Method and system for measuring film stress in a wafer film
    41.
    发明申请
    Method and system for measuring film stress in a wafer film 有权
    用于测量晶片薄膜中薄膜应力的方法和系统

    公开(公告)号:US20100141292A1

    公开(公告)日:2010-06-10

    申请号:US12315933

    申请日:2008-12-08

    Inventor: Peter J. Hopper

    CPC classification number: G01L1/14 G01B7/345 G01B2210/56 H01F5/003

    Abstract: In a MEMS wafer, film stresses are measured by placing an inductor array over or under the wafer and measuring inductance variations across the array to obtain a map defining the amount of bowing of the wafer.

    Abstract translation: 在MEMS晶片中,通过将电感器阵列放置在晶片上方或下方并测量阵列上的电感变化来测量膜应力,以获得限定晶片弯曲量的映射。

    PRESSURE DETECTION DEVICE AND PRESSURE DETECTION METHOD
    42.
    发明申请
    PRESSURE DETECTION DEVICE AND PRESSURE DETECTION METHOD 有权
    压力检测装置和压力检测方法

    公开(公告)号:US20090218163A1

    公开(公告)日:2009-09-03

    申请号:US12393530

    申请日:2009-02-26

    CPC classification number: G01L1/14 G01R33/072

    Abstract: The pressure detection device includes a buffer member deformable by a pressure change, including one or more magnets, and a sensor assembly including one or more magnetic sensors to detect a variation of a magnetic field accompanied by deformation of the buffer member.

    Abstract translation: 压力检测装置包括通过包括一个或多个磁体的压力变化而变形的缓冲构件和包括一个或多个磁性传感器的传感器组件,用于检测伴随缓冲构件变形的磁场的变化。

    Measuring instrument and method for detecting a force
    44.
    发明授权
    Measuring instrument and method for detecting a force 失效
    用于检测力的测量仪器和方法

    公开(公告)号:US07543505B2

    公开(公告)日:2009-06-09

    申请号:US10069452

    申请日:2001-02-16

    Inventor: Michael Hofsaess

    CPC classification number: G01L5/225 B60T7/042 G01D5/145 G01L1/14

    Abstract: The present invention relates to a force measuring instrument, having a carrier plate (3), at least one magnet (5), and at least one magnetically sensitive element (6). A tongue element (4) protrudes at least partly from the carrier plate (3) and is joined to a plate element (2). Between the tongue element (4) and the carrier plate (3), an air gap (7) is formed, in which the magnetically sensitive element (6) is positioned. The force to be measured, delivered via the plate element (2), leads to a relative motion between the end, toward the air gap, of the tongue element (4) and the carrier plate (3). This causes a change in the magnetic field geometry in the air gap (7). The present invention also relates to a method for detecting a force.

    Abstract translation: 本发明涉及一种力测量仪器,其具有承载板(3),至少一个磁体(5)和至少一个磁敏元件(6)。 舌元件(4)至少部分地从承载板(3)突出并且连接到板元件(2)。 在舌元件(4)和承载板(3)之间形成有气敏元件(6)的气隙(7)。 通过板元件(2)传递的测量力导致舌形元件(4)和托板(3)的端部朝向空气间隙的相对运动。 这导致气隙(7)中的磁场几何形状的变化。 本发明还涉及一种用于检测力的方法。

    Pressure sensor and method for fabricating the same
    45.
    发明授权
    Pressure sensor and method for fabricating the same 有权
    压力传感器及其制造方法

    公开(公告)号:US07353719B2

    公开(公告)日:2008-04-08

    申请号:US10507687

    申请日:2003-03-27

    Abstract: A pressure sensor comprising a plurality of sensor parts arranged in matrix. A first electrode being connected with first wiring and a second electrode being connected with second wiring are disposed oppositely through a cavity part in the sensor part. The second electrode bends to the first electrode side in response to a pressure from a specimen and touches the first electrode upon application of a pressure of a specified level or above. When the specimen is pressed against a pressure detecting region, both electrodes touch each other at a sensor part corresponding to a protrusion of the specimen and are separated at a sensor part corresponding to a recess. When a scanning signal is fed from a scanning circuit to one wiring and presence of a signal flowing through the second wiring is detected by a sensing circuit, a pressure being applied to each sensor part can be detected. Furthermore, the shape is detected by feeding the scanning signal from the scanning circuit to each first wiring sequentially and scanning the pressure detecting region generally.

    Abstract translation: 一种压力传感器,包括排列成矩阵的多个传感器部件。 与第一布线连接的第一电极和与第二布线连接的第二电极相对设置在传感器部分中的空腔部分中。 第二电极响应于来自试样的压力而弯曲到第一电极侧,并且在施加指定水平或更高的压力时接触第一电极。 当样本被压在压力检测区域上时,两个电极在对应于样本的突起的传感器部分处彼此接触并且在对应于凹部的传感器部分分离。 当扫描信号从扫描电路馈送到一个布线并且通过感测电路检测到流过第二布线的信号的存在时,可以检测施加到每个传感器部分的压力。 此外,通过将扫描电路的扫描信号顺序地馈送到每个第一布线来检测形状,并且一般扫描压力检测区域。

    Measuring strain in a structure using a sensor having an electromagnetic resonator
    46.
    发明授权
    Measuring strain in a structure using a sensor having an electromagnetic resonator 有权
    使用具有电磁谐振器的传感器的结构中的测量应变

    公开(公告)号:US07347101B2

    公开(公告)日:2008-03-25

    申请号:US10517769

    申请日:2003-06-26

    Abstract: The system (10) comprises a sensor (18) 90×90×90×30 mm as an electromagnetic microwave cavity (20) with a coupler (22) with a wire (40) and an antenna (42). Cavity (20) produces a response signal (26) in response to an interrogation signal (24) from interrogator (16). Sensor (18) is coupled to a structure (14) to allow a strain to alter the resonance properties. 3.6 GHz is used with a detection of a 2.5 kHz change. If not temperature via strain is detected a mechanical amplifier is used with cavity (20) for temperature compensation. Continuous or intermittent narrowband signals are used as interrogation signals (24). Used with bridges for structural health monitoring. Also for aircrafts, dams, buildings, vehicles.

    Abstract translation: 系统(10)包括具有耦合器(22)和电线(40)和天线(42)的电磁微波空腔(20)的90×90×90×30mm的传感器(18)。 腔(20)响应于来自询问器(16)的询问信号(24)产生响应信号(26)。 传感器(18)耦合到结构(14)以允许应变改变谐振特性。 使用3.6 GHz,检测到2.5 kHz的变化。 如果没有检测到温度通过应变,机械放大器与空腔(20)一起用于温度补偿。 连续或间歇的窄带信号被用作询问信号(24)。 与桥梁一起用于结构健康监测。 也适用于飞机,水坝,建筑物,车辆。

    Magnetic field response sensor for conductive media

    公开(公告)号:US07075295B2

    公开(公告)日:2006-07-11

    申请号:US10839448

    申请日:2004-04-30

    CPC classification number: G01L1/14

    Abstract: A magnetic field response sensor comprises an inductor placed at a fixed separation distance from a conductive surface to address the low RF transmissivity of conductive surfaces. The minimum distance for separation is determined by the sensor response. The inductor should be separated from the conductive surface so that the response amplitude exceeds noise level by a recommended 10 dB. An embodiment for closed cavity measurements comprises a capacitor internal to said cavity and an inductor mounted external to the cavity and at a fixed distance from the cavity's wall. An additional embodiment includes a closed cavity configuration wherein multiple sensors and corresponding antenna are positioned inside the cavity, with the antenna and inductors maintained at a fixed distance from the cavity's wall.

    Force sensor
    49.
    发明授权
    Force sensor 有权
    力传感器

    公开(公告)号:US07073391B2

    公开(公告)日:2006-07-11

    申请号:US10493975

    申请日:2003-03-27

    Applicant: Anton Dukart

    Inventor: Anton Dukart

    CPC classification number: B60N2/002 B60R21/01516 G01G19/4142 G01L1/14

    Abstract: A force sensor, in particular for detecting the forces on a vehicle seat, includes a force measurement cell (1) that has a Hall element. The force measurement cell (1) includes at least one bending bar (2, 3), which from the exertion of force to be detected exeris an influence on the magnetic field in the region of a magnetic-field-sensitive sensor element (6) of the measurement cell (1). The sensing is done with a Hall element (6), held on the at least one bending bar (2, 3), which element, under the force exerted on the bending bar (2, 3), can be deflected in the field of a relatively stationary permanent magnet (4), and a magnetic diagnosis field in the region of the Hall element (6) can be generated whose field lines are located in the plane of the sensor element without influencing the measurement field.

    Abstract translation: 特别是用于检测车辆座椅上的力的力传感器包括具有霍尔元件的力测量单元(1)。 力测量单元(1)包括至少一个弯曲杆(2,3),其从被检测的力的作用对磁场敏感传感器元件(6)的区域中的磁场产生影响, 的测量单元(1)。 感测通过保持在至少一个弯曲杆(2,3)上的霍尔元件(6)完成,该元件在施加在弯曲杆(2,3)上的力下可以在 可以产生相对固定的永磁体(4),并且可以产生在霍尔元件(6)的区域中的磁诊断场,其场线位于传感器元件的平面中,而不影响测量场。

    Circuit arrangement with a linear variable differential transformer (LVDT) as a displacement sensor or force sensor
    50.
    发明授权
    Circuit arrangement with a linear variable differential transformer (LVDT) as a displacement sensor or force sensor 失效
    具有线性可变差动变压器(LVDT)作为位移传感器或力传感器的电路布置

    公开(公告)号:US07053603B2

    公开(公告)日:2006-05-30

    申请号:US10807406

    申请日:2004-03-24

    Applicant: Marten Swart

    Inventor: Marten Swart

    CPC classification number: G01L1/14 B60N2/0244 G01D3/036 G01D5/2291

    Abstract: In a circuit arrangement having a linear variable differential transformer as a displacement sensor or force sensor, having a selection circuit which is connected to the primary coil of the transformer and which provides an output current for triggering the primary coil, and having an analysis circuit which is connected to the secondary coils of the transformer and which provides a message signal, a control circuit used for triggering the selection circuit and the analysis circuit and for processing the measurement signal provided by the analysis circuit is connected to the primary coil in order to calculate the temperature of the circuit arrangement, and is configured such that it determines the temperature-dependent ohmic resistance of the primary coil and calculates from it the temperature and corrects accordingly the measurement signal provided by the analysis circuit.

    Abstract translation: 在具有作为位移传感器或力传感器的线性可变差动变压器的电路装置中,具有连接到变压器的初级线圈并且提供用于触发初级线圈的输出电流的选择电路,并且具有分析电路 连接到变压器的次级线圈并提供消息信号,用于触发选择电路和分析电路的控制电路以及用于处理由分析电路提供的测量信号的控制电路连接到初级线圈以便计算 电路布置的温度,并且被配置为使得其确定初级线圈的依赖于温度的欧姆电阻并从其计算温度并相应地校正由分析电路提供的测量信号。

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