公开(公告)号：US20150377797A1

公开(公告)日：2015-12-31

申请号：US14749564

申请日：2015-06-24

Applicant: KLA-Tencor Corporation

Inventor： Pavel Kolchin ,  Mikhail Haurylau ,  Junwei Wei ,  Dan Kapp ,  Robert Danen ,  Grace Chen

IPC: G01N21/95 ,  G01N21/88

CPC classification number: G01N21/9501 ,  G01N21/47 ,  G01N21/8806 ,  G01N21/8851 ,  G01N21/956 ,  G01N21/95623 ,  G01N2021/8887 ,  G01N2201/0668

Abstract: Methods and systems for determining a configuration for an optical element positioned in a collection aperture during wafer inspection are provided. One system includes a detector configured to detect light from a wafer that passes through an optical element, which includes a set of collection apertures, when the optical element has different configurations thereby generating different images for the different configurations. The system also includes a computer subsystem configured for constructing additional image(s) from two or more of the different images, and the two or more different images used to generate any one of the additional image(s) do not include only different images generated for single collection apertures in the set. The computer subsystem is further configured for selecting one of the different or additional configurations for the optical element based on the different images and the additional image(s).

Abstract translation: 提供了用于在晶片检查期间确定位于收集孔中的光学元件的配置的方法和系统。 一个系统包括检测器，其被配置为当光学元件具有不同的配置从而为不同的配置生成不同的图像时，检测来自晶片的光，其通过包括一组收集孔的光学元件。 该系统还包括配置用于从两个或多个不同图像构建附加图像的计算机子系统，并且用于生成附加图像中的任何一个的两个或多个不同图像不仅包括生成的不同图像 用于集合中的单个收集孔。 计算机子系统还被配置为基于不同的图像和附加图像来选择用于光学元件的不同或附加配置之一。

公开(公告)号：US20150377773A1

公开(公告)日：2015-12-31

申请号：US14845997

申请日：2015-09-04

Applicant: THERMO ELECTRON SCIENTIFIC INSTRUMENTS LLC

Inventor： John Magie COFFIN

IPC: G01N21/35

CPC classification number: G01N21/35 ,  G01J3/0237 ,  G01N21/0303 ,  G01N21/15 ,  G01N2201/0668

Abstract: The present invention is thus directed to an automated system of varying the optical path length in a sample that a light from a spectrophotometer must travel through. Such arrangements allow a user to easily vary the optical path length while also providing the user with an easy way to clean and prepare a transmission cell for optical interrogation. Such path length control can be automatically controlled by a programmable control system to quickly collect and stores data from different path lengths as needed for different spectrographic analysis. Moreover, the system utilizes configured wedge shaped windows to best minimize the reflections of light which cause periodic variation in transmission at different wave lengths (commonly described as “channel spectra”). Such a system, as presented herein, is able to return best-match spectra with far fewer computational steps and greater speed than if all possible combinations of reference spectra are considered.

公开(公告)号：US09151671B2

公开(公告)日：2015-10-06

申请号：US13975693

申请日：2013-08-26

Applicant: John Magie Coffin

Inventor： John Magie Coffin

IPC: G01N1/10 ,  G01J3/02 ,  G01N21/03 ,  G01N21/15

CPC classification number: G01N21/35 ,  G01J3/0237 ,  G01N21/0303 ,  G01N21/15 ,  G01N2201/0668

Abstract: The present invention is thus directed to an automated system of varying the optical path length in a sample that a light from a spectrophotometer must travel through. Such arrangements allow a user to easily vary the optical path length while also providing the user with an easy way to clean and prepare a transmission cell for optical interrogation. Such path length control can be automatically controlled by a programmable control system to quickly collect and stores data from different path lengths as needed for different spectrographic analysis. Moreover, the system utilizes configured wedge shaped windows to best minimize the reflections of light which cause periodic variation in transmission at different wave lengths (commonly described as “channel spectra”). Such a system, as presented herein, is able to return best-match spectra with far fewer computational steps and greater speed than if all possible combinations of reference spectra are considered.

Abstract translation: 因此，本发明涉及一种自动化系统，其改变来自分光光度计必须穿过的光的样品中的光程长度。 这样的布置允许用户容易地改变光路长度，同时还为用户提供了清洁和准备用于光询问的传输单元的简单方法。 这种路径长度控制可以由可编程控制系统自动控制，以便根据不同光谱分析的需要快速收集和存储来自不同路径长度的数据。 此外，该系统利用配置的楔形窗口来最大程度地最小化导致在不同波长（通常被描述为“通道光谱”）的传输中周期性变化的光的反射。 如本文所提出的，如果考虑到所有可能的参考光谱组合，这样一个系统就能够以更少的计算步骤和更高的速度返回最佳匹配光谱。

公开(公告)号：US20140233014A1

公开(公告)日：2014-08-21

申请号：US13769494

申请日：2013-02-18

Applicant: GLOBALFOUNDRIES INC.

Inventor： Ming Lei

IPC: G01N21/88

CPC classification number: G01N21/9505 ,  G01B11/161 ,  G01N21/8806 ,  G01N21/95692 ,  G01N2201/061 ,  G01N2201/0668 ,  G01N2201/12

Abstract: An approach for IR-based metrology for detecting stress and/or defects around TSVs of semiconductor devices is provided. Specifically, in a typical embodiment, a beam of IR light will be emitted from an IR light source through the material around the TSV. Once the beam of IR light has passed through the material around the TSV, the beam will be analyzed using one or more algorithms to determine information about TSV stress and/or defects such as imbedded cracking, etc. In one embodiment, the beam of IR light may be split into a first portion and a second portion. The first portion will be passed through the material around the TSV while the second portion is routed around the TSV. After the first portion has passed through the material around the TSV, the two portions may then be recombined, and the resulting beam may be analyzed as indicated above.

Abstract translation: 提供了一种用于检测半导体器件TSV周围的应力和/或缺陷的基于红外测量的方法。 具体地，在典型的实施例中，IR光束将从IR光源通过TSV周围的材料发射。 一旦IR光束通过TSV周围的材料，则将使用一种或多种算法来分析光束，以确定关于TSV应力和/或诸如嵌入裂纹等缺陷的信息。在一个实施例中，IR光束 光可以分成第一部分和第二部分。 第一部分将通过TSV周围的材料，而第二部分绕TSV路线。 在第一部分已经穿过TSV周围的材料之后，可以将两个部分重组，并且可以如上所述分析所得到的光束。

公开(公告)号：US20140231680A1

公开(公告)日：2014-08-21

申请号：US14174964

申请日：2014-02-07

Applicant: Roche Diagnostics Operations, Inc.

Inventor： Darko Klinec

IPC: G01N33/49

CPC classification number: G01N33/491 ,  G01N15/06 ,  G01N21/13 ,  G01N21/253 ,  G01N21/3151 ,  G01N21/51 ,  G01N35/02 ,  G01N35/1016 ,  G01N2015/045 ,  G01N2015/0693 ,  G01N2035/0406 ,  G01N2035/1018 ,  G01N2201/066 ,  G01N2201/0662 ,  G01N2201/0668

Abstract: A method for detecting clots in a liquid is presented. The liquid is in a sample container. Light is irradiated having a first wavelength to the sample container by a first light source at a changeable vertical irradiating position (P—0 to P_n) such that the light irradiated by the first light source passes through the sample container along a first measurement path. An intensity of light having the first wavelength passing along the first measurement path and exiting the sample container is measured. Clots are detected in response to the measured intensity.

Abstract translation: 提出了一种用于检测液体中凝块的方法。 液体在样品容器中。 通过在可变的垂直照射位置（P-0至P_n）处的第一光源将具有第一波长的光照射到第一光源，使得由第一光源照射的光沿第一测量路径通过样品容器。 测量具有沿着第一测量路径通过并离开样品容器的第一波长的光的强度。 根据测量的强度检测到凝块。

公开(公告)号：US20100045980A1

公开(公告)日：2010-02-25

申请号：US12444308

申请日：2007-09-27

Applicant: Yasuo Tsukuda

Inventor： Yasuo Tsukuda

IPC: G01J3/42

CPC classification number: G01N21/251 ,  G01N21/0303 ,  G01N21/31 ,  G01N2021/035 ,  G01N2201/0668

Abstract: A liquid sample is dropped onto the upper surface of a transparent and cylindrical light-transmitting body (22), and the liquid sample is maintained as a droplet by the surface tension. From above the liquid sample, a transparent cover plate (25) is lowered down to the position where the lower surface thereof touches a spacer (23) in order that the liquid sample is held in the small gap formed between the upper surface of the light-transmitting body (22) and the lower surface of the transparent cover plate (25). A measurement light is provided into the liquid sample held in this manner from immediately above it, and passes through the liquid sample. The transmitted light emitted downwards through the light-transmitting body (22) is introduced into a spectro-detecting unit to be spectro-measured. The measurement optical path length can be adjusted by the height of the spacer (23). This enables an easy transmission spectro-measurement of an extremely small amount of liquid sample.

Abstract translation: 将液体样品滴在透明圆柱形透光体（22）的上表面上，并通过表面张力将液体样品保持为液滴。 从液体样品的上方，将透明盖板（25）向下降到其下表面接触间隔件（23）的位置，以使液体样品保持在形成在光的上表面之间的小间隙 - 透射体（22）和透明盖板（25）的下表面。 将测量光从其上方以这种方式提供到液体样品中，并通过液体样品。 通过透光体（22）向下发射的透射光被引入光谱检测单元进行光谱测量。 测量光路长度可以通过间隔物（23）的高度来调节。 这使得能够容易地透射光谱测量极少量的液体样品。

公开(公告)号：US20090268204A1

公开(公告)日：2009-10-29

申请号：US12109254

申请日：2008-04-24

Applicant: Michael Tkachuk

Inventor： Michael Tkachuk

IPC: G01N21/00

CPC classification number: G01N21/3504 ,  G01N2201/0662 ,  G01N2201/0668

Abstract: An optical absorption gas analyser for determining the concentration of a target gas in a sample is disclosed. The analyser comprises a chamber for containing the sample in use; a radiation source assembly arranged to emit radiation into the chamber; a first radiation detector assembly arranged to detect radiation transmitted along a first optical path through the chamber and a second radiation detector assembly arranged to detect radiation transmitted along a second optical path through the chamber, wherein the length of the second optical path which the sample can intercept is shorter than that of the first optical path. The analyser further comprises a processor adapted to generate a sensing signal SS based on the detected radiation transmitted along the first optical path and a reference signal SR based on the detected radiation transmitted along the second optical path. The processor determines the concentration of the target gas in the sample based on a comparison of the sensing signal with the reference signal.

Abstract translation: 公开了一种用于测定样品中目标气体浓度的光吸收气体分析仪。 分析仪包括用于容纳使用中的样品的室; 辐射源组件，被布置成将辐射发射到所述腔室中; 第一辐射检测器组件，被布置成检测沿着通过所述室的第一光路传输的辐射;以及第二辐射检测器组件，其布置成检测沿着通过所述室的第二光路传输的辐射，其中所述样品可以 截距比第一光路的截距短。 分析器还包括处理器，其适于基于沿着第一光路传输的检测到的辐射和基于沿着第二光路传输的检测到的辐射的参考信号SR生成感测信号SS。 处理器基于感测信号与参考信号的比较来确定样品中目标气体的浓度。

公开(公告)号：US07352463B2

公开(公告)日：2008-04-01

申请号：US10525850

申请日：2002-09-06

Applicant: Fabrice Marcel S. Bounaix

Inventor： Fabrice Marcel S. Bounaix

IPC: G01N21/00

CPC classification number: G01N21/61 ,  G01N21/031 ,  G01N2201/0668

Abstract: A method and device for measuring a concentration of a preselected gas in a gas sample are disclosed. The device comprises a Herriott type multipass cell (10) having a center axle (74) and a housing (80A, 80B) surrounding and spaced from the axle to provide a tubular sample cavity (84). The gas sample is pumped through the sample cavity via apertures (154, 156) provided in opposed ends of the axle. A first mirror (44) and a second mirror (46) are supported at opposed ends of the axle. A light source, e.g. a laser or LED, is provided for emitting a light beam into the sample cavity via an entry aperture (30) in the first mirror, the light beam having a wave length at which the preselected gas strongly absorbs. The beam is reflected between the mirrors for a number of times before exiting the cell via an exit aperture (48) in the second mirror and impinging on a detector (52). The device further comprises a reference detector (32) for monitoring the intensity of the unattenuated light beam and a detector for detecting the intensity of light transmitted through the second mirror after a single pass through the cell. The light source is operatively connected to a heat control assembly having a heat sink and the gas sample is passed said heat sink to augment temperature control of the light source.

Abstract translation: 公开了一种测量气体样品中预选气体浓度的方法和装置。 该装置包括具有中心轴（74）的赫里奥多型多通道电池（10）和围绕轴并与轴间隔开的壳体（80A，80B），以提供管状样品腔（84）。 气体样品通过设置在轴的相对端的孔（154,156）泵送通过样品腔。 第一反射镜（44）和第二反射镜（46）被支撑在轴的相对端。 光源，例如 提供激光器或LED，用于经由第一反射镜中的入口孔（30）将光束发射到样品腔中，所述光束具有预定气体强吸收的波长。 光束在反射镜之间反射多次，然后经由第二反射镜中的出射孔（48）离开单元并撞击检测器（52）。 该装置还包括用于监测未衰减的光束的强度的参考检测器（32）和用于在单次通过电池之后检测透过第二反射镜的光的强度的检测器。 光源可操作地连接到具有散热器的热控制组件，并且气体样品通过所述散热器以增加光源的温度控制。

公开(公告)号：US06507397B1

公开(公告)日：2003-01-14

申请号：US09536714

申请日：2000-03-28

Applicant: Shigenori Nishio ,  Masao Kawakami ,  Hiroshi Kimura ,  Kenji Muramoto

Inventor： Shigenori Nishio ,  Masao Kawakami ,  Hiroshi Kimura ,  Kenji Muramoto

IPC: G01J342

CPC classification number: G01N21/31 ,  B01F15/00214 ,  B01F15/0429 ,  D06B23/28 ,  G01J3/46 ,  G01N21/0303 ,  G01N21/05 ,  G01N2201/065 ,  G01N2201/0668

Abstract: An automatic color-tone test device comprises: a measurement cell 4 to which there are communication-connected dye liquor introduction tubes 16, 18 for passing through a controlling dye liquor that is a measurement object and dye liquor discharge tubes 17, 19; a spectrophotometer adapted such that a light transmission distance in the measurement cell 4 can be variably set in compliance with a concentration level of the controlling dye liquor that is a measurement object; and a statistical test computer section for operation-judging whether or not concentration and hue agree with desired values.

Abstract translation: 一种自动色调测试装置，包括：测量单元4，与测量单元4有连通的染液引入管16,18，用于通过作为测量对象的控制染液和染液排放管17,19; 分光光度计，其适于使得测量单元4中的光传输距离可以根据作为测量对象的控制染液的浓度水平可变地设定; 以及用于操作判断浓缩和色调是否与期望值一致的统计测试计算机部分。

公开(公告)号：US20240319079A1

公开(公告)日：2024-09-26

申请号：US18581378

申请日：2024-02-20

Applicant: InnoSpectra Corporation

Inventor： Fei-Peng Chang ,  Kuo-Sheng Huang ,  Cheng-Hsiung Chen ,  Hsi-Pin Li

IPC: G01N21/25 ,  G01N21/27

CPC classification number: G01N21/255 ,  G01N21/27 ,  G01N2201/0637 ,  G01N2201/0638 ,  G01N2201/0664 ,  G01N2201/0668 ,  G01N2201/08

Abstract: A detecting system using a spectrum measurement device and detecting an object is provided. The system includes: a sampling module and spectrum measurement devices assembled to the sampling module. The sampling module provides an illumination beam to the object and collects measurement beams reflected by the object to the spectrum measurement devices. The illumination beam has an illumination light waveband. The measurement beams have the illumination light waveband. The spectrum measurement devices include first and second spectrum measurement devices. The first spectrum measurement device includes a digital micromirror device. The measurement beams include first and second measurement beams transmitted to the first and second spectrum measurement devices respectively. The first spectrum measurement device detects a portion of the illumination light waveband of the first measurement beam, and at the same time the second spectrum measurement device detects another portion of the illumination light waveband of the second measurement beam.