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公开(公告)号:US06781695B2
公开(公告)日:2004-08-24
申请号:US09964242
申请日:2001-09-26
Applicant: Richard Hovan , Stuart F. Metcalfe , Derek D. Stuart
Inventor: Richard Hovan , Stuart F. Metcalfe , Derek D. Stuart
IPC: G01N2100
CPC classification number: G01N21/59 , G01N21/538 , G01N21/85 , G01N2201/06146
Abstract: An improved light source for use in an opacity monitor (transmissometer) that reduces the variation in light intensity across a projected light beam to enable a more accurate and stable method for measuring the opacity of gases in a stack/duct, especially at low values (e.g.,
Abstract translation: 用于不透明度监测器(透射计)的改进的光源,其减少投影光束的光强度的变化,以便能够更准确和稳定地测量堆/管道中的气体的不透明度,尤其是在低值处 例如,<10%)的不透明度,而在特定的性能要求下运行。
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52.
公开(公告)号:US20040150828A1
公开(公告)日:2004-08-05
申请号:US10700086
申请日:2003-11-03
Inventor: James Lee Hendrix , David Y. Wang , David M. Aikens , Lawrence Rotter , Joel Ng
IPC: G01J004/00 , G01N021/55
CPC classification number: G01J3/02 , G01J3/0218 , G01J3/10 , G01N21/55 , G01N21/9501 , G01N2201/06146 , G01N2201/0826
Abstract: A flat spectrum illumination source for use in optical metrology systems includes a first light source generating a visible light beam and a second light source generating an ultraviolet light beam. The illumination source also includes an auxiliary light source generating a light beam at wavelengths between the visible light beam and the ultraviolet light beam. The three light beams are combined to provide a broadband probe beam that has substantially even illumination levels across a broad range of wavelengths. Alternately, the illumination source may be fabricated as an array of light emitting diodes selected to cover a range of separate wavelengths. The outputs of the LED array are combined to produce the broadband probe beam.
Abstract translation: 用于光学测量系统的平面光谱照明源包括产生可见光束的第一光源和产生紫外光束的第二光源。 照明源还包括在可见光束和紫外光束之间的波长处产生光束的辅助光源。 三个光束被组合以提供在宽范围的波长上具有基本均匀的照明水平的宽带探测光束。 或者,照明源可以被制造为被选择以覆盖一定范围的分开的波长的发光二极管的阵列。 组合LED阵列的输出以产生宽带探测光束。
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公开(公告)号:US20030038940A1
公开(公告)日:2003-02-27
申请号:US09964242
申请日:2001-09-26
Inventor: Stuart F. Metcalfe , Derek D. Stuart
IPC: G01N021/61
CPC classification number: G01N21/59 , G01N21/538 , G01N21/85 , G01N2201/06146
Abstract: An improved light source for use in an opacity monitor (transmissometer) that reduces the variation in light intensity across a projected light beam to enable a more accurate and stable method for measuring the opacity of gases in a stack/duct, especially at low values (e.g.,
Abstract translation: 用于不透明度监测器(透射计)的改进的光源,其减少投影光束的光强度的变化,以便能够更准确和稳定地测量堆/管道中的气体的不透明度,尤其是在低值处 例如,<10%)的不透明度,而在特定的性能要求下运行。
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