公开(公告)号：US20220364951A1

公开(公告)日：2022-11-17

申请号：US17771557

申请日：2020-12-14

Applicant: Applied Materials, Inc.

Inventor： Yongan XU ,  Chan Juan XING ,  Jinxin FU ,  Ludovic GODET

IPC: G01M11/00

Abstract: A method and apparatus for determining a line angle and a line angle rotation of a grating or line feature is disclosed. An aspect of the present disclosure involves, measuring coordinate points of a first line feature using a measurement tool, determining a first slope of the first line feature from the coordinate points, and determining a first line angle from the slope of the first line feature. This process can be repeated to find a second slope of a second line feature that is adjacent to the first line feature. The slope of the first and second line features can be compared to find a line angle rotation. The line angle rotation is compared to a design specification and a stitch quality is determined.

公开(公告)号：US20220308263A1

公开(公告)日：2022-09-29

申请号：US17655857

申请日：2022-03-22

Applicant: Applied Materials, Inc.

Inventor： Jinxin FU ,  Yangyang SUN ,  Ludovic GODET

IPC: G02B1/00 ,  G02B27/30 ,  G02B27/42

Abstract: Embodiments of the present disclosure relate to a sensor apparatuses with stacked metasurfaces suitable for small form factors. The apparatus is a sensing apparatus operable to be used in sensing applications. The apparatus includes a light source and an optical device. The optical device includes multiple metasurfaces. The optical device includes a collimation metasurface disposed on a substrate to collimate one or more laser beams from the light source. The one or more laser beams propagate through the substrate to a diffractive metasurface. The diffractive metasurface diffracts the collimated one or more laser beams into diffraction beams.

公开(公告)号：US20220163382A1

公开(公告)日：2022-05-26

申请号：US17456421

申请日：2021-11-24

Applicant: Applied Materials, Inc.

Inventor： Jinxin FU ,  Kazuya DAITO ,  Ludovic GODET

IPC: G01J1/04 ,  G01J1/08

Abstract: A method of optical device metrology is provided. The method includes providing a first type of light into a first optical device during a first time period; measuring a quantity of the first type of light transmitted from a first location on the top surface or the bottom surface during the first time period; coating at least a portion of an edge of the one or more edges with a first coating of optically absorbent material during a second time period that occurs after the first time period; providing the first type of light into the first optical device during a third time period that occurs after the second time period; and measuring a quantity of the first type of light transmitted from the first location on the top surface or the bottom surface during the third time period.