/02 ,  H01F1/01 ,  C23C14/04 ,  C23C14/02

CPC classification number: H02N1/006 ,  B81B2201/034 ,  B81B2201/038 ,  B81B2203/0118 ,  B81B2203/0181 ,  B81B2203/04 ,  B81C3/004 ,  C23C14/00 ,  C23C14/022 ,  C23C14/025 ,  C23C14/027 ,  C23C14/042 ,  C23C14/16 ,  C23C14/30 ,  C23C14/5873 ,  H01F1/01 ,  H01F7/02 ,  H01F41/0253

Abstract: The invention includes miniature dots, miniature disks or miniature cylinders and methods of making the same by dispersing a particle in or on a dissolvable, meltable or etchable layer on a substrate, a portion of the particle exposed above a surface of the dissolvable, meltable or etchable layer; depositing a mask on the particles and the dissolvable substrate; removing the particles from the layer; etching an array of nanoholes in the substrate; depositing one or more metallic layers into the nanoholes to form an array of dots, disks or cylinders; and dissolving the dissolvable layer with a solvent to expose the dots, disks or cylinders. The dots, disks or cylinders can be included with two sets of microelectrodes for ultrahigh speed rotation of miniature motors, and/or can be designed with a magnetic configuration into miniature motors for uniform rotation speeds and prescribed angular displacement. The invention also includes modified diatom frustules, and miniature motors containing modified diatom frustules.

公开(公告)号：US20170153445A1

公开(公告)日：2017-06-01

申请号：US14955060

申请日：2015-12-01

Applicant: APPLE INC.

Inventor： Yuval Gerson ,  Alexander Shpunt

IPC: G02B26/10 ,  B81C1/00 ,  G02B26/08 ,  G01S17/89 ,  G01S7/497 ,  B81B3/00 ,  G01S7/481

CPC classification number: G02B26/101 ,  B81B3/00 ,  B81B3/007 ,  B81B2201/033 ,  B81B2201/034 ,  B81B2201/047 ,  B81B2203/0136 ,  B81B2203/058 ,  B81B2207/015 ,  B81C1/00515 ,  B81C2201/0111 ,  G01S7/4817 ,  G01S7/497 ,  G01S17/10 ,  G01S17/42 ,  G01S17/89 ,  G02B26/0833

Abstract: A scanning device includes a frame, having a central opening, and an array including a plurality of parallel mirrors contained within the central opening of the frame. Hinges respectively connect the mirrors to the frame and define respective, mutually-parallel axes of rotation of the mirrors relative to the frame. A main drive applies a driving force to the array so as to drive an oscillation of the mirrors about the hinges at a resonant frequency of the array. A sensor is configured to detect a discrepancy in a synchronization of the oscillation among the mirrors in the array, and an adjustment circuit applies a corrective signal to at least one of the mirrors in order to alleviate the detected discrepancy.

公开(公告)号：US09148075B2

公开(公告)日：2015-09-29

申请号：US14479615

申请日：2014-09-08

Applicant: STMicroelectronics International N.V.

Inventor： Sason Sourani ,  Moshe Medina

IPC: G02B26/08 ,  H02N1/00 ,  B81B7/00 ,  G02B7/182 ,  B81B3/00

CPC classification number: H02N1/006 ,  B81B3/0043 ,  B81B7/00 ,  B81B7/008 ,  B81B2201/033 ,  B81B2201/034 ,  B81B2201/042 ,  B81B2203/0109 ,  B81B2203/0181 ,  B81B2203/058 ,  G02B7/1821 ,  G02B26/0841 ,  H02N1/008

Abstract: A Micro Electro Mechanical Systems (MEMS) device includes a rotor having first rotor teeth and second rotor teeth formed in at least two layers of silicon-on-insulator (SOI) substrate. Each rotor tooth belonging to the first rotor teeth is formed in a first layer and each rotor tooth belonging of the second rotor teeth is formed in a second layer. A stator includes first stator teeth and second stator teeth formed in at least two layers of SOI substrate. Each stator tooth belonging to the first stator teeth is formed in a first layer and each stator tooth belonging to the second stator teeth is formed in a second layer.

Abstract translation: 微机电系统（MEMS）装置包括具有形成在至少两层绝缘体上硅（SOI）衬底上的第一转子齿和第二转子齿的转子。 属于第一转子齿的每个转子齿形成在第一层中，并且属于第二转子齿的每个转子齿形成在第二层中。 定子包括形成在至少两层SOI衬底中的第一定子齿和第二定子齿。 属于第一定子齿的每个定子齿形成在第一层中，并且属于第二定子齿的每个定子齿形成在第二层中。

公开(公告)号：US09039359B2

公开(公告)日：2015-05-26

申请号：US13336881

申请日：2011-12-23

Applicant: Lee Ervin

Inventor： Lee Ervin

IPC: H02K7/18 ,  B81B5/00 ,  F03B17/00

CPC classification number: F01D1/18 ,  B81B5/00 ,  B81B2201/03 ,  B81B2201/034 ,  B81B2203/06 ,  F01D25/005 ,  F01D25/14 ,  F03B17/00 ,  Y02E10/20 ,  Y02E10/28

Abstract: A device for converting the kinetic energy of molecules into useful work includes an actuator configured to move within a fluid or gas due to collisions with the molecules of the fluid or gas. The actuator has dimensions that subject it to the Brownian motion of the surrounding molecules. The actuator utilizes objects having multiple surfaces where the different surfaces result in differing coefficients of restitution. The Brownian motion of surrounding molecules produce molecular impacts with the surfaces. Each surface then experiences relative differences in transferred energy from the kinetic collisions. The sum effect of the collisions produces net velocity in a desired direction. The controlled motion can be utilized in a variety of manners to perform work, such as generating electricity or transporting materials.

Abstract translation: 用于将分子的动能转化为有用功的装置包括致动器，其构造成由于与流体或气体的分子碰撞而在流体或气体内移动。 致动器具有使其受到周围分子的布朗运动的尺寸。 致动器利用具有多个表面的物体，其中不同的表面导致不同的恢复系数。 周围分子的布朗运动与表面产生分子冲击。 每个表面然后经历来自动力学碰撞的转移能量的相对差异。 碰撞的总和效应产生所需方向的净速度。 受控运动可以以各种方式用于执行工作，例如发电或运输材料。

公开(公告)号：US20150002916A1

公开(公告)日：2015-01-01

申请号：US14479615

申请日：2014-09-08

Applicant: STMicroelectronics International N.V.

Inventor： Sason Sourani ,  Moshe Medina

IPC: H02N1/00 ,  B81B7/00 ,  G02B7/182

CPC classification number: H02N1/006 ,  B81B3/0043 ,  B81B7/00 ,  B81B7/008 ,  B81B2201/033 ,  B81B2201/034 ,  B81B2201/042 ,  B81B2203/0109 ,  B81B2203/0181 ,  B81B2203/058 ,  G02B7/1821 ,  G02B26/0841 ,  H02N1/008

Abstract: A Micro Electro Mechanical Systems (MEMS) device includes a rotor having first rotor teeth and second rotor teeth formed in at least two layers of silicon-on-insulator (SOI) substrate. Each rotor tooth belonging to the first rotor teeth is formed in a first layer and each rotor tooth belonging of the second rotor teeth is formed in a second layer. A stator includes first stator teeth and second stator teeth formed in at least two layers of SOI substrate. Each stator tooth belonging to the first stator teeth is formed in a first layer and each stator tooth belonging to the second stator teeth is formed in a second layer.

Abstract translation: 微机电系统（MEMS）装置包括具有形成在至少两层绝缘体上硅（SOI）衬底上的第一转子齿和第二转子齿的转子。 属于第一转子齿的每个转子齿形成在第一层中，并且属于第二转子齿的每个转子齿形成在第二层中。 定子包括形成在至少两层SOI衬底中的第一定子齿和第二定子齿。 属于第一定子齿的每个定子齿形成在第一层中，并且属于第二定子齿的每个定子齿形成在第二层中。

公开(公告)号：US08656584B2

公开(公告)日：2014-02-25

申请号：US12884871

申请日：2010-09-17

Applicant: Jean-Christophe Gabriel ,  Philippe Andreucci ,  Thomas Ernst ,  Thierry Poiroux

Inventor： Jean-Christophe Gabriel ,  Philippe Andreucci ,  Thomas Ernst ,  Thierry Poiroux

IPC: H05K3/02 ,  H05K3/10

CPC classification number: B81B5/00 ,  B81B2201/034 ,  B82Y15/00 ,  B82Y30/00 ,  F04B19/006 ,  Y10T29/49105 ,  Y10T29/49126 ,  Y10T29/49155

Abstract: Method of fabricating an electro-mechanical microsystem provided with at least one fixed part comprising a bar, and at least one mobile part in rotation around at least one portion of said bar, the method comprising the steps of: a) formation, inside a layer of at least one given material resting on a support, of at least one bar, b) formation around the bar of at least one first graphene sheet, and of a least one second graphene sheet, separated from the first sheet and mobile with respect to the first sheet.

Abstract translation: 一种制造机电微系统的方法，该机电微系统具有至少一个固定部分，该至少一个固定部分包括杆，以及至少一个围绕所述杆的至少一部分旋转的可移动部分，所述方法包括以下步骤：a） 至少一个给定的材料放置在支撑件上，至少一个杆，b）围绕至少一个第一石墨烯片材的棒形成，以及至少一个第二石墨烯片，与第一片材分离并且相对于 第一张。

公开(公告)号：US08455928B2

公开(公告)日：2013-06-04

申请号：US13248283

申请日：2011-09-29

Applicant: Mayumi Yamaguchi ,  Konami Izumi

Inventor： Mayumi Yamaguchi ,  Konami Izumi

IPC: H01L29/84

CPC classification number: H01L29/84 ,  B81B2201/034 ,  B81C1/00246 ,  B81C2203/0742

Abstract: A micro structure and an electric circuit included in a micro electro mechanical device are manufactured over the same insulating surface in the same step. In the micro electro mechanical device, an electric circuit including a transistor and a micro structure are integrated over a substrate having an insulating surface. The micro structure includes a structural layer having the same stacked-layer structure as a layered product of a gate insulating layer of the transistor and a semiconductor layer provided over the gate insulating layer. That is, the structural layer includes layers formed of the same insulating film as the gate insulating layer and the same semiconductor film as the semiconductor layer of the transistor. Further, the micro structure is manufactured by using each of conductive layers used for a gate electrode, a source electrode, and a drain electrode of the transistor as a sacrificial layer.

Abstract translation: 包含在微电子机械装置中的微结构和电路在相同的步骤中在相同的绝缘表面上制造。 在微机电装置中，包括晶体管和微结构的电路集成在具有绝缘表面的基板上。 微结构包括具有与晶体管的栅极绝缘层的层叠体和设置在栅极绝缘层上的半导体层相同的层叠结构的结构层。 也就是说，结构层包括由与绝缘层相同的绝缘膜和与晶体管的半导体层相同的半导体膜形成的层。 此外，通过使用用作晶体管的栅电极，源电极和漏电极的导电层作为牺牲层来制造微结构。

公开(公告)号：US20120169068A1

公开(公告)日：2012-07-05

申请号：US13336881

申请日：2011-12-23

Applicant: Lee Ervin

Inventor： Lee Ervin

IPC: H02K7/18 ,  F03B17/00

CPC classification number: F01D1/18 ,  B81B5/00 ,  B81B2201/03 ,  B81B2201/034 ,  B81B2203/06 ,  F01D25/005 ,  F01D25/14 ,  F03B17/00 ,  Y02E10/20 ,  Y02E10/28

Abstract: A device for converting the kinetic energy of molecules into useful work includes an actuator configured to move within a fluid or gas due to collisions with the molecules of the fluid or gas. The actuator has dimensions that subject it to the Brownian motion of the surrounding molecules. The actuator utilizes objects having multiple surfaces where the different surfaces result in differing coefficients of restitution. The Brownian motion of surrounding molecules produce molecular impacts with the surfaces. Each surface then experiences relative differences in transferred energy from the kinetic collisions. The sum effect of the collisions produces net velocity in a desired direction. The controlled motion can be utilized in a variety of manners to perform work, such as generating electricity or transporting materials.

Abstract translation: 用于将分子的动能转化为有用功的装置包括致动器，其构造成由于与流体或气体的分子碰撞而在流体或气体内移动。 致动器具有使其受到周围分子的布朗运动的尺寸。 致动器利用具有多个表面的物体，其中不同的表面导致不同的恢复系数。 周围分子的布朗运动与表面产生分子冲击。 每个表面然后经历来自动力学碰撞的转移能量的相对差异。 碰撞的总和效应产生所需方向的净速度。 受控运动可以以各种方式用于执行工作，例如发电或运输材料。

公开(公告)号：US20100133537A1

公开(公告)日：2010-06-03

申请号：US12647704

申请日：2009-12-28

Applicant: Mayumi Yamaguchi ,  Konami Izumi

Inventor： Mayumi Yamaguchi ,  Konami Izumi

IPC: H01L29/84 ,  H01L29/04

CPC classification number: H01L29/84 ,  B81B2201/034 ,  B81C1/00246 ,  B81C2203/0742

Abstract: To manufacture a micro structure and an electric circuit included in a micro electro mechanical device over the same insulating surface in the same step. In the micro electro mechanical device, an electric circuit including a transistor and a micro structure are integrated over a substrate having an insulating surface. The micro structure includes a structural layer having the same stacked-layer structure as a layered product of a gate insulating layer of the transistor and a semiconductor layer provided over the gate insulating layer. That is, the structural layer includes a layer formed of the same insulating film as the gate insulating layer and a layer formed of the same semiconductor film as the semiconductor layer of the transistor. Further, the micro structure is manufactured by using each of conductive layers used for a gate electrode, a source electrode, and a drain electrode of the transistor as a sacrificial layer.

Abstract translation: 在相同的步骤中，在相同的绝缘表面上制造包括在微机电装置中的微结构和电路。 在微机电装置中，包括晶体管和微结构的电路集成在具有绝缘表面的基板上。 微结构包括具有与晶体管的栅极绝缘层的层叠体和设置在栅极绝缘层上的半导体层相同的层叠结构的结构层。 也就是说，结构层包括由与绝缘层相同的绝缘膜形成的层和由与晶体管的半导体层相同的半导体膜形成的层。 此外，通过使用用作晶体管的栅电极，源电极和漏电极的导电层作为牺牲层来制造微结构。

公开(公告)号：US07642114B2

公开(公告)日：2010-01-05

申请号：US11777409

申请日：2007-07-13

Applicant: Mayumi Yamaguchi ,  Konami Izumi

Inventor： Mayumi Yamaguchi ,  Konami Izumi

IPC: H01L21/00

CPC classification number: H01L29/84 ,  B81B2201/034 ,  B81C1/00246 ,  B81C2203/0742

Abstract: To manufacture a micro structure and an electric circuit included in a micro electro mechanical device over the same insulating surface in the same step. In the micro electro mechanical device, an electric circuit including a transistor and a micro structure are integrated over a substrate having an insulating surface. The micro structure includes a structural layer having the same stacked-layer structure as a layered product of a gate insulating layer of the transistor and a semiconductor layer provided over the gate insulating layer. That is, the structural layer includes a layer formed of the same insulating film as the gate insulating layer and a layer formed of the same semiconductor film as the semiconductor layer of the transistor. Further, the micro structure is manufactured by using each of conductive layers used for a gate electrode, a source electrode, and a drain electrode of the transistor as a sacrificial layer.

Abstract translation: 在相同的步骤中，在相同的绝缘表面上制造包括在微机电装置中的微结构和电路。 在微机电装置中，包括晶体管和微结构的电路集成在具有绝缘表面的基板上。 微结构包括具有与晶体管的栅极绝缘层的层叠体和设置在栅极绝缘层上的半导体层相同的层叠结构的结构层。 也就是说，结构层包括由与绝缘层相同的绝缘膜形成的层和由与晶体管的半导体层相同的半导体膜形成的层。 此外，通过使用用作晶体管的栅电极，源电极和漏电极的导电层作为牺牲层来制造微结构。