MICROPHONE AND METHOD OF MANUFACTURING THE SAME
    41.
    发明申请
    MICROPHONE AND METHOD OF MANUFACTURING THE SAME 有权
    麦克风及其制造方法

    公开(公告)号:US20160150326A1

    公开(公告)日:2016-05-26

    申请号:US14852574

    申请日:2015-09-13

    Abstract: A microphone and a method of manufacturing the microphone are provided. The method includes; preparing a substrate and forming a vibrating membrane having an oxide film and a plurality of slots onto the substrate. A sacrificial layer and a fixed membrane is formed over the vibrating membrane and air intake apertures are formed through the fixed membrane. A first pad is connected to the fixed membrane, a second pad is connected to the vibrating membrane, and a phase delay unit is bonded to the bonding pad. A penetration aperture may be formed by etching the rear side of the substrate and bonding the phase delay unit on the bonding pad. A sound passage, is formed by connecting passage patterns, and sound apertures with the sound passages by sequentially stacking phase delay layers on the bonding pad and simultaneously forming the passage patterns in the phase delay layers.

    Abstract translation: 提供麦克风和制造麦克风的方法。 该方法包括: 制备基板并在基板上形成具有氧化膜和多个狭缝的振动膜。 在振动膜上形成牺牲层和固定膜,并且通过固定膜形成进气口。 第一焊盘连接到固定膜,第二焊盘连接到振动膜,并且相位延迟单元结合到焊盘。 可以通过蚀刻衬底的后侧并将相位延迟单元接合在焊盘上来形成穿透孔。 通过在接合焊盘上顺序堆叠相位延迟层并同时形成相位延迟层中的通道图案,通过连接通道图案和声音孔与声音通道形成声音通道。

    MICRO PHONE SENSOR
    42.
    发明申请
    MICRO PHONE SENSOR 有权
    微电话传感器

    公开(公告)号:US20160142828A1

    公开(公告)日:2016-05-19

    申请号:US14847776

    申请日:2015-09-08

    CPC classification number: H04R17/02 H04R2201/003 H04R2410/03

    Abstract: A microphone, that increases sensitivity without a separate circuit is provided. The microphone includes an audio detection module having a vibration film that outputs capacitance signals by vibrating audio introduced from the exterior and a piezoresistive element that outputs a piezoresistive signal by a sound pressure of the audio. A semiconductor chip includes an amplifier electrically connected to the audio detection module to receive a capacitance signal and a piezoresistive signal from the audio detection module and amplifies the capacitance signal and piezoresistive signal to an electrical signal. The amplifier includes an input terminal that receives an input of the capacitance signal; a first resistor connected to the input terminal and the piezoresistive element; an output terminal that amplifies and outputs the capacitance signal and piezoresistive signal to an electrical signal; and a second resistor connected to the input terminal and the output terminal and connected to the piezoresistive element.

    Abstract translation: 提供了一种麦克风,无需单独的电路即可提高灵敏度。 麦克风包括具有振动膜的音频检测模块,该振动膜通过从外部引入的振动音频输出电容信号,以及通过音频的声压输出压阻信号的压阻元件。 半导体芯片包括电连接到音频检测模块的放大器,以从音频检测模块接收电容信号和压阻信号,并将电容信号和压阻信号放大到电信号。 放大器包括接收电容信号的输入的输入端; 连接到输入端子和压阻元件的第一电阻器; 输出端子,其将电容信号和压阻信号放大并输出到电信号; 以及连接到输入端子和输出端子并连接到压阻元件的第二电阻器。

    MICROPHONE AND METHOD OF MANUFACTURING THE SAME
    43.
    发明申请
    MICROPHONE AND METHOD OF MANUFACTURING THE SAME 审中-公开
    麦克风及其制造方法

    公开(公告)号:US20160112801A1

    公开(公告)日:2016-04-21

    申请号:US14852572

    申请日:2015-09-13

    Inventor: Ilseon Yoo

    Abstract: A microphone and a method of manufacturing thereof are provided. The microphon includes a substrate that includes a penetration aperture, a vibration membrane disposed over the substrate and covering the penetration aperture, and a fixed electrode disposed over the vibration membrane, separated from the vibration membrane, and including a plurality of air inlets. The vibration membrane includes a first sub-vibration membrane disposed over the substrate and covering the penetration aperture and includes a plurality of first slots and a second sub-vibration membrane disposed over the first sub-vibration membrane, connected to the first sub-vibration membrane, and including a connection unit and a plurality of second slots. The first sub-vibration membrane is flexible, and the second sub-vibration membrane is rigid.

    Abstract translation: 提供麦克风及其制造方法。 麦克风包括一个包括穿透孔的基底,设置在基底上并覆盖穿透孔的振动膜,以及设置在振动膜上方的与振膜隔开的固定电极,并且包括多个空气入口。 所述振动膜包括设置在所述基板上并覆盖所述贯通孔的第一副振动膜,并且包括多个第一狭槽和设置在所述第一子振动膜上的第二子振动膜,所述第二子振动膜连接到所述第一子振动膜 并且包括连接单元和多个第二槽。 第一子振膜是柔性的,第二子振膜是刚性的。

    Microphone and manufacturing method thereof

    公开(公告)号:US10887714B2

    公开(公告)日:2021-01-05

    申请号:US16116231

    申请日:2018-08-29

    Inventor: Ilseon Yoo

    Abstract: A manufacturing method for a microphone is provided. The microphone includes a case that is vibrated by a vibration signal. A sound inlet through which a sound signal is input is formed at a portion of the case and a first sound element is formed in the case at a position corresponding to the sound inlet. The first sound element receives the sound signal and the vibration signal to output a first initial signal. A second sound element is formed to be adjacent to the first sound element and receives the vibration signal to output a second initial signal. A semiconductor chip is connected to the first sound element and the second sound element and receives the first initial signal and the second initial signal to output a final signal.

    Microphone and manufacturing method thereof

    公开(公告)号:US10327077B2

    公开(公告)日:2019-06-18

    申请号:US15657925

    申请日:2017-07-24

    Inventor: Ilseon Yoo

    Abstract: A microphone includes: a substrate configured to have a through hole formed at a central portion thereof; a vibration membrane disposed to cover the through hole on the substrate to include a slit pattern in which slit patterns are arranged in a plurality of lines along a circular edge thereof; a fixed membrane separately mounted at an upper portion of the vibration membrane with an air layer therebetween to have a plurality of air inlets that extend therebetween in a direction of the air layer; and a support layer configured to support the fixed membrane separately mounted on the vibration membrane.

    MICROPHONE DEVICE
    47.
    发明申请
    MICROPHONE DEVICE 审中-公开

    公开(公告)号:US20190082261A1

    公开(公告)日:2019-03-14

    申请号:US15821333

    申请日:2017-11-22

    Inventor: Ilseon Yoo

    Abstract: A microphone apparatus is disclosed. A microphone apparatus according to an exemplary embodiment includes a vibration membrane disposed inside a case and formed on an upper surface of a main substrate; an acoustic component including an absorbing unit cut over a predetermined section toward the outside of a fixed membrane and having a predetermined pattern; a microphone module including a semiconductor chip electrically connected to the acoustic component inside the case; and a printed circuit board on which the microphone module is mounted.

    MICROPHONE AND MANUFACTURING METHOD THEREOF
    48.
    发明申请

    公开(公告)号:US20190020961A1

    公开(公告)日:2019-01-17

    申请号:US16116231

    申请日:2018-08-29

    Inventor: Ilseon Yoo

    Abstract: A microphone includes: a case that is vibrated by a vibration signal, a sound inlet through which a sound signal is input being formed at a portion of the case; a first sound element that is formed in the case at a position corresponding to the sound inlet and receives the sound signal and the vibration signal to output a first initial signal; a second sound element that is formed to be adjacent to the first sound element and receives the vibration signal to output a second initial signal; and a semiconductor chip that is connected to the first sound element and the second sound element and receives the first initial signal and the second initial signal to output a final signal.

    Microphone and manufacturing method thereof

    公开(公告)号:US10149066B2

    公开(公告)日:2018-12-04

    申请号:US15364728

    申请日:2016-11-30

    Inventor: Ilseon Yoo

    Abstract: Disclosed are a microphone and a manufacturing method thereof. The microphone includes a substrate with a through portion formed in a central portion thereof, a vibration membrane disposed on the substrate and covering the through portion, a fixed membrane installed above the vibration membrane and spaced apart from the vibration membrane with an air layer interposed therebetween, and including a plurality of air inlets perforated in a direction toward the air layer, a support layer supporting the fixed membrane installed above the vibration membrane and spaced apart from the vibration membrane, a back plate formed on the fixed membrane and the support layer and having the air inlet formed to extend in a central portion thereof, and an air outflow part allowing air of the air layer to flow to an outer area of an edge of a sensing area of the fixed membrane on the back plate.

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