公开(公告)号：US20070177157A1

公开(公告)日：2007-08-02

申请号：US10590443

申请日：2005-03-04

Applicant: David McMurtry ,  James Henshaw ,  Michael Homer ,  Mark Chapman ,  Raymond Chaney ,  William Lee ,  Jason Slack

Inventor： David McMurtry ,  James Henshaw ,  Michael Homer ,  Mark Chapman ,  Raymond Chaney ,  William Lee ,  Jason Slack

IPC: G01B9/02

CPC classification number: G01B9/02081 ,  G01B9/02041 ,  G01B9/02084 ,  G01B2290/70 ,  G01J9/02 ,  G01J2009/0234 ,  G01J2009/0261

Abstract: Interferometry apparatus which comprises a measurement light beam (2a, 2b) and a reference light beam (2c, 2d) which interact with each other to cause a spatial fringe pattern (24). An optical device (12) is provided which interacts with the spatial fringe pattern (24), such that light is spatially separated into different directions (30, 32, 34, 36). The intensity modulation in two or more directions of the spatially separated light is phase shifted. The optical device may comprise, for example, a diffractive device, a refractive device or a diffractive optical element.

Abstract translation: 干涉测量装置，其包括彼此相互作用以产生空间条纹图案（24）的测量光束（2a，2b）和参考光束（2c，2d）。 提供了与空间条纹图案（24）相互作用的光学装置（12），使得光在空间上分离成不同的方向（30,32,34,36）。 在空间分离的光的两个或更多个方向上的强度调制是相移的。 光学装置可以包括例如衍射装置，折射装置或衍射光学元件。

公开(公告)号：US20070024854A1

公开(公告)日：2007-02-01

申请号：US11193999

申请日：2005-07-29

Applicant: Douglas Jungwirth

Inventor： Douglas Jungwirth

IPC: G01B9/02

CPC classification number: G01B9/02097 ,  G01B9/02051 ,  G01B2290/70 ,  G01J9/02 ,  G01J2009/0234

Abstract: A method and apparatus for correcting an input beam that uses an array of detectors sensing a scanning fringe pattern to generate phase error information which can be corrected by a physically adjacent beam correction device such as an array of micro-electrical-mechanical-system (MEMS) mirrors.

Abstract translation: 一种用于校正输入光束的方法和装置，其使用感测扫描条纹图案的检测器阵列来产生相位误差信息，所述相位误差信息可由物理上相邻的光束校正装置校正，例如微机电系统阵列（MEMS ）镜子。

公开(公告)号：US6122056A

公开(公告)日：2000-09-19

申请号：US56521

申请日：1998-04-07

Applicant: Michael Straight Hibbs ,  Song Peng

Inventor： Michael Straight Hibbs ,  Song Peng

IPC: H01L21/027 ,  G03F1/84 ,  G01B9/02

CPC classification number: G03F1/84 ,  G01N21/45 ,  G01J2009/0203 ,  G01J2009/0234

Abstract: A method of measuring the phase shift between two regions of a phase shift mask. A workpiece is provided including a first pair of slits each having a substantially similar phase shift characteristic and a second pair of slits each having a different phase shift characteristic. Electromagnetic radiation is directed through the first pair of slits and the second pair of slits on the workpiece. A relative shift is measured between interference patterns caused by the first pair of slits and the second pair of slits.

Abstract translation: 一种测量相移掩模的两个区域之间的相移的方法。 提供工件，其包括具有基本相似的相移特性的第一对狭缝和具有不同相移特性的第二对狭缝。 电磁辐射被引导通过工件上的第一对狭缝和第二对狭缝。 在由第一对狭缝和第二对狭缝引起的干涉图案之间测量相对移动。

公开(公告)号：US5170221A

公开(公告)日：1992-12-08

申请号：US713155

申请日：1991-06-11

Applicant: Keiji Matsui ,  Atsushi Ieki

Inventor： Keiji Matsui ,  Atsushi Ieki

IPC: G01J1/04 ,  G01J1/42 ,  G01J9/02

CPC classification number: G01J1/4228 ,  G01J1/04 ,  G01J1/0407 ,  G01J1/0448 ,  G01J1/4257 ,  G01J9/02 ,  G01J2009/0219 ,  G01J2009/0234

Abstract: A parallel light ray measuring apparatus invention measures the parallelism of a light beam by: receiving a light beam which has passed through two gratings having the same grating period by means of at least two photoelectric converting elements, and by detecting the light intensity obtained from those aforementioned photoelectric converting elements and the phase difference between the periodic signals obtained when either of the gratings is moved, using the at least photoelectric converting elements. Further, the parallel light ray measuring apparatus includes: a first grating; a second grating having the same grating period as that of the first grating, and being disposed such that the grating lines of the second grating are in parallel with those of the first grating; a light pick-up screen for receiving a light beam which has passed through both gratings, whereby the light intensity distribution appearing on the light pick-up screen is detected so as to measure the parallelism of the light beam.

Abstract translation: 平行光线测量装置通过以下方式测量光束的平行度：通过至少两个光电转换元件接收已经通过具有相同光栅周期的两个光栅的光束，并且通过检测从这些光束获得的光强度 上述光电转换元件和使用至少光电转换元件移动任何一个光栅时获得的周期信号之间的相位差。 此外，平行光线测量装置包括：第一光栅; 第二光栅具有与第一光栅相同的光栅周期，并且被布置成使得第二光栅的光栅线与第一光栅的光栅线平行; 用于接收已经通过两个光栅的光束的光拾取屏幕，由此检测在拾光屏幕上出现的光强度分布，以便测量光束的平行度。

公开(公告)号：US4558952A

公开(公告)日：1985-12-17

申请号：US467847

申请日：1983-02-18

Applicant: Vladimir P. Kulesh ,  Leonid M. Moskalik ,  Anatoly A. Orlov ,  Jury A. Bliznjuk ,  Stanislav K. Shtandel

Inventor： Vladimir P. Kulesh ,  Leonid M. Moskalik ,  Anatoly A. Orlov ,  Jury A. Bliznjuk ,  Stanislav K. Shtandel

IPC: G01B9/02 ,  G01J9/02 ,  G01J9/04 ,  G01N21/45 ,  G01B11/02

CPC classification number: G01B9/02057 ,  G01B9/02002 ,  G01B9/02012 ,  G01J9/04 ,  G01N21/45 ,  G01B2290/25 ,  G01B2290/45 ,  G01B2290/70 ,  G01J2009/0219 ,  G01J2009/0234 ,  G01J2009/0261

Abstract: A method for measuring an optical length of light path based on use of multiple-beam interference of light and carried into effect by forming an original light beam with two collinear components having mutually independent polarizations and different frequencies in such a manner that when forming each of the following interfering light beams from the preceding one, polarizations of the light components having different frequencies are mutually converted, whereupon the interfered light is converted into an electric signal and its phase is measured, by which the light path optical length is determined. A laser interferometer carrying said method into effect comprises: a laser and arranged consecutively along the direction of run of the light beam: a device for offsetting the frequency of one of the light components, reflecting elements, a polarizing element for separating the light of the interfering beams according to polarization, and a photoelectric converter of the interfered light into an electric signal, as well as a unit for measuring the phase of an electric signal, connected to the photoelectric converter and also a birefringent plate located between the reflecting elements and adapted for mutual conversion of polarizations of the two light components.

Abstract translation: 一种用于基于使用光的多光束干涉来测量光路的光学长度的方法，其通过用具有相互独立的极化和不同频率的两个共线分量形成原始光束来实现，使得当形成 来自前述的以下干涉光束被相互转换，因此被干扰的光被转换为电信号，并且测量其相位，由此确定光路光学长度。 携带所述方法的激光干涉仪实现包括：沿着光束的行进方向连续布置的激光器：用于抵消一个光分量，反射元件的频率的装置，用于分离光束的光的偏振元件 根据偏振的干涉光束和被干扰的光的光电转换器变成电信号，以及连接到光电转换器的电信号的相位测量单元，以及位于反射元件之间的双折射板， 用于两个光分量的偏振的相互转换。