Differential compensator to reduce uncertainty in determination of movement of a structural member

    公开(公告)号:US10247536B2

    公开(公告)日:2019-04-02

    申请号:US15373221

    申请日:2016-12-08

    Abstract: A differential compensator reduces uncertainty in determination of movement of a structural member and includes: a first probe line to attach to the structural member and to provide a first combination of displacement of the structural member and a first expansion of the first probe line in response to movement of the structural member and expansion of the first probe line; and a second probe line having a coefficient of thermal expansion that is different than that of the first probe line, the second probe line to attach to the structural member at a position on the structural member proximate to a point of attachment of the first probe line to the structural member and to provide a second combination of displacement of the structural member and second expansion of the second probe line in response to movement of the structural member and expansion of the second probe line.

    SUPERCONFORMAL FILLING COMPOSITION AND SUPERCONFORMALLY FILLING A RECESSED FEATURE OF AN ARTICLE

    公开(公告)号:US20190093248A1

    公开(公告)日:2019-03-28

    申请号:US16043358

    申请日:2018-07-24

    Abstract: Superconformally filling a recessed feature includes: contacting the recessed feature with superconformal filling composition that includes: Au(SO3)23− anions; SO32− anions; and Bi3+ cations; convectively transporting Au(SO3)23− and Bi3+ to the bottom member of the recessed feature; subjecting the recessed feature to an electrical current to superconformally deposit gold from the Au(SO3)23− on the bottom member relative to the sidewall and the field, the electrical current providing a cathodic voltage; and increasing the electrical current subjected to the field and the recessed feature to maintain the cathodic voltage between −0.85 V and −1.00 V relative to the SSE during superconformally depositing gold on the substrate to superconformally fill the recessed feature of the article with gold as a superconformal filling of gold, the superconformal filling being void-free and seam-free.

    Imaging spectrometer
    65.
    发明授权

    公开(公告)号:US10153144B2

    公开(公告)日:2018-12-11

    申请号:US15632959

    申请日:2017-06-26

    Abstract: A extreme ultraviolet (EUV) imaging spectrometer includes: a radiation source to: produce EUV radiation; subject a sample to the EUV radiation; photoionize a plurality of atoms of the sample; and form photoions from the atoms subject to photoionization by the EUV radiation, the photoions being field evaporated from the sample in response to the sample being subjected to the EUV radiation; and an ion detector to detect the photoions: as a function of a time-of-arrival of the photoions at the ion detector after the sample is subjected to the EUV radiation; or as a function of a position of the photoions at the ion detector.

    Optofluidic flow meter
    66.
    发明授权

    公开(公告)号:US10151681B2

    公开(公告)日:2018-12-11

    申请号:US15673299

    申请日:2017-08-09

    Abstract: An optofluidic flow meter to determine a rate of fluid flow in a flow member includes: the flow member; a primary fluid conduit disposed in the flow member and that receives a fluid; a secondary fluid conduit disposed in the flow member; and a fiber optic comprising a fiber Bragg grating interposed between a first flow region of the primary fluid conduit and a second flow region of the secondary fluid conduit and that: physically distorts relative to a pressure differential between the primary fluid conduit and the secondary fluid conduit; and produces a shift in a Bragg wavelength in response to a physical distortion due to the pressure differential.

    PHOTON MOMENTUM SENSOR
    67.
    发明申请

    公开(公告)号:US20180299299A1

    公开(公告)日:2018-10-18

    申请号:US15620746

    申请日:2017-06-12

    CPC classification number: G01J1/56

    Abstract: A photon momentum sensor includes: a reflector plate that includes: a central disk including a mirror; an annular member; a plurality of spring legs interposed between the central disk and the annular member, such that: the spring legs are interleaved; neighboring spring legs are spaced apart; and the spring legs individually are arranged in an Archimedean spiral that provides orthogonal motion of the central disk relative to the plane of the annular member; and a bias plate disposed opposing the reflector plate such that: the central disk of the reflector plate moves orthogonally to a plane of the bias plate in response to reflection of laser light, and the central disk and the bias plate are arranged spaced apart as a capacitive structure.

    PROCESS FOR FORMING A TRANSITION ZONE TERMINATED SUPERCONFORMAL FILLING

    公开(公告)号:US20180298514A1

    公开(公告)日:2018-10-18

    申请号:US15489089

    申请日:2017-04-17

    Abstract: Forming a transition zone terminated superconformal filling in a recess includes: providing an electrodeposition composition including: a metal electrolyte including a plurality of metal ions, solvent, and suppressor; providing the article including: a field surface and the recess that includes a distal position and a proximate position; exposing the recess to the electrodeposition composition; potentiodynamically controlling an electric potential of the recess with a potential wave form; bifurcating the recess into an active metal deposition region and a passive region; forming a transition zone; decreasing the electric potential of the recess by the potential wave form; progressively moving the transition zone closer to the field surface and away from the distal position; and reducing the metal ions and depositing the metal in the active metal deposition region and not in the passive region to form the transition zone terminated superconformal filling in the recess of the substrate.

    Phase modulation noise reducer
    69.
    发明授权

    公开(公告)号:US10050608B2

    公开(公告)日:2018-08-14

    申请号:US15189235

    申请日:2016-06-22

    Abstract: A phase modulation (PM) noise reducer to reduce phase modulation noise of an oscillator, the PM noise reducer including: an amplitude modulation (AM) detector to receive a primary oscillator signal and to produce an AM detector signal based on the primary oscillator signal, the primary oscillator signal including a first phase modulation (PM) noise; a control circuit in electrical communication with the AM detector to receive the AM detector signal and to produce a control signal; a phase shifter in electrical communication with the control circuit to receive the primary oscillator signal and the control signal and to produce a secondary oscillator signal based on the primary oscillator signal and the control signal, the secondary oscillator signal comprising a second PM noise, wherein the second PM noise is less than the first PM noise.

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