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    Apparatus for fluid delivery in chemical vapor deposition systems
    41.
    发明授权
    Apparatus for fluid delivery in chemical vapor deposition systems 失效
    用于化学气相沉积系统中流体输送的装置

    公开(公告)号：US5620524A

    公开(公告)日：1997-04-15

    申请号：US395613

    申请日：1995-02-27

    Applicant: Chiko Fan ,  Anthony Pearson ,  J. James Chen ,  James L. White, Jr.

    Inventor： Chiko Fan ,  Anthony Pearson ,  J. James Chen ,  James L. White, Jr.

    IPC: B01J4/00 ,  C23C16/448 ,  C23C16/00

    CPC classification number: B01J4/00 ,  C23C16/4481

    Abstract: Described herein is an apparatus and method for delivering fluid components for semiconductor processes such as chemical vapor deposition (CVD) and chemical etch processes. Any prescribed mixture of separate fluid reagents can be delivered with extreme accuracy and precision using the apparatus we describe here. The unique embodiment of a precision fluid pumping system utilizing internal pressure and temperature transducers, capacity volume and restrictive elements that comprise a continuous pulse-free system for use in CVD applications. This system has superior performance characteristics in the areas of: accuracy, precision, repeatability of the fluid mixture delivery and continuous repeatable delivery without intermittent pulsation. We describe a novel fluid pump whose design is integrated using a closed loop feedback system composed of temperature and pressure sensors. This allows the entire system to perform to in either an isobaric-isothermal mode or an isocratic-isothermal mode. The construction of this system is separated into three principle areas (Fluid Pump Hardware), (Fluid phase change hardware) and (Control algorithms), the complete embodiment constitutes a novel invention in the field of chemical delivery as pertaining to the fabrication of semiconductor devices.

    Abstract translation: 本文描述了用于传送用于诸如化学气相沉积（CVD）和化学蚀刻工艺的半导体工艺的流体部件的装置和方法。 使用我们在这里描述的设备，可以以极高的精确度和精确度传送任何规定的单独流体试剂的混合物。 使用内部压力和温度传感器的精密流体泵送系统的独特实施例，容量体积和包含用于CVD应用的连续无脉冲系统的限制元件。 该系统在精度，精度，流体混合物输送的重复性以及连续的可重复输送而无间歇脉动的领域具有卓越的性能特征。 我们描述了一种新型流体泵，其设计使用由温度和压力传感器组成的闭环反馈系统进行集成。 这允许整个系统以等压 - 等温模式或等度 - 等温模式进行。 该系统的结构分为三个主要领域（流体泵硬件），（流体相变硬件）和（控制算法），整个实施例构成了与半导体器件的制造有关的化学传输领域的新颖发明 。

    Modular plasma reactor with local atmosphere
    43.
    发明授权
    Modular plasma reactor with local atmosphere 失效
    具有局部气氛的模块式等离子体反应器

    公开(公告)号：US4539062A

    公开(公告)日：1985-09-03

    申请号：US588853

    申请日：1984-03-12

    Applicant: John P. Zajac

    Inventor： John P. Zajac

    IPC: H01L21/302 ,  B01J4/00 ,  C23C16/455 ,  H01L21/3065 ,  H01L21/306 ,  C23F1/00

    CPC classification number: B01J4/00 ,  C23C16/455 ,  B01J2219/0894 ,  Y10S438/935

    Abstract: A plasma reactor system is described in which a plurality of components are segregated into modules. Devices known as mass flow controllers for gas supply lines are located one each per module. A plenum for inert gas is connected to each module to bath the module in an inert atmosphere.

    Abstract translation: 描述了一种等离子体反应器系统，其中多个部件分离成模块。 称为气体供应管路的质量流量控制器的设备位于每个模块一个。 用于惰性气体的增压室连接到每个模块，以将模块在惰性气氛中进行洗涤。

    LIQUID SUPPLYING APPARATUS AND ENDOSCOPE REPROCESSING APPARATUS
    47.
    发明申请
    LIQUID SUPPLYING APPARATUS AND ENDOSCOPE REPROCESSING APPARATUS 有权
    液体供应装置和内窥镜替代装置

    公开(公告)号：US20160270646A1

    公开(公告)日：2016-09-22

    申请号：US15171180

    申请日：2016-06-02

    Applicant: OLYMPUS CORPORATION

    Inventor： Taiki YASHIMA ,  Takaaki KOMIYA

    IPC: A61B1/12 ,  A61L2/18 ,  B67D7/62 ,  B67D7/76 ,  B08B3/08 ,  G05D7/06

    CPC classification number: A61B1/123 ,  A61B1/12 ,  A61L2/18 ,  A61L2202/24 ,  B01J4/00 ,  B08B3/04 ,  B08B3/08 ,  B67D7/62 ,  B67D7/763 ,  G05D7/0676

    Abstract: A liquid supply apparatus includes: a storing tank configured to store a liquid; a supply conduit through which the liquid remained inside the supply conduit flows reversely into the storing tank by a predetermined amount over time, the supply conduit having a first end portion connected to the storing tank; a liquid feeding section which is arranged at the storing tank or the supply conduit, and which is configured to feed the liquid from the storing tank to a second end portion of the supply conduit; a time measuring section which measures an elapsed time from stop of the liquid feeding by the liquid feeding section; and a control section which is connected to the liquid feeding section and the time measuring section and which is configured to drive the liquid feeding section for a predetermined time based on a length of the elapsed time.

    Abstract translation: 液体供给装置包括：储存罐，被配置为储存液体; 液体保持在供应管道内的供应管道随时间反向流入储存罐预定量，供应管道具有连接到储存罐的第一端部; 液体供给部，其布置在所述储存罐或所述供给管道处，并且被构造成将所述液体从所述储存罐供给到所述供应管道的第二端部; 时间测量部，其测量由所述液体供给部的液体供给停止所经过的时间; 以及控制部，其连接到所述供液部和所述时间测量部，并且被配置为基于所述经过时间的长度来驱动所述给液部预定时间。

    Oil sand processing apparatus control system and method
    48.
    发明授权
    Oil sand processing apparatus control system and method 失效
    油砂加工设备控制系统及方法

    公开(公告)号：US08110095B2

    公开(公告)日：2012-02-07

    申请号：US12212307

    申请日：2008-09-17

    Applicant: William L. Strand

    Inventor： William L. Strand

    IPC: C10G1/04 ,  G05D7/00

    CPC classification number: C10G1/047 ,  B01J4/00 ,  B01J4/001 ,  B01J4/002 ,  B01J19/006 ,  B01J19/0066 ,  B01J19/26 ,  B01J19/28 ,  B01J2219/00164 ,  B01J2219/00184 ,  B01J2219/00768 ,  B01J2219/00772 ,  B01J2219/00777 ,  B01J2219/182 ,  B01J2219/1943 ,  C10G2300/805

    Abstract: A control system for an oil sand processing apparatus and a method for controlling the apparatus. The apparatus includes a rotatable drum, an oil sand feed mechanism, a drive mechanism for rotating the drum, a first drum support and a second drum support. The control system includes a first drum load sensor associated with the first drum support for sensing a first drum load, a second drum load sensor associated with the second drum support for sensing a second drum load and an oil sand feedrate sensor associated with the oil sand feed mechanism for sensing a feedrate of the oil sand feed mechanism. A controller is provided for controlling a rotation speed of the drum and a feedrate of the oil sand feed mechanism in response to input data from the first drum load sensor, the second drum load sensor and the oil sand feedrate sensor.

    Abstract translation: 油砂处理装置的控制系统及其控制方法。 该设备包括可旋转的滚筒，油砂进给机构，用于使滚筒旋转的驱动机构，第一滚筒支撑件和第二滚筒支撑件。 控制系统包括与第一鼓支撑件相关联的第一鼓负载传感器，用于感测第一鼓负载，与第二鼓支撑件相关联的用于感测第二鼓负载的第二鼓负载传感器和与油砂相关联的油砂进给率传感器 用于感测油砂进给机构的进给速度的进给机构。 响应于来自第一滚筒负载传感器，第二滚筒负载传感器和油砂进给率传感器的输入数据，提供控制滚筒的旋转速度和油砂进给机构的进给速度。

    Oil sand processing apparatus and control system
    49.
    发明授权
    Oil sand processing apparatus and control system 有权
    油砂加工设备及控制系统

    公开(公告)号：US07591929B2

    公开(公告)日：2009-09-22

    申请号：US11194338

    申请日：2005-08-01

    Applicant: William L. Strand

    Inventor： William L. Strand

    IPC: B01D11/00 ,  C10G1/04

    CPC classification number: C10G1/047 ,  B01J4/00 ,  B01J4/001 ,  B01J4/002 ,  B01J19/006 ,  B01J19/0066 ,  B01J19/26 ,  B01J19/28 ,  B01J2219/00164 ,  B01J2219/00184 ,  B01J2219/00768 ,  B01J2219/00772 ,  B01J2219/00777 ,  B01J2219/182 ,  B01J2219/1943 ,  C10G2300/805

    Abstract: An apparatus for processing oil sand to produce a liquid stream comprising water and bitumen and a solid stream comprising solid particles, and a method and control system for controlling the apparatus. The apparatus includes a drum having first and second ends, a conditioning zone adjacent the first end, a compressing zone adjacent the second end and a processing zone therebetween. A rotatable spiral trough, having lifting members therein, extends through each zone for imparting a spiral rolling motion to the oil sand. An oil sand inlet communicates with the conditioning zone, while a water inlet communicates with the processing zone. A liquid stream outlet is located at the first end of the drum, while a solid stream outlet is located adjacent the second end. Preferably, the spiral trough has a width through the compressing zone less than through the processing zone and a height through at least a portion of the compressing zone greater than through the processing and conditioning zones.

    Abstract translation: 一种用于处理油砂以产生包含水和沥青的液体流和包含固体颗粒的固体物流的装置，以及用于控制该装置的方法和控制系统。 该设备包括具有第一端和第二端，与第一端相邻的调节区，邻近第二端的压缩区和它们之间的处理区的滚筒。 在其中具有提升构件的可旋转螺旋槽延伸穿过每个区域，以向油砂施加螺旋滚动运动。 油砂入口与调节区连通，而进水口与处理区连通。 液体流出口位于滚筒的第一端，而固体流出口位于第二端附近。 优选地，螺旋槽具有穿过压缩区的宽度小于通过处理区的宽度，并且穿过压缩区的至少一部分的高度大于通过处理和调节区的高度。

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