Semiconductor light detection element

    公开(公告)号:US11664405B2

    公开(公告)日:2023-05-30

    申请号:US17499135

    申请日:2021-10-12

    CPC classification number: H01L27/14887 H01L27/1462 H01L27/14623

    Abstract: Provided a semiconductor light detection element including: a semiconductor portion having a front surface including a light reception region that receives incident light and photoelectrically converting the incident light incident on the light reception region; a metal portion provided on the front surface; and a carbon nanotube film provided on the light reception region and formed by depositing a plurality of carbon nanotubes. The carbon nanotube film extends over an upper surface of the metal portion from an upper surface of the light reception region.

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