公开(公告)号：US08385618B2

公开(公告)日：2013-02-26

申请号：US12747221

申请日：2008-12-12

Applicant: Gerhard Youssefi ,  Birgit Lutzenberger ,  Julia Hoff ,  Ernst Hegels

Inventor： Gerhard Youssefi ,  Birgit Lutzenberger ,  Julia Hoff ,  Ernst Hegels

IPC: G06K9/00 ,  H01J3/14 ,  G01N21/00 ,  A61B18/18

CPC classification number: G01J1/4257 ,  A61B18/20 ,  A61B90/361 ,  A61B2018/00636 ,  A61F9/00802 ,  A61F9/00814 ,  A61F2009/00872 ,  B23K26/04 ,  B23K26/70

Abstract: The invention relates to an apparatus and a method for determining the energy of a laser. In particular, the invention relates to an initial determination of a laser energy and the monitoring of the laser energy preferably of an excimer laser for use in a refractive laser system for treatment of any eye. An apparatus for determining an energy of an excimer laser comprises a tool comprising an area being ablated with a plurality of laser pulses of said excimer laser using at least one predetermined multi spot ablation pattern, said ablation area comprising a specific ablation area being as large as the ablation area or smaller, an image capturing means for capturing at least one image comprising at least said specific ablation area of the tool; an analyzing means for analyzing said at least one image, wherein the size of the specific ablation area provides a measure of the energy of the excimer laser.

Abstract translation: 本发明涉及一种用于确定激光能量的装置和方法。 具体而言，本发明涉及激光能量的初始确定和激光能量的监测，优选地，用于用于治疗任何眼睛的折射激光系统中的准分子激光器。 用于确定准分子激光器的能量的装置包括一种工具，其包括使用至少一个预定的多点消融图案，用所述准分子激光器的多个激光脉冲进行消融的区域，所述消融区域包括与 消融区域或更小的图像捕获装置，用于捕获包括至少所述工具的所述特定消融区域的至少一个图像; 用于分析所述至少一个图像的分析装置，其中所述特定消融区域的尺寸提供所述准分子激光器的能量的量度。

公开(公告)号：US08384051B2

公开(公告)日：2013-02-26

申请号：US13300032

申请日：2011-11-18

Applicant: Kimitaka Ozawa

Inventor： Kimitaka Ozawa

IPC: H01J3/07 ,  H01J3/14 ,  H01J3/26 ,  G03F9/00

CPC classification number: H01J37/3177 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/304 ,  H01J2237/043 ,  H01J2237/24514

Abstract: The drawing apparatus of the present inventions includes a detector having a size for which the detector can simultaneously detect two adjacent charged particle beams among a plurality of charged particle beams, and configured to detect an intensity of a charged particle beam incident thereon. A controller is configured to perform a control of a position of the detector and a control of a blanking deflector array such that one of two adjacent charged particle beams is in a blanking state and the other is in a non-blanking state on the detector that is moved, and each of the plurality of charged particle beams becomes in a blanking state and a non-blanking state sequentially, to cause the detector to perform an output in parallel with the control, and to inspect a defect in each blanking deflector in the blanking deflector array based on the output.

Abstract translation: 本发明的绘图装置包括检测器，该检测器具有这样的尺寸，检测器可以同时检测多个带电粒子束中的两个相邻的带电粒子束，并且被配置为检测入射在其上的带电粒子束的强度。 控制器被配置为执行检测器的位置的控制和对消隐偏转器阵列的控制，使得两个相邻的带电粒子束中的一个处于消隐状态，另一个在检测器上处于非消隐状态， 多个带电粒子束中的每一个顺序地处于消隐状态和非消隐状态，以使检测器与控制并行地执行输出，并且检查在每个消隐偏转器中的缺陷 基于输出的消隐偏转器阵列。

公开(公告)号：US08339260B2

公开(公告)日：2012-12-25

申请号：US12998378

申请日：2009-07-28

Applicant: Katja Paula Krieger ,  Manfred Wilhelm Maierhöfer ,  Klaus Karl Müller ,  Josef Herbert Olbort ,  Karlheinz Rahner ,  Senad Ugljesa

Inventor： Katja Paula Krieger ,  Manfred Wilhelm Maierhöfer ,  Klaus Karl Müller ,  Josef Herbert Olbort ,  Karlheinz Rahner ,  Senad Ugljesa

IPC: G08B13/00 ,  G08B13/18 ,  G08B23/00 ,  G05B9/02 ,  G05B19/04 ,  G06F19/00 ,  H01J3/14

CPC classification number: B65H26/00 ,  B65H2407/10 ,  B65H2553/416

Abstract: A hazardous area in the region surrounding a reel transport of a reel changer is secured. A contactless protective device is located at the access boundaries of the region. This protective device can be deactivated for feeding and/or removing a known object and comprises an evaluation unit. The protective device is configured as a light curtain that is comprised of a plurality of light beams that run in parallel to each other. The evaluation unit includes an assembly for detecting the sequence of the interruption of the light beams during the feeding and/or the removal of an object. Based on the detected sequence of interruption of the light beams, a known object, that is permitted to access the hazardous area, is detected. The protective device is deactivated in this situation. Securing the hazardous area further includes the provision of a second contactless protective device that is permanently active.

Abstract translation: 确保在卷轴更换器的卷轴传送周围的区域中的危险区域。 非接触式保护装置位于该区域的进入边界。 该保护装置可以被禁用以供给和/或去除已知的物体，并且包括评估单元。 保护装置被配置为由彼此平行延伸的多个光束组成的光幕。 评估单元包括用于在进给和/或移除物体期间检测光束中断的顺序的组件。 基于检测到的光束的中断顺序，检测出允许访问危险区域的已知对象。 在这种情况下，保护装置被停用。 保护危险区域还包括提供永久有效的第二非接触式保护装置。

公开(公告)号：US20120273690A1

公开(公告)日：2012-11-01

申请号：US13458861

申请日：2012-04-27

Applicant: Marco Jan Jaco Wieland ,  Stijn Willem Herman Karel Steenbrink ,  Alexander Hendrik Vincent van Veen ,  Alrik van den Brom

Inventor： Marco Jan Jaco Wieland ,  Stijn Willem Herman Karel Steenbrink ,  Alexander Hendrik Vincent van Veen ,  Alrik van den Brom

IPC: G21K5/04 ,  H01J3/26 ,  H01J3/14

CPC classification number: G03F7/70 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/045 ,  H01J37/09 ,  H01J37/12 ,  H01J37/3177 ,  H01J2237/1205

Abstract: The invention relates to a charged particle system such as a multi beam lithography system, comprising a manipulator device for manipulation of one or more charged particle beams, wherein the manipulator device comprises at least one through opening in the plane of the planar substrate for passing at least one charged particle beam there through. Each through opening is provided with electrodes arranged in a first set of multiple first electrodes along a first part of a perimeter of said through opening and in a second set of multiple second electrodes along a second part of said perimeter. An electronic control circuit is arranged for providing voltage differences the electrodes in dependence of a position of the first and second electrode along the perimeter of the through opening.

Abstract translation: 本发明涉及带电粒子系统，例如多光束光刻系统，其包括用于操纵一个或多个带电粒子束的操纵器装置，其中所述操纵器装置包括在所述平面基板的平面中的至少一个通孔，用于通过 至少一个带电粒子束通过。 每个通孔具有沿着所述通孔的周边的第一部分布置在第一组多个第一电极中的电极和沿着所述周边的第二部分的第二组多个第二电极。 电子控制电路被布置用于根据第一和第二电极沿着通孔的周边的位置来提供电极的电压差。

公开(公告)号：US08299418B2

公开(公告)日：2012-10-30

申请号：US12611229

申请日：2009-11-03

Applicant: Masahiro Shirono

Inventor： Masahiro Shirono

IPC: H01J3/14 ,  H04N5/225 ,  G03B17/00

CPC classification number: G02B27/0006 ,  G03B17/00 ,  H04N5/2171 ,  H04N5/232

Abstract: Provided are an imaging device unit and a photographing apparatus. The imaging device unit includes an imaging device having an imaging plane on which an optical image of a subject is formed, wherein the imaging unit is configured to convert the optical image into an electrical signal; an optical unit disposed nearer to the subject than the imaging device; a plate that is mounted on a boundary portion of the optical unit, wherein at least an outer portion of the plate extends over an outer edge of the optical unit; a piezoelectric element that is mounted on the plate and configured to vibrate the plate and the optical unit; and a supporting frame that supports the at least outer portion of the plate extending over the outer edge of the optical unit.

Abstract translation: 提供了一种成像装置单元和拍摄装置。 成像装置单元包括具有其上形成有被摄体的光学图像的成像平面的成像装置，其中，所述成像单元被配置为将所述光学图像转换为电信号; 设置得比成像装置更靠近被摄体的光学单元; 安装在所述光学单元的边界部分上的板，其中所述板的至少外部部分在所述光学单元的外边缘上延伸; 压电元件，其安装在所述板上并且构造成使所述板和所述光学单元振动; 以及支撑框架，其支撑在光学单元的外边缘上延伸的板的至少外部部分。

公开(公告)号：US08294083B2

公开(公告)日：2012-10-23

申请号：US12485564

申请日：2009-06-16

Applicant: Ken Nishioka ,  Atsuya Hirano ,  Hiroki Matsubara ,  Hiroshi Nishigaki

Inventor： Ken Nishioka ,  Atsuya Hirano ,  Hiroki Matsubara ,  Hiroshi Nishigaki

IPC: H01J3/14

CPC classification number: G03B21/28 ,  H04N9/3129

Abstract: An image display device is provided, by which variations in drive sensitivity of a scan mirror is corrected. Processing executed by a CPU in a laser projector includes the steps of: driving a scanner mirror in a vertical direction; allowing at least one of a green laser and red/blue lasers to emit light; calculating stay time in a light-receiving region in a photoreceptor; comparing the calculated stay time with ideal stay time Tideal; decreasing a tilt of a drive signal for driving the scanner mirror in the vertical direction if the calculated stay time is shorter than the stay time Tideal; and increasing the tilt of the drive signal if the calculated stay time is longer than the stay time Tideal.

Abstract translation: 提供一种图像显示装置，由此校正扫描镜的驱动灵敏度的变化。 由激光投影机中的CPU执行的处理包括以下步骤：在垂直方向上驱动扫描镜; 允许绿色激光和红色/蓝色激光器中的至少一种发光; 计算感光体的光接收区域的停留时间; 将计算停留时间与理想停留时间Tideal进行比较; 如果所计算的停留时间短于停留时间Tideal，则减小用于在垂直方向上驱动扫描仪反射镜的驱动信号的倾斜; 并且如果所计算的停留时间长于停留时间Tideal，则增加驱动信号的倾斜度。

公开(公告)号：US08289178B2

公开(公告)日：2012-10-16

申请号：US12689051

申请日：2010-01-18

Applicant: Michael S. Slemon ,  Charles S. Slemon

Inventor： Michael S. Slemon ,  Charles S. Slemon

IPC: G08B17/10 ,  H01J3/14 ,  G01J1/42 ,  G01N21/00

CPC classification number: G08B17/107

Abstract: A system for analyzing smoke has a plurality of units, wherein each unit includes an optical emitter for alternately directing horizontally and vertically polarized light along a beam path, and into a smoke cloud, to generate scattered light. A horizontally polarized detector and a vertically polarized detector are positioned at different locations, but at a same distance and scattering angle relative to the beam path. Each unit has a different wavelength. A computer receives signals from the detectors of all units, in response to each emitter, for analysis of the smoke.

Abstract translation: 用于分析烟雾的系统具有多个单元，其中每个单元包括用于沿着光束路径交替地引导水平和垂直偏振光并且进入烟雾云的光发射器，以产生散射光。 水平极化检测器和垂直极化检测器位于不同的位置，但是相对于光束路径具有相同的距离和散射角。 每个单元具有不同的波长。 计算机响应于每个发射器从所有单元的检测器接收用于分析烟雾的信号。

公开(公告)号：US20120235054A1

公开(公告)日：2012-09-20

申请号：US13240242

申请日：2011-09-22

Applicant: Shinsuke Nishimura ,  Munehiro Ogasawara

Inventor： Shinsuke Nishimura ,  Munehiro Ogasawara

IPC: H01J3/14

CPC classification number: H01J37/244

Abstract: According to one embodiment, an electron beam irradiation apparatus comprises an objective lens configured to irradiate a specimen surface with an electron beam, an electron detector which is provided between the objective lens and the specimen surface and which is configured to detect reflected electrons or secondary electrons emitted from the specimen surface, and an antireflection mechanism which is provided between the electron detector and the specimen surface. The antireflection mechanism has a plurality of holes following spiral trajectories of reflected electrons or secondary electrons emitted from the specimen surface and is configured to prevent the reflected electrons or secondary electrons from being re-reflected toward the specimen surface and to direct a part of the reflected electrons or secondary electrons to the electron detector.

Abstract translation: 根据一个实施例，电子束照射装置包括被配置为用电子束照射样本表面的物镜，设置在物镜和样本表面之间并被配置为检测反射电子或二次电子的电子检测器 从样品表面发射的反射机构，以及设置在电子检测器和试样表面之间的防反射机构。 防反射机构具有从被检体表面发射的反射电子或二次电子的螺旋轨迹之后的多个孔，并且被配置为防止反射的电子或二次电子朝向试样表面再反射并且引导反射的一部分 电子或二次电子到电子检测器。

公开(公告)号：US20120223246A1

公开(公告)日：2012-09-06

申请号：US13225045

申请日：2011-09-02

Applicant: Thomas STEPHANI ,  Uwe BEHRENS ,  Heinrich ROECKEN ,  Jan TIMMER ,  Christian BAUMGARTEN

Inventor： Thomas STEPHANI ,  Uwe BEHRENS ,  Heinrich ROECKEN ,  Jan TIMMER ,  Christian BAUMGARTEN

IPC: A61N5/10 ,  H01J3/14 ,  G21K5/00

CPC classification number: H05H7/02 ,  A61N5/10 ,  A61N5/1077 ,  A61N2005/1087 ,  H01J3/14 ,  H05H13/005 ,  H05H2007/122 ,  H05H2277/11

Abstract: Systems and methods are provided to perform efficient, automatic cyclotron initialization, calibration, and beam adjustment. A process is provided that allows the automation of the initialization of a cyclotron after overnight or maintenance imposed shutdown. In one embodiment, five independent cyclotron system states are defined and the transition between one state to another may be automated, e.g., by the control system of the cyclotron. According to these embodiments, it is thereby possible to achieve beam operation after shutdown with minimal manual input. By applying an automatic procedure, all active devices of the cyclotron (e.g., RF system, extraction deflectors, ion source) are respectively ramped to predefined parameters.

Abstract translation: 提供系统和方法来执行有效的自动回旋加速器初始化，校准和波束调整。 提供了一个过程，允许自动化过夜后的回旋加速器的初始化或维护关闭。 在一个实施例中，定义了五个独立的回旋加速器系统状态，并且一个状态与另一个状态之间的转换可以例如由回旋加速器的控制系统自动化。 根据这些实施例，由此可以在最少的手动输入之后实现停机后的光束操作。 通过应用自动程序，回旋加速器的所有有源装置（例如，RF系统，提取偏转器，离子源）分别斜坡到预定参数。

公开(公告)号：US20120199758A1

公开(公告)日：2012-08-09

申请号：US13501561

申请日：2010-10-12

Applicant: Yoshimi Kawanami ,  Tohru Ishitani

Inventor： Yoshimi Kawanami ,  Tohru Ishitani

IPC: H01J3/14 ,  H01T23/00

CPC classification number: H01J37/08 ,  H01J27/26 ,  H01J37/3056 ,  H01J2237/002 ,  H01J2237/006 ,  H01J2237/0807

Abstract: Provided is a gas field ionization ion source capable of emitting heavy ions with high brightness which are suitable for processing a sample. The gas field ionization ion source according to the present invention includes a temperature controller individually controlling the temperature of the tip end of an emitter electrode (1) and the temperature of a gas injection port part (3) of a gas supply unit.

Abstract translation: 提供能够发出适合于处理样品的高亮度的重离子的气体电离离子源。 根据本发明的气体电离离子源包括温度控制器，其分别控制发射极电极（1）的末端的温度和气体供给单元的气体注入口部分（3）的温度。