Abstract:
An etching apparatus using a neutral beam includes an electron emission unit to convert an ion beam, extracted from plasma by a plurality of grids, into a neutral beam by colliding the ion beam with electrons to prevent the ion beam from physically colliding with the electron emission unit, thus preventing the damage to a neutralization unit and generation of foreign substances with a simple structure. Further, the etching apparatus converts the ion beam into the neutral beam at a high neutralizing efficiency without causing directionality and energy losses, and generates a neutral beam having a large area, thus uniformly etching a semiconductor wafer.
Abstract:
An ion beam extractor controls a direction and an intensity of ion beams by adjusting a voltage applied to a grid having slits formed therein, thereby enhancing uniformity of an etching rate of a wafer, leading to an increase of productivity of semiconductor diodes. The ion beam extractor comprises an ion source to produce an ion beam and at least one grid located at a rear end of the ion source in a progressing path of the ion beam produced by the ion source to adjust a direction of the ion beam by controlling a voltage applied to the at least one grid.
Abstract:
An apparatus to treat a substrate including a vacuum chamber having a plasma space where plasma is generated and a treating space where a substrate is treated, an extract electrode disposed between the plasma space and the treating space, a power supply to provide power to the extract electrode, and a controller to control the power supply so that a cation beam and a negative charge beam are alternately extracted from a plasma in the plasma space to the treating space.
Abstract:
A method and apparatus for sharing a DL-DPCH in an NB-TDD system. Two time slots at the same position in two subframes forming one radio frame are allocated as a DPCH for two UEs. A Node B arranges data and control information for the UEs in the two time slots and transmits the data and control information to the UEs. The UEs extract the data and control information from the two time slots and acquire the data and control information destined for the individual UEs.
Abstract:
A method and apparatus for transmitting scheduling grant information by a TFCI in Node B controlled scheduling of uplink packet transmission. In one embodiment, a scheduling command resulting from Node B controlled scheduling is mapped onto a TFCI and transmitted on the downlink. In another embodiment, an ACK/NACK signal determining retransmission of uplink packet data is mapped onto a TFCI and transmitted on the downlink.
Abstract:
A dual crucible for silicon melting and a manufacturing apparatus of a silicon thin film including the same are disclosed. The dual crucible for the silicon melting includes a graphite crucible formed in a container shape with an open top and a bottom having an outlet part formed therein to exhaust silicon melt, the graphite crucible comprising a slope part configured to connect the outlet part and an inner wall with each other, with a predetermined slope with respect to a top surface of the outlet part, and a quartz crucible insertedly coupled to the graphite crucible, with being formed in a corresponding shape to the graphite crucible, the quartz crucible having a silicon base material charged therein.
Abstract:
A top nozzle is provided. The top nozzle can include a coupling plate, a perimeter wall and a hold-down spring unit. The coupling plate can be coupled to a guide thimble of the nuclear fuel assembly. The perimeter wall can protrude upwards from the perimeter of the coupling plate. A spring clamp can be provided on the upper surface of the perimeter wall. The hold-down spring unit can be mounted to the upper surface of the perimeter wall in such a way to couple a corresponding end of the hold-down spring unit to the spring clamp. A fastening pin hole can be vertically formed through an upper surface of the spring clamp. A spring insert hole into which the hold-down spring unit can be inserted and formed by electro-discharge machining in an insert direction of the hold-down spring.
Abstract:
A debugging apparatus and method are provided. The debugging apparatus may include a breakpoint setting unit configured to store a first instruction corresponding to a breakpoint in a table, stop a program currently being executed, and insert a breakpoint instruction including current location information of the first instruction into the breakpoint; and an instruction execution unit configured to selectively execute one of the breakpoint instruction and the first instruction according to a value of a status bit.
Abstract:
A guide thimble plug for a nuclear fuel assembly is provided, in which an internal threaded hole is formed through a main body so that the main body is coupled to a bottom nozzle by a screw coupling. An upper insert part is formed in the upper end of the main body. The upper insert part is inserted into a shock absorption tube. A thermal deformation prevention part is formed on the main body below the upper insert part and is recessed inward from the outer surface of the main body such that, when the main body is coupled to the guide thimble, a gap is defined between the thermal deformation prevention part and the guide thimble. The guide thimble and the shock absorption tube can be reliably fastened to the bottom nozzle, and thermal deformation of the guide thimble can be minimized.
Abstract:
A fusing apparatus to fuse a toner image transferred to a printing medium by applying heat and pressure. The fusing apparatus includes a separation member that is rotatably mounted on a rotation axis to separate the printing medium from one of a heating roller and a pressing roller. The separation member includes a hollow portion into which the rotation axis is inserted, and a separation portion that contacts an outer circumference of the heating roller. The separation member is installed so as to be pitched around the rotation axis and a pitching axis having an inclination angle within a range of ±10° with respect to a line that connects a contact point between the separation portion and the outer circumference of the roller from which the printing medium is to be separated and a center of the roller from which the printing medium is to be separated.