公开(公告)号：US11385406B2

公开(公告)日：2022-07-12

申请号：US16667833

申请日：2019-10-29

Applicant: Waymo LLC

Inventor： James Dunphy ,  David Hutchison ,  Pierre-Yves Droz ,  Yeh-Jiun Tung

IPC: G02B6/125 ,  G01S7/481 ,  G02B6/122 ,  G02B6/42 ,  G01S17/10

Abstract: One example LIDAR device comprises a substrate and a waveguide disposed on the substrate. A first section of the waveguide extends lengthwise on the substrate in a first direction. A second section of the waveguide extends lengthwise on the substrate in a second direction different than the first direction. A third section of the waveguide extends lengthwise on the substrate in a third direction different than the second direction. The second section extends lengthwise between the first section and the second section. The LIDAR device also comprises a light emitter configured to emit light. The waveguide is configured to guide the light inside the first section toward the second section, inside the second section toward the third section, and inside the third section away from the second section.

公开(公告)号：US20220082660A1

公开(公告)日：2022-03-17

申请号：US17121918

申请日：2020-12-15

Applicant: Waymo LLC

Inventor： Pierre-Yves Droz ,  Ralph H. Shepard ,  Augusto Tazzoli ,  David Hutchison ,  David Schleuning ,  Nathaniel Golshan ,  Nathaniel Quillin ,  Andrew Abo ,  Caner Onal ,  Michael Tom ,  Robert Lockwood ,  Kelvin Kwong ,  Daiwei Li ,  Drew Ulrich ,  Simon Ellgas ,  Chandra Kakani ,  Erin Eppard ,  Samuel Lenius ,  Justin Andrade ,  James Dunphy

IPC: G01S7/484 ,  G01S7/481 ,  G01F23/00 ,  G01S17/931 ,  G01S17/89

Abstract: Example embodiments relate to light detection and ranging (lidar) devices having a light-guide manifold. An example lidar device includes a transmit subsystem. The transmit subsystem includes a light emitter. The transmit subsystem also includes a light-guide manifold optically coupled to the light emitter. Further, the transmit subsystem includes a telecentric lens assembly optically coupled to the light-guide manifold. The lidar device also includes a receive subsystem. The receive subsystem includes the telecentric lens assembly. The receive subsystem also includes an aperture plate having an aperture defined therein. The aperture plate is positioned at a focal plane of the telecentric lens assembly. Further, the receive subsystem includes a silicon photomultiplier (SiPM) positioned to receive light traveling through the aperture.

公开(公告)号：US20210397094A1

公开(公告)日：2021-12-23

申请号：US17464185

申请日：2021-09-01

Applicant: Waymo LLC

Inventor： James Dunphy ,  David Hutchison

IPC: G03F7/20 ,  G03F7/00 ,  G03F7/26

Abstract: Systems and methods described herein relate to the manufacture of optical elements and optical systems. An example system may include an optical component configured to direct light from a light source to illuminate a photoresist material at a desired angle and to expose at least a portion of an angled structure in the photoresist material, where the photoresist material overlays at least a portion of a top surface of a substrate. The optical component includes a container containing an light-coupling material that is selected based in part on the desired angle. The optical component also includes a mirror arranged to reflect at least a portion of the light to illuminate the photoresist material at the desired angle.

公开(公告)号：US11131934B2

公开(公告)日：2021-09-28

申请号：US16666952

申请日：2019-10-29

Applicant: Waymo LLC

Inventor： James Dunphy ,  David Hutchison

IPC: G03B27/72 ,  G03F7/20 ,  G02B6/42

Abstract: The present disclosure relates to systems and methods relating to the fabrication of light guide elements. An example system includes an optical component configured to direct light emitted by a light source to illuminate a photoresist material at one or more desired angles so as to expose an angled structure in the photoresist material. The photoresist material overlays at least a portion of a first surface of a substrate. The optical component includes a container containing a light-coupling material that is selected based in part on the one or more desired angles. The system also includes a reflective surface arranged to reflect at least a first portion of the emitted light to illuminate the photoresist material at the one or more desired angles.

公开(公告)号：US20210208506A1

公开(公告)日：2021-07-08

申请号：US17188562

申请日：2021-03-01

Applicant: Waymo LLC

Inventor： Bernard Fidric ,  Pierre-Yves Droz ,  David Hutchison

IPC: G03F7/26 ,  G03F9/00

Abstract: Systems and methods described herein relate to the manufacture of optical elements and optical systems. An example method includes overlaying a first mask on a photoresist material and a substrate, and causing a light source to illuminate the photoresist material through the first mask during a first exposure so as to define a first feature. During the first exposure, the light source is positioned at a non-normal angle with respect to a plane parallel to the substrate. The method includes developing the photoresist material so as to retain an elongate portion of the photoresist material on the substrate. A first end of the elongate portion includes an angled portion that is sloped at an angle with respect to a long axis of the elongate portion. The method also includes depositing a reflective material through a second mask onto the angled portion.

公开(公告)号：US20200081349A1

公开(公告)日：2020-03-12

申请号：US16684955

申请日：2019-11-15

Applicant: Waymo LLC

Inventor： Bernard Fidric ,  Pierre-yves Droz ,  David Hutchison

IPC: G03F7/26 ,  G02B6/12 ,  G03F7/20

Abstract: Systems and methods described herein relate to the manufacture of optical elements and optical systems. An example method includes overlaying a first mask on a photoresist material and a substrate, and causing a light source to illuminate the photoresist material through the first mask during a first exposure so as to define a first feature. During the first exposure, the light source is positioned at a non-normal angle with respect to a plane parallel to the substrate. The method includes developing the photoresist material so as to retain an elongate portion of the photoresist material on the substrate. A first end of the elongate portion includes an angled portion that is sloped at an angle with respect to a long axis of the elongate portion. The method also includes depositing a reflective material through a second mask onto the angled portion.