公开(公告)号：US06422825B2

公开(公告)日：2002-07-23

申请号：US09749469

申请日：2000-12-28

Applicant: Raphael A. Dandl ,  Wayne L. Johnson ,  Gareth Guest

Inventor： Raphael A. Dandl ,  Wayne L. Johnson ,  Gareth Guest

IPC: F04B3702

CPC classification number: H01J37/32834 ,  F04B17/00 ,  F04B37/14 ,  H01J37/3266 ,  H01J41/14 ,  H05H1/54

Abstract: A plasma pumping cell and method for pumping ions from a first region containing a plasma to a second region when the plasma pumping cell is interposed between the first and second regions, the plasma pumping cell including: a partition member (4) positioned between the first and second regions, the partition member (4) having a through opening defining a conduit (22); a plurality of magnets (24) positioned relative to the conduit in a manner to provide lines of magnetic force that extend through the conduit; a source of free electrons in communication with the conduit; and an electric potential source (34) disposed relative to the conduit to create an electrostatic field which accelerates ions from the conduit (22) to the second region.

Abstract translation: 一种等离子体泵浦单元，以及当等离子体泵浦单元插入在第一和第二区域之间时，将离子从含有等离子体的第一区域抽吸到第二区域的方法，所述等离子体泵浦单元包括：分隔构件（4） 和第二区域，所述分隔构件（4）具有限定导管（22）的通孔; 多个磁体（24），以相对于所述导管定位的方式提供延伸穿过所述导管的磁力线; 与导管连通的自由电子源; 和相对于导管设置的电位源（34），以产生将离子从导管（22）加速到第二区域的静电场。

公开(公告)号：US20010016166A1

公开(公告)日：2001-08-23

申请号：US09749469

申请日：2000-12-28

Applicant: TOKYO ELECTRON LIMITED

Inventor： Raphael A. Dandl ,  Wayne L. Johnson ,  Gareth Guest

IPC: F04F011/00

CPC classification number: H01J37/32834 ,  F04B17/00 ,  F04B37/14 ,  H01J37/3266 ,  H01J41/14 ,  H05H1/54

Abstract: A plasma pumping cell and method for pumping ions from a first region containing a plasma to a second region when the plasma pumping cell is interposed between the first and second regions, the plasma pumping cell including: a partition member (4) positioned between the first and second regions, the partition member (4) having a through opening defining a conduit (22); a plurality of magnets (24) positioned relative to the conduit in a manner to provide lines of magnetic force that extend through the conduit; a source of free electrons in communication with the conduit; and an electric potential source (34) disposed relative to the conduit to create an electrostatic field which accelerates ions from the conduit (22) to the second region.

Abstract translation: 一种等离子体泵浦单元，以及当等离子体泵浦单元插入在第一和第二区域之间时，将离子从含有等离子体的第一区域抽吸到第二区域的方法，所述等离子体泵浦单元包括：分隔构件（4） 和第二区域，所述分隔构件（4）具有限定导管（22）的通孔; 多个磁体（24），以相对于所述导管定位的方式提供延伸穿过所述导管的磁力线; 与导管连通的自由电子源; 和相对于导管设置的电位源（34），以产生将离子从导管（22）加速到第二区域的静电场。

公开(公告)号：US3496399A

公开(公告)日：1970-02-17

申请号：US3496399D

申请日：1967-12-11

Applicant: EDWARDS HIGH VACUUM INT LTD

Inventor： BUCKINGHAM JOHN DOBLE ,  CHAPMAN THOMAS ,  CLEAVER JOHN STUART ,  THORNE PETER NEVILLE

IPC: H01J41/04 ,  H01J41/14 ,  H01J7/16

CPC classification number: H01J41/14 ,  H01J41/04

公开(公告)号：US3441839A

公开(公告)日：1969-04-29

申请号：US3441839D

申请日：1966-11-22

Applicant: NAT RES CORP

Inventor： OPIJNEN LEENDERT J K VAN

IPC: H01J41/14 ,  G01N27/62

CPC classification number: H01J41/14

公开(公告)号：US3244990A

公开(公告)日：1966-04-05

申请号：US26110463

申请日：1963-02-26

Applicant: WISCONSIN ALUMNI RES FOUND

Inventor： HERB RAYMOND G ,  PAULY THEODORE E

IPC: H01J9/38 ,  H01J41/04 ,  H01J41/14 ,  H01J41/16 ,  H03F3/02

CPC classification number: H01J41/04 ,  H01J9/38 ,  H01J41/14 ,  H01J41/16 ,  H03F3/02

公开(公告)号：US3178864A

公开(公告)日：1965-04-20

申请号：US25402763

申请日：1963-01-25

Applicant: ANDERSON FRED W ,  OF TECHNOLOGY MASSACHUSETTS IN ,  LARKIN CHARLES R ,  CLARK WELLMAN L

Inventor： ANDERSON FRED W ,  OF TECHNOLOGY MASSACHUSETTS IN ,  LARKIN CHARLES R ,  CLARK WELLMAN L

IPC: H01J41/14

CPC classification number: H01J41/14

公开(公告)号：US2578009A

公开(公告)日：1951-12-11

申请号：US79341947

申请日：1947-12-23

Applicant: RCA CORP

Inventor： LINDER ERNEST G

IPC: H01J41/14

CPC classification number: H01J41/14

公开(公告)号：US2245215A

公开(公告)日：1941-06-10

申请号：US29714639

申请日：1939-09-29

Applicant: DISTILLATION PRODUCTS INC

Inventor： MORSE RICHARD S

IPC: H01J41/14

CPC classification number: H01J41/14 ,  Y10S55/15

公开(公告)号：US2063249A

公开(公告)日：1936-12-08

申请号：US74606034

申请日：1934-09-29

Applicant: RCA CORP

Inventor： HANSELL CLARENCE W

IPC: H01J41/14

CPC classification number: H01J41/14

公开(公告)号：US2022465A

公开(公告)日：1935-11-26

申请号：US64718932

申请日：1932-12-14

Applicant: RCA CORP

Inventor： HANSELL CLARENCE W

IPC: H01J41/14

CPC classification number: H01J41/14