Ultraviolet-based detection and sterilization
    67.
    发明授权
    Ultraviolet-based detection and sterilization 有权
    紫外线检测和灭菌

    公开(公告)号:US09572903B2

    公开(公告)日:2017-02-21

    申请号:US14883804

    申请日:2015-10-15

    Abstract: A system capable of detecting and/or sterilizing surface(s) of an object using ultraviolet radiation is provided. The system can include a disinfection chamber and/or handheld ultraviolet unit, which includes ultraviolet sources for inducing fluorescence in a contaminant and/or sterilizing a surface of an object. The object can comprise a protective suit, which is worn by a user and also can include ultraviolet sources for disinfecting air prior to the air entering the protective suit. The system can be implemented as a multi-tiered system for protecting the user and others from exposure to the contaminant and sterilizing the protective suit after exposure to an environment including the contaminant.

    Abstract translation: 提供一种能够使用紫外线辐射来检测和/或消毒物体表面的系统。 该系统可以包括消毒室和/或手持式紫外线单元,其包括用于在污染物中诱导荧光和/或消毒物体表面的紫外线源。 该物体可以包括用户佩戴的防护服,并且还可以包括用于在空气进入防护服之前对空气进行消毒的紫外线源。 该系统可以实现为多层系统,用于在暴露于包括污染物的环境之后,保护使用者和其他人免受暴露于污染物和对防护服进行消毒。

    Multi-Layered Contact to Semiconductor Structure
    68.
    发明申请
    Multi-Layered Contact to Semiconductor Structure 有权
    多层次接触半导体结构

    公开(公告)号:US20170005246A1

    公开(公告)日:2017-01-05

    申请号:US15198569

    申请日:2016-06-30

    Abstract: A multi-layered contact to a semiconductor structure and a method of making is described. In one embodiment, the contact includes a discontinuous Chromium layer formed over the semiconductor structure. A discontinuous Titanium layer is formed directly on the Chromium layer, wherein portions of the Titanium layer extend into at least some of the discontinuous sections of the Chromium layer. A discontinuous Aluminum layer is formed directly on the Chromium layer, wherein portions of the Aluminum layer extend into at least some of the discontinuous sections of the Titanium layer and the Chromium layer.

    Abstract translation: 描述了与半导体结构的多层接触和制造方法。 在一个实施例中,触点包括形成在半导体结构上的不连续的铬层。 直接在铬层上形成不连续的钛层,其中钛层的部分延伸到铬层的至少一些不连续部分。 直接在铬层上形成不连续的铝层,其中铝层的部分延伸到钛层和铬层的至少一些不连续部分。

    Susceptor Heating For Epitaxial Growth Process
    70.
    发明申请
    Susceptor Heating For Epitaxial Growth Process 审中-公开
    受体加热用于外延生长过程

    公开(公告)号:US20160355947A1

    公开(公告)日:2016-12-08

    申请号:US15173660

    申请日:2016-06-05

    CPC classification number: C30B25/16 C23C16/4586 C23C16/46 C23C16/52 C30B25/10

    Abstract: An approach for heating a susceptor during an epitaxial growth process of semiconductor layers in an epitaxial growth chamber is described. A main heating unit heats a region of the susceptor supporting a wafer. An auxiliary heating unit supports the main heating unit in heating the susceptor when the temperature distribution over the surface of the wafer fails to satisfy a target temperature distribution. The control unit monitors the temperature distribution over the surface of the wafer while the susceptor is heated by both the main heating unit and the auxiliary heating unit and adjusts at least one of a multitude of operating parameters for the auxiliary heating unit in response to determining that the temperature distribution over the surface of the wafer while the susceptor is heated by the main heating unit and the auxiliary heating unit is failing to satisfy the target temperature distribution.

    Abstract translation: 描述了在外延生长室中的半导体层的外延生长过程期间加热基座的方法。 主加热单元加热支撑晶片的基座的区域。 当晶片表面上的温度分布不能满足目标温度分布时,辅助加热单元支撑主加热单元加热基座。 所述控制单元监测所述晶片表面上的温度分布,同时所述基座被所述主加热单元和所述辅助加热单元加热,并响应于确定所述辅助加热单元的多个操作参数中的至少一个而调整 当基座被主加热单元和辅助加热单元加热时,晶片表面上的温度分布不能满足目标温度分布。

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