OPTICAL WIRING MODULE
    63.
    发明申请
    OPTICAL WIRING MODULE 有权
    光接线模块

    公开(公告)号:US20090304325A1

    公开(公告)日:2009-12-10

    申请号:US12375608

    申请日:2007-09-17

    CPC classification number: G02B6/43 B82Y20/00 G02B6/1226

    Abstract: Provided is an optical wiring module. The optical wiring module includes a light source mounted on a surface of a substrate, a metal optical waveguide coupled to a transverse magnetic mode of light emitted from the light source and using a long-range surface palsmon polariton, and a photodetector. The optical wiring module has a simple structure enabling it to be further miniaturized and its yield to be increased.

    Abstract translation: 提供了一种光配线模块。 光配线模块包括安装在基板的表面上的光源,耦合到从光源发射的光的横向磁模式并使用远程表面匹配极化子的金属光波导和光电检测器。 光配线模块具有能够进一步小型化并且其产量提高的简单结构。

    Semiconductor Wafer Cleaning System
    69.
    发明申请
    Semiconductor Wafer Cleaning System 审中-公开
    半导体晶圆清洗系统

    公开(公告)号:US20080173335A1

    公开(公告)日:2008-07-24

    申请号:US11910977

    申请日:2005-04-04

    Abstract: The present invention related to a semiconductor wafer cleaning system comprising a preliminary cleaning station for removing particles on a wafer in advance by spraying deionized water thereon; a first cleaning station for cleaning remaining particles firstly by rotating frictionally a pair of brushes disposed to be contacted with a front surface and a back surface of the wafer and by spraying chemicals thereon through a chemical sprayer being provided independently; a first rinsing station for rinsing by spraying a cleaning liquid onto the firstly cleaned wafer at the first cleaning station; a second cleaning station for cleaning particles secondly remained on the front surface and the back surface of the wafer by spraying the chemicals onto the firstly rinsed cleaned wafer at the first rinsing station through a chemical sprayer being provided independently using the same structure and manner as those of the first cleaning station; a second rinsing station for rinsing by spraying the cleaning liquid onto the secondly cleaned wafer at the second cleaning station; and a dry station for drying the remained cleaning liquid using centrifugal force generated by rotating the rinsed wafer at the second rinsing station at a high speed. According to the present invention, a waiting time of entry into each cleaning station is minimized by processing a cleaning operation and a rinsing operation of a surface-polished wafer in a cleaning station and a rinsing station which are provided separately and independently thereby improves wafer productivity significantly by solving a delayed phenomenon in a whole process of wafer manufacturing.

    Abstract translation: 本发明涉及一种半导体晶片清洁系统,其包括:通过在其上喷射去离子水,预先清除晶片上的颗粒的初步清洁站; 第一清洁站,首先通过摩擦地旋转一对刷子来清洁剩余的颗粒,所述一对刷子设置成与晶片的前表面和后表面接触,并且通过独立设置的化学喷雾器在其上喷洒化学品; 第一冲洗站,用于通过在第一清洁站处将清洁液体喷射到第一清洁的晶片上进行冲洗; 通过化学喷雾器,使用与上述相同的结构和方式独立地提供在第一漂洗站处将化学品喷洒到首先漂洗的清洁晶片上,从而第二清洁颗粒的第二清洗站保留在晶片的前表面和后表面上 的第一个清洁站; 第二清洗站,用于通过在第二清洁站处将清洁液体喷洒到第二清洁的晶片上进行漂洗; 以及干燥站,用于使用通过在第二漂洗站高速旋转漂洗的晶片产生的离心力来干燥残留的清洁液体。 根据本发明,通过处理单独且独立地提供的清洁站和漂洗站中的表面抛光晶片的清洁操作和漂洗操作,进入每个清洁站的等待时间最小化,从而提高晶片生产率 通过在整个晶片制造过程中解决延迟现象而显着。

    Subscriber control module having a test apparatus for asynchronous transfer mode
    70.
    发明授权
    Subscriber control module having a test apparatus for asynchronous transfer mode 失效
    用户控制模块具有用于异步传输模式的测试装置

    公开(公告)号:US06212168B1

    公开(公告)日:2001-04-03

    申请号:US08961230

    申请日:1997-10-30

    Abstract: The present invention relates to a subscriber control module having a test apparatus suitable for testing internal routes in an Asynchronous Transfer Mode ATM exchange system for improved reliability and effective maintenance thereof. A subscriber control module having testing functions makes it possible that internal whole routes in the exchange system under the control by maintenance control module inside the system can be tested through the use of subscriber switching network and connection switching network. Further, a test apparatus of the present invention placed inside the exchange system can test ATM subscribers with individually different rates, configured in such a way to be identical with boards used in the exchange system so that the test apparatus can be installed inside the exchange system.

    Abstract translation: 本发明涉及一种具有测试装置的用户控制模块,该测试装置适用于测试异步传输模式ATM交换系统中的内部路由,以提高其可靠性和有效维护。 具有测试功能的用户控制模块使得可以通过使用用户交换网络和连接交换网络来测试在系统内的维护控制模块控制的交换系统中的内部整个路由。 此外,本发明的设置在交换系统内部的测试装置可以以单独不同的速率来测试ATM用户,其配置方式与交换系统中使用的板相同,使得测试设备可以安装在交换系统内 。

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