Abstract:
A monitor system for monitoring a status of one or more equipment includes a plurality of mobile terminals respectively operated by a plurality of operators. Each of the plurality of mobile terminals includes a communicator that receives status information with regard to the status of the equipment via a communication line; a display that displays, when the status according to the status information received from one of the mobile terminals indicates that the equipment requires a specified operation, information showing that the specified operation is required; and a territory setter that sets a territory in which one or more operations for the equipment to be performed by the operator of the each of the plurality of mobile terminals.
Abstract:
A liquid control apparatus 30 controls a spread mode of a liquid. The liquid control apparatus 30 includes a main body 31 having an upper surface 31c to which the liquid is supplied, and a mesh 47 woven in a net-like shape and provided to be in contact with the upper surface 31c. An inhibiting groove 41 is provided in the upper surface 31c in a portion that is in contact with the mesh 47. An introducing port 33b for introducing a gas from the inside of the main body 31 into the inhibiting groove 41 is provided in the main body 31. The introducing port 33b is formed such that the gas is introduced into the inhibiting groove 41 substantially parallel to the upper surface 31c.
Abstract:
A pilot type solenoid valve includes a pilot valve unit and a passage block unit. The passage block unit has a rectangular parallelepiped shape including a pair of wide opposite surfaces, and four side surfaces surrounding the wide opposite surfaces. The four side surfaces include a first surface on which the pilot valve unit is attached, and a second surface formed with at least either an input port or an output port. A valve element is a diaphragm valve and arranged in parallel to the pair of wide opposite surfaces. The passage block unit includes a block body forming a valve chamber around a valve seat, and a flat cover. The flat cover includes a recess forming the back chamber of the diaphragm valve, and the flat cover has a flat cover communication path formed to provide communication between the recess and a common path of the pilot valve unit.
Abstract:
A fluid control valve includes: a valve main body including an inlet port and an outlet port, each being formed on opposite side surfaces; and a mounting plate attached to a lower end of the valve main body; wherein the valve main body has side surfaces located perpendicular to the opposite side surfaces and formed with locking protrusions, the mounting plate is formed with locking arms each extending from an upper end of the mounting plate, the locking arms each having a locking pawl facing and engaging with the protrusion, the valve main body is formed with an annular rib about an central axis on the lower end of the valve main body, and the upper end of the mounting plate is formed with a press-fit rib including a press-fit portion press-fitted in a wall surface of the annular rib.
Abstract:
A target supply apparatus includes a tank for storing a liquid target material, a nozzle for outputting the liquid target material in the tank, and a gas supply source for supplying gas into the tank, and controls a gas pressure inside the tank with a pressure of the gas supplied from the gas supply source which is provided with a pressure regulator. The target supply apparatus also includes a pressure-decrease gas passage of which one end is connected to the tank and the other end forms an exhaust port, a pressure-decrease valve provided on the pressure-decrease gas passage, and a controller for controlling open/close of the pressure-decrease valve. The controller, when the target material is caused not to output from the nozzle, opens the pressure-decrease valve and decreases the pressure inside the tank.
Abstract:
An external seal structure in a vacuum valve in which an upper end plate of a partition wall member is held between a valve body and a cylinder cover. An annular seal member for main fluid is placed between the upper end plate and the valve body to prevent material gas from leaking to atmosphere through an abutting section defined by the valve body and the cylinder cover connected in abutting manner. The main-fluid annular seal member is made of perfluoroelastomer. A fluorinated annular seal member made of fluorinated resin is placed between the upper end plate and the valve body and between the main-fluid annular seal member and the abutting section. A leak port communicated with outside air is provided in the valve body to communicate with between a seal point of the main-fluid annular seal member and a seal point of the fluorinated annular seal member.
Abstract:
An inlet flow passage, a valve seat section, and a valve chamber are formed within a flow passage block. An operation chamber, a rocking chamber, and a drive chamber are formed within a case along a reference plane. A valve rod is brought into contact with and separated from the valve seat section by reciprocating through the operation chamber in an extending direction thereof. A piston rod reciprocates through the drive chamber in an extending direction thereof. A lever member is received in the rocking chamber and has a support shaft section. The distance between the center of the support shaft section and a second contact position where the piston rod contacts the lever member is set greater than the distance between the center of the support shaft section and a first contact position where the valve rod contacts the lever member.