公开(公告)号：US06296779B1

公开(公告)日：2001-10-02

申请号：US09255236

申请日：1999-02-22

Applicant: William A. Clark ,  Thor Juneau ,  Roger T. Howe

Inventor： William A. Clark ,  Thor Juneau ,  Roger T. Howe

IPC: C03C1500

CPC classification number: G01C19/5719

Abstract: A microfabricated gyroscope to measure rotation about an axis parallel to the surface of the substrate. A voltage differential may be applied between pairs of electrode fingers to reduce the quadrature error. A microfabricated gyroscope includes a vibratory structure and interdigited electrodes having a high aspect ratio.

Abstract translation: 用于测量围绕平行于衬底表面的轴的旋转的微制造陀螺仪。 可以在电极指对之间施加电压差以减小正交误差。 微制造的陀螺仪包括具有高纵横比的振动结构和交叉指向的电极。

公开(公告)号：US5589082A

公开(公告)日：1996-12-31

申请号：US480467

申请日：1995-06-07

Applicant: Liwei Lin ,  Clark T. Nguyen ,  Roger T. Howe ,  Albert P. Pisano

Inventor： Liwei Lin ,  Clark T. Nguyen ,  Roger T. Howe ,  Albert P. Pisano

IPC: H03H9/46 ,  H01L21/00

CPC classification number: H03H9/02275 ,  H03H9/02377 ,  H03H9/46 ,  H03H9/462

Abstract: A micromechanical filter having planar components, and manufacturable using very large scale integrated circuit microfabrication techniques. The input and output transducers are interdigitated comb electrodes. The mechanical coupling between the input and output transducers includes planar flexures, displacement of the electrodes producing bending of the elements of the flexures. By sealing micromechanical filters in a vacuum and providing on-board circuitry, high signal-to-noise ratios and quality factors are achievable. Construction of a real-time spectrum analyzer using many micromechanical resonators, provides a device with high accuracy and a short sample time.

Abstract translation: 具有平面部件的微机械滤波器，并且可使用非常大规模的集成电路微加工技术制造。 输入和输出换能器是叉指梳状电极。 输入和输出换能器之间的机械耦合包括平面弯曲，电极的位移产生弯曲元件的弯曲。 通过在真空中密封微机械滤波器并提供板上电路，可以实现高信噪比和质量因素。 构建使用许多微机械谐振器的实时频谱分析仪，为设备提供高精度和短的采样时间。

公开(公告)号：US5565625A

公开(公告)日：1996-10-15

申请号：US347795

申请日：1994-12-01

Applicant: Roger T. Howe ,  Stephen Bart

Inventor： Roger T. Howe ,  Stephen Bart

IPC: G01L1/14 ,  G01P15/125 ,  G01P15/13 ,  G01P15/08

CPC classification number: G01P15/125 ,  G01L1/148 ,  G01P15/131 ,  H01G5/14 ,  G01P2015/0814

Abstract: A micromachined force sensor containing separate sensing and actuator structures. A member is suspended above the substrate so that it is movable along an axis in response to a force. The member includes a set of parallel sense fingers and a separate set of parallel force fingers. The sense fingers are positioned between fingers of two sense plates, to form a first differential capacitor, whose capacitance changes when the member moves in response to a force along the axis. The change in capacitance induces a sense signal on the member, which permits the measurement of the magnitude and duration of the force. The force fingers are positioned between fingers of two actuator plates, to form a second differential capacitor. The sense signal can be used to provide feedback to the second differential capacitor to generate different electrostatic forces between the force fingers and the two actuator plates, to offset the force applied along the preferred axis. Limit stops limit the movement of the member to less than the distance between the electrodes of the differential capacitors, to prevent contact between the electrodes. Additional fingers be positioned around the differential capacitors to minimize parasitic capacitances.

公开(公告)号：US5314572A

公开(公告)日：1994-05-24

申请号：US872037

申请日：1992-04-22

Applicant: Theresa A. Core ,  Roger T. Howe

Inventor： Theresa A. Core ,  Roger T. Howe

IPC: B81B3/00 ,  B81C99/00 ,  G01P15/08 ,  G01P15/125 ,  G01P15/13 ,  H01L21/306 ,  H01L21/764 ,  H01L29/84 ,  B29C37/00 ,  B44C1/22 ,  C03C15/00

CPC classification number: B81C1/0092 ,  B81C1/00928 ,  B81C99/004 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/131 ,  B81B2201/0235 ,  G01P2015/0814

Abstract: A suspended microstructure fabrication process. Photoresist pedestals are inserted in a sacrificial layer between the suspended microstructure and the substrate and photoresist spacers are inserted in the microstructure layer between non contacting portions of the suspended microstructure so that the photoresist pedestals and spacers support the microstructure bridge during the wet etching and drying process used to remove the sacrificial layer.

Abstract translation: 悬浮微结构制造工艺。 将光刻胶基座插入到悬浮的微结构和衬底之间的牺牲层中，并且将光致抗蚀剂间隔物插入到悬浮微结构的非接触部分之间的微结构层中，使得光致抗蚀剂基座和间隔件在湿蚀刻和干燥过程期间支撑微结构桥 用于去除牺牲层。

公开(公告)号：US5043043A

公开(公告)日：1991-08-27

申请号：US542435

申请日：1990-06-22

Applicant: Roger T. Howe ,  Jeffrey H. Lang ,  Martin F. Schlecht ,  Martin A. Schmidt ,  Stephen D. Senturia ,  Mehran Mehregany ,  Lee S. Tavrow

Inventor： Roger T. Howe ,  Jeffrey H. Lang ,  Martin F. Schlecht ,  Martin A. Schmidt ,  Stephen D. Senturia ,  Mehran Mehregany ,  Lee S. Tavrow

IPC: H02N1/00

CPC classification number: H02N1/004

Abstract: An electrostatic micromotor employs a side drive design. The stator operates in a plane above a substract and a moveable member lies and moves in the plane of the stator. An electrostatic field of operational strength is generated and sustained without breakdown in the plane between the stator and edges of the moveable member. Three fabrication processes enable formation of a moveable member in the plane of operation of the stator and spaced apart from the stator by a micron amount. One fabrication process deposits and patterns a structural layer to form the stator and moveable member over a sacrificial layer. A second fabrication process etches channels in a first structural layer to outline a stator, moveable member, and if desired, a bearing. A substrate is connected to the side of the structural layer through which the channels are etched and the opposite side is ground down to the ends of the channels to form salient stator, rotor and, if desired, bearing structures. The third fabrication process grows a sacrificial layer by local oxidation in an etched cavity of the substrate. A structural layer is then deposited and patterned over the substrate and sacrificial layer to form the stator and moveable member in a common plane. A harmonic side drive micromotor is also provided by the fabrication processes.

Abstract translation: 静电微电机采用侧驱设计。 定子在一个减法器上方的平面中工作，并且可移动构件位于定子的平面内并移动。 产生并维持操作强度的静电场，而不会在定子和可移动构件的边缘之间的平面内发生故障。 三个制造工艺使得能够在定子的操作平面中形成可移动构件并且与定子隔开微米量。 一个制造工艺沉积和图案化结构层，以在牺牲层上形成定子和可移动构件。 第二制造工艺蚀刻第一结构层中的通道以勾勒定子，可移动构件，并且如果需要，轮廓轴承。 衬底连接到结构层的侧面，通道通过该侧被蚀刻并且相对侧被研磨到通道的端部，以形成凸出的定子，转子以及如果需要的话承载结构。 第三制造工艺通过在衬底的蚀刻腔中的局部氧化来生长牺牲层。 然后在衬底和牺牲层上沉积和图案化结构层，以在公共平面中形成定子和可移动构件。 还通过制造工艺提供了谐波侧驱动微电机。

公开(公告)号：US4997521A

公开(公告)日：1991-03-05

申请号：US342952

申请日：1989-04-25

Applicant: Roger T. Howe ,  Jeffrey H. Lang ,  Martin F. Schlecht ,  Martin A. Schmidt ,  Stephen D. Senturia

Inventor： Roger T. Howe ,  Jeffrey H. Lang ,  Martin F. Schlecht ,  Martin A. Schmidt ,  Stephen D. Senturia

IPC: H02N1/00

CPC classification number: H02N1/004

Abstract: An electrostatically driven microactuator is micromachined in a monolithic process. Sacrificial layers are placed between a moving element and stator structural layers. Removal of the sacrificial layers leaves a free standing moving element and micron wide air gaps within a stator. An electric field of about 100 Mv/m and higher is supported across the micron wide gap without breakdown and enables high energy torque densities to be produced between the stator and the moving element. One electrostatic drive scheme involves a series of stator electrodes attached to the stator and a series of electrodes attached to the moving element charged in sequence to attract each other in a direction of movement and to oppose each other in a direction normal to movement. A bearing is aligned with the moving element within the stator during the layering of a sacrificial layer over an edge of the moving element structural layer. The bearing and stator laterally stabilize the moving element. Vertical stability is through aerodynamic shaping of the moving element, electronic circuits, or bushings. Applications of the microactuator include a linearly sliding shutter, an optical modulator, a gyroscope and an air pump.

Abstract translation: 静电驱动微致动器在单片工艺中被微加工。 牺牲层被放置在移动元件和定子结构层之间。 牺牲层的移除在定子内留​​下自由站立的移动元件和微米宽的气隙。 大约100Mv / m以上的电场被支撑在微米宽的间隙上而不会发生故障，并且能够在定子和移动元件之间产生高能量的转矩密度。 一个静电驱动方案涉及一系列连接到定子的定子电极和一系列连接到移动元件上的电极，该电极按顺序充电以在运动方向上彼此吸引并且在垂直于运动的方向上彼此相对。 在牺牲层在移动元件结构层的边缘上层叠期间，轴承与定子内的移动元件对齐。 轴承和定子横向稳定移动元件。 垂直稳定性是通过移动元件，电子电路或衬套的空气动力学成形。 微致动器的应用包括线性滑动快门，光学调制器，陀螺仪和空气泵。

公开(公告)号：US4860232A

公开(公告)日：1989-08-22

申请号：US41773

申请日：1987-04-22

Applicant: Hae-Seung Lee ,  Roger T. Howe ,  Joseph T. Kung

Inventor： Hae-Seung Lee ,  Roger T. Howe ,  Joseph T. Kung

IPC: G01D5/241 ,  G01L9/12 ,  G01R17/06 ,  G01R27/26

CPC classification number: G01D5/2415 ,  G01L9/125 ,  G01R17/06 ,  G01R27/2605

Abstract: The present invention comprises a circuit for measuring the capacitive differences of small capacitors. The circuit comprises a reference capacitor and a sensor capacitor. Connected to one of the plates of each capacitor is a switch which connects the capacitors to one of two reference voltages. The other plate of the capacitors are connected to an input terminal of a voltage comparator. The comparator compares the input voltage with a third reference voltage. Differences in voltages detected by the comparator are applied to a feedback loop for generating an offset voltage at the input terminal. The offset voltage applied at the input terminal is proportional to the capacitive difference between the reference capacitor and the sensor capacitor. The feedback loop comprises a successive approximation register for digitizing the offset voltages and a digital to analog converter for converting the digitized voltages into analog voltages which are applied at the input terminal. Digitized offset voltages can be measured at the output of the successive approximation register.

Abstract translation: 本发明包括用于测量小电容器的电容差的电路。 该电路包括参考电容器和传感器电容器。 连接到每个电容器的一个板的是将电容器连接到两个参考电压之一的开关。 电容器的另一个电极连接到电压比较器的输入端。 比较器将输入电压与第三参考电压进行比较。 由比较器检测的电压的差异被施加到用于在输入端产生偏移电压的反馈回路。 施加在输入端子的偏移电压与参考电容器和传感器电容器之间的电容差成正比。 反馈回路包括用于数字化偏移电压的逐次逼近寄存器和用于将数字化电压转换成在输入端施加的模拟电压的数模转换器。 可以在逐次逼近寄存器的输出端测量数字化偏移电压。

公开(公告)号：US06448622B1

公开(公告)日：2002-09-10

申请号：US09617300

申请日：2000-07-17

Applicant: Andrea Franke ,  Roger T. Howe ,  Tsu-Jae King

Inventor： Andrea Franke ,  Roger T. Howe ,  Tsu-Jae King

IPC: H01L2982

CPC classification number: B81C1/00246 ,  B81B2203/0118 ,  B81C2201/0109 ,  B81C2203/0735 ,  Y10S438/933

Abstract: This invention relates to micro-electromechanical systems using silicon-germanium films. Such a system includes one or more layers of Si1−xGex, deposited on a substrate, where 0

Abstract translation: 本发明涉及使用硅 - 锗膜的微机电系统。 这种系统包括沉积在衬底上的一层或多层Si1-xGex，其中0

公开(公告)号：US06250156B1

公开(公告)日：2001-06-26

申请号：US09298631

申请日：1999-04-23

Applicant: Ashwin A. Seshia ,  Roger T. Howe

Inventor： Ashwin A. Seshia ,  Roger T. Howe

IPC: G01C1900

CPC classification number: G01C19/5719

Abstract: A microfabricated gyroscopic sensor for measuring rotation about a Z-axis. The sensor includes a substrate, a first mass, a second mass, a coupling system connecting the first mass and the second mass, and a suspension system connecting the first mass and the second mass to the substrate. The sensor further includes a drive system to cause the first mass and the second mass to vibrate in an antiphase mode along a drive axis, and a position sensor to measure a displacement of the first mass and the second mass along a sense axis perpendicular to the drive axis and generally parallel to the surface of the substrate, wherein rotation of the first mass and the second mass about the Z-axis perpendicular to the surface of the substrate and vibration of the first mass and the second mass along the drive axis generates a Coriolis force to vibrate the first mass and the second mass along the sense axis in antiphase to each other.

Abstract translation: 用于测量围绕Z轴的旋转的微制造陀螺仪传感器。 传感器包括基板，第一质量块，第二质量块，连接第一质量块和第二质量块的联接系统，以及将第一质量块和第二质量块连接到衬底的悬架系统。 传感器还包括驱动系统，其使第一质量块和第二质量块沿着驱动轴以反相模式振动;以及位置传感器，用于测量第一质量块和第二质量块沿垂直于 驱动轴线并且大致平行于基板的表面，其中第一质量块和第二质量块围绕垂直于衬底表面的Z轴的旋转和沿着驱动轴线的第一质量块和第二质量块的振动产生一个 科里奥利力使第一质量和第二质量沿着感测轴彼此反相振动。

公开(公告)号：US5969249A

公开(公告)日：1999-10-19

申请号：US073747

申请日：1998-05-06

Applicant: Trey Roessig ,  Roger T. Howe ,  Albert P. Pisano

Inventor： Trey Roessig ,  Roger T. Howe ,  Albert P. Pisano

IPC: G01P15/08 ,  G01P15/097 ,  G01P15/10 ,  G01P15/09

CPC classification number: G01P15/097 ,  G01P15/0802 ,  G01P2015/0814

Abstract: An accelerometer comprises a proof mass, a first resonant tuning fork connected to the proof mass, a second resonant tuning fork connected to the proof mass, and a flexural lever leverage system supporting the proof mass above a substrate. The flexural lever leverage system enhances an acceleration force applied to the proof mass to cause a tensile force in the first resonant tuning fork which raises its resonant frequency, and a compressive force in the second resonant tuning fork which lowers its resonant frequency. The device may be fabricated using semiconductor-based surface-micromachining technology.

Abstract translation: 加速度计包括检测质量块，连接到检验质量块的第一谐振音叉，连接到校验块的第二谐振音叉，以及支撑在衬底上方的校准块的弯曲杆杠杆系统。 弯曲杆杠杆系统增强了施加到检验质量块上的加速力，从而在第一共振音叉中引起拉力，从而提高其共振频率，并使第二共振音叉中的压缩力降低其谐振频率。 该器件可以使用基于半导体的表面微加工技术来制造。