公开(公告)号：US06635861B1

公开(公告)日：2003-10-21

申请号：US09425551

申请日：1999-10-22

Applicant: Thomas W. Stone

Inventor： Thomas W. Stone

IPC: H01J314

CPC classification number: G02B6/43 ,  G02B6/4206 ,  G02B6/4246 ,  G02B6/4249

Abstract: An optical interconnect system having a GRIN rod lens, the GRIN rod lens having a first end and a second end, and further having a preselected length, a preselected width and a preselected index of refraction. Means are fixedly secured to the first end of the GRIN rod lens for emitting electromagnetic radiation and means are fixedly secured to said second end of said GRIN rod lens for receiving the emitted electromagnetic radiation. The GRIN rod lens forms an image of the emitting means onto the receiving means and overcomes problems associated with misalignment. Further embodiments of this optical interconnect system are capable of use in even further applications in an environment where alignment problems are at issue

Abstract translation: 一种具有GRIN棒状透镜的光学互连系统，所述GRIN棒透镜具有第一端和第二端，并且还具有预选长度，预选宽度和预选折射率。 装置固定地固定到用于发射电磁辐射的GRIN棒状透镜的第一端，并且装置固定地固定到所述GRIN棒透镜的所述第二端以接收发射的电磁辐射。 GRIN棒状透镜在接收装置上形成发射装置的图像，并克服与未对准相关的问题。 该光学互连系统的其它实施例能够用于在对准问题出现问题的环境中的甚至更多应用中

公开(公告)号：US06555811B1

公开(公告)日：2003-04-29

申请号：US09786546

申请日：2001-04-09

Applicant: William Bradshaw Amos

Inventor： William Bradshaw Amos

IPC: H01J314

CPC classification number: G01J3/36 ,  G02B21/0024 ,  G02B21/0064

Abstract: A confocal scanning optical microscope system wherein a dispersive optical device such as a prism separates an image from a restricted area of a specimen into a spread of images of differing wavelengths. Different parts of the spread of images are focused at respective beam-limiting apertures which are conjugate with one another, and the spectrally differing beams passing through the beam-limiting apertures pass to respective detectors.

Abstract translation: 共聚焦扫描光学显微镜系统，其中诸如棱镜的色散光学装置将图像与样本的限制区域分离成不同波长的图像的扩展。 图像扩展的不同部分聚焦在彼此共轭的相应的光束限制孔径处，并且通过光束限制孔径的光谱不同的光束传递到相应的检测器。

公开(公告)号：US06545265B1

公开(公告)日：2003-04-08

申请号：US09463722

申请日：2000-04-14

Applicant: Norbert Czarnetzki ,  Peter Muehlig

Inventor： Norbert Czarnetzki ,  Peter Muehlig

IPC: H01J314

CPC classification number: G02B21/008 ,  G02B21/0044 ,  G02B21/0072

Abstract: A method is disclosed for mixing pairs of confocal images and different arrangements for fast generation of parallel confocal images and the combination thereof in real time. The method is used for improving contrast and resolution in confocal images. The suggested arrangements point to some possibilities for a meaningful application of the method for image mixing in parallel confocal single-beam or double-beam methods for the generation of highly resolved images in real time for a wide variety of different applications, especially also for material inspection. By combining at least two confocal images, a resolution of the fine structure of the object is achieved in the mixed image. Contrast, lateral resolution and depth resolution are improved in the mixed image of the object to be examined, which can also be a phase object. Further, the method permits the generation of very highly resolved three-dimensional digital images of optical objects to be examined.

Abstract translation: 公开了一种用于混合成对的共焦图像和用于快速生成平行共焦图像及其组合的不同布置的方法。 该方法用于改善共焦图像中的对比度和分辨率。 建议的布置指出了在并行共焦单光束或双光束方法中有意义地应用图像混合方法的一些可能性，用于实时地生成用于各种不同应用的高分辨率图像，特别是对于材料 检查。 通过组合至少两个共焦图像，在混合图像中实现对象的精细结构的分辨率。 在被检查物体的混合图像中，对比度，横向分辨率和深度分辨率也得到改善，也可以是相位对象。 此外，该方法允许生成要检查的光学对象的非常高度分辨的三维数字图像。

公开(公告)号：US06545263B2

公开(公告)日：2003-04-08

申请号：US09187631

申请日：1998-11-06

Applicant: Ralph Lange ,  Torsten Antrack ,  Martin Voelcker

Inventor： Ralph Lange ,  Torsten Antrack ,  Martin Voelcker

IPC: H01J314

CPC classification number: G01Q60/22

Abstract: An illumination device for a light microscope comprises a scanning microscope probe which is integrated in the center thereof. A scanning probe microscope comprising such illumination device is also disclosed.

Abstract translation: 用于光学显微镜的照明装置包括集成在其中心的扫描显微镜探针。 还公开了包括这种照明装置的扫描探针显微镜。

公开(公告)号：US06538247B2

公开(公告)日：2003-03-25

申请号：US09929008

申请日：2001-08-15

Applicant: Takashi Iizuka

Inventor： Takashi Iizuka

IPC: H01J314

CPC classification number: G02B26/123

Abstract: A positional relationship of a plurality of beam spots for a multi-beam imaging apparatus is detected. The imaging apparatus including a light source, a beam splitter that divides a received beam into a plurality of beams, a deflecting system that deflects the beams to scan, and an imaging optical system that forms a plurality of scanning beam spots on a surface. According to the method, a phase filter is provided between the light source and the beam splitter. The filter is configured to divide a cross section of the beam into a plurality of areas, light fluxes passed through adjoining two areas having an optical path difference of half a wavelength. Dark lines are formed, in each beam spot, due to the phase difference of the adjoining two areas. By detecting the dark lines of respective beam spots, a positional relationship between the plurality of beam spots can be determined.

公开(公告)号：US06483117B1

公开(公告)日：2002-11-19

申请号：US09335043

申请日：1999-06-16

Applicant: Clay S. Clement ,  Michael S. Gordon ,  Rodney A. Kendall ,  Werner Stickel

Inventor： Clay S. Clement ,  Michael S. Gordon ,  Rodney A. Kendall ,  Werner Stickel

IPC: H01J314

CPC classification number: G21K1/087 ,  H01J37/045 ,  H01J2237/3175

Abstract: An electronic beam lithography tool providing dimensional stability. The tool includes three or more deflection plates above an aperture diaphragm which allows the beam to be deflected away from an aperture and along a two-dimensional locus on the aperture diaphragm which is approximately symmetrical around the aperture therein. By doing so, the aperture diaphragm is symmetrically heated by the power of the charged particle beam and the geometry of the charged particle beam device is stabilized against variance in geometry of the device to a very small tolerance.

Abstract translation: 一种提供尺寸稳定性的电子束光刻工具。 该工具包括在孔径光阑上方的三个或更多个偏转板，其允许光束从孔径偏转并且沿着孔径光阑上围绕其孔径近似对称的二维轨迹偏转。 通过这样做，孔径光阑被带电粒子束的功率对称地加热，并且带电粒子束装置的几何形状被稳定，以防止装置的几何形状的变化到非常小的公差。

公开(公告)号：US06472658B2

公开(公告)日：2002-10-29

申请号：US09832358

申请日：2001-04-09

Applicant: Elmar Mayer ,  Wolfgang Holzapfel ,  Andreas Franz

Inventor： Elmar Mayer ,  Wolfgang Holzapfel ,  Andreas Franz

IPC: H01J314

CPC classification number: G01D5/2457 ,  G01D5/366 ,  G01D5/38

Abstract: An incremental position measuring system in the form of a three-grating sensor is optimized in such a way, that the degree of modulation (M) of the incremental scanning device, as well as the intensity (I) of a reference marker signal are relatively strong. To this end, a phase grating with an effective phase deviation of &lgr;/4 is embodied on a scale 2, as well as a reference marker (R) in the form of an amplitude structure. A compact structure is achieved by the divergent illumination of the grating located in front of the scale.

Abstract translation: 以三光栅传感器形式的增量位置测量系统以这样的方式被优化：增量扫描装置的调制度（M）以及参考标记信号的强度（I）是相对的 强大。 为此，具有有效相位偏移lambd / 4的相位光栅被体现在刻度2上，以及以振幅结构形式的参考标记（R）。 通过位于刻度前方的光栅的发散照明来实现紧凑的结构。

公开(公告)号：US06469294B2

公开(公告)日：2002-10-22

申请号：US09045044

申请日：1998-03-20

Applicant: Masanori Ohkawa ,  Toshiyuki Ichikawa ,  Hiroshi Watanuki ,  Kozo Yamazaki

Inventor： Masanori Ohkawa ,  Toshiyuki Ichikawa ,  Hiroshi Watanuki ,  Kozo Yamazaki

IPC: H01J314

CPC classification number: G06K7/1096 ,  G06K7/10693

Abstract: A point of sale (POS) device, such as an optical scanner, reduces the beam diameters of two light beam components having been emitted from a common light source and split by an optical beam splitter. The optical scanner includes a light source emitting a light beam, a light beam splitter splitting the emitted light beam, a polygon mirror reflecting the split light beam components into mutually different directions, and groups of mirrors. The groups of mirrors are provided for each reading window, allowing the light beam components to be emitted therefrom. The emitted light beam components can then impinge on an object, whereupon the optical scanner detects by detectors and reads a bar code located on the object. The optical scanner also includes beam shaping devices, one of which is placed between the light source and light splitting device and the other of which is placed in one of the optical paths followed by one of the light beam components. Since the beam diameter of the light beam components are reduced, and since the light beams are emitted from multiple reading windows, bar codes with narrow spaces between the bars can be read more easily, even with varying orientations of the bar code on the object.

Abstract translation: 诸如光学扫描仪的销售点（POS）装置减少了已经从公共光源发射并被光分束器分裂的两个光束分量的光束直径。 光学扫描器包括发射光束的光源，将发射光束分开的光束分离器，将分离的光束分量反射到相互不同的方向的多棱镜和反射镜组。 为每个读取窗口提供反射镜组，允许从其发射光束组件。 发射的光束分量然后可以撞击到物体上，于是光学扫描器由检测器检测并读取位于物体上的条形码。 光学扫描器还包括光束整形装置，其中一个放置在光源和光分离装置之间，另一个放置在一个光路中，随后是光束部件之一。 由于光束分量的光束直径减小，并且由于光束从多个读取窗口发射，所以即使在对象上的条形码的取向方面，也可以更容易地读取条之间的狭窄空间的条形码。

公开(公告)号：US06455838B2

公开(公告)日：2002-09-24

申请号：US09166979

申请日：1998-10-06

Applicant: Tilman Schäffer ,  Paul K. Hansma

Inventor： Tilman Schäffer ,  Paul K. Hansma

IPC: H01J314

CPC classification number: G01Q20/02 ,  G01Q70/06 ,  Y10S977/863 ,  Y10S977/869 ,  Y10S977/87

Abstract: A high sensitivity beam deflection sensing optical device, such as an atomic force microscope, including one or more of the following: specified means in the path of the incident beam for adjusting the size and/or power of the incident beam spot, means for moving the incident beam spot with movement of the object whereby to maintain the position of the spot on the object, and means for increasing the signal to noise ratio of the optical detector in which adjusted gains are applied to different segments of the optical detector.

Abstract translation: 一种高灵敏度光束偏转感测光学装置，例如原子力显微镜，包括以下中的一个或多个：用于调整入射光束光斑的尺寸和/或功率的入射光束的路径中的指定装置，用于移动的装置 具有物体运动的入射光束点，从而保持物体上的光斑的位置，以及用于增加光学检测器的信噪比的装置，其中调节的增益被施加到光学检测器的不同部分。

公开(公告)号：US06441360B1

公开(公告)日：2002-08-27

申请号：US09515412

申请日：2000-02-29

Applicant: David John Bishop ,  Randy Clinton Giles

Inventor： David John Bishop ,  Randy Clinton Giles

IPC: H01J314

CPC classification number: G02B6/3566 ,  G02B6/3512 ,  G02B6/353 ,  G02B6/3552 ,  G02B6/357 ,  G02B6/3598 ,  G02B26/02 ,  G02B26/0841

Abstract: An opto-isolator incorporating a MEMS device includes an optical signal source and an optical signal detector defining therebeween an optical path for communication of optical signals. A MEMS device having an actuator for controlling a moveable element is disposed between the source and detector for manipulating the optical signals. In one embodiment, the moveable element is a shutter which is operable to selectively allow optical signals to be received by the detector and prevent signals from being detected. In another embodiment, the moveable member is a MEMS tilt mirror for selectively directing optical signals to the detector.

Abstract translation: 结合MEMS器件的光隔离器包括光信号源和光信号检测器，其中定义用于光信号通信的光路。 具有用于控制可移动元件的致动器的MEMS装置设置在源和检测器之间，用于操纵光信号。 在一个实施例中，可移动元件是快门，其可操作以选择性地允许光信号被检测器接收并防止检测信号。 在另一个实施例中，可移动构件是用于将光信号选择性地引导到检测器的MEMS倾斜镜。