Liquid control apparatus
    51.
    发明授权
    Liquid control apparatus 有权
    液体控制装置

    公开(公告)号:US09266130B2

    公开(公告)日:2016-02-23

    申请号:US13752232

    申请日:2013-01-28

    CPC classification number: B05B9/03 B01B1/005 B01D1/14

    Abstract: A liquid control apparatus 30 controls a spread mode of a liquid. The liquid control apparatus 30 includes a main body 31 having an upper surface 31c to which the liquid is supplied, and a mesh 47 woven in a net-like shape and provided to be in contact with the upper surface 31c. An inhibiting groove 41 is provided in the upper surface 31c in a portion that is in contact with the mesh 47. An introducing port 33b for introducing a gas from the inside of the main body 31 into the inhibiting groove 41 is provided in the main body 31. The introducing port 33b is formed such that the gas is introduced into the inhibiting groove 41 substantially parallel to the upper surface 31c.

    Abstract translation: 液体控制装置30控制液体的扩散模式。 液体控制装置30包括具有供给液体的上表面31c的主体31和网状47,网47形成为与上表面31c接触。 在上表面31c中设置有与网47接触的部分的抑制槽41.用于将主体31内部的气体引入抑制槽41的引入口33b设置在主体 引入口33b形成为使得气体基本上平行于上表面31c引入到抑制槽41中。

    Fluid control valve
    52.
    发明授权
    Fluid control valve 有权
    流体控制阀

    公开(公告)号:US09228669B2

    公开(公告)日:2016-01-05

    申请号:US13708244

    申请日:2012-12-07

    CPC classification number: F16K27/00 F16K27/0236 Y10T137/598

    Abstract: A fluid control valve includes: a valve main body including an inlet port and an outlet port, each being formed on opposite side surfaces; and a mounting plate attached to a lower end of the valve main body; wherein the valve main body has side surfaces located perpendicular to the opposite side surfaces and formed with locking protrusions, the mounting plate is formed with locking arms each extending from an upper end of the mounting plate, the locking arms each having a locking pawl facing and engaging with the protrusion, the valve main body is formed with an annular rib about an central axis on the lower end of the valve main body, and the upper end of the mounting plate is formed with a press-fit rib including a press-fit portion press-fitted in a wall surface of the annular rib.

    Abstract translation: 流体控制阀包括:阀主体,包括入口和出口,每个形成在相对的侧表面上; 以及安装板,安装在阀主体的下端; 其中所述阀主体具有垂直于所述相对侧表面并形成有锁定突起的侧表面,所述安装板形成有从所述安装板的上端延伸的锁定臂,所述锁定臂各自具有锁定爪, 与主体接合,阀主体在阀主体的下端围绕中心轴线形成环形肋,并且安装板的上端形成有压配合肋,该压配合肋包括压配合 部分压配合在环形肋的壁表面中。

    Valve seat structure of fluid control valve
    54.
    发明授权
    Valve seat structure of fluid control valve 有权
    流体控制阀的阀座结构

    公开(公告)号:US08960644B2

    公开(公告)日:2015-02-24

    申请号:US13272705

    申请日:2011-10-13

    Inventor: Tatsuhito Aoyama

    CPC classification number: F16K1/425

    Abstract: In a valve seat structure of a fluid control valve comprising a valve element, a body formed with an inlet port and an outlet port, and a valve seat member provided in the body, the fluid control valve being configured to bring the valve element into or out of contact with the valve seat member to control the flow of a fluid, the valve seat member is formed in a ring shape and includes a valve seat portion with which the valve element will come into our out of contact. Assuming that a thickness of the valve seat portion in a radial direction of the valve seat member is a first thickness t1 (0

    Abstract translation: 在包括阀元件的流体控制阀的阀座结构中,形成有入口和出口的主体以及设置在主体中的阀座构件,所述流体控制阀构造成使阀元件进入或 与阀座构件不接触以控制流体的流动,阀座构件形成为环形,并且包括阀座部分,阀元件将与该阀座部分脱离接触。 假设阀座部分在阀座部件的径向方向上的厚度为第一厚度t1(0

    Device for measuring three dimensional shape
    55.
    发明授权
    Device for measuring three dimensional shape 有权
    用于测量三维形状的装置

    公开(公告)号:US08896845B2

    公开(公告)日:2014-11-25

    申请号:US13558842

    申请日:2012-07-26

    CPC classification number: G01B11/2509 G01B11/2513

    Abstract: A device for measuring three dimensional shape is configured to perform one of a first imaging operation as imaging processing of a single operation among a multiplicity of imaging operations performed by irradiation of a first light pattern of multiply varied phases, and a second imaging operation as imaging processing of a single operation among a multiplicity of imaging operations performed by irradiation of a second light pattern of multiply varied phases. The device is configured to, simultaneous with completion of the first or second imaging operation, start shifting or switching operation of said first grating or a second grating relating to said first imaging operation. The device is configured to, without waiting for completion of the shifting or switching operation, perform the other imaging operation from among the first and second imaging operations.

    Abstract translation: 用于测量三维形状的装置被配置为执行第一成像操作中的一个,作为通过照射多重相位的第一光图案执行的多次成像操作中的单个操作的成像处理,以及作为成像的第二成像操作 在通过多相变化的相位的第二光图案的照射进行的多次成像操作中处理单个操作。 该装置被配置为,与完成第一或第二成像操作同时开始移动或切换所述第一光栅或与所述第一成像操作相关的第二光栅的操作。 该设备被配置为在不等待完成移位或切换操作的情况下,从第一和第二成像操作中执行另一个成像操作。

    Liquid feed pump and flow control device
    56.
    发明授权
    Liquid feed pump and flow control device 有权
    液体进料泵和流量控制装置

    公开(公告)号:US08888471B2

    公开(公告)日:2014-11-18

    申请号:US14012820

    申请日:2013-08-28

    Inventor: Shinichi Nitta

    CPC classification number: F04B43/046 F04B43/02 F04B43/021 F04B43/04

    Abstract: A liquid feed pump includes a pump housing, a diaphragm forming a pump chamber together with the recessed portion surface and partitioning the pump chamber from the hole, a reciprocating member reciprocatably inserted into the hole and reciprocating to press the diaphragm to deform, a driving member displacing the reciprocating member periodically in a direction of reciprocation, a seal portion sandwiching the diaphragm to seal the diaphragm in a position around an outer peripheral side of the recessed portion surface, a diaphragm receiving surface provided between the seal portion and the opening portion, and its contact area contacting the diaphragm decreases in response to an increase in the displacement of the reciprocating member to the recessed portion surface side and increases in response to an increase in the internal pressure of the pump chamber.

    Abstract translation: 液体供给泵包括泵壳体,隔膜,与凹部表面一起形成泵室并将泵室与孔分隔开;往复运动件,其可往复运动地插入孔中并往复运动以推压膜片变形;驱动构件 在往复运动方向周期性地移动往复运动件,密封部分夹住隔膜以将隔膜密封在凹部表面的外周侧的位置,设置在密封部和开口部之间的隔膜接收面,以及 响应于往复运动构件向凹部表面侧的位移的增加而与隔膜接触的接触面积减小,并且响应于泵室的内部压力的增加而增加。

    Fluid control valve
    57.
    发明授权
    Fluid control valve 有权
    流体控制阀

    公开(公告)号:US08840082B2

    公开(公告)日:2014-09-23

    申请号:US13811533

    申请日:2011-09-30

    CPC classification number: F16K7/17 F16K7/14 F16K27/0236 F16K31/122

    Abstract: A fluid control valve is configured in a manner that a first passage has at one end portion thereof a first port communication passage communicating with a first port, and at the other end portion thereof a first valve hole communication passage communicating with a valve hole, and the first port communication passage and the first valve hole communication passage communicate with each other. The resin valve body is provided with a valve seat support part which supports the valve seat and which is provided between the valve chamber, and the first port communication passage and the first valve hole communication passage. The valve seat support part has a valve seat reinforcement part, and the valve seat reinforcement part is formed so as to partially close the inside of the first passage.

    Abstract translation: 流体控制阀构造成使得第一通道的一端部具有与第一端口连通的第一端口连通路,在另一端部具有与阀孔连通的第一阀孔连通路,以及 第一端口连通路和第一阀孔连通路相互连通。 树脂阀体设置有阀座支撑部,该阀座支撑部支撑阀座,并且设置在阀室与第一端口连通路与第一阀孔连通路之间。 阀座支撑部具有阀座加强部,并且阀座加强部形成为部分地封闭第一通路的内部。

    Gas flow monitoring system
    59.
    发明授权
    Gas flow monitoring system 有权
    气体流量监测系统

    公开(公告)号:US08826935B2

    公开(公告)日:2014-09-09

    申请号:US13602719

    申请日:2012-09-04

    Abstract: A gas flow monitoring system is provided in process gas lines each arranged to supply gas to a predetermined process chamber via a flow control device, the system being configured to measure lowering or rising of gas pressure before and after the flow control device to monitor a flow rate of the flow control device. The system includes a first flow monitoring unit placed upstream of the flow control device in a selected one of the process gas lines, a second flow monitoring unit placed in a discharge passage upstream of the process chamber, and a controller that constantly monitors the flow rate of the flow control device with the first flow monitoring unit and, when the first flow monitoring unit detects the flow-rate abnormality two or more times, commands the second flow monitoring unit to re-verify whether flow-rate abnormality is present or not in the flow control device.

    Abstract translation: 气体流量监测系统设置在处理气体管线中,每个气体管线布置成经由流量控制装置将气体供应到预定的处理室,该系统被配置为测量流量控制装置之前和之后的气体压力的下降或上升以监测流量 流量控制装置的速率。 该系统包括:第一流量监测单元,其位于处理气体管线中所选择的一个流量控制装置的上游,放置在处理室上游的排放通道中的第二流量监测单元,以及不断监测流量的控制器 的流量控制装置,并且当第一流量监视单元检测到流量异常两次以上时,命令第二流量监视单元重新验证流量异常是否存在于 流量控制装置。

    LIQUID DRIP PREVENTION VALVE
    60.
    发明申请
    LIQUID DRIP PREVENTION VALVE 审中-公开
    液体防止阀

    公开(公告)号:US20140158230A1

    公开(公告)日:2014-06-12

    申请号:US14233278

    申请日:2012-08-20

    Abstract: In a liquid drip prevention valve, an input port is formed in the upper face of a flow passage block, and an output port is formed in the lower face, which opposes the upper face of the flow passage block. In addition, a valve chamber is formed on a side face of the flow passage block, and an air block abuts the side face. Furthermore, a diaphragm valve makes contact with a valve seat when pressure is applied with respect to a back side chamber of the diaphragm valve and separates from the valve seat when the back side chamber is brought to negative pressure, thus forming the liquid drip prevention valve.

    Abstract translation: 在液体防滴阀中,在流路块的上表面形成有输入口,在与流路块的上表面相对的下表面形成有输出口。 此外,在流路块的侧面形成有阀室,空气块与侧面抵接。 此外,当隔膜阀相对于隔膜阀的后侧室施加压力时,隔膜阀与阀座接触,并且当后侧室处于负压时与阀座分离,从而形成防液阀 。

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