公开(公告)号：US20050236682A1

公开(公告)日：2005-10-27

申请号：US10995406

申请日：2004-11-24

Applicant: Naokatsu Ikegami

Inventor： Naokatsu Ikegami

IPC: G01P15/02 ,  B81B3/00 ,  B81C1/00 ,  B81C3/00 ,  G01P15/08 ,  H01L29/84

CPC classification number: B81C3/008 ,  G01P15/0802 ,  G01P2015/0828

Abstract: The present invention provides a method of manufacturing MEMS devices, comprising the steps of forming MEMS device bodies in a first substrate, defining concave portions around the MEMS device bodies over the first substrate, forming convex portions coincident with the concave portions in a second substrate, fitting the convex portions in the concave portions, respectively, to join the first substrate and the second substrate to each other, thereby forming a third substrate, sticking the third substrate to a UV sheet on the second substrate side, and dicing the third substrate to separate the MEMS device bodies from one another.

Abstract translation: 本发明提供一种制造MEMS器件的方法，包括以下步骤：在第一衬底中形成MEMS器件本体，在第一衬底上限定围绕MEMS器件本体的凹部，形成与第二衬底中的凹部重合的凸部， 将凹部分别嵌入凹部，使第一基板和第二基板彼此接合，由此形成第三基板，将第三基板粘贴在第二基板侧的UV片上，将第三基板切割成 将MEMS器件本体彼此分开。

公开(公告)号：US20050151448A1

公开(公告)日：2005-07-14

申请号：US10509873

申请日：2003-04-02

Applicant: Koichi Hikida ,  Masaya Yamashita ,  Yuuichi Kanayama ,  Hirofumi Fukumoto

Inventor： Koichi Hikida ,  Masaya Yamashita ,  Yuuichi Kanayama ,  Hirofumi Fukumoto

IPC: G01C9/06 ,  G01C9/12 ,  G01P15/08 ,  G01P15/12 ,  G01P15/18 ,  H02N2/00 ,  H01L41/04

CPC classification number: G01P15/18 ,  G01C9/06 ,  G01C9/12 ,  G01C2009/068 ,  G01P15/0802 ,  G01P15/123 ,  G01P2015/0828 ,  G01P2015/084

Abstract: A tilt sensor capable of measuring a tilt angle by utilizing piezoresistive effect without selectively etching a substrate having piezoresistors formed therein, wherein the backside of the silicon substrate 1 having piezoresistors R1 to R4 formed therein is uniformly ground to a deflectable thickness, both ends of the silicon substrate 1 are supported by a support member 2, and a weight member 3 is provided at the center of the silicon substrate 1 through a convex portion 3a.

Abstract translation: 一种倾斜传感器，其能够通过利用压阻效应来测量倾斜角度，而不选择性地蚀刻其中形成有压电电阻的基板，其中，其中形成有压电电阻器R 1至R 4的硅基板1的背面被均匀地研磨成可偏转的厚度， 硅基板1由支撑构件2支撑，并且配重构件3通过凸部3a设置在硅基板1的中心。

公开(公告)号：US06839962B2

公开(公告)日：2005-01-11

申请号：US10178253

申请日：2002-06-24

Applicant: Robert Aigner ,  Florian Plötz ,  Sven Michaelis ,  Michael Brauer

Inventor： Robert Aigner ,  Florian Plötz ,  Sven Michaelis ,  Michael Brauer

IPC: G01P15/08 ,  B81B3/00 ,  B81B7/00 ,  B81C1/00 ,  G01P1/02 ,  H01L21/301 ,  H01L29/84 ,  H05K3/02 ,  H05K3/10

CPC classification number: B81B7/007 ,  B81C1/00888 ,  G01P1/023 ,  G01P2015/0828 ,  Y10T29/49126 ,  Y10T29/49155 ,  Y10T29/49204 ,  Y10T29/49222 ,  Y10T29/49798 ,  Y10T29/49813 ,  Y10T83/02 ,  Y10T83/0581

Abstract: A micromechanical structure is described which is disposed on a base body and requires protection from environmental influences by a covering body. Furthermore, electrical contacts are necessary for establishing contacts for the micromechanical structure. By skillfully carrying out a sawing-into operation and a sawing-through operation, it is possible to expose the electrical contact.

Abstract translation: 描述了一种微机械结构，其被布置在基体上并且需要保护以免受覆盖体的环境影响。 此外，为了建立微机械结构的触点，需要电触点。 通过巧妙地进行锯切操作和锯切操作，可以暴露电接触。

公开(公告)号：US06835588B2

公开(公告)日：2004-12-28

申请号：US10735171

申请日：2003-12-12

Applicant: Seung Do An ,  Kyoung Soo Kim ,  Ji Man Cho

Inventor： Seung Do An ,  Kyoung Soo Kim ,  Ji Man Cho

IPC: H01L2100

CPC classification number: B81C1/00301 ,  B81B2201/025 ,  B81B2207/095 ,  B81C2201/019 ,  B81C2203/0118 ,  B81C2203/038 ,  G01C19/5783 ,  G01P1/023 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0814 ,  G01P2015/0828 ,  Y10T428/24322

Abstract: The present invention provides a micro inertia sensor and a method of manufacturing the same, the micro inertia sensor includes a lower glass substrate; a lower silicon including a first border, a first fixed point and a side movement sensing structure; an upper silicon including a second border, a second fixed point being connected to a via hole, in which a metal wiring is formed, on an upper side, and an sensing electrode, which correspond to the first border, the first fixed point and the side movement sensing structure; a bonded layer by a eutectic bonding between the upper silicon and the lower silicon; and a upper glass substrate, being positioned on an upper portion of the upper silicon, for providing the via hole on which an electric conduction wiring is formed, thereby aiming at the miniaturization of the product and the simplification of the process.

Abstract translation: 本发明提供一种微惯性传感器及其制造方法，所述微惯性传感器包括下玻璃基板; 包括第一边界的下硅，第一固定点和侧移检测结构; 包括第二边界的上硅，在上侧连接有形成有金属布线的通孔的第二固定点和与第一边界相对应的第一固定点和第二边界的感测电极 侧运动感测结构; 通过上硅和下硅之间的共晶键合的键合层; 以及上玻璃基板，其位于上硅的上部，用于提供其上形成导电布线的通孔，从而瞄准产品的小型化和简化工艺。

公开(公告)号：US20040237650A1

公开(公告)日：2004-12-02

申请号：US10604855

申请日：2003-08-21

Inventor： Chien-Sheng Yang

IPC: G01P015/125

CPC classification number: G01P15/125 ,  G01P2015/0828

Abstract: A capacitive acceleration sensor includes a non-single-crystal-silicon-based substrate, a polysilicon beam structure having a movable section that includes a movable electrode, a polysilicon supporter positioned on the non-single-crystal-silicon-based substrate for fixing the beam structure and forming a distance between the beam structure and the non-single-crystal-silicon-based substrate, a stationary electrode positioned on the non-single-crystal-silicon-based substrate and opposite to the movable section of the beam structure, and a thin film transistor (TFT) control circuit positioned on the non-single-crystal-silicon-based substrate. The stationary electrode and the movable electrode constitute a plate capacitor, and the TFT control circuit is electrically connected to the plate capacitor.

Abstract translation: 电容加速度传感器包括非单晶硅基底板，具有可移动部分的多晶硅束结构，该可移动部分包括可动电极，位于非单晶硅基底板上的多晶硅支撑体，用于固定 并且在所述光束结构和所述非单晶硅基基板之间形成距离，所述固定电极位于所述非单晶硅基基板上并且与所述光束结构的可动部分相对， 以及位于非单晶硅基底板上的薄膜晶体管（TFT）控制电路。 固定电极和可动电极构成板状电容器，TFT控制电路与板状电容器电连接。

公开(公告)号：US06662657B2

公开(公告)日：2003-12-16

申请号：US10183312

申请日：2002-06-25

Applicant: Rand H. Hulsing, II ,  Randy Sprague

Inventor： Rand H. Hulsing, II ,  Randy Sprague

IPC: G01P904

CPC classification number: G01P15/097 ,  G01C19/5719 ,  G01L1/183 ,  G01P2015/0828

Abstract: Performance-enhancing, reduced-area metalization adhesion areas in force-sensing transducers are described.

公开(公告)号：US06617191B1

公开(公告)日：2003-09-09

申请号：US09445124

申请日：1999-12-02

Applicant: Hitoshi Iwata ,  Makoto Murate

Inventor： Hitoshi Iwata ,  Makoto Murate

IPC: H01L2100

CPC classification number: G01P15/0802 ,  G01P2015/0828 ,  H01L21/3063 ,  Y10S438/96

Abstract: An epitaxial growth layer, an oxide film, and a passivation film are formed on a silicon substrate. Except for an opening formed on a part of the passivation film, the upper surface of the passivation film is covered with a metal protective film made of tungsten (W). With the silicon substrate immersed in a high-concentration hydrofluoric aqueous solution, anodization is performed with the silicon substrate as an anode and the metal protective film as a counter electrode.

Abstract translation: 在硅衬底上形成外延生长层，氧化物膜和钝化膜。 除了形成在钝化膜的一部分上的开口之外，钝化膜的上表面被由钨（W）制成的金属保护膜覆盖。 将硅衬底浸入高浓度氢氟酸水溶液中，以硅衬底作为阳极进行阳极氧化，并将金属保护膜用作对电极。

公开(公告)号：US06576968B2

公开(公告)日：2003-06-10

申请号：US09855113

申请日：2001-05-14

Applicant: Terje Kvisteroey ,  Jacobsen Henrik

Inventor： Terje Kvisteroey ,  Jacobsen Henrik

IPC: H01L2982

CPC classification number: G01P21/00 ,  G01F1/28 ,  G01L1/183 ,  G01P15/097 ,  G01P2015/0828

Abstract: A sensor formed from a semiconductor material. The device comprises a support frame, a sensing element; and means for vibrating the sensing element at a frequency corresponding generally to a first resonant frequency vibration mode. Error detection means detects the resonant frequency vibration mode, the output of the error detection means being indicative of existence or otherwise an expected response of the resonant frequency vibration mode to the excitation. Means for detecting the deformation of the sensing element provides an output indicative of the parameter to be sensed, the deformation detecting means and error detection means being formed from the same elements.

公开(公告)号：US06566742B1

公开(公告)日：2003-05-20

申请号：US09722530

申请日：2000-11-28

Applicant: Masahiro Matsumoto ,  Seikou Suzuki ,  Masayuki Miki

Inventor： Masahiro Matsumoto ,  Seikou Suzuki ,  Masayuki Miki

IPC: H01L2302

CPC classification number: G01P15/125 ,  G01P15/18 ,  G01P2015/0828 ,  H01L2224/45144 ,  H01L2224/48091 ,  H01L2224/48137 ,  H01L2924/00014 ,  H01L2924/00

Abstract: An acceleration sensor is disclosed which includes a capacitance-type acceleration detection element mounted on a ceramic base plate. The element comprises a movable electrode mounted between a pair of fixed electrodes. Acceleration of the sensor in a measurement direction causes the movable electrode to move relative to the fixed electrodes and the element has opposite ends in a direction perpendicular to the measurement direction. The acceleration detection element is mounted on the base at a first one of the opposite ends. Accordingly, the mounting surface of the acceleration sensor is parallel to the direction of acceleration to be detected. Thus the acceleration sensor can be surface-mounted on a printed board, and more be easily mounted in an automobile air bag control system or the like.

Abstract translation: 公开了一种加速度传感器，其包括安装在陶瓷基板上的电容式加速度检测元件。 元件包括安装在一对固定电极之间的可动电极。 传感器在测量方向的加速使得可动电极相对于固定电极移动，并且元件在垂直于测量方向的方向上具有相对端。 加速度检测元件在相对端的第一个处安装在基座上。 因此，加速度传感器的安装面平行于要检测的加速度方向。 因此，加速度传感器可以表面安装在印刷电路板上，并且更容易地安装在汽车安全气囊控制系统等中。

公开(公告)号：US06561030B2

公开(公告)日：2003-05-13

申请号：US09867523

申请日：2001-05-31

Applicant: Masahiro Matsumoto ,  Seikou Suzuki ,  Masayuki Miki

Inventor： Masahiro Matsumoto ,  Seikou Suzuki ,  Masayuki Miki

IPC: G01D15125

CPC classification number: G01P15/125 ,  G01P15/18 ,  G01P2015/0828 ,  H01L2224/45144 ,  H01L2224/48091 ,  H01L2224/48137 ,  H01L2924/00014 ,  H01L2924/00

Abstract: An acceleration sensor is disclosed which includes a capacitance-type acceleration detection element mounted on a ceramic base plate. The element comprises a movable electrode mounted between a pair of fixed electrodes. Acceleration of the sensor in a measurement direction causes the movable electrode to move relative to the fixed electrodes and the element has opposite ends in a direction perpendicular to the measurement direction. The acceleration detection element is mounted on the base at a first one of the opposite ends. Accordingly, the mounting surface of the acceleration sensor is parallel to the direction of acceleration to be detected. Thus the acceleration sensor can be surface-mounted on a printed board, and more be easily mounted in an automobile air bag control system or the like.