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    System and method for charge control in a MEMS device
    61.
    发明申请
    System and method for charge control in a MEMS device 有权
    MEMS器件中充电控制的系统和方法

    公开(公告)号：US20070058095A1

    公开(公告)日：2007-03-15

    申请号：US11267939

    申请日：2005-11-04

    Applicant: Mark Miles

    Inventor： Mark Miles

    IPC: G02F1/13

    CPC classification number: G02B26/001 ,  G01J3/26 ,  G02B6/12 ,  G02B26/02 ,  G02B26/0833 ,  G02B26/0841 ,  G02B26/085 ,  G02B26/0858 ,  G02B2006/12104 ,  G02F1/13725 ,  G02F1/216 ,  G02F2001/213 ,  G02F2203/03 ,  G02F2203/09 ,  G06F3/1431 ,  G06F3/1446 ,  G06F3/147 ,  G09G3/001 ,  G09G3/2014 ,  G09G3/2074 ,  G09G3/2077 ,  G09G3/22 ,  G09G3/34 ,  G09G3/3466 ,  G09G5/02 ,  G09G2300/0408 ,  G09G2300/0452 ,  G09G2300/06 ,  G09G2360/142

    Abstract: Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each of the modulation elements having a surface which is caused to exhibit a predetermined impedance characteristic to particular frequencies of light. The amplitude of light delivered by each of the modulation elements is controlled independently by pulse code modulation. Each modulation element has a deformable portion held under tensile stress, and the control circuitry controls the deformation of the deformable portion. Each deformable element has a deformation mechanism and an optical portion, the deformation mechanism and the optical portion independently imparting to the element respectively a controlled deformation characteristic and a controlled modulation characteristic. The deformable modulation element may be a non-metal. The elements are made by forming a sandwich of two layers and a sacrificial layer between them, the sacrificial layer having a thickness related to the final cavity dimension, and using water or an oxygen based plasma to remove the sacrificial layer.

    Abstract translation: 在可见光谱中的光被调制使用调制元件的阵列，以及连接到阵列的控制电路，用于独立地控制每个调制元件，每个调制元件具有表现出特定频率的预定阻抗特性的表面 的光。 每个调制元件传送的光的幅度由脉冲编码调制独立地控制。 每个调制元件具有保持在拉伸应力下的可变形部分，并且控制电路控制可变形部分的变形。 每个可变形元件具有变形机构和光学部分，变形机构和光学部分分别独立地赋予元件受控的变形特性和受控的调制特性。 可变形调制元件可以是非金属的。 这些元件通过形成两层的夹层和在它们之间的牺牲层制成，牺牲层具有与最终空腔尺寸相关的厚度，并且使用水或氧基等离子体去除牺牲层。

    MEMS devices having overlying support structures and methods of fabricating the same
    62.
    发明申请
    MEMS devices having overlying support structures and methods of fabricating the same 有权
    具有上覆支撑结构的MEMS器件及其制造方法

    公开(公告)号：US20070019280A1

    公开(公告)日：2007-01-25

    申请号：US11490880

    申请日：2006-07-21

    Applicant: Teruo Sasagawa ,  SuryaPrakash Ganti ,  Mark Miles ,  Clarence Chui ,  Manish Kothari ,  Ming-Hau Tung

    Inventor： Teruo Sasagawa ,  SuryaPrakash Ganti ,  Mark Miles ,  Clarence Chui ,  Manish Kothari ,  Ming-Hau Tung

    IPC: G02F1/29 ,  G02B6/00

    CPC classification number: G02B26/001 ,  B81B3/007 ,  B81B2201/047 ,  B81B2203/0307 ,  B81B2203/053

    Abstract: Embodiments of MEMS devices comprise a conductive movable layer spaced apart from a conductive fixed layer by a gap, and supported by rigid support structures, or rivets, overlying depressions in the conductive movable layer, or by posts underlying depressions in the conductive movable layer. In certain embodiments, portions of the rivet structures extend through the movable layer and contact underlying layers. In other embodiments, the material used to form the rigid support structures may also be used to passivate otherwise exposed electrical leads in electrical connection with the MEMS devices, protecting the electrical leads from damage or other interference.

    Abstract translation: MEMS器件的实施例包括通过间隙与导电固定层间隔开的导电可移动层，并且由导电可移动层中的上凹部的刚性支撑结构或铆钉支撑，或由导电可移动层中的凹陷下方的柱支撑。 在某些实施例中，铆钉结构的部分延伸穿过可移动层并接触下面的层。 在其他实施例中，用于形成刚性支撑结构的材料也可以用于钝化与MEMS装置电连接的其它暴露的电引线，保护电引线免受损坏或其他干扰。

    Movable micro-electromechanical device
    63.
    发明申请
    Movable micro-electromechanical device 有权
    可移动微机电装置

    公开(公告)号：US20060268388A1

    公开(公告)日：2006-11-30

    申请号：US11399681

    申请日：2006-04-06

    Applicant: Mark Miles

    Inventor： Mark Miles

    IPC: G02B26/00

    CPC classification number: G02B26/0841 ,  G09G3/2014 ,  G09G3/22 ,  G09G3/3466 ,  G09G2300/0809 ,  G09G2300/0842 ,  G09G2300/088

    Abstract: Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each of the modulation elements having a surface which is caused to exhibit a predetermined impedance characteristic to particular frequencies of light. The amplitude of light delivered by each of the modulation elements is controlled independently by pulse code modulation. Each modulation element has a deformable portion held under tensile stress, and the control circuitry controls the deformation of the deformable portion. Each deformable element has a deformation mechanism and an optical portion, the deformation mechanism and the optical portion independently imparting to the element respectively a controlled deformation characteristic and a controlled modulation characteristic. The deformable modulation element may be a non-metal. The elements are made by forming a sandwich of two layers and a sacrificial layer between them, the sacrificial layer having a thickness related to the final cavity dimension, and using water or an oxygen based plasma to remove the sacrificial layer.

    Abstract translation: 在可见光谱中的光被调制使用调制元件的阵列，以及连接到阵列的控制电路，用于独立地控制每个调制元件，每个调制元件具有表现出特定频率的预定阻抗特性的表面 的光。 每个调制元件传送的光的幅度由脉冲编码调制独立地控制。 每个调制元件具有保持在拉伸应力下的可变形部分，并且控制电路控制可变形部分的变形。 每个可变形元件具有变形机构和光学部分，变形机构和光学部分分别独立地赋予元件受控的变形特性和受控的调制特性。 可变形调制元件可以是非金属的。 这些元件通过形成两层的夹层和在它们之间的牺牲层制成，牺牲层具有与最终空腔尺寸相关的厚度，并且使用水或氧基等离子体去除牺牲层。

    Immersive environments with multiple points of view
    64.
    发明申请
    Immersive environments with multiple points of view 有权
    具有多个观点的沉浸式环境

    公开(公告)号：US20060268013A1

    公开(公告)日：2006-11-30

    申请号：US11136111

    申请日：2005-05-24

    Applicant: Mark Miles

    Inventor： Mark Miles

    IPC: G09G5/00

    CPC classification number: G06F3/1446 ,  G09G2300/026 ,  G09G2320/028

    Abstract: In one embodiment, a method is provided. The method comprises positioning a plurality of display screens at different positions within a real space, each display screen being associated with a different window into an object space through which a scene comprising objects from the object space can be seen; and displaying scenes from the object space on each of the plurality of display screens, wherein the scene displayed on each screen comprises objects from the object space that can be seen through the window associated with that screen by a hypothetical viewer positioned at a first position relative to the window and for which window the field of view is restricted to be non-overlapping with the field of view for an adjacent window.

    Abstract translation: 在一个实施例中，提供了一种方法。 该方法包括将多个显示屏幕定位在真实空间内的不同位置，每个显示屏幕与不同的窗口相关联到对象空间中，通过该对象空间可以看到包含来自对象空间的对象的场景; 以及在所述多个显示屏幕中的每一个上显示来自所述对象空间的场景，其中，在每个屏幕上显示的场景包括来自所述物体空间的物体，所述物体可以通过位于相对于所述第一位置的假想观察者通过与所述屏幕相关联的窗口看到 到窗口，并且视野的视野被限制为与相邻窗口的视场不重叠。

    MEMS device and method of forming a MEMS device
    67.
    发明申请
    MEMS device and method of forming a MEMS device 有权
    MEMS器件和形成MEMS器件的方法

    公开(公告)号：US20060261330A1

    公开(公告)日：2006-11-23

    申请号：US11267819

    申请日：2005-11-04

    Applicant: Mark Miles

    Inventor： Mark Miles

    IPC: H01L51/00 ,  H01L21/02

    CPC classification number: G02B26/001 ,  G09G3/2014 ,  G09G3/22 ,  G09G3/34 ,  G09G3/3466

    Abstract: Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each of the modulation elements having a surface which is caused to exhibit a predetermined impedance characteristic to particular frequencies of light. The amplitude of light delivered by each of the modulation elements is controlled independently by pulse code modulation. Each modulation element has a deformable portion held under tensile stress, and the control circuitry controls the deformation of the deformable portion. Each deformable element has a deformation mechanism and an optical portion, the deformation mechanism and the optical portion independently imparting to the element respectively a controlled deformation characteristic and a controlled modulation characteristic. The deformable modulation element may be a non-metal. The elements are made by forming a sandwich of two layers and a sacrificial layer between them, the sacrificial layer having a thickness related to the final cavity dimension, and using water or an oxygen based plasma to remove the sacrificial layer.

    Abstract translation: 在可见光谱中的光被调制使用调制元件的阵列，以及连接到阵列的控制电路，用于独立地控制每个调制元件，每个调制元件具有表现出特定频率的预定阻抗特性的表面 的光。 每个调制元件传送的光的幅度由脉冲编码调制独立地控制。 每个调制元件具有保持在拉伸应力下的可变形部分，并且控制电路控制可变形部分的变形。 每个可变形元件具有变形机构和光学部分，变形机构和光学部分分别独立地赋予元件受控的变形特性和受控的调制特性。 可变形调制元件可以是非金属的。 这些元件通过形成两层的夹层和在它们之间的牺牲层制成，牺牲层具有与最终空腔尺寸相关的厚度，并且使用水或氧基等离子体去除牺牲层。

    VISIBLE SPECTRUM MODULATOR ARRAYS
    69.
    发明申请
    VISIBLE SPECTRUM MODULATOR ARRAYS 有权
    可见光谱调制器阵列

    公开(公告)号：US20050213183A9

    公开(公告)日：2005-09-29

    申请号：US10082397

    申请日：2002-02-25

    Applicant: Mark Miles

    Inventor： Mark Miles

    IPC: G02B26/00 ,  G02B26/08 ,  G09G3/22 ,  G09G3/34

    CPC classification number: B82Y20/00 ,  G02B26/001 ,  G02B26/08 ,  G02F1/19 ,  G09G3/2014 ,  G09G3/22 ,  G09G3/34 ,  G09G3/3466 ,  G09G2300/0456 ,  G09G2330/021

    Abstract: Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each of the modulation elements having a surface which is caused to exhibit a predetermined impedance characteristic to particular frequencies of light. The amplitude of light delivered by each of the modulation elements is controlled independently by pulse code modulation. Each modulation element has a deformable portion held under tensile stress, and the control circuitry controls the deformation of the deformable portion. Each deformable element has a deformation mechanism and an optical portion, the deformation mechanism and the optical portion independently imparting to the element respectively a controlled deformation characteristic and a controlled modulation characteristic. The deformable modulation element may be a non-metal. The elements are made by forming a sandwich of two layers and a sacrificial layer between them, the sacrificial layer having a thickness related to the final cavity dimension, and using chemical (e.g., water) or a plasma based etch process to remove the sacrificial layer.

    Abstract translation: 在可见光谱中的光被调制使用调制元件的阵列，以及连接到阵列的控制电路，用于独立地控制每个调制元件，每个调制元件具有表现出特定频率的预定阻抗特性的表面 的光。 每个调制元件传送的光的幅度由脉冲编码调制独立地控制。 每个调制元件具有保持在拉伸应力下的可变形部分，并且控制电路控制可变形部分的变形。 每个可变形元件具有变形机构和光学部分，变形机构和光学部分分别独立地赋予元件受控的变形特性和受控的调制特性。 可变形调制元件可以是非金属的。 这些元件通过形成两层的夹层和它们之间的牺牲层制成，牺牲层具有与最终空腔尺寸相关的厚度，并且使用化学（例如，水）或基于等离子体的蚀刻工艺来去除牺牲层 。

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