Micro Heater and Micro Sensor
    42.
    发明申请
    Micro Heater and Micro Sensor 审中-公开
    微加热器和微型传感器

    公开(公告)号:US20170067842A1

    公开(公告)日:2017-03-09

    申请号:US15247530

    申请日:2016-08-25

    Abstract: The present invention relates to a micro heater and a micro sensor wherein an anti-etching dam is formed on the first supporting portion, and thus, the first supporting portion maintains its initial shape thereby so that the heat capacity of the first supporting portion becomes small, and temperature uniformity thereof is enhanced.

    Abstract translation: 微加热器和微型传感器技术领域本发明涉及一种微加热器和微型传感器,其中在第一支撑部分上形成有抗蚀刻凹槽,因此第一支撑部分保持其初始形状,使得第一支撑部分的热容变小 ,并且其温度均匀性增强。

    Probe card
    44.
    发明授权

    公开(公告)号:US12270828B2

    公开(公告)日:2025-04-08

    申请号:US17919742

    申请日:2021-04-20

    Abstract: Proposed is a probe card. The probe card according to the present disclosure includes: a circuit board; a probe head having a guide plate, and through which a plurality of probes pass; and a connection member electrically connecting the circuit board and the probes to each other, wherein an insulating part of the connection member and the guide plate are made of an anodic aluminum oxide film formed by anodizing a metal as a base material.

    Probe card for testing a pattern formed on a wafer

    公开(公告)号:US11619655B2

    公开(公告)日:2023-04-04

    申请号:US17029979

    申请日:2020-09-23

    Abstract: A probe card is configured to perform a circuit test on a wafer to realize a reduction in size and pitch of probe insertion holes. The probe card includes a first plate, a second plate coupled to a lower portion of the first plate, an upper guide plate provided on an upper surface of the first plate, a lower guide plate provided on a lower surface of the second plate, and a reinforcing plate coupled to at least a surface of each of the upper and lower guide plates. At least one of the upper and lower guide plates is made of an anodic oxide film material, and as viewed from above, the upper and lower guide plates and the reinforcing plate are configured to have smaller areas than the first and second plates, so that upper and lower surfaces of the first and second plates are exposed.

    Probe head and probe card having same

    公开(公告)号:US11543432B2

    公开(公告)日:2023-01-03

    申请号:US17211812

    申请日:2021-03-24

    Abstract: Proposed are a probe head and a probe card having the same. The probe head includes: an upper guide plate having an upper guide hole; a lower guide plate having a lower guide hole; an intermediate guide plate having an intermediate guide hole, and provided between the upper guide plate and the lower guide plate; and a guide member provided at a side of the intermediate guide plate, wherein the intermediate guide plate is limited in movement by the guide member.

    Micro LED transfer head
    49.
    发明授权

    公开(公告)号:US11342207B2

    公开(公告)日:2022-05-24

    申请号:US16989431

    申请日:2020-08-10

    Abstract: A micro LED transfer head is proposed. The micro LED transfer head includes: a holding member including a holding region that holds a micro LED by means of vacuum holding force and a non-holding region that does not hold the micro LED; and a porous member provided on top of the holding member and having arbitrary pores, wherein the holding region includes: a first holding region; and a second holding region provided above the first holding region, formed to have a larger opening area than the first holding region, and communicating with the first holding region and the porous member, whereby the micro LED transfer head selectively transfers the micro LED.

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