Rib-type waveguide silicon modulators and optical devices

    公开(公告)号:US09891451B2

    公开(公告)日:2018-02-13

    申请号:US15238688

    申请日:2016-08-16

    Abstract: A ring optical modulator includes a SOI substrate, including at least first and second top silicon layers, and a silicon-based ring resonator formed on the SOI substrate. The silicon-based ring resonator includes first and second top silicon layers, a thin dielectric gate layer disposed between the top silicon layers, first and second electric contacts, and first rib-type waveguide and ring-shape rib-type waveguide formed on the second top silicon layer. The thin dielectric layer includes a first side in contact with the first top silicon layer and a second side in contact with the second top silicon layer. With electric signals applied on the electric contacts, free carriers accumulate, deplete or invert within the top silicon layers on the first and second sides of the thin dielectric gate layer beneath the ring-shape rib-type waveguide, simultaneously, and a refractive index of the ring-shape rib-type waveguide confining optical fields is modulated.

    Mach-Zehnder modulator, method for fabricating Mach-Zehnder modulator

    公开(公告)号:US09885936B2

    公开(公告)日:2018-02-06

    申请号:US15605637

    申请日:2017-05-25

    CPC classification number: G02F1/2257 G02F2001/212 G02F2201/063

    Abstract: A Mach-Zehnder modulator includes: a support having a principal surface, the principal surface having a first area, a second area, and a third area; a first structure including first and second semiconductor mesas disposed on the first and second areas, respectively; a second structure including a first strip-shaped semiconductor region on the second area, a second strip-shaped semiconductor region on the third area, and a first strip-shaped void and a second strip-shaped void defining the first and second strip-shaped semiconductor regions; a first electrode disposed on the first semiconductor mesa in the first area, the first strip-shaped semiconductor region of the second structure being disposed between the support and the second semiconductor mesa of the first structure in the second area, and the first and second semiconductor mesas, and the first and second strip-shaped semiconductor regions being arranged to constitute a first arm waveguide of the Mach-Zehnder modulator.

    MACH-ZEHNDER MODULATOR, METHOD FOR FABRICATING MACH-ZEHNDER MODULATOR

    公开(公告)号:US20170343881A1

    公开(公告)日:2017-11-30

    申请号:US15605637

    申请日:2017-05-25

    CPC classification number: G02F1/2257 G02F2001/212 G02F2201/063

    Abstract: A Mach-Zehnder modulator includes: a support having a principal surface, the principal surface having a first area, a second area, and a third area; a first structure including first and second semiconductor mesas disposed on the first and second areas, respectively; a second structure including a first strip-shaped semiconductor region on the second area, a second strip-shaped semiconductor region on the third area, and a first strip-shaped void and a second strip-shaped void defining the first and second strip-shaped semiconductor regions; a first electrode disposed on the first semiconductor mesa in the first area, the first strip-shaped semiconductor region of the second structure being disposed between the support and the second semiconductor mesa of the first structure in the second area, and the first and second semiconductor mesas, and the first and second strip-shaped semiconductor regions being arranged to constitute a first arm waveguide of the Mach-Zehnder modulator.

    Silicon-based electro-optic modulator

    公开(公告)号:US09703125B2

    公开(公告)日:2017-07-11

    申请号:US14777791

    申请日:2013-11-28

    Abstract: Provided is a silicon-based electro-optic modulator which is small in size and capable of high speed operation. A first silicon semiconductor layer (120) doped to exhibit a first type of conductivity and a second semiconductor layer (160) doped to exhibit a second type of conductivity are at least partly stacked together, and a relatively thin dielectric (150) is formed at the interface between the stacked first and second silicon semiconductor layers (120, 160). The first silicon semiconductor layer (120) has a rib waveguide shape (130) comprising a rib portion (131) and slab portions (132). A first heavily doped region (140) formed by a high concentration doping process is arranged at a location, in the first silicon semiconductor layer (120), neighboring to each of the slab portions (132). The first heavily doped region (140) has almost the same height as that of the rib portion (131) of the rib waveguide (130).

    Thermally controlled semiconductor optical waveguide
    67.
    发明授权
    Thermally controlled semiconductor optical waveguide 有权
    热控半导体光波导

    公开(公告)号:US09122085B2

    公开(公告)日:2015-09-01

    申请号:US12944946

    申请日:2010-11-12

    Abstract: An apparatus includes a conductive or semiconductive substrate and a dielectric layer located directly thereon. A semiconductor layer is located directly on the dielectric layer. The semiconductor layer includes a ridge waveguide and a heater strip extending parallel to the ridge waveguide. The heater strip is electrically isolated from the ridge waveguide and is doped to carry a current therein about parallel to the ridge waveguide.

    Abstract translation: 一种设备包括导电或半导体衬底和直接位于其上的介电层。 半导体层直接位于电介质层上。 半导体层包括脊波导和平行于脊波导延伸的加热条。 加热器条与脊波导电隔离,并且被掺杂以在其中携带平行于脊波导的电流。

    Optical element and Mach-Zehnder optical waveguide element
    68.
    发明授权
    Optical element and Mach-Zehnder optical waveguide element 有权
    光学元件和马赫 - 策德尔光波导元件

    公开(公告)号:US09110348B2

    公开(公告)日:2015-08-18

    申请号:US14260883

    申请日:2014-04-24

    Applicant: FUJIKURA, LTD.

    Abstract: Provided is an optical element including an optical waveguide including a core formed from: a rib part; and a first and second slab parts sandwiching the rib part. The first slab part includes a P-type region, the second slab part includes an N-type region, the rib part includes a P-type region which is in contact with the P-type region provided in the first slab part, and an N-type region which is in contact with the N-type region provided in the second slab part. The rib part includes a top portion which is located above the first and second slab parts and includes an undoped region formed from at least one of an intrinsic region and a low-concentration doping region which is doped at a dopant concentration 1/10 or less of a dopant concentration in at least one of the adjacent P-type region and the adjacent N-type region.

    Abstract translation: 本发明提供一种光学元件,其包括:光波导,包括芯,所述芯由以下部分形成:肋部; 以及夹着所述肋部的第一和第二板坯部。 第一板坯部包括P型区域,第二板坯部包括N型区域,肋部包括与设置在第一板坯部中的P型区域接触的P型区域, N型区域与设置在第二板坯部分中的N型区域接触。 肋部分包括位于第一和第二板坯部分上方的顶部部分,并且包括由掺杂浓度为1/10以下的本征区域和低浓度掺杂区域中的至少一个形成的未掺杂区域 在相邻的P型区域和相邻的N型区域中的至少一个中的掺杂剂浓度。

    Nanoparticle-based quantum confined stark effect modulator
    69.
    发明授权
    Nanoparticle-based quantum confined stark effect modulator 有权
    基于纳米粒子的量子限制斯塔克效应调制器

    公开(公告)号:US09008467B2

    公开(公告)日:2015-04-14

    申请号:US12262312

    申请日:2008-10-31

    CPC classification number: G02F1/025 G02F2001/0157 G02F2201/063 G02F2202/36

    Abstract: An optical modulator includes a first layer that is transparent or semitransparent over a range of optical wavelengths; a modulation layer made from nanoparticles embedded in a matrix; a first electrode and a second electrode that create an electrical field that passes through the modulation layer. A method for forming a nanoparticle modulator includes obtaining and preparing a substrate; forming sub-layers on the substrate; forming a nanoparticle modulator layer, where the nanoparticle modulator layer is an electrical insulator and has a thickness of less than the wavelength of light the nanoparticle QCSE modulator is designed to modulate.

    Abstract translation: 光调制器包括在一定范围的光波长上是透明或半透明的第一层; 由嵌入基质中的纳米颗粒制成的调制层; 产生通过调制层的电场的第一电极和第二电极。 形成纳米颗粒调制剂的方法包括获得和制备基材; 在基板上形成子层; 形成纳米颗粒调制剂层,其中纳米颗粒调节剂层是电绝缘体并且具有小于纳米颗粒QCSE调制器被设计为调制的光的波长的厚度。

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