公开(公告)号：US20170373073A1

公开(公告)日：2017-12-28

申请号：US15686169

申请日：2017-08-25

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Chun-Hsien Huang ,  Yu-Tse Kuo ,  Shu-Ru Wang

IPC: H01L27/11 ,  H01L29/66 ,  H01L29/78

CPC classification number: H01L29/6681 ,  H01L27/1104 ,  H01L27/1116 ,  H01L29/785

Abstract: A static random-access memory (SRAM) cell array forming method includes the following steps. A plurality of fin structures are formed on a substrate, wherein the fin structures include a plurality of active fins and a plurality of dummy fins, each PG (pass-gate) FinFET shares at least one of the active fins with a PD (pull-down) FinFET, and at least one dummy fin is disposed between the two active fins having two adjacent pull-up FinFETs thereover in a static random-access memory cell. At least a part of the dummy fins are removed. The present invention also provides a static random-access memory (SRAM) cell array formed by said method.

公开(公告)号：US20170263597A1

公开(公告)日：2017-09-14

申请号：US15604685

申请日：2017-05-25

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Ching-Wen Hung ,  Chih-Sen Huang ,  Shih-Fang Tzou ,  Yi-Wei Chen ,  Yung-Feng Cheng ,  Li-Ping Huang ,  Chun-Hsien Huang ,  Chia-Wei Huang ,  Yu-Tse Kuo

IPC: H01L27/02 ,  H01L21/8238 ,  H01L29/66 ,  H01L21/768 ,  H01L27/11 ,  H01L27/092

CPC classification number: H01L27/0207 ,  H01L21/768 ,  H01L21/76816 ,  H01L21/76829 ,  H01L21/823821 ,  H01L21/823871 ,  H01L27/0924 ,  H01L27/1104 ,  H01L29/66545 ,  H01L29/6681 ,  H01L29/7851

Abstract: Semiconductor devices and method of manufacturing such semiconductor devices are provided for improved FinFET memory cells to avoid electric short often happened between metal contacts of a bit cell, where the meal contacts are positioned next to a dummy gate of a neighboring dummy edge cell. In one embodiment, during the patterning of a gate layer on a substrate surface, an improved gate slot pattern is used to extend the lengths of one or more gate slots adjacent bit lines so as to pattern and sectionalize a dummy gate line disposed next to metal contacts of an active memory cell. In another embodiment, during the patterning of gate lines, the distances between one or more dummy gates lines disposed adjacent an active memory cell are adjusted such that their locations within dummy edge cells are shifted in position to be away from metal contacts of the active memory cell.

公开(公告)号：US09761302B1

公开(公告)日：2017-09-12

申请号：US15092613

申请日：2016-04-06

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Tien-Yu Lu ,  Chang-Hung Chen ,  Chun-Hsien Huang ,  Han-Tsun Wang ,  Jheng-Tai Yan ,  Yu-Tse Kuo

IPC: G11C11/34 ,  G11C11/417 ,  G11C11/412 ,  H01L27/105

CPC classification number: G11C11/417 ,  G11C8/16 ,  G11C11/412 ,  G11C11/418 ,  G11C11/419 ,  H01L27/0207 ,  H01L27/105 ,  H01L27/1104

Abstract: A SRAM cell includes a first pass-gate device and a second-pass gate device comprising a first conductivity type, a first pull-down device and a second pull-down device comprising the first conductivity type, and a first pull-up device and a second pull-up device comprising a second conductivity type complementary to the first conductivity type. The first pass-gate device and the second pass-gate device respectively include first lightly-doped drains (hereinafter abbreviated as LDDs. The first pull-down device and the second pull-down device respectively include second LDDs. And a dosage of the first LDDs is different from a dosage of the second LDDs.

公开(公告)号：US09728541B1

公开(公告)日：2017-08-08

申请号：US15185043

申请日：2016-06-17

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Chun-Hsien Huang ,  Yu-Tse Kuo ,  Shu-Ru Wang

IPC: H01L21/336 ,  H01L27/11 ,  H01L29/78 ,  H01L29/66

CPC classification number: H01L29/6681 ,  H01L27/1104 ,  H01L27/1116 ,  H01L29/785

Abstract: A static random-access memory (SRAM) cell array forming method includes the following steps. A plurality of fin structures are formed on a substrate, wherein the fin structures include a plurality of active fins and a plurality of dummy fins, each PG (pass-gate) FinFET shares at least one of the active fins with a PD (pull-down) FinFET, and at least one dummy fin is disposed between the two active fins having two adjacent pull-up FinFETs thereover in a static random-access memory cell. At least a part of the dummy fins are removed. The present invention also provides a static random-access memory (SRAM) cell array formed by said method.

公开(公告)号：US09401366B1

公开(公告)日：2016-07-26

申请号：US14792636

申请日：2015-07-07

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Tien-Yu Lu ,  Chang-Hung Chen ,  Yu-Tse Kuo ,  Chun-Hsien Huang

IPC: G11C11/00 ,  H01L27/088 ,  H01L27/11 ,  H01L27/02 ,  H01L29/06 ,  G11C11/412 ,  H01L21/84 ,  H01L27/105 ,  H01L29/423

CPC classification number: H01L27/1104 ,  G11C11/412 ,  G11C11/4125 ,  H01L21/845 ,  H01L27/1052 ,  H01L29/42392

Abstract: The present invention provides a layout pattern of an 8-transistor static random access memory (8T-SRAM), at least including a first diffusion region, a second diffusion region and a third diffusion region disposed on a substrate, a critical dimension region being disposed between the first diffusion region and the third diffusion region. The critical dimension region directly contacts the first diffusion region and the third diffusion region, a first extra diffusion region, a second extra diffusion region and a third extra diffusion region disposed surrounding and directly contacting the first diffusion region, the second diffusion region and the third diffusion region respectively. The first, the second and the third extra diffusion region are not disposed within the critical dimension region.

Abstract translation: 本发明提供了至少包括第一扩散区域，第二扩散区域和设置在衬底上的第三扩散区域的8-晶体管静态随机存取存储器（8T-SRAM）的布局图案，设置临界尺寸区域 在第一扩散区域和第三扩散区域之间。 临界尺寸区域直接接触第一扩散区域和第三扩散区域，第一额外扩散区域，第二额外扩散区域和设置在第一扩散区域，第二扩散区域和第三扩散区域周围并直接接触的第三额外扩散区域 扩散区。 第一，第二和第三附加扩散区域不设置在临界尺寸区域内。

公开(公告)号：US12224001B2

公开(公告)日：2025-02-11

申请号：US18071658

申请日：2022-11-30

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Chun-Hsien Huang ,  Yu-Tse Kuo ,  Shu-Ru Wang ,  Li-Ping Huang ,  Yu-Fang Chen ,  Chun-Yen Tseng ,  Tzu-Feng Chang ,  Chun-Chieh Chang

IPC: G11C11/412 ,  H01L29/66 ,  H01L29/78 ,  H10B10/00

Abstract: The invention provides a layout pattern of static random access memory (SRAM), which at least comprises a plurality of gate structures located on a substrate and spanning the plurality of fin structures to form a plurality of transistors distributed on the substrate, wherein the plurality of transistors comprise two pull-up transistors (PU), two pull-down transistors (PD) to form a latch circuit, and two access transistors (PG) connected to the latch circuit. In each SRAM memory cell, the fin structure included in the pull-up transistor (PU) is defined as a PU fin structure, the fin structure included in the pull-down transistor (PD) is defined as a PD fin structure, and the fin structure included in the access transistor (PG) is defined as a PG fin structure, wherein a width of the PD fin structure is wider than a width of the PG fin structure.

公开(公告)号：US20240404587A1

公开(公告)日：2024-12-05

申请号：US18218025

申请日：2023-07-04

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Chun-Hsien Huang ,  Yu-Tse Kuo ,  Shu-Ru Wang ,  Li-Ping Huang ,  Chun-Yen Tseng

IPC: G11C11/412 ,  G11C5/06

Abstract: The invention provides a layout pattern of static random access memory (SRAM), which comprises a substrate, and a plurality of fin structures and a plurality of gate structures are located on the substrate to form a plurality of transistors. The plurality of transistors comprise a first pull-up transistor (PU1), a first pull-down transistor (PD1), a second pull-up transistor (PU2), a second pull-down transistor (PD2), a first access transistor (PG1A), a second access transistor (PG1B), a third access transistor (PG2A) and a fourth access transistor (PG2B). A first word line contact pad connected to a gate of the first access transistor (PG1A) and a first word line, and a second word line contact pad connected to a gate of the second access transistor (PG1B) and a second word line, the first word line contact pad and the second word line contact pad do not overlap in a vertical direction.

公开(公告)号：US12148809B2

公开(公告)日：2024-11-19

申请号：US17583225

申请日：2022-01-25

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Chun-Hsien Huang ,  Yu-Tse Kuo ,  Shu-Ru Wang ,  Chien-Hung Chen ,  Li-Ping Huang ,  Chun-Yen Tseng

IPC: H01L29/423 ,  G11C5/06 ,  G11C11/412 ,  H01L29/78 ,  H10B10/00

Abstract: The present invention provides a layout pattern of static random access memory, comprising a PU1 (first pull-up transistor), a PU2 (second pull-up transistor), a PD1A (first pull-down transistor), a PD1B (second pull-down transistor), a PD2A (third pull-down transistor), a PD2B (fourth pull-down transistor), a PG1A (first access transistor), a PG1B (second access transistor), a PG2A (third access transistor) and a PG2B (fourth access transistor) located on the substrate. The PD1A and the PD1B are connected in parallel with each other, the PD2A and the PD2B are connected in parallel with each other, wherein the gate structures include a first J-shaped gate structure, and the first J-shaped gate structure is an integrally formed structure.

公开(公告)号：US20230403837A1

公开(公告)日：2023-12-14

申请号：US17857065

申请日：2022-07-04

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Chun-Hsien Huang ,  Yu-Tse Kuo ,  Shu-Ru Wang ,  Li-Ping Huang ,  Chun-Yen Tseng

IPC: H01L27/11

CPC classification number: H01L27/1104

Abstract: The invention provides a static random access memory (SRAM) array pattern, which comprises a substrate, a first region, a second region, a third region and a fourth region are defined on the substrate and arranged in an array, each region partially overlaps with the other three regions, and each region contains a SRAM cell, the layout of the SRAM cell in the first region is the same as that in the third region, the layout of the SRAM cell in the second region is the same as that in the fourth region, and the layout of the SRAM cell in the first region and the layout of the SRAM cell in the fourth region are mirror patterns along a horizontal axis.

公开(公告)号：US20230018513A1

公开(公告)日：2023-01-19

申请号：US17952327

申请日：2022-09-26

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Chun-Yen Tseng ,  Shu-Ru Wang ,  Yu-Tse Kuo ,  Chang-Hung Chen ,  Yi-Ting Wu ,  Shu-Wei Yeh ,  Ya-Lan Chiou ,  Chun-Hsien Huang

IPC: H01L27/22 ,  H01L43/02

Abstract: A layout pattern of a magnetoresistive random access memory (MRAM) includes a substrate having a first cell region and a second cell region and a diffusion region on the substrate extending through the first cell region and the second cell region. Preferably, the diffusion region includes a first H-shape and a second H-shape according to a top view.