Forming Ion Pump Having Silicon Manifold
    1.
    发明申请

    公开(公告)号:US20180233338A1

    公开(公告)日:2018-08-16

    申请号:US15948465

    申请日:2018-04-09

    CPC classification number: H01J41/14 F04B37/14 H01J41/18

    Abstract: An ultra-high vacuum (UHV) system includes a UHV cell and an ion pump to maintain the UHV in the UHV cell. The ion pump has a GCC (glass, ceramic, or crystalline) housing. An interior wall of the ion-pump housing serves as an anode or bears a coating that serves as an anode. At least one cathode is disposed with respect to the housing so that it can cooperate with the anode to form an electric field for establishing a Penning trap. The GCC housing defines a flow channel that extends radially through the anode so that a molecule can flow directly into the most ionizing region of a Penning trap.

    Bayard-alpert vacuum ionization tube
    2.
    发明授权
    Bayard-alpert vacuum ionization tube 失效
    BAYARD-ALPERT真空离子管

    公开(公告)号:US3839655A

    公开(公告)日:1974-10-01

    申请号:US39139273

    申请日:1973-08-24

    CPC classification number: H01J41/04

    Abstract: An improved Bayard-Alpert type vacuum ionization tube includes an electron collecting grid surrounding and coaxial with a centrally located positive ion collector. The grid has an inner diameter of approximately 0.5 inches and an electron emitting filament is positioned outside of the grid and spaced from the grid by approximately 0.2 inches. A grounded shield screen surrounds the grid outside of the filament and is coaxial with the collector. The tube has constant vacuum gauging sensitivity over the range from 10 1 to 5 X 10 10 torr.

    Abstract translation: 改进的Bayard-Alpert型真空电离管包括围绕并与中心定位的正离子收集器同轴的电子收集栅。 栅格具有大约0.5英寸的内径,并且电子发射丝位于栅格的外部并与网格间隔约0.2英寸。 接地屏蔽屏幕围绕灯丝外部的栅格并与收集器同轴。 该管在10 -1至5×10 -10托的范围内具有恒定的真空计量灵敏度。

    Forming ion pump having silicon manifold

    公开(公告)号:US10460918B2

    公开(公告)日:2019-10-29

    申请号:US15948465

    申请日:2018-04-09

    Abstract: An ultra-high vacuum (UHV) system includes a UHV cell and an ion pump to maintain the UHV in the UHV cell. The ion pump has a GCC (glass, ceramic, or crystalline) housing. An interior wall of the ion-pump housing serves as an anode or bears a coating that serves as an anode. At least one cathode is disposed with respect to the housing so that it can cooperate with the anode to form an electric field for establishing a Penning trap. The GCC housing defines a flow channel that extends radially through the anode so that a molecule can flow directly into the most ionizing region of a Penning trap.

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