公开(公告)号：US4249846A

公开(公告)日：1981-02-10

申请号：US971209

申请日：1978-12-20

Applicant: Daniel Worsham

Inventor： Daniel Worsham

IPC: B01J3/03 ,  C23C14/56 ,  F16J15/16 ,  C23C13/08

CPC classification number: C23C14/56 ,  B01J3/03 ,  F16J15/168 ,  Y10S277/906 ,  Y10S414/139

Abstract: In a rotary vacuum sealed wafer transport system for transporting semiconductive wafers between ambient atmosphere and subatmospheric pressure within a wafer processing station, the wafers, on a conveyor web pass through a slot in the vacuum chamber of the processing station. The evacuable envelope of the processing station has an external concave face portion intersecting with a generally planar face portion with the slot being positioned generally at the intersection of the concave and planar face portions. A deformable elastic roller, preferably pneumatically inflated, is disposed for rolling sealing engagement with the conveyor web and wafer and for wiping sealing engagement with portions of the planar and concave faces to provide a gas tight seal of the slot while permitting passage of the conveyor web with the wafers thereon into the evacuated wafer processing station. In a preferred embodiment, the conveyor web passes through input and output slots with pneumatic rollers sealing the pair of slots. In the latter case, the rollers are preferably driven in unison to prevent any wiping action of the roller on the surface of the wafer. In an alternative embodiment, the conveyor web is omitted.

Abstract translation: 在用于在晶片处理站内的环境气氛和低于大气压之间运输半导体晶片的旋转式真空密封晶片传送系统中，传送带上的晶片通过处理站的真空室中的槽。 处理站的可抽出的外壳具有与大体上平面的面部相交的外凹面部分，该凹槽大致位于凹面部分和平面部分的相交处。 优选地气动膨胀的可变形的弹性辊被设置用于与输送带和晶片滚动密封接合，并且用于擦拭与平面和凹面的部分的密封接合，以提供槽的气密密封，同时允许输送带 其上的晶片进入真空的晶片处理站。 在优选实施例中，输送带通过输入和输出槽与密封该对槽的气动辊相通。 在后一种情况下，优选地一起驱动辊以防止辊在晶片表面上的任何擦拭作用。 在替代实施例中，省略了传送带。