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    METHOD OF FORMING A FLOW RESTRICTION IN A FLUID COMMUNICATION SYSTEM
    43.
    发明申请
    METHOD OF FORMING A FLOW RESTRICTION IN A FLUID COMMUNICATION SYSTEM 有权
    在流体通信系统中形成流量限制的方法

    公开(公告)号：US20110232090A1

    公开(公告)日：2011-09-29

    申请号：US13123050

    申请日：2009-10-07

    Applicant: Kristian Raaby Poulsen ,  Peter Andreas Rasmussen

    Inventor： Kristian Raaby Poulsen ,  Peter Andreas Rasmussen

    IPC: B23P17/00

    CPC classification number: F16K99/0001 ,  B01L2400/0633 ,  B81B2201/054 ,  B81C1/00119 ,  F16K99/0021 ,  Y10T29/494

    Abstract: A method of forming a flow restriction in a fluid communication system is disclosed. The method comprises the steps of providing a flow restricting section having a cross sectional area and a length, measuring the flow resistivity of the flow restricting section, and modifying the cross sectional area and/or the length of the flow restricting section until a desired flow resistivity of the flow restricting section is obtained. The method provides the possibility of forming a flow restriction in an easy and cost effective manner, and to subsequently adjust the flow resistivity of the flow restriction, thereby obtaining an accurate flow resistivity.

    Abstract translation: 公开了一种在流体通信系统中形成流量限制的方法。 该方法包括以下步骤：提供具有横截面面积和长度的流量限制部分，测量流动限制部分的流动阻力，以及修改流动限制部分的横截面面积和/或长度，直到所需流动 获得流量限制部分的电阻率。 该方法提供了以容易且成本有效的方式形成流动限制的可能性，并且随后调节流动限制的流动阻力，从而获得精确的流动阻力。

    Small scale actuators and methods for their formation and use
    46.
    发明授权
    Small scale actuators and methods for their formation and use 有权
    小型执行器及其形成和使用的方法

    公开(公告)号：US07175772B2

    公开(公告)日：2007-02-13

    申请号：US10738827

    申请日：2003-12-16

    Applicant: Jerome M. Eldridge

    Inventor： Jerome M. Eldridge

    IPC: B81C1/00

    CPC classification number: F16K99/0001 ,  B81B2201/054 ,  F03G7/06 ,  F16K13/10 ,  F16K99/0011 ,  F16K99/0017 ,  F16K99/0036 ,  F16K99/0044 ,  F16K99/0061 ,  F16K2099/0074 ,  F16K2099/008 ,  F16K2099/0084 ,  Y10T137/0318 ,  Y10T137/0497 ,  Y10T137/1797 ,  Y10T137/1812 ,  Y10T137/1827 ,  Y10T137/6606 ,  Y10T137/87764

    Abstract: An actuator assembly and method for making and using an actuator assembly. In one embodiment, the assembly includes an actuator body having an actuator channel with a first region and a second region. An actuator is disposed in the actuator channel and is movable when in a flowable state between a first position and a second position. A heater is positioned proximate to the actuator channel to heat the actuator from a solid state to a flowable state. A source of gas or other propellant is positioned proximate to the actuator channel to drive the actuator from the first position to the second position. The actuator has a higher surface tension when engaged with the second region of the channel than when engaged with the first region. Accordingly, the actuator can halt upon reaching the second region of the channel due to the increased surface tension between the actuator and the second region of the channel.

    Abstract translation: 一种用于制造和使用致动器组件的致动器组件和方法。 在一个实施例中，组件包括致动器主体，其具有带有第一区域和第二区域的致动器通道。 致动器设置在致动器通道中并且当处于第一位置和第二位置之间的可流动状态时可移动。 加热器位于致动器通道附近，以将致动器从固态加热到可流动状态。 气体源或其它推进剂的位置靠近致动器通道定位，以将致动器从第一位置驱动到第二位置。 当与通道的第二区域接合时，致动器具有比与第一区域接合时更高的表面张力。 因此，由于致动器和通道的第二区域之间的表面张力增大，致动器可能在到达通道的第二区域时停止。

    Method for producing and testing a corrosion-resistant channel in a silicon device
    47.
    发明授权
    Method for producing and testing a corrosion-resistant channel in a silicon device 有权
    在硅器件中生产和测试耐腐蚀通道的方法

    公开(公告)号：US07125739B2

    公开(公告)日：2006-10-24

    申请号：US10929145

    申请日：2004-08-27

    Applicant: James M. Harris ,  Sapna Patel

    Inventor： James M. Harris ,  Sapna Patel

    IPC: H01L21/00

    CPC classification number: H01L22/20 ,  B81B7/0012 ,  B81B2201/054 ,  B81B2201/058 ,  B81C99/0045 ,  B81C2203/038 ,  F16K99/0001 ,  F16K99/0015 ,  F16K99/0034 ,  F16K99/0036 ,  F16K99/0059 ,  F16K2099/0074 ,  H01L21/02071 ,  H01L22/24 ,  H01L22/34

    Abstract: A method for producing a corrosion-resistant channel in a wetted path of a silicon device enables such device to be used with corrosive compounds, such as fluorine. A wetted path of a MEMS device is coated with either (1) an organic compound resistant to attack by atomic fluorine or (2) a material capable of being passivated by atomic fluorine. The device is then exposed to a gas that decomposes into active fluorine compounds when activated by a plasma discharge. One example of such a gas is CF4, an inert gas that is easier and safer to work with than volatile gases like ClF3. The gas will passivate the material (if applicable) and corrode any exposed silicon. The device is tested in such a manner that any unacceptable corrosion of the wetted path will cause the device to fail. If the device operates properly, the wetted path is deemed to be resistant to corrosion by fluorine or other corrosive compounds, as applicable.

    Abstract translation: 在硅装置的润湿路径中制造耐腐蚀通道的方法使得这种装置能够与诸如氟的腐蚀性化合物一起使用。 MEMS器件的润湿路径涂覆有（1）抗原子氟侵蚀的有机化合物或（2）能够被原子氟钝化的材料。 然后将该装置暴露于当通过等离子体放电激活时分解成活性氟化合物的气体。 这种气体的一个实例是CF 4 SO 3，惰性气体比诸如ClF 3 3的挥发性气体更容易和更安全地工作。 气体将钝化材料（如果适用）并腐蚀任何暴露的硅。 该装置以这样的方式被测试，使得湿润路径的任何不可接受的腐蚀将导致装置失效。 如果设备正常工作，则湿润路径被认为是耐氟或其他腐蚀性化合物的腐蚀，如适用的。

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