公开(公告)号：US07599582B2

公开(公告)日：2009-10-06

申请号：US10994862

申请日：2004-11-22

Applicant: Ronald E. Beselt ,  Frank M. Haran ,  John A. Harjula ,  Ulysse S. Dos Santos

Inventor： Ronald E. Beselt ,  Frank M. Haran ,  John A. Harjula ,  Ulysse S. Dos Santos

IPC: G02B6/00 ,  G01B11/16 ,  G01J3/00 ,  G01N21/84

CPC classification number: G01N21/89 ,  G01N21/3554 ,  G01N21/3559 ,  G01N21/8806 ,  G01N2201/103

Abstract: A scanning system includes a cable take-up mechanism that uses a series of pulleys that determine the bend diameters of a scanning system. The mechanism is particularly suited for a spectrometric, e.g., infrared, scanning system where moving scanner or sensor head essentially houses only the optical elements while essentially of all the other electronic and optical components associated with the measurement are housed in an easily accessible compartment that is remote from the moving scanner head. Light is transmitted through optical fiber cables. The cable take-up mechanism maintains the fiber optic cable at essentially constant total bend length and bend diameter thereby minimizing any dynamic changes to spectral bend losses as the optical head is scanned. The light weight construction of the sensor head further reduces vibrations associated with the moving scanner head.

Abstract translation: 扫描系统包括使用确定扫描系统的弯曲直径的一系列滑轮的电缆卷取机构。 该机制特别适用于光谱测量，例如红外线扫描系统，其中移动的扫描仪或传感器头基本上仅容纳光学元件，而基本上与测量相关联的所有其它电子和光学组件基本上容纳在易于访问的隔室中， 远离移动的扫描仪头。 光通过光缆传输。 电缆拾取机构将光纤电缆保持在基本上恒定的总弯曲长度和弯曲直径，从而最小化当光学头被扫描时光谱弯曲损耗的任何动态变化。 传感头的重量轻的构造进一步降低与移动的扫描头相关的振动。

公开(公告)号：US07190447B2

公开(公告)日：2007-03-13

申请号：US11372556

申请日：2006-03-11

Applicant: Steven W. Meeks

Inventor： Steven W. Meeks

IPC: G01N21/00

CPC classification number: G01N21/9506 ,  G01B11/0616 ,  G01B11/0641 ,  G01B11/065 ,  G01B11/303 ,  G01B11/306 ,  G01N21/21 ,  G01N21/47 ,  G01N21/9501 ,  G01N21/958 ,  G01N2021/8427 ,  G01N2021/8841 ,  G01N2201/103 ,  G01N2201/104 ,  G01N2201/1045 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A double-sided optical inspection system is presented which may detect and classify particles, pits and scratches on thin film disks or wafers in a single scan of the surface. In one embodiment, the invention uses a pair of orthogonally oriented laser beams, one in the radial and one in the circumferential direction on both surfaces of the wafer or thin film disk. The scattered light from radial and circumferential beams is separated via their polarization or by the use of a dichroic mirror together with two different laser wavelengths.

Abstract translation: 提出了一种双面光学检测系统，其可以在表面的单次扫描中检测和分类薄膜盘或晶片上的颗粒，凹坑和划痕。 在一个实施例中，本发明使用一对正交取向的激光束，一个在径向上，一个在圆周方向上在晶片或薄膜盘的两个表面上。 来自径向和周向光束的散射光通过其偏振分离，或者通过使用二向色镜与两种不同的激光波长分离。

公开(公告)号：US20060263777A1

公开(公告)日：2006-11-23

申请号：US10540224

申请日：2004-01-27

Applicant: William Tong

Inventor： William Tong

IPC: C12Q1/68 ,  C12M1/34

CPC classification number: G01N21/636 ,  G01J3/42 ,  G01N21/253 ,  G01N30/74 ,  G01N2201/103 ,  G01N2201/12746

Abstract: Techniques and systems for using nonlinear four wave mixing to optically measure microarrays with sample cells of biological or chemical materials. Examples of suitable microarrays include but are not limited to DNA microchips and capillary electrophoresis microarrays.

Abstract translation: 使用非线性四波混合的光学测量微阵列与生物或化学材料样品池的技术和系统。 合适的微阵列的实例包括但不限于DNA微芯片和毛细管电泳微阵列。

公开(公告)号：US07057177B2

公开(公告)日：2006-06-06

申请号：US10427006

申请日：2003-04-29

Applicant: Bruce R. Davis ,  Paul H. Shelley

Inventor： Bruce R. Davis ,  Paul H. Shelley

IPC: G01N21/35

CPC classification number: G01N25/00 ,  G01N21/3563 ,  G01N21/55 ,  G01N33/20 ,  G01N2021/8887 ,  G01N2021/95615 ,  G01N2201/103

Abstract: A non-destructive method is provided for determining amount and distribution of a corrosion product on a metallic substrate. A value of infrared energy reflected from the metallic substrate without corrosion is determined. A value of infrared energy reflected from the metallic substrate with the corrosion product is determined. A value of infrared energy absorbed in the corrosion product is determined, and the value of the infrared energy absorbed in the corrosion product is correlated to an amount of the corrosion product.

Abstract translation: 提供了用于确定金属基底上的腐蚀产物的量和分布的非破坏性方法。 确定从没有腐蚀的金属基材反射的红外能量的值。 确定从具有腐蚀产物的金属基底反射的红外能量的值。 确定在腐蚀产物中吸收的红外能量的值，并且腐蚀产物中吸收的红外能量的值与腐蚀产物的量相关。

公开(公告)号：US20040223053A1

公开(公告)日：2004-11-11

申请号：US10435625

申请日：2003-05-07

Applicant: Mitutoyo Corporation

Inventor： Paul G. Gladnick ,  Richard M. Wasserman ,  Barry E. Saylor ,  Mark L. Delaney

IPC: H04N007/18

CPC classification number: G01N21/8806 ,  G01N2021/8835 ,  G01N2021/8838 ,  G01N2021/8887 ,  G01N2201/0694 ,  G01N2201/103 ,  G01N2201/117 ,  G06T1/0007 ,  G06T7/0004 ,  G06T2207/30164 ,  G06T2207/30241

Abstract: A precision machine vision inspection system and method for increased inspection throughput. The vision inspection system includes a movable stage for scanning and measuring selected workpiece features. In prior systems, conventional interspersing of image processing and inspection operations with image acquisition operations required stopping and starting the stage motion during image acquisition, necessitating associated delays or wait-states in various operations. Such delays are avoided in this invention by acquiring images continuously, with a timing that is independent of image inspection operations, so that delays and wait-states are avoided. In addition, continuous stage motion is combined with a strobe lighting feature during the image acquisition operations to acquire blur-free images at a high rate. Improved image acquisition and image analysis routines including these features are created and stored by the system.

Abstract translation: 精密机器视觉检测系统和方法，提高检测吞吐量。 视觉检查系统包括用于扫描和测量所选择的工件特征的可移动台。 在现有系统中，图像处理和检查操作与图像采集操作的传统散布需要在图像采集期间停止和启动阶段运动，从而在各种操作中需要相关的延迟或等待状态。 通过以独立于图像检查操作的定时连续获取图像，从而避免了延迟和等待状态，从而避免了这种延迟。 此外，在图像采集操作期间，连续舞台运动与闪光灯照明特征相结合，以高速率获得无模糊图像。 包括这些功能在内的改进的图像采集和图像分析程序由系统创建和存储。

公开(公告)号：US5426506A

公开(公告)日：1995-06-20

申请号：US36320

申请日：1993-03-22

Applicant: William A. Ellingson ,  Mark P. Brada

Inventor： William A. Ellingson ,  Mark P. Brada

IPC: G01N21/88 ,  G01N21/01

CPC classification number: G01N21/88 ,  G01N2021/178 ,  G01N2021/1782 ,  G01N2021/4792 ,  G01N2021/8887 ,  G01N2201/103

Abstract: A laser is used in a non-destructive manner to detect surface and near-subsurface defects in dense ceramics and particularly in ceramic bodies with complex shapes such as ceramic bearings, turbine blades, races, and the like. The laser's wavelength is selected based upon the composition of the ceramic sample and the laser can be directed on the sample while the sample is static or in dynamic rotate or translate motion. Light is scattered off surface and subsurface defects using a preselected polarization. The change in polarization angle is used to select the depth and characteristics of surface/subsurface defects. The scattered light is detected by an optical train consisting of a charge coupled device (CCD), or vidicon, television camera which, in turn, is coupled to a video monitor and a computer for digitizing the image. An analyzing polarizer in the optical train allows scattered light at a given polarization angle to be observed for enhancing sensitivity to either surface or near-subsurface defects. Application of digital image processing allows subtraction of digitized images in near real-time providing enhanced sensitivity to subsurface defects. Storing known "feature masks" of identified defects in the computer and comparing the detected scatter pattern (Fourier images) with the stored feature masks allows for automatic classification of detected defects.

Abstract translation: 以非破坏性的方式使用激光来检测致密陶瓷中的表面和近地下缺陷，特别是陶瓷轴承，涡轮叶片，种类等复杂形状的陶瓷体。 基于陶瓷样品的组成选择激光器的波长，并且可以在样品静态或动态旋转或平移运动时将激光器定向在样品上。 光被预选的极化散射在表面和地下缺陷之外。 偏振角的变化用于选择表面/地下缺陷的深度和特征。 散射光通过由电荷耦合器件（CCD）或视频摄像机组成的光学系统来检测，电视摄像机又连接到视频监视器和用于数字化图像的计算机。 光学列车中的分析偏振器允许观察到给定偏振角的散射光，以增强对表面或近地下缺陷的敏感性。 数字图像处理的应用允许近实时地减少数字化图像，提供对地下缺陷的增强的灵敏度。 在计算机中存储已识别缺陷的已知“特征掩模”，并将检测到的散射图（傅立叶图像）与存储的特征掩模进行比较，可以自动分类检测到的缺陷。

公开(公告)号：US5171963A

公开(公告)日：1992-12-15

申请号：US700819

申请日：1991-05-16

Applicant: Masahiro Saruta ,  Tetsuji Sagisaka ,  Kazunari Maeda ,  Takumi Yashiki

Inventor： Masahiro Saruta ,  Tetsuji Sagisaka ,  Kazunari Maeda ,  Takumi Yashiki

IPC: B23K26/08 ,  G01N21/88 ,  G01N21/95 ,  G02F1/13 ,  G05B19/401

CPC classification number: G05B19/401 ,  B23K26/0853 ,  G01N21/88 ,  G02F1/1309 ,  G01N2021/9513 ,  G01N2201/103 ,  G05B2219/45165 ,  G05B2219/50064

Abstract: A laser processing device includes a Z stage movable in the up and down directions with respect to a XY stage movable in the X, Y directions on which an object to be processed is provided. The surface of the object to be processed is image-sensed by a CCD camera through a lens of an electrically-driven revolver attached to the Z stage, which is projected in a monitor. When a defect of the object is displayed in the monitor, a laser beam is radiated to a defective portion of the object from a laser head provided in the Z stage and the defective portion is removed.

公开(公告)号：US5086232A

公开(公告)日：1992-02-04

申请号：US547467

申请日：1990-06-29

Applicant: Sean P. J. Maguire ,  Kandiah Sivayoganathan ,  Velupillai Balendran

Inventor： Sean P. J. Maguire ,  Kandiah Sivayoganathan ,  Velupillai Balendran

IPC: G01B11/30 ,  G01N21/55 ,  G01N21/57 ,  G01N21/84 ,  G01N21/88 ,  G01N21/89 ,  G01N21/892 ,  G01N21/95 ,  G06T1/00

CPC classification number: G01N21/8806 ,  G01N2021/4726 ,  G01N2021/556 ,  G01N21/9515 ,  G01N2201/103

Abstract: A method of inspecting a surface of a member such as a motor vehicle body panel includes the steps of setting up the member at an inspection site, directing light on to the surface at a high angle of incidence so as to form a transverse trace across the surface and to reflect light from the surface with a low angle of deflection to form an image of the trace on a detection screen. A record of the image is produced. The trace is also viewed and recorded directly from a position substantially perpendicular to the surface. The records of the image and of the trace are analysed together to give an indication of the nature of the surface at the trace. The light is scanned in relation to the member to form further transverse traces across the member and the new traces and images are also analysed.

公开(公告)号：US4943732A

公开(公告)日：1990-07-24

申请号：US394674

申请日：1989-08-16

Applicant: Nicholas P. Economou

Inventor： Nicholas P. Economou

IPC: G01N21/88 ,  G01N21/95 ,  G02F1/13

CPC classification number: G02F1/1309 ,  G01N21/88 ,  G01N2021/8893 ,  G01N2021/9513 ,  G01N2201/103

Abstract: Methods and apparatus for locating defects in liquid crystal display (LCD) panels include scanning the panel with a laser, detecting reflected, refracted, scattered or transmitted light, and processing signals representative of the detected light utilizing a digital processor, to detect discontinuities in the arrays of LCD elements on the panel.

Abstract translation: 用于定位液晶显示器（LCD）面板中的缺陷的方法和设备包括用激光扫描面板，检测反射，折射，散射或透射的光，以及利用数字处理器处理表示检测到的光的信号，以检测在 面板上的LCD元件阵列。

公开(公告)号：US4845552A

公开(公告)日：1989-07-04

申请号：US087387

申请日：1987-08-20

Applicant: Bruno Jaggi ,  Mohammed J. Deen ,  Branko Palcic

Inventor： Bruno Jaggi ,  Mohammed J. Deen ,  Branko Palcic

IPC: G01N21/59 ,  G02B21/00

CPC classification number: G02B21/002 ,  G01N21/5911 ,  G01N2021/5938 ,  G01N2021/5957 ,  G01N2201/103

Abstract: A solid state microscope for viewing and scanning microscopic objects. The solid state microscope has a light source with a condensor and diffusion filter. A moveable stage is provided to allow X, Y, Z plane displacements in order to scan objects under the microscope. There is an objective to magnify the image of the object and project this image onto a two dimensional solid state image sensor. The solid state image sensor sends signals to an analog-to-digital converter where the signals are digitized and sent to a frame memory. A monitor is used to display the image of the object as stored in frame memory. The present invention can be interfaced with a computer to allow for automatic focusing and scanning of an image. The computer also houses storage means to store images. Methods of scanning an object are also described. A prism element can be used to obtain spectral scans of an object. In another scanning method, a first edge row of pixels is used to detect an object of interest in the scanned image. This first detection row activates an area of the sensor array at a later time to capture the entire image. In this way, only relevant information is collected and processed.

Abstract translation: 用于观察和扫描微观物体的固态显微镜。 固态显微镜具有带有聚光器和扩散滤光片的光源。 提供可移动台以允许X，Y，Z平面位移，以便在显微镜下扫描物体。 目的是放大对象的图像并将该图像投影到二维固态图像传感器上。 固态图像传感器将信号发送到模数转换器，其中信号被数字化并发送到帧存储器。 显示器用于显示存储在帧存储器中的对象的图像。 本发明可以与计算机接口以允许图像的自动聚焦和扫描。 计算机还容纳存储图像的存储装置。 还描述了扫描对象的方法。 可以使用棱镜元件来获得物体的光谱扫描。 在另一种扫描方法中，第一边缘像素行用于检测扫描图像中的感兴趣对象。 该第一检测行在稍后时间激活传感器阵列的区域以捕获整个图像。 这样，只收集和处理相关信息。