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    SYSTEMS AND METHODS FOR NON-INVASIVE TESTING OF ELECTROMECHANICAL SYSTEMS DEVICES
    34.
    发明申请
    SYSTEMS AND METHODS FOR NON-INVASIVE TESTING OF ELECTROMECHANICAL SYSTEMS DEVICES 审中-公开
    电气系统设备非接触式测试的系统和方法

    公开(公告)号：US20130135620A1

    公开(公告)日：2013-05-30

    申请号：US13307427

    申请日：2011-11-30

    Applicant: Wilhelmus A. De Groot ,  Daniel Felnhofer

    Inventor： Wilhelmus A. De Groot ,  Daniel Felnhofer

    IPC: G01N21/55

    CPC classification number: G01L1/103 ,  G01D5/28 ,  G01K11/26 ,  G01L5/0047 ,  G01L9/0011 ,  G01L9/002 ,  G01M99/005 ,  G02B26/001 ,  G09G3/006 ,  G09G3/3466

    Abstract: This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for testing an electromechanical systems (EMS) device. In one aspect, a laser is directed at a driven EMS device, and the reflected light pattern is analyzed to provide information regarding the characteristics of the driven EMS device. In some aspects, the reflected light pattern is analyzed to determine a resonant frequency of the EMS device or the damping forces acting on the EMS device. The resonant frequency can then be used to determine stresses within the EMS device, or pressure or temperature within a device package encapsulating the EMS device.

    Abstract translation: 本公开提供了用于测试机电系统（EMS）设备的系统，方法和装置，包括在计算机存储介质上编码的计算机程序。 在一个方面，激光被引导到被驱动的EMS装置，并且分析反射光图案以提供关于所驱动的EMS装置的特性的信息。 在一些方面，分析反射光图案以确定EMS装置的谐振频率或作用在EMS装置上的阻尼力。 然后谐振频率可用于确定EMS设备内的应力，或者封装EMS设备的设备封装内的压力或温度。

    Apparatus and method for measuring internal stress of reticle membrane
    35.
    发明授权
    Apparatus and method for measuring internal stress of reticle membrane 失效

    公开(公告)号：US06575035B2

    公开(公告)日：2003-06-10

    申请号：US09813030

    申请日：2001-03-21

    Applicant: Yoshihiko Suzuki

    Inventor： Yoshihiko Suzuki

    IPC: G01N2904

    CPC classification number: G01L1/103 ,  G01L5/0047

    Abstract: An apparatus for measuring internal stress of a membrane formed in a reticle, including a temperature adjustment device configured to change a temperature of the membrane from a first temperature to a second temperature; a resonance frequency finding device configured to find a first resonance frequency of the membrane at the first temperature and a second resonance frequency of the membrane at the second temperature; and a stress calculating device configured to calculate the internal stress based on the first and second resonance frequencies.

    System for measuring stress
    36.
    发明授权
    System for measuring stress 失效
    压力测量系统

    公开(公告)号：US5563348A

    公开(公告)日：1996-10-08

    申请号：US305189

    申请日：1994-09-13

    Applicant: Hideyo Suzuki ,  Isamu Yokoi ,  Qing Feng

    Inventor： Hideyo Suzuki ,  Isamu Yokoi ,  Qing Feng

    IPC: G01L1/00 ,  G01L1/10 ,  G08C23/04 ,  G01B11/00

    CPC classification number: G01L1/103

    Abstract: In a stress measuring, system sensor driving power and a signal sensed by a sensor are transmitted and received in the form of a light pulse signal to thereby improve a noise resistant property as well as a measuring accuracy and reliability. The stress measuring system includes a sensor head disposed at a sensing location and a measuring device disposed at a location remote from the sensing location. The sensor head includes a sensor having a sensing section for sensing a change in stress as a change in the natural frequency of an oscillation string, an output section for outputting a light pulse sensing signal corresponding to the natural frequency sensed by the sensing section and a driving section for causing oscillation at the natural frequency of the oscillation system of the sensing section in response to a driving light pulse signal. The measuring device includes a measuring section for measuring the stress based on the frequency of the light pulse sensing signal and a creating section for creating the driving light pulse signal having the frequency following a change in the natural frequency based on the light pulse sensing signal. The sensor head is connected to the measuring device through optical fibers for transmitting at least the light pulse sensing signal and the driving light pulse signal.

    Abstract translation: 在应力测量中，以光脉冲信号的形式发送和接收由传感器感测的系统传感器驱动功率和信号，从而提高抗噪声性能以及测量精度和可靠性。 应力测量系统包括设置在感测位置处的传感器头和设置在远离检测位置的位置处的测量装置。 传感器头包括传感器，传感器具有感测部分，用于感测作为振荡线的固有频率的变化的应力变化;输出部分，用于输出对应于由感测部分感测的固有频率的光脉冲感测信号;以及 驱动部分，用于响应于驱动光脉冲信号在感测部分的振荡系统的固有频率处产生振荡。 测量装置包括：测量部分，用于基于光脉冲感测信号的频率测量应力;以及创建部分，用于基于光脉冲感测信号产生具有跟随固有频率变化的频率的驱动光脉冲信号。 传感器头通过光纤连接到测量装置，用于至少传输光脉冲感测信号和驱动光脉冲信号。

    Micro resonator
    37.
    发明授权
    Micro resonator 失效
    微谐振器

    公开(公告)号：US5265479A

    公开(公告)日：1993-11-30

    申请号：US954406

    申请日：1992-09-29

    Applicant: Alan J. Cook ,  Stephen D. Hawker

    Inventor： Alan J. Cook ,  Stephen D. Hawker

    IPC: G01D5/26 ,  G01L1/10 ,  G01L9/00

    CPC classification number: G01L1/103 ,  G01D5/268 ,  G01L9/0011

    Abstract: An optically driven microresonator sensor comprising a sensor member having a vibratory bridge onto which a light beam is directed at a non-zero angle relative to a normal to said bridge, the light beam causing the bridge to oscillate at its resonant frequency, in use, in the direction of said normal, between a first position, where most of the incident light is reflected by the bridge to a light intensity measuring system, and a second position, where most of the incident light is not intercepted by said bridge, so that the reflected incident light sensed by said light intensity measuring system is reduced, the resonant frequency of oscillation of the bridge thus determined from said system, being dependent upon the nature of an applied force, such as stress, exerted on the sensor member.

    Abstract translation: 一种光学驱动的微谐振器传感器，包括具有振动桥的传感器构件，光束相对于所述桥的法线指向非零角度，所述光束在使用中以其谐振频率摆动， 在所述法线的方向上，大多数入射光被桥梁反射到第一位置与光强度测量系统之间，以及第二位置，其中大部分入射光不被所述桥接器截取，使得 由所述光强测量系统感测到的反射入射光减少，由此从所述系统确定的桥的振荡的谐振频率取决于施加在传感器构件上的施加的力（例如应力）的性质。

    Optical measurement system with light-driven vibrating sensor element
    38.
    发明授权
    Optical measurement system with light-driven vibrating sensor element 失效
    具有光驱振动传感器元件的光学测量系统

    公开(公告)号：US4521684A

    公开(公告)日：1985-06-04

    申请号：US350687

    申请日：1982-02-22

    Applicant: Anthony C. Gilby ,  Edward L. Lewis ,  Everett O. Olsen

    Inventor： Anthony C. Gilby ,  Edward L. Lewis ,  Everett O. Olsen

    IPC: G01H9/00 ,  G01H13/00 ,  G01L1/08 ,  G01L1/10 ,  G02B5/14

    CPC classification number: G01L1/103 ,  G01L1/08

    Abstract: An instrumentation system for use in measuring and processing industrial process variables, such as flow, pressure, or temperature, includes a resonant element sensor whose resonant frequency varies in accordance with changes in the desired process variable communicating through an optical fiber link to a distant control room. The sensor is activated into resonant physical motion by light energy from a source in the control room, while the motion of the wire is sensed optically and retransmitted to the control room to produce an output signal whose frequency is equal to that of the resonating element. A feedback network maintains the sensor in resonance by synchronizing the delivery of light energy to the motion of the resonant element. The powering and sensing aspect may be performed by individual fiber optic cables or alternatively this function may be combined by utilizing a single fiber optic strand.

    Abstract translation: 用于测量和处理诸如流量，压力或温度的工业过程变量的仪表系统包括谐振元件传感器，其谐振频率根据通过光纤链路传输到远程控制器的期望过程变量的变化而变化 房间。 传感器通过来自控制室中的源的光能被激活成共振的物理运动，同时光线的运动被光学地感测并重新发送到控制室，以产生频率等于谐振元件的输出信号。 反馈网络通过将光能的传递与谐振元件的运动同步来使传感器保持谐振。 功率和感测方面可以由单独的光纤电缆执行，或者该功能可以通过利用单个光纤线组合。

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