公开(公告)号：US4318889A

公开(公告)日：1982-03-09

申请号：US204540

申请日：1980-11-06

Applicant: Peter Schiller

Inventor： Peter Schiller

IPC: H01L21/31 ,  B01J3/03 ,  B01J19/00 ,  C30B25/08 ,  C30B31/10 ,  F16L53/00 ,  F16L55/10 ,  H01L21/22 ,  F28D21/00

CPC classification number: C30B31/10 ,  B01J19/0053 ,  B01J19/0073 ,  B01J3/03 ,  C30B25/08 ,  F16L53/00 ,  F16L55/10 ,  B01J2219/00085

Abstract: An impermeable cooled closing plug adapted for closing the end of a semiconductor manufacture processing tube is made of a material selected from the group consisting of quartz, silicon and silicon carbide, which materials have low heat conductivity and high chemical stability. The cooling effects of a cooling liquid supplied to the entrance flange of a processing tube are isolated from the tube closing plug by virtue of the low heat conductivity, thus preventing unwanted condensation effects at the entrance of the tube.

Abstract translation: 用于封闭半导体制造处理管的端部的不可渗透的冷却闭合塞由选自石英，硅和碳化硅的材料制成，该材料具有低导热性和高化学稳定性。 供给到处理管的入口凸缘的冷却液的冷却效果由于导热率低而与管闭塞隔离，从而防止了管入口处的不必要的冷凝效应。

公开(公告)号：US4287157A

公开(公告)日：1981-09-01

申请号：US151762

申请日：1980-05-21

Applicant: Klaus Koch

Inventor： Klaus Koch

IPC: B01J3/03 ,  C10G1/06 ,  C10J3/50 ,  B01J4/00 ,  B01J8/10

CPC classification number: C10G1/065 ,  B01J3/03 ,  Y10S277/927

Abstract: A method and apparatus for sealing the drive end of a chamber for the preparation and hydrogenation of coal with hydrogen to form hydrocarbons in which the chamber comprises a hollow cylinder with a rotatable element therein having a conveying web thereon and in a sealing region a pressurized sealing substance such as coal particles mixed with oil is fed from a storage container through a feed passage into an annular recess at a pressure higher than that in the chamber so that the sealing substance passes through a conical annular gap which tapers towards the chamber. A further narrower gap on the drive side of the recess leads to a further annular recess from which the sealing substance can be extracted through a return pipe. Pressure comparison means control the feed pressure in the feed passage. The recesses and the annular gap can be provided by machining the rotatable element rather than the hollow cylinder and forward feed screw forms may be provided on the rotatable element in the sealing region.

Abstract translation: 一种用于密封用于用氢气制备和氢化煤以形成烃的室的驱动端的方法和装置，其中所述室包括其中具有可旋转元件的中空圆柱体，其中具有输送幅材，并且在密封区域中具有加压密封 与油混合的煤粒子的物质从储存容器通过进料通道以比室内的压力高的压力进入环形凹部，使得密封物质通过朝向腔室逐渐变细的锥形环形间隙。 在凹部的驱动侧上的间隙更窄，导致另外的环形凹部，密封物质可从该凹槽通过返回管从中抽出。 压力比较装置控制进料通道中的进料压力。 可以通过机加工可旋转元件而不是中空圆筒来提供凹部和环形间隙，并且可以在密封区域中的可旋转元件上设置向前进给螺杆形式。

公开(公告)号：US4249846A

公开(公告)日：1981-02-10

申请号：US971209

申请日：1978-12-20

Applicant: Daniel Worsham

Inventor： Daniel Worsham

IPC: B01J3/03 ,  C23C14/56 ,  F16J15/16 ,  C23C13/08

CPC classification number: C23C14/56 ,  B01J3/03 ,  F16J15/168 ,  Y10S277/906 ,  Y10S414/139

Abstract: In a rotary vacuum sealed wafer transport system for transporting semiconductive wafers between ambient atmosphere and subatmospheric pressure within a wafer processing station, the wafers, on a conveyor web pass through a slot in the vacuum chamber of the processing station. The evacuable envelope of the processing station has an external concave face portion intersecting with a generally planar face portion with the slot being positioned generally at the intersection of the concave and planar face portions. A deformable elastic roller, preferably pneumatically inflated, is disposed for rolling sealing engagement with the conveyor web and wafer and for wiping sealing engagement with portions of the planar and concave faces to provide a gas tight seal of the slot while permitting passage of the conveyor web with the wafers thereon into the evacuated wafer processing station. In a preferred embodiment, the conveyor web passes through input and output slots with pneumatic rollers sealing the pair of slots. In the latter case, the rollers are preferably driven in unison to prevent any wiping action of the roller on the surface of the wafer. In an alternative embodiment, the conveyor web is omitted.

Abstract translation: 在用于在晶片处理站内的环境气氛和低于大气压之间运输半导体晶片的旋转式真空密封晶片传送系统中，传送带上的晶片通过处理站的真空室中的槽。 处理站的可抽出的外壳具有与大体上平面的面部相交的外凹面部分，该凹槽大致位于凹面部分和平面部分的相交处。 优选地气动膨胀的可变形的弹性辊被设置用于与输送带和晶片滚动密封接合，并且用于擦拭与平面和凹面的部分的密封接合，以提供槽的气密密封，同时允许输送带 其上的晶片进入真空的晶片处理站。 在优选实施例中，输送带通过输入和输出槽与密封该对槽的气动辊相通。 在后一种情况下，优选地一起驱动辊以防止辊在晶片表面上的任何擦拭作用。 在替代实施例中，省略了传送带。

公开(公告)号：US4122969A

公开(公告)日：1978-10-31

申请号：US796215

申请日：1977-05-12

Applicant: Dale G. Hugley

Inventor： Dale G. Hugley

IPC: B01J3/03 ,  F16J13/24 ,  B65D45/00 ,  B65D51/18

CPC classification number: B01J3/03 ,  F16J13/24 ,  Y10S220/20

Abstract: Disclosed is a safety closure apparatus for a pressure vessel, particularly for a vessel such as a pump stabilizer which has a gas compartment and a liquid compartment therein, both of which are normally pressurized. The apparatus includes a safety head configured to cover the closure means of the vessel to prevent its actuation; a liquid pressure bleed valve which must be removed before the safety hood can be moved off of the closure means, thereby insuring depressurization of the liquid compartment prior to opening; and gas pressure bleed means automatically operable upon movement of the safety hood off of the closure means, thereby also insuring depressurization of the gas compartment before access can be had to the closure means to actuate it to open the vessel.

Abstract translation: 公开了一种用于压力容器的安全闭合装置，特别是用于诸如泵稳定器的容器，其具有通常被加压的气室和液室。 该装置包括安全头，其构造成覆盖容器的封闭装置以防止其致动; 在安全罩能够从封闭装置移出之前必须将其移除的液体压力放泄阀，从而在打开之前确保液体隔室的减压; 并且气体压力泄放装置在安全罩从封闭装置移开时可自动操作，从而也可以在封闭装置进入开启装置之前确保气体隔间的减压以使其开启以打开容器。

公开(公告)号：US3915337A

公开(公告)日：1975-10-28

申请号：US31242572

申请日：1972-12-05

Applicant: FOSTER WHEELER ENERGY CORP

Inventor： PARSELS DONALD I

IPC: F16J12/00 ,  B01J3/03 ,  F16B4/00 ,  F16J13/02 ,  F16J13/12 ,  B65D53/00 ,  B23P11/02 ,  B65D45/02

CPC classification number: F16J13/12 ,  B01J3/03 ,  F16B4/006 ,  Y10S277/909 ,  Y10S277/91 ,  Y10T29/49865

Abstract: A fluid container, such as a pressure vessel, in which a removable closure plug is adapted to sealingly close an open end of a cylindrical vessel. The closure plug is supported relative to the vessel in a manner so that a space is defined between respective surface portions thereof, with a sealing member being disposed in the space. Heat is applied to the vessel to cause movement thereof relative to the closure plug and a compression of said sealing member prior to the final attachment of the closure plug to the vessel.

Abstract translation: 流体容器，例如压力容器，其中可移除的封闭塞适于密封地封闭圆柱形容器的开口端。 封闭塞以相对于容器的相应表面部分之间限定空间的方式被支撑，密封件设置在该空间中。 在将封闭塞最终附接到容器之前，将热量施加到容器以引起其相对于封闭塞的运动和所述密封构件的压缩。

公开(公告)号：US3698591A

公开(公告)日：1972-10-17

申请号：US3698591D

申请日：1971-01-04

Applicant: US NAVY

Inventor： MORIN RICHARD A ,  LANPHIER EDWARD H

IPC: B01J3/03 ,  B63C11/32 ,  F16J13/02 ,  G21F7/005 ,  B65D53/00

CPC classification number: B63C11/325 ,  B01J3/03 ,  F16J13/02 ,  G21F7/005

Abstract: An access door for a pressure vessel wherein the door itself is the only moving part and the pressure difference between the interior of the chamber and ambient exterior pressure is the only sealing force is provided. The door is in the form of a disc or wafer made of metal or solid plastic material and holds in position a sealing ring having a peripheral groove for receiving one O ring and a groove on the surface facing the door for receiving a second O ring. The door is rolled manually by a substantially radially extending handle. The chamber is cut to receive the door laterally and recessed internally to permit the sealing ring to be moved axially into sealing position in the recess.

公开(公告)号：US3695482A

公开(公告)日：1972-10-03

申请号：US3695482D

申请日：1971-06-14

Applicant: LUMMUS CO

Inventor： SMITH COLIN

IPC: B01J3/03 ,  F16J15/08 ,  B65D45/00 ,  B65D53/00

CPC classification number: B01J3/03 ,  F16J15/0881

Abstract: A pressure vessel including a sealing structure for the cover which comprises a triangularly-shaped gasket in sealing engagement with a curved shoulder on the cover, a gasket engaging surface of the vessel wall and a backing ring positioned between the gasket and a key-ring located in a groove in the vessel wall.

Abstract translation: 一种压力容器，包括用于盖的密封结构，其包括与盖上的弯曲肩部密封接合的三角形垫圈，容器壁的垫圈接合表面和位于垫圈和键环之间的背衬环 在血管壁的凹槽中。

公开(公告)号：US3623206A

公开(公告)日：1971-11-30

申请号：US3623206D

申请日：1970-01-07

Applicant: GEN DYNAMICS CORP

Inventor： HAGER ROBERT N JR

IPC: B01J3/03 ,  F16K51/02 ,  F17C13/04 ,  B23P19/04

CPC classification number: B01J3/03 ,  F16K51/02 ,  F17C13/04 ,  F17C2205/0323 ,  F17C2205/0382 ,  Y10T29/53096 ,  Y10T29/53687

Abstract: A VALVE TOOL FOR REMOVING AND INSTALLING THE CAP PORTION OF A FITTING ATTACHED TO A CONTAINER OR VACUUM SYSTEM WHILE THE CONTAINER OR SYSTEM IS BEING EVACUATED. THE BELL-SHAPED BODY OF THE VALVE POSITIONS OVER THE PUMPDOWN FITTING DURING VACUUM PUMPING THEREOF. A SOCKET WRENCH ENCLOSED WITHIN THE VALVE BODY ENGAGES THE CAP PORTION OF THE FITTING FOR INSTALLATION OR REMOVAL THEREOF BY MANUAL OPERATION OF A HANDLE OUTSIDE OF THE VALVE BODY. A SHAFT EXTENDING THROUGH A SEAL IN THE VALVE BODY, CONNECTS THE SOCKET WRENCH TO THE HANDLE. A PORT LOCATED IN THE VALVE BODY PROVIDES PASSAGE MEANS FOR EVACUATING GASES FROM THE SYSTEM OR CONTAINER.

公开(公告)号：US3554144A

公开(公告)日：1971-01-12

申请号：US3554144D

申请日：1969-07-09

Applicant: PACIFIC SCIENTIFIC CO

Inventor： MESCHER HAROLD E

IPC: B01J3/03 ,  C21D9/00 ,  F16J13/22 ,  F23M7/00

CPC classification number: B01J3/03 ,  C21D9/0006 ,  F16J13/22

Abstract: A sealing door for heat-treating furnaces having a piston and cylinder arrangement that not only raises and lowers the door but also moves the door outwardly slightly upon opening to protect the door seal during the vertical movement of the door and also presses the door against the furnace upon closure to seal the furnace against leakage of internal vacuum or pressure.

公开(公告)号：US3549186A

公开(公告)日：1970-12-22

申请号：US3549186D

申请日：1969-06-06

Applicant: CHICAGO BRIDGE & IRON CO

Inventor： LARSEN LYLE V

IPC: B01J3/03 ,  F16B35/02 ,  F16J13/02 ,  B65D45/30 ,  A47J36/10

CPC classification number: B01J3/03 ,  F16B35/02 ,  F16J13/02 ,  Y10T292/218