公开(公告)号：US07473907B2

公开(公告)日：2009-01-06

申请号：US11091238

申请日：2005-03-28

Applicant: Wolfgang Singer ,  Martin Antoni ,  Johannes Wangler ,  Markus Weiss ,  Vadim Yevgenyevich Banine ,  Marcel Dierichs ,  Roel Moors ,  Karl Heinz Schuster ,  Axel Scholz ,  Philipp Bosselmann ,  Bernd Warm

Inventor： Wolfgang Singer ,  Martin Antoni ,  Johannes Wangler ,  Markus Weiss ,  Vadim Yevgenyevich Banine ,  Marcel Dierichs ,  Roel Moors ,  Karl Heinz Schuster ,  Axel Scholz ,  Philipp Bosselmann ,  Bernd Warm

IPC: G01G1/00 ,  G01J1/42

CPC classification number: G03F7/7085 ,  G03F7/70141 ,  G03F7/70558

Abstract: There is provided an illumination system that includes (a) a light source that emits light having a wavelength ≦193 nm, where the light provides a predetermined illumination in a plane distant from the light source and defines a used area in the plane, and (b) a sensor, situated in or near the plane, for detecting light outside the used area.

Abstract translation: 提供了一种照明系统，其包括（a）发射波长<= 193nm的光的光源，其中所述光在远离光源的平面中提供预定照明并且在平面中限定使用区域，以及 （b）位于或靠近平面的传感器，用于检测使用区域外的光。

公开(公告)号：US20090002670A1

公开(公告)日：2009-01-01

申请号：US12221045

申请日：2008-07-30

Applicant: Frank Melzer ,  Markus Weiss ,  Guenther Dengel ,  Volker Stein

Inventor： Frank Melzer ,  Markus Weiss ,  Guenther Dengel ,  Volker Stein

IPC: G03B27/54

CPC classification number: G03F7/70825 ,  G02B7/005 ,  G02B7/1827 ,  G03F7/70258

Abstract: The invention relates to an apparatus for the manipulation and/or adjustment of an optical element with respect to a structure, the optical element being connected to the structure by means of a number of setting members, and the setting members having as active adjusting elements screw elements or piezoceramic elements, which in each case produce an active force along one degree of freedom and by means of which the optical element is connected to the structure in such a way that it can be set in up to six degrees of freedom.

Abstract translation: 本发明涉及一种用于相对于结构操作和/或调节光学元件的装置，所述光学元件借助于多个固定构件连接到所述结构，并且所述固定构件具有作为主动调节元件的螺钉 元件或压电陶瓷元件，其在每种情况下沿着一个自由度产生主动力，并且通过该元件或光学元件将光学元件连接到结构，使得其可以被设置为高达六个自由度。

公开(公告)号：US07460212B2

公开(公告)日：2008-12-02

申请号：US11825078

申请日：2007-07-03

Applicant: Wolfgang Singer ,  Wilhelm Egle ,  Markus Weiss ,  Joachim Hainz ,  Jochen Wietzorrek ,  Frank Melzer ,  Johannes Wangler

Inventor： Wolfgang Singer ,  Wilhelm Egle ,  Markus Weiss ,  Joachim Hainz ,  Jochen Wietzorrek ,  Frank Melzer ,  Johannes Wangler

IPC: G21K1/06

CPC classification number: G21K1/06 ,  B82Y10/00 ,  G02B5/09 ,  G02B17/006 ,  G02B19/0014 ,  G02B19/0019 ,  G02B19/0023 ,  G02B19/0047 ,  G02B19/0095 ,  G03F7/70108 ,  G03F7/70158 ,  G03F7/70166 ,  G03F7/70175 ,  G03F7/702 ,  G03F7/70233 ,  G03F7/70825 ,  G21K2201/065 ,  G21K2201/067

Abstract: There is provided a collector. The collector includes a first mirror shell positioned inside a second mirror shell that has a chamfered end.

公开(公告)号：US20070242799A1

公开(公告)日：2007-10-18

申请号：US11820375

申请日：2007-06-19

Applicant: Markus Weiss ,  Wolfgang Singer ,  Bernd Kleemann

Inventor： Markus Weiss ,  Wolfgang Singer ,  Bernd Kleemann

IPC: G02B5/08

CPC classification number: G03F7/70233 ,  B82Y10/00 ,  G02B5/09 ,  G02B19/0023 ,  G02B19/0047 ,  G02B19/0095 ,  G03F7/70083 ,  G03F7/70158 ,  G03F7/702 ,  G03F7/70575 ,  G21K1/06

Abstract: There is provided an illumination system. The illumination system includes (a) a mirror, (b) a diaphragm in a light path downstream of the mirror, and (c) a field plane in the light path, downstream of the diaphragm.

Abstract translation: 提供照明系统。 照明系统包括（a）反射镜，（b）在反射镜下游的光路中的光阑，以及（c）光通路中的在光阑下游的场平面。

公开(公告)号：US07248667B2

公开(公告)日：2007-07-24

申请号：US09961819

申请日：2001-09-24

Applicant: Markus Weiss ,  Wolfgang Singer ,  Bernd Kleemann

Inventor： Markus Weiss ,  Wolfgang Singer ,  Bernd Kleemann

IPC: G21K5/04 ,  G21K1/06 ,  G02B27/44

CPC classification number: G03F7/70233 ,  B82Y10/00 ,  G02B5/09 ,  G02B19/0023 ,  G02B19/0047 ,  G02B19/0095 ,  G03F7/70083 ,  G03F7/70158 ,  G03F7/702 ,  G03F7/70575 ,  G21K1/06

Abstract: An illumination system, particularly for wavelengths ≦100 nm, with an object plane and a field plane, comprises a grating element and a physical diaphragm in a diaphragm plane, which is arranged downstream to the grating element in the beam path from the object plane to the field plane.

Abstract translation: 特别是对于具有物平面和场平面的波长<= 100nm的照明系统，包括光阑元件和光阑面中的物理光阑，该光栅元件和物镜在物镜平面的光束路径中布置在光栅元件的下游 到现场飞机。

公开(公告)号：US20070114466A1

公开(公告)日：2007-05-24

申请号：US11439854

申请日：2006-05-24

Applicant: Marco Wedowski ,  Markus Weiss ,  Stephan Mullender ,  Johann Trenkler ,  Hartmut Enkisch ,  Gisela Sipos ,  H.A. van Mierlo ,  Michiel Nijkerk ,  Fokko Wieringa ,  Nadyeh Shariloo

Inventor： Marco Wedowski ,  Markus Weiss ,  Stephan Mullender ,  Johann Trenkler ,  Hartmut Enkisch ,  Gisela Sipos ,  H.A. van Mierlo ,  Michiel Nijkerk ,  Fokko Wieringa ,  Nadyeh Shariloo

IPC: G01J3/10

CPC classification number: G03F7/70958 ,  B82Y10/00 ,  G03F7/70175 ,  G03F7/70316 ,  G03F7/70916 ,  G21K1/00 ,  G21K1/062 ,  G21K2201/067

Abstract: An optical element, especially a normal-incidence collector mirror, for radiation in the EUV and/or soft X-ray region of wavelengths is described. The element has a substrate, a multilayer coating with an optically active region, and a capacitor, having a first and a second capacitor electrode. At least one layer of the multilayer coating serves as the first capacitor electrode. At least one dielectric layer is provided between the two capacitor electrodes. Also described is an optical system with at least one optical element, having a first electrode arranged in the vicinity of the optical element.

Abstract translation: 描述了用于EUV和/或波长的软X射线区域中的辐射的光学元件，特别是法向入射收集镜。 元件具有基板，具有光学活性区域的多层涂层和具有第一和第二电容器电极的电容器。 多层涂层的至少一层用作第一电容器电极。 在两个电容器电极之间提供至少一个电介质层。 还描述了具有至少一个光学元件的光学系统，其具有布置在光学元件附近的第一电极。

公开(公告)号：US20060144646A1

公开(公告)日：2006-07-06

申请号：US11287775

申请日：2005-11-28

Applicant: Werner Engel ,  Markus Weiss

Inventor： Werner Engel ,  Markus Weiss

IPC: B66B3/00 ,  B66B1/34

CPC classification number: B66B5/0087 ,  B66B25/006

Abstract: A method and a device for maintenance of an elevator or escalator installation includes an interface for connection of a controller of the installation with a display and control unit for display of operating parameters or for input of control commands and data, and connection equipment for creating a data connection with a maintenance center. Data and parameters stored in the maintenance center can be transferred to the display and control unit by the data connection after an identification check. A fault log with component designations, which is transferred by the data connection from the display and control unit to the maintenance center, can be produced in dependence on a comparison between operating parameters and transferred data and parameters.

Abstract translation: 用于维护电梯或自动扶梯安装的方法和设备包括用于连接设备的控制器与显示器和控制单元的接口，用于显示操作参数或用于输入控制命令和数据，以及连接设备，用于创建 与维护中心的数据连接。 存储在维护中心的数据和参数可以在识别检查后通过数据连接传输到显示和控制单元。 可以根据操作参数和传输的数据和参数之间的比较，生成通过数据连接从显示和控制单元传输到维护中心的故障日志。

公开(公告)号：US20060097202A1

公开(公告)日：2006-05-11

申请号：US11243403

申请日：2005-10-04

Applicant: Wolfgang Singer ,  Wilhelm Egle ,  Markus Weiss ,  Joachim Hainz ,  Jochen Wietzorrek ,  Frank Melzer ,  Johannes Wangler

Inventor： Wolfgang Singer ,  Wilhelm Egle ,  Markus Weiss ,  Joachim Hainz ,  Jochen Wietzorrek ,  Frank Melzer ,  Johannes Wangler

IPC: G01J3/10

CPC classification number: G21K1/06 ,  B82Y10/00 ,  G02B5/09 ,  G02B17/006 ,  G02B19/0014 ,  G02B19/0019 ,  G02B19/0023 ,  G02B19/0047 ,  G02B19/0095 ,  G03F7/70108 ,  G03F7/70158 ,  G03F7/70166 ,  G03F7/70175 ,  G03F7/702 ,  G03F7/70233 ,  G03F7/70825 ,  G21K2201/065 ,  G21K2201/067

Abstract: There is provided a collector for illumination systems for light having a wavelength ≦193 nm comprising. The collector includes (a) a first mirror shell adjacent to, and positioned inside of, a second mirror shell around a common axis of rotation, in which the first and second mirror shells are rotationally symmetric, and (b) a component in a region between the first and second mirror shells. The collector is for receiving the light from a light source via an object-side aperture and for illuminating an area in an image-side plane, and the region is not used by the light.

Abstract translation: 提供了一种用于具有波长<= 193nm的光的照明系统的收集器。 收集器包括（a）第一反射镜壳体，其围绕公共旋转轴线邻近第二反射镜壳体并位于其内部，其中第一和第二反射镜壳体旋转对称，以及（b）区域中的部件 在第一和第二镜壳之间。 收集器用于经由物体侧孔口接收来自光源的光并且用于照射图像侧平面中的区域，并且该区域不被光使用。

公开(公告)号：US07015489B2

公开(公告)日：2006-03-21

申请号：US10625254

申请日：2003-07-23

Applicant: Wolfgang Singer ,  Wilhelm Egle ,  Markus Weiss ,  Joachim Hainz ,  Jochen Wietzorrek ,  Frank Melzer ,  Johannes Wangler

Inventor： Wolfgang Singer ,  Wilhelm Egle ,  Markus Weiss ,  Joachim Hainz ,  Jochen Wietzorrek ,  Frank Melzer ,  Johannes Wangler

IPC: G01G1/00

CPC classification number: G21K1/06 ,  B82Y10/00 ,  G02B5/09 ,  G02B17/006 ,  G02B19/0014 ,  G02B19/0019 ,  G02B19/0023 ,  G02B19/0047 ,  G02B19/0095 ,  G03F7/70108 ,  G03F7/70158 ,  G03F7/70166 ,  G03F7/70175 ,  G03F7/702 ,  G03F7/70233 ,  G03F7/70825 ,  G21K2201/065 ,  G21K2201/067

Abstract: There is provided a collector for illumination systems for light having a wavelength ≦193 nm comprising. The collector includes (a) a first mirror shell adjacent to, and positioned inside of, a second mirror shell around a common axis of rotation, in which the first and second mirror shells are rotationally symmetric, and (b) a component in a region between the first and second mirror shells. The collector is for receiving the light from a light source via an object-side aperture and for illuminating an area in an image-side plane, and the region is not used by the light.

Abstract translation: 提供了一种用于具有波长<= 193nm的光的照明系统的收集器。 收集器包括（a）第一反射镜壳体，其围绕公共旋转轴线邻近第二反射镜壳体并位于其内部，其中第一和第二反射镜壳体旋转对称，以及（b）区域中的部件 在第一和第二镜壳之间。 收集器用于经由物体侧孔口接收来自光源的光并且用于照射图像侧平面中的区域，并且该区域不被光使用。

公开(公告)号：US20060001854A1

公开(公告)日：2006-01-05

申请号：US11065327

申请日：2005-02-24

Applicant: Wolfgang Singer ,  Joachim Hainz ,  Joachim Wietzorrek ,  Markus Weiss

Inventor： Wolfgang Singer ,  Joachim Hainz ,  Joachim Wietzorrek ,  Markus Weiss

IPC: G03B27/54

CPC classification number: G02B27/0006 ,  G02B17/0657 ,  G03F7/702 ,  G03F7/70233 ,  G03F7/70825 ,  G03F7/70925 ,  G03F7/70975

Abstract: There is provided an optical system including an optical element having a first used area and a second used area on which impinge rays of a light bundle, and a device for moving the optical element between a first position and a second position. The light bundle impinges on the first used area when the optical element is in the first position, and light bundle impinges on the second used area when the optical element is in the second position.

Abstract translation: 提供了一种光学系统，其包括具有第一使用区域的光学元件和光束的入射光线的第二使用区域，以及用于在第一位置和第二位置之间移动光学元件的装置。 当光学元件处于第一位置时，光束照射在第一使用区域上，并且当光学元件处于第二位置时，光束照射在第二使用区域上。