公开(公告)号：US20210262092A1

公开(公告)日：2021-08-26

申请号：US17186594

申请日：2021-02-26

Applicant: Applied Materials, Inc.

Inventor： Muhammad M. Rasheed ,  Mandyam Sriram ,  Anqing Cui ,  Sanjeev Baluja ,  Kevin Griffin ,  Joseph AuBuchon

IPC: C23C16/455 ,  C23C16/44

Abstract: Gas delivery systems and methods of delivering a process gas are described. The gas delivery system includes an inert gas line and a first reactive gas line connected to a gas line with a purge gas flow. The flows of inert gas and first reactive gas are controlled so that the pressure at the end of the gas line remains substantially constant.

公开(公告)号：US20210050186A1

公开(公告)日：2021-02-18

申请号：US16990306

申请日：2020-08-11

Applicant: Applied Materials, Inc.

Inventor： Hanhong Chen ,  Arkaprava Dan ,  Joseph AuBuchon ,  Kyoung Ha Kim ,  Philip A. Kraus

IPC: H01J37/32 ,  H01L21/285 ,  H01L21/768 ,  C23C16/34 ,  C23C16/511

Abstract: A method of depositing titanium nitride is disclosed. Some embodiments of the disclosure provide a PEALD process for depositing titanium nitride which utilizes a direct microwave plasma. In some embodiments, the direct microwave plasma has a high plasma density and low ion energy. In some embodiments, the plasma is generated directly above the substrate surface.

公开(公告)号：US20200256228A1

公开(公告)日：2020-08-13

申请号：US16789796

申请日：2020-02-13

Applicant: Applied Materials, Inc.

Inventor： Michael Rice ,  Sanjeev Baluja ,  Joseph AuBuchon ,  Hari Ponnekanti ,  Mario D. Silvetti ,  Kevin Griffin

IPC: F01N1/16 ,  F01N11/00 ,  F01N13/08

Abstract: Exhaust systems for handling multiple effluent streams are described. Some embodiments include pressure drops to prevent perturbations from one effluent source from affecting a second effluent source. Some embodiments incorporate an exhaust assembly with multiple inlets and pumps and a single outlet. The exhaust assembly includes shared auxiliary components like purge and cooling systems.