公开(公告)号：US10359377B2

公开(公告)日：2019-07-23

申请号：US15495634

申请日：2017-04-24

Applicant: KLA-Tencor Corporation

Inventor： Alexander Bykanov ,  Nikolay Artemiev ,  Joseph A. Di Regolo ,  John Wade Viatella

IPC: G21K1/04 ,  G01N23/201 ,  G21K7/00

Abstract: Methods and systems for reducing the effect of finite source size on illumination beam spot size for Transmission, Small-Angle X-ray Scatterometry (T-SAXS) measurements are described herein. A beam shaping slit having a slender profile is located in close proximity to the specimen under measurement and does not interfere with wafer stage components over the full range of angles of beam incidence. In one embodiment, four independently actuated beam shaping slits are employed to effectively block a portion of an incoming x-ray beam and generate an output beam having a box shaped illumination cross-section. In one aspect, each of the beam shaping slits is located at a different distance from the specimen in a direction aligned with the beam axis. In another aspect, the beam shaping slits are configured to rotate about the beam axis in coordination with the orientation of the specimen.

公开(公告)号：US10146140B2

公开(公告)日：2018-12-04

申请号：US15285051

申请日：2016-10-04

Applicant: ASML Netherlands B.V.

Inventor： Maxim Pisarenco ,  Richard Quintanilha ,  Markus Gerardus Martinus Maria Van Kraaij

IPC: G03B27/68 ,  G03F7/20 ,  G01B15/00 ,  G01N23/201

Abstract: A structure of interest is irradiated with radiation for example in the x-ray or EUV waveband, and scattered radiation is detected by a detector (306). A processor (308) calculates a property such as linewidth (CD) by simulating interaction of radiation with a structure and comparing the simulated interaction with the detected radiation. A layered structure model (600, 610) is used to represent the structure in a numerical method. The structure model defines for each layer of the structure a homogeneous background permittivity and for at least one layer a non-homogeneous contrast permittivity. The method uses Maxwell's equation in Born approximation, whereby a product of the contrast permittivity and the total field is approximated by a product of the contrast permittivity and the background field. A computation complexity is reduced by several orders of magnitude compared with known methods.

公开(公告)号：US20180188192A1

公开(公告)日：2018-07-05

申请号：US15847375

申请日：2017-12-19

Applicant: KLA-Tencor Corporation

Inventor： Nikolay Artemiev ,  Michael Friedmann

IPC: G01N23/201

CPC classification number: G01N23/201 ,  G01N2223/1016 ,  G01N2223/6116

Abstract: Methods and systems for controlling illumination beam spot size for Transmission, Small-Angle X-ray Scatterometry (T-SAXS) measurements of different sized metrology targets are described herein. An X-ray illumination optics subsystem includes one or more focusing optical elements with object and image planes at fixed locations and one or more illumination apertures or slits that independently control magnification and beam divergence. In a further aspect, the illumination source size and shape is controlled, along with magnification and beam divergence. In this manner, beam divergence and illumination spot size on a specimen are independently controlled, while maintaining constant illumination flux.

公开(公告)号：US09958404B2

公开(公告)日：2018-05-01

申请号：US14198611

申请日：2014-03-06

Applicant: Bruker AXS GmbH

Inventor： Jan Skov Pedersen

IPC: G01N23/201 ,  G21K1/04

CPC classification number: G01N23/201 ,  G01N2223/314 ,  G21K1/04 ,  G21K1/046 ,  G21K2201/062

Abstract: An X-ray analyzing system for x-ray scattering analysis having an x-ray source for generating a beam of x-rays propagating along a transmission axis (3), at least one hybrid slit (5b) with an aperture which defines the shape of the cross section of the beam, a sample on which the beam shaped by the hybrid slit (5b) is directed and an X-ray detector for detecting x-rays originating from the sample. The hybrid slit (5b) has at least three hybrid slit elements (7), each hybrid slit element (7) having a single crystal substrate (8) bonded to a base (9) with a taper angle α≠0. The single crystal substrates (8) of the hybrid slit elements (7) limit the aperture and the hybrid slit elements (7) are staggered with an offset along the transmission axis (3). The X-ray analyzing system has improved resolution and signal to noise ratio.

公开(公告)号：US09847242B2

公开(公告)日：2017-12-19

申请号：US14582749

申请日：2014-12-24

Applicant: Industrial Technology Research Institute

Inventor： Wen-Li Wu ,  Yen-Song Chen ,  Wei-En Fu ,  Yun-San Chien ,  Hsin-Chia Ho

IPC: G01N23/201 ,  H01L21/68

CPC classification number: H01L21/68 ,  G01N2223/054 ,  G01N2223/6116

Abstract: The disclosure provides an apparatus for aligning first and second plates that are parallel to each other and have the same orientation. The apparatus includes a detector that detects composite small-angle X-ray scattering emitted from patterns of the first and second plates that are perpendicularly impinged by X-ray, and a moving unit that aligns the first and second plates according to a composite amplitude distribution of the composite small-angle X-ray scattering. Therefore, the first and second plates are aligned to each other accurately.

公开(公告)号：US09557283B2

公开(公告)日：2017-01-31

申请号：US14713081

申请日：2015-05-15

Applicant: Brookhaven Science Associates, LLC

Inventor： Charles T. Black ,  Kevin G. Yager

IPC: G01N23/00 ,  G01N23/20 ,  G01N23/201

CPC classification number: G01N23/20025 ,  G01N23/201 ,  G01N2223/054 ,  G01N2223/309

Abstract: A nano-confinement platform that may allow improved quantification of the structural order of nanometer-scale systems. Sample-holder ‘chips’ are designed for the GTSAXS experimental geometry. The platform involves fabricated nanostructured sample holders on and in one or more corners of a substrate support where the sample material of interest is positioned at the corner of the substrate support. In an embodiment, the substrate material making up the substrate support beneath the sample-holding area is removed. A scattering x-ray sample platform includes a substrate support arranged in a parallelepiped form, having a substantially flat base and a substantially flat top surface, the top surface being substantially parallel with the base, the parallelepiped having a plurality of corners. At least one corner of the substrate support has a sample holding area formed in the top surface of the substrate support and within a predetermined distance from the corner. The sample holding area includes a regular array of nano-wells formed in the top surface of the substrate support.

Abstract translation: 纳米限制平台可以改进纳米尺度系统的结构顺序的量化。 样品架“芯片”是为GTSAXS实验几何设计的。 该平台涉及在衬底支撑件的一个或多个角部上和之上的制造的纳米结构样品架，其中感兴趣的样品材料位于衬底支架的拐角处。 在一个实施例中，去除在样品保持区域下方构成基底支撑物的基底材料。 散射X射线样品平台包括布置成平行六面体形式的基底支撑件，具有基本上平坦的基部和基本平坦的顶表面，该顶表面基本上平行于基部，该平行六面体具有多个拐角。 衬底支撑件的至少一个角部具有形成在衬底支撑件的顶表面中并且距离拐角预定距离内的样品保持区域。 样品保持区域包括在衬底支撑体的顶表面中形成的纳米孔的规则阵列。

公开(公告)号：US09329143B2

公开(公告)日：2016-05-03

申请号：US14004999

申请日：2012-03-12

Applicant: Heimo Schnablegger ,  Edith Pieber

Inventor： Heimo Schnablegger

IPC: G01N23/201 ,  G01N23/20

CPC classification number: G01N23/20008 ,  G01N23/20 ,  G01N2223/054 ,  G01N2223/3307

Abstract: The invention relates to a method and an apparatus for studying the X-ray properties of samples (3c), wherein X-ray radiation scattered by a sample (3c) is recorded by a detector (5) positioned at a distance from the sample (3c) and is evaluated with respect to the characteristics of the sample. According to the invention, it is provided that at a predetermined distance between the X-ray beam source (1) and the detector (5) or between the starting point (2b) of the X-ray beam (10) directed at the sample (3c) and the detector (5), for a predetermined number of successive measurements the distance (S1, S2) between the sample (3c) and the detector (5) is changed and is set at a predetermined different value.

Abstract translation: 本发明涉及一种用于研究样品（3c）的X射线特性的方法和装置，其中由样品（3c）散射的X射线辐射由位于离样品一定距离的检测器（5）记录 3c），并且相对于样品的特性进行评估。 根据本发明，提供在X射线束源（1）和检测器（5）之间或X射线束（10）的起始点（2b）之间的预定距离处，该距离指向样品 （3c）和检测器（5），对于预定数量的连续测量，样品（3c）和检测器（5）之间的距离（S1，S2）被改变并被设置在预定的不同值。

公开(公告)号：US09284836B2

公开(公告)日：2016-03-15

申请号：US13969607

申请日：2013-08-18

Applicant: HALLIBURTON ENERGY SERVICES, INC.

Inventor： Paul F. Rodney ,  Ronald L. Spross ,  Jerome Allen Truax ,  Daniel David Gleitman

IPC: E21B49/08 ,  E21B49/10 ,  E21B47/10 ,  G01N23/20 ,  G01N23/201

CPC classification number: E21B49/08 ,  E21B47/1015 ,  E21B49/10 ,  G01N23/201 ,  G01N2223/616 ,  G01N2223/635

Abstract: A method and system for determining a property of a sample of fluid in a borehole. A fluid sample is collected in a downhole tool. While collecting, X-rays are transmitted proximate the fluid from an X-ray source in the tool and an X-ray flux that is a function of a property of the fluid is detected. The detected X-ray flux data is processed to determine the property of the fluid.

Abstract translation: 一种用于确定井眼中的流体样品的性质的方法和系统。 流体样品被收集在井下工具中。 在收集时，X射线在工具中的来自X射线源的流体附近传输，并且检测作为流体性质的函数的X射线通量。 检测到的X射线通量数据被处理以确定流体的性质。

公开(公告)号：US09279776B2

公开(公告)日：2016-03-08

申请号：US13895389

申请日：2013-05-16

Applicant: incoatec GmbH

Inventor： Andreas Kleine ,  Josef Kreith ,  Frank Hertlein

IPC: G21K1/02 ,  G21K1/04 ,  A61B6/06 ,  G01N23/20 ,  G02B26/00 ,  G02B26/08 ,  G02B27/09 ,  G01N23/201 ,  G01N23/207

CPC classification number: G01N23/20008 ,  A61B6/06 ,  G01N23/201 ,  G01N23/207 ,  G02B26/001 ,  G02B26/0808 ,  G02B27/0988 ,  G21K1/02 ,  G21K1/04 ,  G21K1/046

Abstract: An X-ray analysis apparatus has at least one X-ray aperture (4; 4a, 4b) which delimits an X-ray beam (RS) emitted by an X-ray source (2). The at least one X-ray aperture (4; 4a, 4b) is disposed at a separation from the sample (5) and has a single crystal aperture body (8) with a through pinhole (9). The single crystal aperture body (8) forms a peripheral continuous edge (10) which delimits the X-ray beam (RS) and starting from which the pinhole (9) widens like a funnel in a direction of an outlet opening (11) of the X-ray aperture (4; 4a, 4b) in a first area (B1). The X-ray analysis apparatus reduces impairment of X-ray measurements due to parasitic scattered radiation and at little expense.

公开(公告)号：US20160061752A1

公开(公告)日：2016-03-03

申请号：US14839883

申请日：2015-08-28

Applicant: Decision Sciences International Corporation

Inventor： Priscilla Kurnadi ,  Shawn McKenney ,  Sean Simon ,  Peter Lam

IPC: G01N23/04 ,  G01N23/201

CPC classification number: G01N23/046 ,  G01V5/0016

Abstract: Techniques, systems, and devices are disclosed for analyzing a point of closest approach (PoCA) image of a volume of interest (VOI) comprising a set of recorded PoCA points from charged particle detector measurements to detect an object within the VOI. The VOI is partitioned into a set of equally-sized bins with each bin including a subset of the PoCA points. A bin metric is determined for each bin. A subset of the bins is selected based on the detected bin metric with the subset of bins being most likely to contain objects. A potential object for each selected bin is determined by determining a location and a size for the potential object based at least on the PoCAs inside the bin. A figure of merit (FOM) of the potential object is determined as a measure of the likelihood that the potential object is truly a threat object.

Abstract translation: 公开了技术，系统和设备，用于分析包含一组来自带电粒子检测器测量的记录的PoCA点的感兴趣体积（VOI）的最接近方法（PoCA）图像点以检测VOI内的对象。 VOI被划分成一组相同尺寸的箱，每个箱包括PoCA点的子集。 为每个仓确定仓位。 基于检测到的bin度量来选择垃圾箱的子集，其中子箱的子集最有可能包含对象。 通过至少基于仓内的PoC确定潜在对象的位置和大小来确定每个所选择的仓的潜在对象。 确定潜在对象的品质因数（FOM）作为潜在对象真正成为威胁对象的可能性的度量。