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公开(公告)号：US09998089B2
公开(公告)日：2018-06-12
申请号：US14650658
申请日：2013-12-13
Applicant: GENERAL ELECTRIC COMPANY
Inventor： Russell Craddock , Roger Jones , Li Zhao , Muhammad Irshad
IPC: G01L1/10 , H03H9/02 , G01L9/00 , G01L19/00 , G01L19/04 , G01K7/32 , G01P15/02 , H03H3/007 , H03H3/02
CPC classification number: H03H9/02244 , G01K7/32 , G01L1/103 , G01L9/002 , G01L9/0077 , G01L19/0092 , G01L19/04 , G01P15/02 , H03H3/0072 , H03H3/02
Abstract: A resonator device 10 is disclosed. The resonator device may be used in a transducer or a sensor such as a pressure, force or acceleration sensor. The resonator device comprises a resonator 20 provided on a diaphragm 30. A cap 40 is provided which may be fusion bonded to the diaphragm 30 to enclose the resonator 20 and form a hermetically sealed package 10. The resonator device is excited by applying electromagnetic stimulation, such as infra-red or optical stimulation, which may be from a laser via a fiber 50. The resonator device may be interrogated by applying an electromagnetic signal into the optical cavity formed between the resonator 20 and the inside surface of the cap 40 to derive a frequency change of the resonator. As the resonator device incorporates a hermetically sealed package and is stimulated by electromagnetic radiation, it is robust and able to operate in harsh environments.
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公开(公告)号：US20140096608A1
公开(公告)日：2014-04-10
申请号：US13648644
申请日：2012-10-10
Applicant: SERVICE SOLUTIONS U.S. LLC
Inventor： Jeremy Themm , William W. Wittliff, III , Reed Selkirk , Kevin Gray
CPC classification number: G01L1/00 , G01H1/00 , G01H3/00 , G01H9/00 , G01H11/00 , G01L1/10 , G01L1/103 , G01L5/042 , G01L5/105
Abstract: A measuring system including a sensor positioned to a belt to measure an oscillation or vibration of the belt based at least in part on a trigger threshold. Also, the measuring system may include a diagnostic tool coupled the sensor to receive a plurality of measurements of the oscillation or vibration of the belt, wherein the diagnostic tool may determine a tension of the belt based at least in part on an average of the plurality of measurements of the oscillation or vibration of the belt.
Abstract translation: 一种测量系统，包括至少部分地基于触发阈值定位到皮带上以测量皮带的振动或振动的传感器。 此外，测量系统可以包括诊断工具，耦合传感器以接收带的振荡或振动的多个测量值，其中诊断工具可以至少部分地基于多个平均值来确定皮带的张力 测量皮带的振动或振动。
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公开(公告)号：US20110219887A1
公开(公告)日：2011-09-15
申请号：US13128478
申请日：2009-10-28
Applicant: Werner Schiffers , John R. Webster
Inventor： Werner Schiffers , John R. Webster
IPC: G01L3/08
Abstract: A strain sensor apparatus for a rotatable shaft including a radiation emitter/receiver, a vibration element attached to the shaft and a radiation-reflective annulus surrounding the shaft and vibration element.
Abstract translation: 一种用于可旋转轴的应变传感器装置，包括辐射发射器/接收器，附接到轴的振动元件和围绕轴和振动元件的辐射反射环。
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公开(公告)号：US4813271A
公开(公告)日：1989-03-21
申请号：US33806
申请日：1987-04-03
Applicant: John C. Greenwood
Inventor： John C. Greenwood
CPC classification number: G01L9/0014 , G01L1/103 , G01L1/186 , G01L9/002 , Y10S73/01
Abstract: A strain or pressure responsive transducer comprises a pair of elongate beam resonators arranged end to end and provided with a flexible coupling therebetween. The arrangement oscillates e.g. in a double see-saw or butterfly mode. The transducer is disposed on a diaphragm whereby strain may be transmitted to the oscillatory system. The frequency of oscillation is a function of this strain.
Abstract translation: 应变或压力响应换能器包括一对细长的束谐振器，它们端对端设置并且在它们之间设置有柔性耦合。 该装置例如振荡。 在双锯或蝴蝶模式。 换能器设置在隔膜上，因此应变可以传递到振荡系统。 振荡的频率是该应变的函数。
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公开(公告)号：US4743752A
公开(公告)日：1988-05-10
申请号：US8209
申请日：1987-01-28
Applicant: Everett O. Olsen , Christopher R. Brown , Gordon W. Chitty
Inventor： Everett O. Olsen , Christopher R. Brown , Gordon W. Chitty
CPC classification number: G01L9/0011 , G01D5/268 , G01K1/024 , G01K11/26 , G01L1/103 , G01L9/0014
Abstract: An optically driven, electromagnetically oscillating resonant sensor subjected to a stress force wherein the optical driving energy and the optically communicated signal generated in response to the stress force are both communicated a substantial distance along a single optical fiber. A portion of the supply energy drives the oscillatory mechanism and a portion is reflected to a frequency detector by the shuttering action of the resonant element. The device may be configured so as to be electrically driven and optically sensed, optically driven and electrically sensed, or both optically driven and optically sensed for maximum retrofit versatility in past, present, and future process control systems.
Abstract translation: 经受应力的光驱动电磁振荡谐振传感器，其中响应于应力的力产生的光学驱动能量和光通信信号都沿着单根光纤传送相当长的距离。 供应能量的一部分驱动振荡机构，并且通过谐振元件的快门动作将一部分反射到频率检测器。 该器件可以被配置为电过驱动和光学感测，光学驱动和电感测，或者被光学驱动和光学检测，以便在过去，现在和未来的过程控制系统中实现最大的改进的多功能性。
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Patent Agency Ranking
公开(公告)号：US4567451A
公开(公告)日：1986-01-28
申请号：US500129
申请日：1983-06-01
Applicant: John C. Greenwood
Inventor： John C. Greenwood
CPC classification number: G01L9/0023 , G01B11/16 , G01D5/268 , G01L1/103 , G01L1/186 , G01L9/0014 , G01L9/002
Abstract: A resonator device comprises an elastic beam driven electrostatically at its natural frequency, or an harmonic thereof, by voltage pulses applied to an integral paddle member. The voltage pulses are derived from optical pulses fed via an optical fibre and reflected from the paddle member to a photodiode array. There is thus minimal coupling between the beam and the drive system. A positive feedback loop is provided in which light retroreflected from the paddle member is recaptured by the optical fibre and electronically detected, amplified and fed back in phase with the beam oscillations by modulating the optical pulses.
Abstract translation: 谐振器装置包括通过施加到整体桨叶构件的电压脉冲以其固有频率或其谐波静电驱动的弹性梁。 电压脉冲是从经由光纤馈送并从桨形部件反射到光电二极管阵列的光脉冲导出的。 因此，梁和驱动系统之间的耦合很小。 提供了一种正反馈回路，其中从桨形构件回射的光被光纤重新捕获，并通过调制光脉冲与电子束振荡电相检测，放大和反相反馈。
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公开(公告)号：US20020020220A1
公开(公告)日：2002-02-21
申请号：US09813030
申请日：2001-03-21
Applicant: NIKON CORPORATION
Inventor： Yoshihiko Suzuki
IPC: G01L001/00 , G01N021/00
CPC classification number: G01L1/103 , G01L5/0047
Abstract: An apparatus for measuring internal stress of a membrane formed in a reticle, including a temperature adjustment device configured to change a temperature of the membrane from a first temperature to a second temperature; a resonance frequency finding device configured to find a first resonance frequency of the membrane at the first temperature and a second resonance frequency of the membrane at the second temperature; and a stress calculating device configured to calculate the internal stress based on the first and second resonance frequencies.
Abstract translation: 一种用于测量形成在掩模版中的膜的内应力的装置，包括温度调节装置，其被配置为将膜的温度从第一温度改变到第二温度; 谐振频率发现装置，被配置为在所述第二温度下发现所述膜的第一温度的第一共振频率和所述膜的第二共振频率; 以及应力计算装置，被配置为基于所述第一和第二共振频率来计算所述内部应力。
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公开(公告)号：US06178821B2
公开(公告)日：2001-01-30
申请号：US09236427
申请日：1999-01-25
Applicant: Sudhir Dattatraya Savkar , Walter Whipple
Inventor： Sudhir Dattatraya Savkar , Walter Whipple
IPC: G01D900
Abstract: A vibration sensing device including a strip bearing a pattern of markings. The strip is caused to slide back and forth in front of a sensor as the result of vibration or displacement of an object to which either the strip or the sensor is attached. By varying the spacing between the markings on strip, the direction and approximate speed of the motion can be sensed by the frequency of the signal generated by movement of the pattern past the sensor and its rate of change. The vibration sensing device can be made to sense out of balance (OOB) or vibratory motion of a piece of equipment such as a washing machine, motor engine or other device during use or transport.
Abstract translation: 一种振动感测装置，包括带有标记图案的条带。 由于带或传感器所附着的物体的振动或位移，导致条带在传感器前面前后滑动。 通过改变条带上的标记之间的距离，运动的方向和近似速度可以通过由图案经过传感器的移动产生的信号的频率及其变化率来感测。 振动感测装置可以在使用或运输期间使感知不平衡（OOB）或诸如洗衣机，发动机或其他装置的设备的振动运动。
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9.发明授权
公开(公告)号：US5844236A
公开(公告)日：1998-12-01
申请号：US785494
申请日：1997-01-17
Applicant: Mark Lowell Wilson
Inventor： Mark Lowell Wilson
Abstract: A method of driving and sensing a resonant sensor network wherein a least a one resonant sensor is driven by a first light from a first light source at a first frequency, wherein said first light source is modulated by an a.c. source. A second light source at a second frequency is utilized sense the resonant frequency of the at least one resonant sensor. Wherein said at least one resonant sensor modulates said second light source. The modulated light is provided to a photo detector and the first light source is filtered out of said reflected light. The detector ac amplifies the filtered reflected light, thereby detecting said the resonant frequency of the resonant sensor.
Abstract translation: 一种驱动和感测谐振传感器网络的方法，其中至少一个谐振传感器由来自第一频率的第一光源的第一光驱动，其中所述第一光源由等直流调制。 资源。 利用第二频率的第二光源来感测至少一个谐振传感器的谐振频率。 其中至少一个谐振传感器调制所述第二光源。 将调制的光提供给光检测器，并且将第一光源从所述反射光中滤出。 检测器交流放大经滤波的反射光，从而检测谐振传感器的谐振频率。
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公开(公告)号：US5115128A
公开(公告)日：1992-05-19
申请号：US456787
申请日：1989-12-29
Applicant: Alan J. Cook
Inventor： Alan J. Cook
Abstract: A resonant beam sensor is excited into resonance by directing onto it a drive signal comprising light which has been amplitude modulated at the resonant frequency. A portion of the drive signal reflected by the sensor is demodulated by a photodetector to provide a measurement signal.
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