公开(公告)号：US20150285735A1

公开(公告)日：2015-10-08

申请号：US14745047

申请日：2015-06-19

Applicant: KLA-Tencor Corporation

Inventor： David Y. Wang ,  Klaus Flock ,  Lawrence Rotter ,  Shankar Krishnan ,  Johannes D. de Veer ,  Catalin Filip ,  Gregory Brady ,  Muzammil Arain ,  Andrei Shchegrov

IPC: G01N21/21 ,  G01N21/95

CPC classification number: G01N21/211 ,  G01B2210/56 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/214 ,  G01N2021/8848 ,  G01N2201/06113 ,  G01N2201/0636

Abstract: An apparatus includes (i) a bright light source for providing an illumination beam at multiple wavelengths selectable with a range from a deep ultraviolet wavelength to an infrared wavelength, (ii) illumination optics for directing the illumination beam towards a sample at selectable sets of angles of incidence (AOI's) or azimuth angles (AZ's) and polarization states to provide spectroscopic ellipsometry, wherein the illumination optics include an apodizer for controlling a spot size of the illumination beam on the sample at each of the selectable AOI/AZ sets, (iii) collection optics for directing an output beam from the sample in response to the illumination beam at each of the selectable AOI/AZ sets and polarization states towards a detector that generates an output signal or image based on the output beam, and (v) a controller for characterizing a feature of the sample based on the output signal or image.

Abstract translation: 一种装置包括（i）用于提供在从深紫外波长到红外波长的范围内可选择的多个波长的照明光束的明亮光源，（ii）照明光学器件，用于将照明光束以可选择的角度集合 （AOI）或方位角（AZ）和极化状态以提供光谱椭偏仪，其中照明光学器件包括用于控制每个可选AOI / AZ组上样品上的照明光束的光斑尺寸的变迹器，（iii ）收集光学器件，用于响应于在每个可选择的AOI / AZ集合处的照明光束和朝向基于输出光束产生输出信号或图像的检测器的偏振状态来引导来自样品的输出光束，以及（v） 控制器，用于基于输出信号或图像来表征样本的特征。

公开(公告)号：US20150253246A1

公开(公告)日：2015-09-10

申请号：US14434547

申请日：2013-10-18

Applicant: HITACHI, LTD.

Inventor： Yuta Nakatsuka ,  Shuichi Mori ,  Noe Miyashita

IPC: G01N21/64 ,  C12Q1/00

CPC classification number: G01N21/6428 ,  C12Q1/008 ,  C12Q1/02 ,  G01N21/763 ,  G01N33/52 ,  G01N2201/0636

Abstract: A device for quantifying biological material (ATP) of cells contained in a liquid sample as a sample is provided. The device includes a controller that calculates an amount of the biological material of cells contained in the liquid sample, based on a differential amount of luminescence between an amount of luminescence when an ATP luminescence reagent as a luminescent reagent for biological material is reacted with the biological material (ATP) that is separated and extracted from cells contained in the liquid sample by bringing an ATP extraction reagent as a processing reagent into contact with the liquid sample, and an amount of luminescence when the ATP luminescent reagent is reacted with the ATP extraction reagent.

Abstract translation: 提供了用于量化作为样品的液体样品中包含的细胞的生物材料（ATP）的装置。 该装置包括：控制器，其基于当作为生物材料的发光试剂的ATP发光试剂与生物体的反应的发光量之间的发光量的差异量来计算包含在液体样品中的细胞的生物材料的量的量 通过使ATP提取试剂作为处理剂与液体样品接触而从液体样品中包含的细胞中分离提取的材料（ATP），以及当ATP发光试剂与ATP提取试剂反应时的发光量 。

公开(公告)号：US20150241351A1

公开(公告)日：2015-08-27

申请号：US14430147

申请日：2013-09-23

Applicant: GE Healthcare Bio-Sciences Corp.

Inventor： Jeremy Cooper ,  William M. Dougherty

IPC: G01N21/64 ,  G02B21/16 ,  G02B21/36 ,  G01B11/00

CPC classification number: G01N21/6458 ,  G01B11/002 ,  G01N21/6486 ,  G01N2201/0633 ,  G01N2201/0636 ,  G02B21/06 ,  G02B21/14 ,  G02B21/16 ,  G02B21/361 ,  G02B21/365 ,  G02B21/367 ,  G02B27/58

Abstract: Methods and systems to resolve positions of sample components in fluorescence stochastic microscopy using three-dimensional structured illumination microscopy (“3D-SIM”) are disclosed. In one aspect, components of a sample specimen are labeled with fluorophores and weakly illuminated with a frequency of light to stochastically convert a subset of the fluorophores into an active state. The sample is then illuminated with a three-dimensional structured illumination pattern (“3D-SIP”) of excitation light that causes the activated fluorophores to fluoresce. As the 3D-SIP is incrementally moved within the volume of the sample and images are recorded, computational methods are used to process the images to locate and refine the locations of the activated fluorophores thereby generating a super-resolution image of sample components.

Abstract translation: 公开了使用三维结构照明显微镜（“3D-SIM”）在荧光随机显微镜中分析样品组分位置的方法和系统。 在一个方面，样品样品的成分用荧光团标记，并以光的频率被弱照射以将一部分荧光团随机转化为活性状态。 然后用引起活化的荧光团发荧光的激发光的三维结构照明模式（“3D-SIP”）照亮样品。 随着3D-SIP在样本的体积内逐渐移动并且记录图像，使用计算方法来处理图像以定位和细化活化的荧光团的位置，从而生成样品组分的超分辨率图像。

公开(公告)号：US20150233840A1

公开(公告)日：2015-08-20

申请号：US13998046

申请日：2013-09-25

Applicant: Ajharali Amanullah ,  Jing Lin ,  Kok Weng Wong

Inventor： Ajharali Amanullah ,  Jing Lin ,  Kok Weng Wong

IPC: G01N21/88 ,  H04N5/235 ,  G06T7/00 ,  G01N21/95

CPC classification number: G01N21/9501 ,  G01N21/8806 ,  G01N2021/8825 ,  G01N2201/06113 ,  G01N2201/0636 ,  G06T7/0008 ,  G06T7/001 ,  G06T2207/10152 ,  G06T2207/20212 ,  G06T2207/30148 ,  H01L22/12 ,  H01L2924/0002 ,  H04N5/2354 ,  H01L2924/00

Abstract: An inspection system for inspecting a semiconductor wafer. The inspection system comprises an illumination setup for supplying broadband illumination. The broadband illumination can be of different contrasts, for example brightfield and darkfield broadband illumination. The inspection system further comprises a first image capture device and a second image capture device, each configured for receiving broadband illumination to capture images of the semiconductor wafer while the semiconductor wafer is in motion. The system comprises a number of tube lenses for enabling collimation of the broadband illumination. The system also comprises a stabilizing mechanism and an objective lens assembly. The system further comprises a thin line illumination emitter and a third image capture device for receiving thin line illumination to thereby capture three-dimensional images of the semiconductor wafer. The system comprises a reflector assembly for enabling the third image capture device to receive illumination reflected from the semiconductor wafer in multiple directions.

Abstract translation: 用于检查半导体晶片的检查系统。 检查系统包括用于提供宽带照明的照明设备。 宽带照明可以具有不同的对比度，例如明场和暗场宽带照明。 检查系统还包括第一图像捕获装置和第二图像捕获装置，每个被配置为在半导体晶片运动的同时接收宽带照明以捕获半导体晶片的图像。 该系统包括许多用于使准直宽带照明的管透镜。 该系统还包括稳定机构和物镜组件。 该系统还包括细线照明发射器和用于接收细线照明从而捕获半导体晶片的三维图像的第三图像捕获装置。 该系统包括反射器组件，用于使得第三图像捕获装置能够在多个方向上接收从半导体晶片反射的照明。

公开(公告)号：US09080975B2

公开(公告)日：2015-07-14

申请号：US14371262

申请日：2012-11-19

Applicant: Schaller-Automation Industrielle Automationstechnik GmbH & Co. KG

Inventor： Uwe Gnauert

IPC: G01M15/04 ,  G01N21/59 ,  F01M11/10 ,  F01M13/02 ,  G01N21/53 ,  G01N33/28 ,  G01N33/30

CPC classification number: G01N21/59 ,  F01M11/10 ,  F01M13/02 ,  F01M13/021 ,  F01M2013/026 ,  G01M15/042 ,  G01N21/534 ,  G01N33/2888 ,  G01N33/30 ,  G01N2201/061 ,  G01N2201/0636

Abstract: A measuring device (2) draws out an aerosol air mixture from the working chamber (4) of the machine and feeds it to an optical sensor unit with an optical emitter (15) and an optical receiver (17). A compressed air jet pump (8) includes a compressed air feed (26), a compressed air nozzle (32), a preferably funnel-shaped pressure discharge channel and an underpressure region (10), with the compressed air nozzle (32) having an outlet direction oriented substantially in the direction of the pressure discharge channel. The compressed air feed (26) is connected to a compressed air source. A suction line is connected between the working chamber (4) and the underpressure region (10). The optical sensor unit has an optical passage between the optical emitter (15) and the optical receiver (17) oriented substantially perpendicular to the outlet direction of the compressed air nozzle (32) and leads through the underpressure region.

Abstract translation: 测量装置（2）从机器的工作室（4）抽出气溶胶空气混合物并将其馈送到具有光发射器（15）和光接收器（17）的光学传感器单元。 压缩空气喷射泵（8）包括压缩空气进料（26），压缩空气喷嘴（32），优选漏斗形压力排放通道和负压区域（10），压缩空气喷嘴（32）具有 出口方向基本上在压力排放通道的方向上取向。 压缩空气供给部26与压缩空气源连接。 吸入管线连接在工作室（4）和负压区（10）之间。 光学传感器单元在光发射器（15）和光接收器（17）之间具有基本上垂直于压缩空气喷嘴（32）的出口方向定向并通过负压区域的光学通道。

公开(公告)号：US20150192459A1

公开(公告)日：2015-07-09

申请号：US14589902

申请日：2015-01-05

Applicant: KLA-Tencor Corporation

Inventor： Damon F. Kvamme

IPC: G01J1/04 ,  G01N21/55

CPC classification number: G01J1/0411 ,  G01J1/429 ,  G01N21/33 ,  G01N21/956 ,  G01N21/95607 ,  G01N2021/95676 ,  G01N2201/0636 ,  G02B17/0657 ,  G03F1/84 ,  G03F7/70233

Abstract: Disclosed are methods and apparatus for reflecting, towards a sensor, extreme ultra-violet (EUV) light that is reflected from a target substrate. The system includes a first mirror arranged to receive and reflect the EUV light that is reflected from the target substrate, a second mirror arranged to receive and reflect the EUV light that is reflected by the first mirror, a third mirror arranged to receive and reflect the EUV light that is reflected by the second mirror, and a fourth mirror arranged to receive and reflect the EUV light that is reflected by the third mirror. The first mirror has an aspherical surface. The second, third, and fourth mirrors each have a spherical surface.

Abstract translation: 公开了用于向传感器反射从目标衬底反射的极紫外（EUV）光的方法和装置。 该系统包括布置成接收和反射从目标基板反射的EUV光的第一反射镜，布置成接收和反射由第一反射镜反射的EUV光的第二反射镜，布置成接收和反射 由第二反射镜反射的EUV光和被配置为接收和反射由第三反射镜反射的EUV光的第四反射镜。 第一个镜子有一个非球面。 第二，第三和第四反射镜各自具有球面。

公开(公告)号：US20150125345A1

公开(公告)日：2015-05-07

申请号：US14396388

申请日：2013-03-12

Applicant: AVL EMISSION TEST SYSTEMS GMBH

Inventor： Norbert Kreft

IPC: G01N21/76 ,  G01N33/00

CPC classification number: G01N21/766 ,  G01N33/0037 ,  G01N2201/0636 ,  G01N2201/0806 ,  G01N2201/084 ,  G01N2201/0846 ,  Y02A50/245

Abstract: A device for determining a concentration of at least one gas in a sample gas stream includes an analysis chamber, a detector, and a connecting channel. The analysis chamber is configured to have the sample gas stream and a reaction gas stream be introduced therein. The sample gas stream and the reaction gas stream are mixed to a gas mixture which reacts so as to emit an optical radiation. The detector is configured to measure the optical radiation. The connecting channel is configured to connect the analysis chamber to the detector. The connecting channel is configured as a light conductor extending from the analysis chamber to the detector.

Abstract translation: 用于确定样品气流中的至少一种气体的浓度的装置包括分析室，检测器和连接通道。 分析室被构造成具有样品气流并且反应气流被引入其中。 将样品气流和反应气流混合到反应以发射光辐射的气体混合物中。 检测器被配置成测量光辐射。 连接通道被配置为将分析室连接到检测器。 连接通道被配置为从分析室延伸到检测器的光导体。

公开(公告)号：US20150116719A1

公开(公告)日：2015-04-30

申请号：US14592755

申请日：2015-01-08

Applicant: ASML HOLDING N.V.

Inventor： Stanislav Y. SMIRNOV ,  Yevgeniy Konstantinovich SHMAREV

IPC: G01N21/47 ,  G02B17/08 ,  G01N21/956

CPC classification number: G03F7/70225 ,  G01N21/4738 ,  G01N21/4788 ,  G01N21/9501 ,  G01N21/956 ,  G01N2201/062 ,  G01N2201/0636 ,  G01N2201/0638 ,  G02B17/08 ,  G02B17/0876 ,  G02B21/0016 ,  G02B21/04 ,  G03F7/70625

Abstract: A catadioptric optical system operates in a wide spectral range. In an embodiment, the catadioptric optical system includes a first reflective surface positioned and configured to reflect radiation; a second reflective surface positioned and configured to reflect radiation reflected from the first reflective surface as a collimated beam, the second reflective surface having an aperture to allow transmission of radiation through the second reflective surface; and a channel structure extending from the aperture toward the first reflective surface and having an outlet, between the first reflective surface and the second reflective surface, to supply radiation to the first reflective surface.

Abstract translation: 反射折射光学系统在宽光谱范围内工作。 在一个实施例中，反折射光学系统包括定位和配置成反射辐射的第一反射表面; 第二反射表面，被定位和配置为反射从第一反射表面反射的辐射作为准直光束，第二反射表面具有孔，以允许辐射透过第二反射表面; 以及从所述孔向所述第一反射表面延伸并且在所述第一反射表面和所述第二反射表面之间具有出口的通道结构，以向所述第一反射表面提供辐射。

公开(公告)号：US20150076354A1

公开(公告)日：2015-03-19

申请号：US14485453

申请日：2014-09-12

Applicant: CANON KABUSHIKI KAISHA

Inventor： Takayuki Koizumi

IPC: G01N21/55 ,  G01N33/48 ,  G01N33/44 ,  G21K5/02 ,  G01J1/04

CPC classification number: G01N21/55 ,  G01N21/3563 ,  G01N21/3581 ,  G01N21/3586 ,  G01N33/48 ,  G01N2201/06113 ,  G01N2201/0636 ,  G01N2201/0697

Abstract: An information acquiring apparatus that acquires information on a specimen by applying terahertz wave to the specimen through a plate-like member, the specimen being provided between a reflecting member having a reflecting surface and the plate-like member. The apparatus includes an applying unit that applies the terahertz wave to the specimen, a detecting unit that detects the terahertz wave reflected from the specimen, and an information acquiring unit that acquires the information on the specimen by using temporal waveforms acquired from a result of detection performed by the detecting unit, the information acquiring unit using at least a temporal waveform representing a portion of the terahertz wave that is reflected by an interface between the plate-like member and the specimen and a temporal waveform representing a portion of the terahertz wave that is reflected by an interface between the specimen and the reflecting surface of the reflecting member.

Abstract translation: 一种信息获取装置，通过板状构件向试样施加太赫兹波，从而获取关于试样的信息，试样设置在具有反射面的反射构件和板状构件之间。 该装置包括向样本施加太赫兹波的施加单元，检测从样本反射的太赫兹波的检测单元，以及通过使用从检测结果获取的时间波形来获取样本信息的信息获取单元 所述信息获取单元至少使用表示由所述板状构件和所述样本之间的界面反射的所述太赫兹波的一部分的时间波形和表示所述太赫兹波的一部分的时间波形，所述时间波形 被试样与反射构件的反射面之间的界面反射。

公开(公告)号：US20150069223A1

公开(公告)日：2015-03-12

申请号：US14467199

申请日：2014-08-25

Applicant: Kenichi Yoshimura

Inventor： Kenichi Yoshimura

IPC: G01S17/02 ,  B60S1/08 ,  G02B6/26

CPC classification number: G01S17/026 ,  B60S1/0833 ,  B60S1/0837 ,  B60S1/0844 ,  G01N21/3554 ,  G01N21/43 ,  G01N21/4738 ,  G01N21/552 ,  G01N2021/3155 ,  G01N2021/9586 ,  G01N2201/0626 ,  G01N2201/0631 ,  G01N2201/0636 ,  G01N2201/064 ,  G02B5/04 ,  G02B6/26

Abstract: A light guide member for an object detection apparatus for detecting an object adhered on a light translucent member based on change of quantity of reflection light received from the light translucent member includes a detection face where light exits to the light translucent member and reflection light reflected from the light translucent member enters, the detection face including a detection area where a part of the reflection light to enter the detection unit passes through, and a non-detection area where remaining part of the reflection light not to enter the detection unit passes through; a first intervening member disposed on the detection face attachable to the light translucent member via the first intervening member; and a second intervening member disposed on the detection face attachable to the light translucent member via the second intervening member. The first intervening member has flexibility greater than flexibility of the second intervening member.

Abstract translation: 一种用于物体检测装置的导光部件，用于根据从光透光部件接收到的反射光量的变化来检测粘附在透光性部件上的物体，包括：光从光透过部件射出的检测面， 光透过部件进入检测面，检测面包括进入检测部的反射光的一部分的检测区域，以及不进入检测部的反射光的剩余部分的非检测区域通过; 第一中间构件，其经由所述第一居间构件设置在所述检测面上，所述第一居间构件可附接到所述光半透明构件; 以及第二中间构件，其经由所述第二居间构件设置在所述检测面上，所述检测面可附着到所述光半透明构件。 第一个居间成员的灵活性大于第二个居间成员的灵活性。