Abstract:
Provided is a three-dimensional (3D) capacitor including conductors formed at a high density inside holes of an anodic oxide film, and a first electrode layer and a second electrode layer electrically connected to the conductors. Thus, a high capacitance relative to a size of the 3D capacitor may be easily achieved.
Abstract:
The present invention relates to a transfer head gripping and transferring micro LEDs from a first substrate to a second substrate. More particularly, the present invention relates to a transfer head gripping and transferring micro LEDs in a batch manner without any error even when there is a height difference of the micro LEDs.
Abstract:
A micro sensor package having a low thermal conductivity includes: a substrate on which a metal pattern is formed; a sensing chip disposed on the substrate; a cover covering the sensing chip and formed with a hole for supplying gas to the sensing chip; and a filter covering the hole, wherein the sensing chip comprises a sensor platform having a plurality of first pores formed along the up-down direction, and a sensor electrode formed on an upper portion or a lower portion of the sensor platform and electrically connected to the metal pattern.
Abstract:
A fluid permeable anodic oxide film includes a plurality of regularly-disposed pores formed by anodizing metal and a plurality of permeation holes having an inner width larger than an inner width of the pores and extending through the fluid permeable anodic oxide film. Also provided is a fluid permeable body which makes use of the fluid permeable anodic oxide film.
Abstract:
A micro heater and a micro sensor is capable of providing a heater having a small thermal capacity by forming an air gap which surrounds the heater wire, and forming the heater wire on a porous substrate.