SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME
    49.
    发明申请
    SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME 审中-公开
    半导体器件及其制造方法

    公开(公告)号:US20170005044A1

    公开(公告)日:2017-01-05

    申请号:US15198785

    申请日:2016-06-30

    Abstract: The present invention is to provide a semiconductor device in which an insulating material layer contains no reinforced fibers such as a glass cloth or a nonwoven cloth and which enables miniaturization of metal thin-film wiring layers, a reduction in the diameter of metal vias, and a reduction in interlayer thickness. The semiconductor device includes an insulating material layer including one or more semiconductor elements sealed with an insulating material containing no reinforced fibers, a plurality of metal thin-film wiring layers, metal vias that electrically connect the metal thin-film wiring layers together and electrodes of the semiconductor elements and the metal thin-film wiring layers together, and a warpage adjustment layer arranged on one principal surface of the insulating material layer to offset warpage of the insulating material layer to reduce warpage of the semiconductor device.

    Abstract translation: 本发明提供一种半导体器件,其中绝缘材料层不包含玻璃布或无纺布等增强纤维,并且能够使金属薄膜布线层小型化,金属通孔的直径减小, 层间厚度减小。 半导体器件包括绝缘材料层,其包括用不含增强纤维的绝缘材料密封的一个或多个半导体元件,多个金属薄膜布线层,将金属薄膜布线层电连接在一起的金属通孔和电极 半导体元件和金属薄膜布线层在一起,以及布置在绝缘材料层的一个主表面上的翘曲调节层,以抵消绝缘材料层的翘曲,以减少半导体器件的翘曲。

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