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公开(公告)号：US09913579B2
公开(公告)日：2018-03-13
申请号：US14899559
申请日：2014-06-20
Applicant: Cylite Pty Ltd
Inventor： Steven James Frisken , Grant Andrew Frisken
IPC: A61B3/10 , A61B3/00 , G01B9/02 , G01J9/02 , A61B3/117 , A61B3/107 , A61B3/14 , G02B27/10 , G02B27/28 , G02C7/02
CPC classification number: A61B3/1015 , A61B3/0025 , A61B3/1025 , A61B3/107 , A61B3/117 , A61B3/14 , G01B9/02027 , G01B9/02039 , G01B9/02041 , G01B9/02044 , G01B9/02091 , G01B2290/70 , G01J9/02 , G01J2009/0219 , G01J2009/0238 , G02B27/1013 , G02B27/283 , G02C7/027 , G02C2202/24
Abstract: Method and systems are presented for analyzing a wavefront using a spectral wavefront analyzer to extract optical phase and spectral information at a two dimensional array of sampling points across the wavefront, wherein the relative phase information between the sampling points is maintained. Methods and systems are also presented for measuring an eye by reflecting a wavefront of an eye and measuring the wavefront at a plurality of angles to provide a map of the off-axis relative wavefront curvature and aberration of the eye. The phase accuracy between wavelengths and sample points over a beam aperture offered by these methods and systems have a number of ocular applications including corneal and anterior eye tomography, high resolution retinal imaging, and wavefront analysis as a function of probe beam incident angle for determining myopia progression and for designing and testing lenses for correcting myopia.
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公开(公告)号：US07602503B2
公开(公告)日：2009-10-13
申请号：US11708618
申请日：2007-02-21
Applicant: Sherman K. Poultney
Inventor： Sherman K. Poultney
IPC: G01B9/02
CPC classification number: G01J9/0215 , G01J2009/0219 , G02B5/1838 , G03F7/70591 , G03F7/706 , G03F7/7085
Abstract: A method for measuring a wavefront of an optical system. A first step of the method includes directing electromagnetic radiation uniformly at an object plane having a first grating positioned therein. Lines of the first grating comprise a plurality of dots. A second step of the method includes projecting an image of the first grating onto a focal plane having a second grating positioned therein. A third step of the method includes measuring the wavefront of the optical system based on a fringe pattern produced by the second grating.
Abstract translation: 一种用于测量光学系统的波前的方法。 该方法的第一步包括将电磁辐射均匀地引导到具有位于其中的第一光栅的物平面。 第一光栅的线包括多个点。 该方法的第二步骤包括将第一光栅的图像投影到具有定位在其中的第二光栅的焦平面上。 该方法的第三步骤包括基于由第二光栅产生的条纹图案来测量光学系统的波前。
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3.发明申请OCULAR METROLOGY EMPLOYING SPECTRAL WAVEFRONT ANALYSIS OF REFLECTED LIGHT 审中-公开使用反射光的光谱波形分析的OCULAR METROLOGY公开(公告)号：US20160135679A1
公开(公告)日：2016-05-19
申请号：US14899559
申请日：2014-06-20
Applicant: Cylite Pty Ltd
Inventor： Steven James Frisken , Grant Andrew Frisken
CPC classification number: A61B3/1015 , A61B3/0025 , A61B3/1025 , A61B3/107 , A61B3/117 , A61B3/14 , G01B9/02027 , G01B9/02039 , G01B9/02041 , G01B9/02044 , G01B9/02091 , G01B2290/70 , G01J9/02 , G01J2009/0219 , G01J2009/0238 , G02B27/1013 , G02B27/283 , G02C7/027 , G02C2202/24
Abstract: Method and systems are presented for analysing a wavefront using a spectral wavefront analyser to extract optical phase and spectral information at a two dimensional array of sampling points across the wavefront, wherein the relative phase information between the sampling points is maintained. Methods and systems are also presented for measuring an eye by reflecting a wavefront of an eye and measuring the wavefront at a plurality of angles to provide a map of the off-axis relative wavefront curvature and aberration of the eye. The phase accuracy between wavelengths and sample points over a beam aperture offered by these methods and systems have a number of ocular applications including corneal and anterior eye tomography, high resolution retinal imaging, and wavefront analysis as a function of probe beam incident angle for determining myopia progression and for designing and testing lenses for correcting myopia.
Abstract translation: 提出了一种方法和系统，用于使用光谱波前分析器分析波前，以在波阵面上的采样点的二维阵列提取光学相位和光谱信息，其中保持采样点之间的相对相位信息。 还提出了用于通过反射眼睛的波前并以多个角度测量波前来测量眼睛的方法和系统，以提供离轴相对波前曲率和眼睛的像差的图。 这些方法和系统提供的光束孔径之间的波长和采样点之间的相位精度具有许多眼睛应用，包括角膜和前眼层析成像，高分辨率视网膜成像和波前分析作为用于确定近视的探针束入射角的函数 进展和设计和测试矫正近视眼镜。
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公开(公告)号：US20150204729A1
公开(公告)日：2015-07-23
申请号：US14565703
申请日：2014-12-10
Applicant: Lasertec Corporation
Inventor： Haruhiko KUSUNOSE , Kiwamu TAKEHISA
CPC classification number: G01J9/02 , G01B9/02041 , G01B9/02049 , G01B9/02098 , G01B2290/30 , G01J9/0215 , G01J2009/0219 , G01N21/45 , G03F1/26 , G03F1/84
Abstract: The present invention is directed to the provision of an interferometer and a phase shift amount measuring apparatus that can precisely operate in the EUV region. The interferometer according to the invention comprises an illumination source for generating an illumination beam, an illumination system for projecting the illumination beam emitted from the illumination source onto a sample, and an imaging system for directing the reflected beam by the sample onto a detector. The illumination system includes a first diffraction grating for producing a first and second diffraction beams which respectively illuminate two areas on the sample where are shifted from each other by a given distance, and the imaging system includes a second grating for diffracting the first and second diffraction beams reflected by the sample to produce a third and fourth diffraction beams which are shifted from each other by a given distance.
Abstract translation: 本发明涉及提供一种能够在EUV区域中精确地工作的干涉仪和相移量测量装置。 根据本发明的干涉仪包括用于产生照明光束的照明源，用于将从照明源发射的照射光束投射到样本上的照明系统，以及用于将由样品引导到检测器的反射光束的成像系统。 照明系统包括：第一衍射光栅，用于产生第一和第二衍射光束，其分别照射样品上彼此偏移给定距离的两个区域，并且成像系统包括用于衍射第一和第二衍射的第二光栅 由样品反射的光束以产生彼此偏移给定距离的第三和第四衍射光束。
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5.发明授权公开(公告)号：US08416387B2
公开(公告)日：2013-04-09
申请号：US12605017
申请日：2009-10-23
Applicant: Ko Ishizuka
Inventor： Ko Ishizuka
CPC classification number: G01J9/0246 , G01J2009/0219 , G01J2009/0261 , G03F7/70775
Abstract: A wavelength shift measuring apparatus of the present invention is a wavelength shift detection sensor (WLCD1) which measures a shift of a wavelength of a light beam emitted from a light source, and includes a beam splitter (BS2) splitting the light beam emitted from the light source into a plurality of light beams and to synthesize two light beams among the plurality of light beams to generate an interference light, a spacer member (SP) provided so that an optical path length difference of the two light beams split by the beam splitter (PBS2) is constant, and a plurality of photoelectric sensors (PD) detecting the interference light generated by the beam splitter (BS2). The plurality of photoelectric sensors (PD) output a plurality of interference signals having phases shifted from one another based on the interference light to calculate a wavelength shift using the plurality of interference signals.
Abstract translation: 本发明的波长偏移测量装置是一种波长偏移检测传感器（WLCD1），其测量从光源发射的光束的波长偏移，并且包括分束器（BS2），其将从 光源分割为多个光束，并且在多个光束中合成两个光束以产生干涉光;间隔部件（SP），其设置成使得由分束器分离的两个光束的光路长度差异 （PBS2）是恒定的，并且多个光电传感器（PD）检测由分束器（BS2）产生的干涉光。 多个光电传感器（PD）基于干涉光输出具有相位偏移的多个干涉信号，以使用多个干涉信号计算波长偏移。
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Patent Agency Ranking
公开(公告)号：US4474467A
公开(公告)日：1984-10-02
申请号：US335118
申请日：1981-12-28
Applicant: John W. Hardy , Jeffrey H. Everson
Inventor： John W. Hardy , Jeffrey H. Everson
CPC classification number: G01J9/02 , G02F1/11 , G01J2009/0219
Abstract: A wavefront sensor for detecting the slope of an input wavefront. A surface acoustic wave reflective diffraction grating is positioned at a focal point of the wavefront, and generates surface acoustic waves at two primary frequencies f.sub.1 and f.sub.2. The reflective diffraction grating produces a first AC shearing interferogram between two like diffraction orders generated by the f.sub.1 and f.sub.2 surface acoustic waves. A photodetector array is positioned to detect the shearing interferogram at a two dimensional array of zones, and the phase of the output signal for each zone is representative of the local slope of the wavefront in the direction of shearing, thus producing the slope in one direction. Complete two dimensional wavefront slope information is obtained by shearing the wavefront in a second orthogonal direction in substantially the same manner utilizing a second surface acoustic wave diffraction grating and a second photodetector array.
Abstract translation: 用于检测输入波前的斜率的波前传感器。 表面声波反射衍射光栅位于波前的焦点处，并在两个主频f1和f2处产生表面声波。 反射衍射光栅在由f1和f2表面声波产生的两个相似衍射级之间产生第一AC剪切干涉图。 定位光电检测器阵列以检测区域的二维阵列上的剪切干涉图，并且每个区域的输出信号的相位表示在剪切方向上波前的局部斜率，从而在一个方向上产生斜率 。 通过使用第二表面声波衍射光栅和第二光电检测器阵列以基本相同的方式在第二正交方向上剪切波前来获得完整的二维波前斜率信息。
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公开(公告)号：US09861277B2
公开(公告)日：2018-01-09
申请号：US14899563
申请日：2014-06-20
Applicant: Cylite Pty Ltd
IPC: A61B3/14 , A61B3/00 , A61B3/10 , G01B9/02 , G01J9/02 , A61B3/117 , A61B3/107 , G02B27/10 , G02B27/28 , G02C7/02
CPC classification number: A61B3/1015 , A61B3/0025 , A61B3/1025 , A61B3/107 , A61B3/117 , A61B3/14 , G01B9/02027 , G01B9/02039 , G01B9/02041 , G01B9/02044 , G01B9/02091 , G01B2290/70 , G01J9/02 , G01J2009/0219 , G01J2009/0238 , G02B27/1013 , G02B27/283 , G02C7/027 , G02C2202/24
Abstract: Interferometry-based methods and apparatus are presented for analyzing one or more wavefronts from a sample, in which the sample wavefronts are interfered with two or more reference wavefronts to produce two or more interferograms in a sufficiently short time period for the interferograms to be captured in a single exposure of an image capture device such as a CCD array. Each interferogram has a unique carrier frequency dependent on the angle between a respective pair of sample and reference wavefronts. In certain embodiments multiple sample and/or reference wavefronts are generated using scanning mirrors, while in other embodiments utilizing multi-wavelength beams multiple sample and/or reference wavefronts are generated with wavelength dispersive elements. The methods and apparatus are suitable for measuring aberrations at one or more positions on the retina of an eye.
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8.发明申请公开(公告)号：US20100103403A1
公开(公告)日：2010-04-29
申请号：US12605017
申请日：2009-10-23
Applicant: Ko Ishizuka
Inventor： Ko Ishizuka
CPC classification number: G01J9/0246 , G01J2009/0219 , G01J2009/0261 , G03F7/70775
Abstract: A wavelength shift measuring apparatus of the present invention is a wavelength shift detection sensor (WLCD1) which measures a shift of a wavelength of a light beam emitted from a light source, and includes a beam splitter (BS2) splitting the light beam emitted from the light source into a plurality of light beams and to synthesize two light beams among the plurality of light beams to generate an interference light, a spacer member (SP) provided so that an optical path length difference of the two light beams split by the beam splitter (PBS2) is constant, and a plurality of photoelectric sensors (PD) detecting the interference light generated by the beam splitter (BS2). The plurality of photoelectric sensors (PD) output a plurality of interference signals having phases shifted from one another based on the interference light to calculate a wavelength shift using the plurality of interference signals.
Abstract translation: 本发明的波长偏移测量装置是一种波长偏移检测传感器（WLCD1），其测量从光源发射的光束的波长偏移，并且包括分束器（BS2），其将从 光源分割为多个光束，并且在多个光束中合成两个光束以产生干涉光;间隔部件（SP），其设置成使得由分束器分离的两个光束的光路长度差异 （PBS2）是恒定的，并且多个光电传感器（PD）检测由分束器（BS2）产生的干涉光。 多个光电传感器（PD）基于干涉光输出具有相位偏移的多个干涉信号，以使用多个干涉信号计算波长偏移。
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公开(公告)号：US5170221A
公开(公告)日：1992-12-08
申请号：US713155
申请日：1991-06-11
Applicant: Keiji Matsui , Atsushi Ieki
Inventor： Keiji Matsui , Atsushi Ieki
CPC classification number: G01J1/4228 , G01J1/04 , G01J1/0407 , G01J1/0448 , G01J1/4257 , G01J9/02 , G01J2009/0219 , G01J2009/0234
Abstract: A parallel light ray measuring apparatus invention measures the parallelism of a light beam by: receiving a light beam which has passed through two gratings having the same grating period by means of at least two photoelectric converting elements, and by detecting the light intensity obtained from those aforementioned photoelectric converting elements and the phase difference between the periodic signals obtained when either of the gratings is moved, using the at least photoelectric converting elements. Further, the parallel light ray measuring apparatus includes: a first grating; a second grating having the same grating period as that of the first grating, and being disposed such that the grating lines of the second grating are in parallel with those of the first grating; a light pick-up screen for receiving a light beam which has passed through both gratings, whereby the light intensity distribution appearing on the light pick-up screen is detected so as to measure the parallelism of the light beam.
Abstract translation: 平行光线测量装置通过以下方式测量光束的平行度：通过至少两个光电转换元件接收已经通过具有相同光栅周期的两个光栅的光束，并且通过检测从这些光束获得的光强度 上述光电转换元件和使用至少光电转换元件移动任何一个光栅时获得的周期信号之间的相位差。 此外，平行光线测量装置包括：第一光栅; 第二光栅具有与第一光栅相同的光栅周期，并且被布置成使得第二光栅的光栅线与第一光栅的光栅线平行; 用于接收已经通过两个光栅的光束的光拾取屏幕，由此检测在拾光屏幕上出现的光强度分布，以便测量光束的平行度。
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10.发明授权Method for measuring an optical length of light path and a laser interferometer for carrying same into effect 失效用于测量光路的光学长度的方法和用于使其起作用的激光干涉仪
公开(公告)号：US4558952A
公开(公告)日：1985-12-17
申请号：US467847
申请日：1983-02-18
Applicant: Vladimir P. Kulesh , Leonid M. Moskalik , Anatoly A. Orlov , Jury A. Bliznjuk , Stanislav K. Shtandel
Inventor： Vladimir P. Kulesh , Leonid M. Moskalik , Anatoly A. Orlov , Jury A. Bliznjuk , Stanislav K. Shtandel
CPC classification number: G01B9/02057 , G01B9/02002 , G01B9/02012 , G01J9/04 , G01N21/45 , G01B2290/25 , G01B2290/45 , G01B2290/70 , G01J2009/0219 , G01J2009/0234 , G01J2009/0261
Abstract: A method for measuring an optical length of light path based on use of multiple-beam interference of light and carried into effect by forming an original light beam with two collinear components having mutually independent polarizations and different frequencies in such a manner that when forming each of the following interfering light beams from the preceding one, polarizations of the light components having different frequencies are mutually converted, whereupon the interfered light is converted into an electric signal and its phase is measured, by which the light path optical length is determined. A laser interferometer carrying said method into effect comprises: a laser and arranged consecutively along the direction of run of the light beam: a device for offsetting the frequency of one of the light components, reflecting elements, a polarizing element for separating the light of the interfering beams according to polarization, and a photoelectric converter of the interfered light into an electric signal, as well as a unit for measuring the phase of an electric signal, connected to the photoelectric converter and also a birefringent plate located between the reflecting elements and adapted for mutual conversion of polarizations of the two light components.
Abstract translation: 一种用于基于使用光的多光束干涉来测量光路的光学长度的方法，其通过用具有相互独立的极化和不同频率的两个共线分量形成原始光束来实现，使得当形成 来自前述的以下干涉光束被相互转换，因此被干扰的光被转换为电信号，并且测量其相位，由此确定光路光学长度。 携带所述方法的激光干涉仪实现包括：沿着光束的行进方向连续布置的激光器：用于抵消一个光分量，反射元件的频率的装置，用于分离光束的光的偏振元件 根据偏振的干涉光束和被干扰的光的光电转换器变成电信号，以及连接到光电转换器的电信号的相位测量单元，以及位于反射元件之间的双折射板， 用于两个光分量的偏振的相互转换。
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