RESONATOR, METHOD FOR MANUFACTURING FILTER BY USING RESONATOR AND FILTER MANUFACTURED BY THE SAME METHOD
    43.
    发明申请
    RESONATOR, METHOD FOR MANUFACTURING FILTER BY USING RESONATOR AND FILTER MANUFACTURED BY THE SAME METHOD 审中-公开
    谐振器,使用谐振器制造滤波器的方法和使用同一方法制造的滤波器

    公开(公告)号:US20090091405A1

    公开(公告)日:2009-04-09

    申请号:US12257333

    申请日:2008-10-23

    CPC classification number: H01P7/04 H01P1/202 Y10T29/49016

    Abstract: There are provided a resonator for use in a filter, which interprets and reduces intermodulation distortion by analyzing characteristics of current density occurring at resonance and linear and nonlinear characteristics of the filter, a method for manufacturing filters by using the resonator and a filter manufactured by the method. The resonator has a ratio of an inside diameter to an outside diameter belonging to a range which is larger than about 1:3 and smaller than or equal to about 1:3.75 and its length (H) is about λ/4, wherein λ is a wavelength of a plane wave provided to the resonator. By employing the method, it is possible to effectively design the filters through the use of a circuitry and structural approach with breaking from a conventional approach depending on local and minute processing steps when manufacturing the filters.

    Abstract translation: 提供了一种用于滤波器的谐振器,其通过分析谐振发生的电流密度的特性和滤波器的线性和非线性特性来解释和减少互调失真,通过使用谐振器制造滤波器的方法和由 方法。 谐振器的内径与外径之比大于1:3且小于或等于1:3.75,其长度(H)约为λ/ 4,其中λ为 提供给谐振器的平面波的波长。 通过采用该方法,可以通过使用电路和结构方法来有效地设计滤波器,这取决于制造滤波器时的局部和微小的处理步骤,从常规方法断开。

    Two-dimensional Planar photonic crystal superprism device and method of manufacturing the same
    44.
    发明申请
    Two-dimensional Planar photonic crystal superprism device and method of manufacturing the same 有权
    二维平面光子晶体超导装置及其制造方法

    公开(公告)号:US20080112669A1

    公开(公告)日:2008-05-15

    申请号:US11974635

    申请日:2007-10-15

    CPC classification number: G02B6/1225 B82Y20/00 G02B6/1221

    Abstract: Provided are a two-dimensional planar photonic crystal superprism device and a method of manufacturing the same, in which a manufacturing process is simplified using a nanoimprint lithography technique, and thus price-reduction and mass production are facilitated. The two-dimensional planar photonic crystal superprism device includes: a single-mode input waveguide comprising a straight waveguide having a taper structure and a bending waveguide; a superprism formed on an output end side of the single-mode input waveguide and comprising a slab and a photonic crystal superprism; and a single-mode output waveguide comprising a straight waveguide having a taper structure and a bending waveguide, and formed adjacent to the photonic crystal superprism. Using the two-dimensional planar photonic crystal superprism device, it is possible to facilitate manufacturing of nano-photonic integrated circuits, photonic crystal integrated circuits and nano-photonic systems. In addition, a wavelength-selectable photonic crystal superprism device using high dispersion of photonic crystal, which is several hundred times the dispersion of conventional glass prism, can be manufactured using thermal/hot and ultraviolet nanoimprint lithography techniques corresponding to nano-manufacturing technology.

    Abstract translation: 提供了一种二维平面光子晶体超控装置及其制造方法,其中使用纳米压印光刻技术简化了制造工艺,因此有利于价格降低和批量生产。 二维平面光子晶体超导装置包括:单模输入波导,包括具有锥形结构的直波导管和弯曲波导; 形成在单模输入波导的输出端侧并且包括平板和光子晶体超控的超实例; 以及单模输出波导,其包括具有锥形结构的直波导管和弯曲波导,并且与光子晶体超立体相邻地形成。 使用二维平面光子晶体超微元器件,可以促进纳米光子集成电路,光子晶体集成电路和纳米光子系统的制造。 此外,使用对应于纳米制造技术的热/热和紫外线纳米压印光刻技术可以制造使用高分散度的光子晶体的波长可选择的光子晶体超大容量器件,其是常规玻璃棱镜的百分之几。

    OPTICAL WAVEGUIDE DEVICE
    45.
    发明申请
    OPTICAL WAVEGUIDE DEVICE 有权
    光波器件

    公开(公告)号:US20080080824A1

    公开(公告)日:2008-04-03

    申请号:US11857262

    申请日:2007-09-18

    CPC classification number: G02B6/1226 B82Y20/00

    Abstract: Provided is an optical waveguide device including: a core having a stacked structure of at least three layers in which first thin films having a finite width and thickness and formed of a material having a relatively high electric conductivity and a second thin film having the same width as the first thin films and formed of a material having a lower conductivity than the material forming the first thin films are stacked in sequence, the first thin films being disposed in a first layer and an uppermost layer and adjacent to each other for interaction of surface plasmons; and a clad disposed around the core and formed of a material having a lower conductivity than the material forming the first thin films and a higher refractive index than the material forming the second thin film. The thin metal films of at least two layers having a high electric conductivity in the optical waveguide device can generate a combined surface plasmon mode and propagate the generated surface plasmon mode in the length direction of the thin metal films. Thus, a propagated signal suffers from a smaller propagation loss than a surface plasmon mode supported by a single thin film.

    Abstract translation: 本发明提供一种光波导装置,其特征在于,包括:具有层叠结构的至少3层的芯,其中具有有限宽度和厚度的第一薄膜由具有较高导电性的材料形成,并且具有相同宽度的第二薄膜 因为第一薄膜并且由具有比形成第一薄膜的材料的导电性低的材料形成的材料依次层叠,所以第一薄膜被布置在第一层和最上层中并且彼此相邻以相互作用 等离子体激元 以及围绕芯部设置的包层,其由比形成第一薄膜的材料低的导电性材料形成,并且比形成第二薄膜的材料具有更高的折射率。 在光波导器件中具有高电导率的至少两层的金属薄膜可以产生组合的表面等离子体激元模式,并且在薄金属薄膜的长度方向上传播产生的表面等离子体激元模式。 因此,传播信号比由单个薄膜支持的表面等离子体模式传播损耗更小。

    OPTO-ELECTRONIC CONNECTOR MODULE AND OPTO-ELECTRONIC COMMUNICATION MODULE HAVING THE SAME
    46.
    发明申请
    OPTO-ELECTRONIC CONNECTOR MODULE AND OPTO-ELECTRONIC COMMUNICATION MODULE HAVING THE SAME 有权
    OPTO-ELECTRONIC连接器模块和OPEN-ELECTRONIC通信模块

    公开(公告)号:US20080080807A1

    公开(公告)日:2008-04-03

    申请号:US11837891

    申请日:2007-08-13

    CPC classification number: G02B6/43 G02B6/3817 G02B6/423 G02B6/4292

    Abstract: An opto-electronic connector module includes an optical waveguide portion including an optical waveguide in which an optical signal is transmitted, and a connector portion coupled to the optical waveguide portion, fixing the optical waveguide portion on a PCB on which a semiconductor chip portion having an opto-electronic device and a semiconductor chip is surface-mounted, and having a first coupling portion having a convex or concave structure formed in a lower portion thereof. The first coupling portion of the connector portion is coupled to a second coupling portion having a concave or convex structure formed on an upper surface of the PCB.

    Abstract translation: 光电连接器模块包括光波导部分,该光波导部分包括其中传输光信号的光波导,以及耦合到光波导部分的连接器部分,将光波导部分固定在其上具有 光电器件和半导体芯片是表面安装的,并且具有形成在其下部的具有凸形或凹形结构的第一联接部分。 连接器部分的第一耦合部分耦合到具有形成在PCB的上表面上的凹或凸结构的第二耦合部分。

    Optical coupling device and method for fabricating the same, and master used in fabricating optical coupling device and method for fabricating the same
    47.
    发明授权
    Optical coupling device and method for fabricating the same, and master used in fabricating optical coupling device and method for fabricating the same 失效
    光耦合器件及其制造方法,以及用于制造光耦合器件的母机及其制造方法

    公开(公告)号:US07167617B2

    公开(公告)日:2007-01-23

    申请号:US10984796

    申请日:2004-11-10

    CPC classification number: G02B6/3636 G02B6/30 G02B6/3652 G02B6/3688 G02B6/3696

    Abstract: An integrated type optical coupling device capable of easily accurately performing an optical arrangement between a narrow-pitch multi-channel optical waveguide and an optical fiber array and a master used in fabricating the same are provided. By forming a fixing projection between the optical fibers, the dynamic stability of the optical fiber array is increased and the optical arrangement between the optical waveguide and the optical fiber is easily accurately performed by hand. Accordingly, the cost required for the alignment is reduced and the alignment error due to the rolling of the optical fiber is not generated. In addition, the multi-step metal master is fabricated by using a photoresist film for X-ray exposure, and the narrow-pitch multi-channel optical coupling device is fabricated in a hot embossing method using the same, thereby the high-integrated device can be fabricated at a low price.

    Abstract translation: 提供了一种能够容易地精确地执行窄间距多通道光波导和光纤阵列之间的光学布置的集成型光耦合器件和用于制造它的母盘。 通过在光纤之间形成固定突起,增加了光纤阵列的动态稳定性,并且手动地容易地精确地执行光波导与光纤之间的光学配置。 因此,对准所需的成本降低,并且不产生由于光纤的滚动引起的对准误差。 此外,通过使用用于X射线曝光的光致抗蚀剂膜来制造多级金属母版,并且使用该方法使用热压花法制造窄间距多通道光耦合器件,从而将高集成器件 可以以低价制造。

    Optical head of an optical disc recording/reproducing apparatus having a
polygonal prism
    48.
    发明授权
    Optical head of an optical disc recording/reproducing apparatus having a polygonal prism 失效
    具有多边形棱镜的光盘记录/再现装置的光头

    公开(公告)号:US5748581A

    公开(公告)日:1998-05-05

    申请号:US602056

    申请日:1996-02-15

    Applicant: Jin Tae Kim

    Inventor: Jin Tae Kim

    Abstract: Disclose is a optical head having reduced elements and a simplified construction, thereby having a reduced size. In the optical head, the transmitting path of the optical beam is shortened and energy loss of the optical head is reduced. The optical head has a polygonal prism having a first and a second reflecting surfaces. The laser beam radiated from a laser source is reflected by the first reflecting surface and focused on an optical disc, and an information laser beam reflected by the optical disc is transmitted through or reflected by the first and the second reflecting surfaces, and then is incident upon the first and the second light-receiving regions of a single light-receiving element. The optical head records and reproduces information on and from the optical disc and performs a focusing servo and a tracking servo of the objective lens by utilizing data of the reflected information beam received by the first and the second light-receiving regions.

    Abstract translation: Disclose是具有减少的元件和简化结构的光学头,由此具有减小的尺寸。 在光头中,光束的传输路径被缩短,光头的能量损失减小。 光学头具有具有第一反射面和第二反射面的多棱镜。 从激光源照射的激光束被第一反射面反射并聚焦在光盘上,由光盘反射的信息激光束被透过第一和第二反射面反射,然后入射 在单个光接收元件的第一和第二光接收区域上。 光头在光盘上记录和再现信息,并通过利用由第一和第二光接收区域接收的反射信息光束的数据来执行物镜的聚焦伺服和跟踪伺服。

    Wafer cleaning apparatus and wafer cleaning method using the same
    50.
    发明授权
    Wafer cleaning apparatus and wafer cleaning method using the same 有权
    晶圆清洗装置及使用其的晶圆清洗方法

    公开(公告)号:US09240335B2

    公开(公告)日:2016-01-19

    申请号:US13383201

    申请日:2009-12-03

    CPC classification number: H01L21/02052 B08B3/08 H01L21/67017

    Abstract: The object of the present invention is to provide a wafer cleaning apparatus that reduces the amount of dissolved oxygen, without using hydrogen peroxide, to be able to reduce the deformation, etc. of a wafer and to reduce silicon consumption and a wafer cleaning method using the same.The present invention provides a wafer cleaning apparatus comprising: a first thin film contactor that receives drug solution for removing an oxide film or ultra pure water to separate and discharge gas dissolved in the drug solution for removing the oxide film or the ultra pure water; a second thin film contactor that receives the drug solution for removing the oxide film or the ultra pure water discharged from the first thin film contactor; a vacuum pump that discharges gas separated in the first and second thin film contactors to the outside; and a process vessel that stores the drug solution for removing the oxide film or the ultra pure water discharged from the second thin film contactor, and a wafer cleaning method using the same.

    Abstract translation: 本发明的目的是提供一种在不使用过氧化氢的情况下减少溶解氧量能够减少晶片的变形等并减少硅消耗的晶圆清洗装置以及使用 一样。 本发明提供了一种晶片清洗装置,包括:第一薄膜接触器,其接收用于去除氧化膜或超纯水的药物溶液,以分离和排出溶解在药物溶液中的气体,以除去氧化膜或超纯水; 接收用于除去从第一薄膜接触器排出的氧化膜或超纯水的药液的第二薄膜接触器; 将在第一和第二薄膜接触器分离的气体排出到外部的真空泵; 以及存储用于除去从第二薄膜接触器排出的氧化膜或超纯水的药液的处理容器,以及使用其的晶片清洗方法。

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