公开(公告)号：US08888471B2

公开(公告)日：2014-11-18

申请号：US14012820

申请日：2013-08-28

Applicant: CKD Corporation

Inventor： Shinichi Nitta

IPC: F04B45/047 ,  F04B43/04 ,  F04B43/02

CPC classification number: F04B43/046 ,  F04B43/02 ,  F04B43/021 ,  F04B43/04

Abstract: A liquid feed pump includes a pump housing, a diaphragm forming a pump chamber together with the recessed portion surface and partitioning the pump chamber from the hole, a reciprocating member reciprocatably inserted into the hole and reciprocating to press the diaphragm to deform, a driving member displacing the reciprocating member periodically in a direction of reciprocation, a seal portion sandwiching the diaphragm to seal the diaphragm in a position around an outer peripheral side of the recessed portion surface, a diaphragm receiving surface provided between the seal portion and the opening portion, and its contact area contacting the diaphragm decreases in response to an increase in the displacement of the reciprocating member to the recessed portion surface side and increases in response to an increase in the internal pressure of the pump chamber.

Abstract translation: 液体供给泵包括泵壳体，隔膜，与凹部表面一起形成泵室并将泵室与孔分隔开;往复运动件，其可往复运动地插入孔中并往复运动以推压膜片变形;驱动构件 在往复运动方向周期性地移动往复运动件，密封部分夹住隔膜以将隔膜密封在凹部表面的外周侧的位置，设置在密封部和开口部之间的隔膜接收面，以及 响应于往复运动构件向凹部表面侧的位移的增加而与隔膜接触的接触面积减小，并且响应于泵室的内部压力的增加而增加。

公开(公告)号：US20040195534A1

公开(公告)日：2004-10-07

申请号：US10833026

申请日：2004-04-28

Applicant: CKD CORPORATION

Inventor： Eitaro Ijichi ,  Shigeru Osugi

IPC: F16K031/143 ,  F16K039/02

CPC classification number: F16K31/1266 ,  F16K31/1268

Abstract: A diaphragm valve capable of increasing durability of a diaphragm comprises a valve body internally formed with a valve chamber having an open upper end and a suck-back chamber having an open lower end, between an inlet passage and an outlet passage, and a through hole which provides communication between the valve chamber and the suck-back chamber. The open end of the valve chamber is closed by a first diaphragm which is brought into and out of contact with a valve seat. The open end of the suck-back chamber is closed by a second diaphragm. The first and second diaphragms are substantially identical in shape. Each circumferential edge portion of the first and second diaphragms is tightly retained by a retaining member mountable to the valve body so that the diaphragms are curved outwardly with respect to the valve chamber and the suck-back chamber respectively. The first and second diaphragms are connected by a connecting rod passing through the through hole so that the diaphragms are deformed synchronously by operation of an actuator.

Abstract translation: 能够提高隔膜的耐久性的隔膜阀具有内部形成有阀室的阀体，该阀体具有开口的上端和具有敞开的下端的吸入室，位于入口通道和出口通道之间，通孔 其提供阀室和吸回室之间的连通。 阀室的开口端由与阀座进入和脱离接触的第一隔膜封闭。 吸回室的开口端由第二隔膜封闭。 第一和第二隔膜的形状基本相同。 第一和第二隔膜的每个圆周边缘部分被可安装到阀体的保持构件紧密地保持，使得隔膜相对于阀室和吸回室分别向外弯曲。 第一和第二隔膜通过穿过通孔的连杆连接，使得隔膜通过致动器的操作而同步变形。

公开(公告)号：US20040163463A1

公开(公告)日：2004-08-26

申请号：US10372861

申请日：2003-02-26

Applicant: CKD CORPORATION

Inventor： Akihiro Ito ,  Yoshihiko Kawai

IPC: G01F001/68

CPC classification number: G01F1/6845 ,  G01F1/6842

Abstract: A board mounting thereon a measuring chip is fixed to a body in close contact relation to form a main passage and a sensor passage inside of the body, while a hot wire for a temp. sensor and a hot wire for a flow velocity sensor, both being provided on the measuring chip, are bridged across the sensor passage, to measure the flow rate of a gas flowing in the inside of the body by means of an electric circuit on the back side of the board. In a state where an electrode for a hot wire on the measuring chip is joined to an electrode for the electric circuit on the board, the temp. sensor hot wire and the flow velocity sensor hot wire both provided on the measuring chip are connected to the electric circuit on the back side of the board.

公开(公告)号：US20240401616A1

公开(公告)日：2024-12-05

申请号：US18667062

申请日：2024-05-17

Applicant: CKD Corporation

Inventor： Takemoto KONDO

IPC: F15B19/00 ,  F15B21/00

Abstract: An operation detecting system for a fluid pressure actuator is provided with a first pressure sensor for detecting a first pressure value which is a pressure value in a first pressure acting chamber, a second pressure value which is pressure value in a second pressure acting chamber, and an operation detecting device including a detection program configured to calculate an addition value of the first pressure value and the second pressure value, calculate a time differential value of the addition value, and detect the start time and the stop time of movement of a piston based on a variation in the time differential value over time.

公开(公告)号：US12152996B2

公开(公告)日：2024-11-26

申请号：US18164221

申请日：2023-02-03

Applicant: CKD CORPORATION

Inventor： Shozo Oda ,  Yukihiro Taguchi ,  Eiji Ohta

IPC: G01N21/95 ,  B65B11/52 ,  B65B57/02 ,  G06T7/00 ,  H04N23/56

Abstract: An inspection device inspects a formation state of a pocket portion formed in a container film of a blister pack and includes: an illumination device that irradiates a container film including the pocket portion with a predetermined electromagnetic wave; an imaging device that takes an image of at least the electromagnetic wave transmitted through a bottom portion of the pocket portion and obtains image data; a control device that extracts, based on the image data, shading pattern data corresponding to a shading pattern occurring in the bottom portion of the pocket portion by irradiation with the electromagnetic wave; a storage that stores a neural network and a model, the model being generated by learning of the neural network using, as learning data, only shading pattern data of a pocket portion without any formation defect among the extracted shading pattern data.

公开(公告)号：US20240353247A1

公开(公告)日：2024-10-24

申请号：US18636672

申请日：2024-04-16

Applicant: CKD CORPORATION

Inventor： Shinichi Nitta

IPC: G01F1/7086

CPC classification number: G01F1/7086

Abstract: A flow rate measurement unit includes: an inflow passage; an outflow passage; a screening passage including an inlet and outlet; an injector that injects a substance into the inflow passage; a first detector that irradiates the inlet with the light having the predetermined wavelength, and detects a first intensity; a second detector that irradiates the outlet with the light having the predetermined wavelength, and detects a second intensity; and a first controller that calculates a flow rate of the liquid by dividing a predetermined volume of the screening passage from the inlet to the outlet by a time difference obtained by subtracting a first time from a second time. The first time is taken from when the substance is injected until the first intensity reaches a peak, and the second time is taken from when the substance is injected until the second intensity reaches a peak.

公开(公告)号：US20240344633A1

公开(公告)日：2024-10-17

申请号：US18683450

申请日：2022-12-14

Applicant: CKD CORPORATION

Inventor： Toshikazu OGISU

IPC: F16K51/02 ,  F16K49/00

CPC classification number: F16K51/02 ,  F16K49/00

Abstract: A pressure control valve for opening/closing a circular outlet port that connects a vacuum chamber used in a semiconductor manufacturing apparatus and an exhaust pump for evacuating the vacuum chamber, the pressure control valve including a valve unit that contacts and separates from a valve seat provided radially outward from the outlet port, wherein the valve unit includes: a hollow portion located between an upper surface of the valve unit on the vacuum chamber side and a lower surface of the valve unit on the exhaust pump side; a first rubber heater covering a first rear surface of the upper surface in the hollow portion; and a second rubber heater covering a second rear surface of the lower surface in the hollow portion.

公开(公告)号：US20240287977A1

公开(公告)日：2024-08-29

申请号：US18658346

申请日：2024-05-08

Applicant: CKD CORPORATION

Inventor： Masaki Yoshida ,  Yoshifumi Nishio ,  Takayuki Kumagai ,  Shigenobu Nishida

IPC: F04B43/02 ,  H01L21/67

CPC classification number: F04B43/02 ,  H01L21/67017

Abstract: A diaphragm to be used in a chemical flow control device that controls a flow of a chemical in a semiconductor manufacturing process and to which a pressure of a working gas is applied. The diaphragm includes a membrane portion and a permeation reduction layer. The membrane portion is made of fluoroplastic that is resistant to the chemical. The permeation reduction layer is less likely to pass the working gas in comparison to the membrane portion and disposed on a surface of the membrane portion to which the pressure of the working gas is applied.

公开(公告)号：US20240270595A1

公开(公告)日：2024-08-15

申请号：US18635204

申请日：2024-04-15

Applicant: CKD CORPORATION ,  The University of Electro-Communications ,  Ushio Denki Kabushiki Kaisha

Inventor： Naohiko Noda ,  Masahiro Hayashi ,  Takatoshi Nomura ,  Shuzi Hayase ,  Daishiro Nomura ,  Daisuke Hirotani ,  Masaki Nakamura ,  Tomoyuki Hirami ,  Takayuki Kuga ,  Satoru Kani ,  Shinpei Sasahara

IPC: C01G19/04

CPC classification number: C01G19/04 ,  C01P2002/34

Abstract: A method of producing a tin-based perovskite layer includes: preparing a first solution by dissolving a tin-based perovskite compound in a solvent that does not contain dimethyl sulfoxide (DMSO); after the preparing of the first solution, mixing the DMSO with the first solution; and applying the first solution mixed with the DMSO to a base. The mixing is performed a predetermined time before the applying of the first solution mixed with the DMSO to the base.

公开(公告)号：US12007331B2

公开(公告)日：2024-06-11

申请号：US16919490

申请日：2020-07-02

Applicant: CKD CORPORATION

Inventor： Yukihiro Taguchi

IPC: B65B5/02 ,  B65B5/10 ,  B65B57/00 ,  G01N21/3563 ,  G01N21/359 ,  G01N21/86 ,  B29C51/18 ,  B29C51/46 ,  B29L31/00

CPC classification number: G01N21/86 ,  B65B5/02 ,  B65B5/103 ,  B65B57/00 ,  G01N21/3563 ,  G01N21/359 ,  B29C51/18 ,  B29C51/46 ,  B29L2031/712 ,  G01N2021/869 ,  G01N2201/127

Abstract: An inspection device includes: an illumination device that irradiates standard and inspection objects with near-infrared light; a spectroscope that disperses reflected light; an imaging device that takes images of first and second optical spectrums of the reflected light dispersed by the spectroscope to obtain standard spectroscopic image data and inspection spectroscopic image data; and a processor. The processor executes a predetermined arithmetic operation with regard to at least one of (i) each pixel row of the standard spectroscopic image data perpendicular to a wavelength dispersion direction and (ii) each pixel column of the standard spectroscopic image data parallel to the wavelength dispersion direction. The processor, based on luminance values of pixels belonging to the pixel row or column, determines a characteristic of the pixel row and grasps a wavelength sensitivity characteristic of the imaging element under the near-infrared light emitted from the illumination device.