公开(公告)号：US20170076439A1

公开(公告)日：2017-03-16

申请号：US15264108

申请日：2016-09-13

Applicant: NIKON CORPORATION

Inventor： Jonathan K. Wells ,  Matthew D. Rosa ,  Paul Derek Coon ,  Eric Peter Goodwin

IPC: G06T7/00 ,  H04N5/225 ,  G06T7/20

Abstract: A measuring device (233) for monitoring movement of a first object relative to a second object, the first object or the second object including a target surface (13), comprises a first image sensor combination (236), a second image sensor combination (237), and a control system (20A). The image sensor combinations (236, 237) capture first images and second images of the target surface (13) over time. The first image sensor combination (236) includes a first image sensor (236A) and a first lens assembly (236B). The second image sensor combination (237) includes a second image sensor (237A), and a second lens assembly (237B) having a second optical axis (237BX) that is at an angle of between thirty degrees and sixty degrees relative to normal to the target surface (13). The control system (20A) analyzes the first images and the second images to monitor movement of the first object relative to the second object.

Abstract translation: 一种用于监测第一物体相对于第二物体的移动的测量装置（233），所述第一物体或所述第二物体包括目标表面（13），包括第一图像传感器组合（236），第二图像传感器组合 237）和控制系统（20A）。 图像传感器组合（236,237）随着时间的推移捕获目标表面（13）的第一图像和第二图像。 第一图像传感器组合（236）包括第一图像传感器（236A）和第一透镜组件（236B）。 第二图像传感器组合（237）包括第二图像传感器（237A）和具有第二光轴（237BX）的第二透镜组件（237B），第二光轴相对于垂直于第二图像传感器 目标表面（13）。 控制系统（20A）分析第一图像和第二图像以监测第一对象相对于第二对象的移动。

公开(公告)号：US09360347B2

公开(公告)日：2016-06-07

申请号：US14449371

申请日：2014-08-01

Applicant: Nikon Corporation

Inventor： Eric Peter Goodwin ,  Daniel Gene Smith

IPC: G01D5/38 ,  G01D5/347 ,  G01B11/00 ,  G02B27/42 ,  G03F7/20 ,  G02B5/18

CPC classification number: G01D5/34746 ,  G01B11/002 ,  G01D5/38 ,  G02B5/1814 ,  G02B27/4255 ,  G03F7/70775

Abstract: Two dimensional encoder system and method designed to improve accuracy, compactness, stability, resolution, and/or light efficiency of metrology carried out with such system and method. Embodiments employ a novel retroreflector which while particularly useful in present invention, is believed to have more general utility in optical imaging systems and methods.

Abstract translation: 二维编码器系统和方法旨在通过这种系统和方法提高测量的精度，紧凑性，稳定性，分辨率和/或光效。 实施例采用了一种新颖的后向反射器，其在本发明中特别有用，被认为在光学成像系统和方法中具有更多的一般效用。

公开(公告)号：US20150355327A1

公开(公告)日：2015-12-10

申请号：US13840658

申请日：2013-03-15

Applicant: Nikon Corporation ,  Nikon Metrology NV

Inventor： Eric Peter Goodwin ,  Daniel G. Smith ,  Alexander Cooper ,  Mina A. Rezk ,  Anthony R. Slotwinski ,  Thomas M. Hedges

IPC: G01S17/10 ,  G01S7/481 ,  G02B26/10

CPC classification number: G01S17/102 ,  G01S7/4812 ,  G01S7/4817 ,  G01S7/4818 ,  G01S7/4917 ,  G01S17/325 ,  G01S17/66 ,  G02B26/101 ,  G02B26/108

Abstract: Laser radar systems include a pentaprism configured to scan a measurement beam with respect to a target surface. A focusing optical assembly includes a corner cube that is used to adjust measurement beam focus. Target distance is estimated based on heterodyne frequencies between a return beam and a local oscillator beam. The local oscillator beam is configured to propagate to and from the focusing optical assembly before mixing with the return beam. In some examples, heterodyne frequencies are calibrated with respect to target distance using a Fabry-Perot interferometer having mirrors fixed to a lithium aluminosilicate glass-ceramic tube.

Abstract translation: 激光雷达系统包括配置成相对于目标表面扫描测量光束的五棱镜。 聚焦光学组件包括用于调节测量光束聚焦的角立方体。 基于返回波束和本地振荡器波束之间的外差频率来估计目标距离。 本地振荡器束配置成在与返回光束混合之前传播到聚焦光学组件和/或从聚焦光学组件传播。 在一些示例中，使用具有固定到铝硅酸锂玻璃 - 陶瓷管的镜子的法布里 - 珀罗干涉仪来校准相对于目标距离的外差频率。

公开(公告)号：US08993974B2

公开(公告)日：2015-03-31

申请号：US13790295

申请日：2013-03-08

Applicant: Nikon Corporation

Inventor： Eric Peter Goodwin

IPC: G01J1/42 ,  G01B11/14 ,  G01B11/25 ,  G03F7/20 ,  G02B7/36 ,  G03F9/00

CPC classification number: G01J1/42 ,  G01B11/14 ,  G01B11/25 ,  G02B7/36 ,  G03F7/70 ,  G03F7/70725 ,  G03F7/70775 ,  G03F9/7026

Abstract: A detector (550) for detecting light (248B) from a light source (248A) comprises a single array of pixels (574) and a first mask (576). The single array of pixels (574) includes a plurality of rows of pixels (574R), and a plurality of columns of pixels (574C) having at least a first active column of pixels (574AC) and a spaced apart second active column of pixels (574AC). The first mask (576) covers one of the plurality of columns of pixels (574C) to provide a first masked column of pixels (574MC) that is positioned between the first active column of pixels (574AC) and the second active column of pixels (574AC). Additionally, a charge is generated from the light (248B) impinging on the first active column of pixels (574AC), is transferred to the first masked column of pixels (574MC), and subsequently is transferred to the second active column of pixels (574AC).

Abstract translation: 用于从光源（248A）检测光（248B）的检测器（550）包括单个像素阵列（574）和第一掩模（576）。 单个像素阵列（574）包括多行像素（574R），并且多列像素（574C）具有至少第一有源像素列（574AC）和间隔开的第二有源像素列 （574AC）。 第一掩模（576）覆盖多个像素列（574C）中的一个，以提供位于第一有效像素列（574AC）和第二有效像素列（574C）之间的第一被屏蔽的像素列（574MC） 574AC）。 另外，从照射在第一有源像素列（574AC）上的光（248B）产生电荷被传送到第一被屏蔽的像素列（574MC），并且随后被传送到第二有源像素列（574AC ）。

公开(公告)号：US20150070670A1

公开(公告)日：2015-03-12

申请号：US14480810

申请日：2014-09-09

Applicant: Nikon Corporation

Inventor： Eric Peter Goodwin ,  Daniel Gene Smith

IPC: G03F7/20 ,  G01J1/42 ,  G02B7/09

CPC classification number: G03F7/70641 ,  G02B7/32 ,  G02B7/365

Abstract: Fringe-projection autofocus system devoid of a reference mirror. Contributions to error in determination of a target surface profile caused by air non-uniformities measured based on multiple measurements of the target surface performed at different wavelengths, and/or angles of incidence, and/or grating pitches and subtracted from the measured profile, rendering the system substantially insensitive to presence of air turbulence. Same optical beams forming a fringe irradiance pattern on target surface are used for measurement of the surface profile and reduction of measurement error by the amount attributed to air turbulence.

Abstract translation: 边缘投影自动对焦系统没有参考镜。 基于在不同波长执行的目标表面的多次测量和/或入射角和/或光栅间距测量的空气非均匀度导致的目标表面轮廓误差的贡献，并从测量的轮廓中减去，渲染 该系统对空气湍流的存在基本上不敏感。 在目标表面上形成边缘辐照度图案的相同光束用于测量表面轮廓，并通过归因于空气湍流的量减少测量误差。

公开(公告)号：US20140049761A1

公开(公告)日：2014-02-20

申请号：US13801961

申请日：2013-03-13

Applicant: NIKON CORPORATION

Inventor： Eric Peter Goodwin ,  Daniel G. Smith

IPC: G01B11/25

CPC classification number: G01B11/2527 ,  G02B27/4255 ,  G03F9/7026

Abstract: Fringe projection autofocus systems are provided with variable pitch diffraction gratings or multiple diffraction gratings so that a reference beam and a measurement beam propagate along a common path. Alternatively, an input beam can be directed to a diffraction grating so that the selected diffraction orders propagate along a common path. In some examples, distinct spectral bands are used for reference and measurement beams.

Abstract translation: 边缘投影自动对焦系统具有可变节距衍射光栅或多个衍射光栅，使得参考光束和测量光束沿着公共路径传播。 或者，输入光束可以被引导到衍射光栅，使得所选择的衍射级沿着公共路径传播。 在一些示例中，不同的光谱带用于参考和测量光束。

公开(公告)号：US20130194563A1

公开(公告)日：2013-08-01

申请号：US13828221

申请日：2013-03-14

Applicant: Nikon Corporation

Inventor： Eric Peter Goodwin ,  Daniel G. Smith ,  Brian L. Stamper ,  Alexander Cooper ,  Alec Robertson

IPC: G02B26/10 ,  G01S17/95

CPC classification number: G02B26/105 ,  G01S7/4812 ,  G01S17/95 ,  G02B26/0816

Abstract: A compact optical assembly for a laser radar system is provided, that is configured to move as a unit with a laser radar system as the laser radar system is pointed at a target and eliminates the need for a large scanning (pointing) mirror that is moveable relative to other parts of the laser radar. The optical assembly comprises a light source, a lens, a scanning reflector and a fixed reflector that are oriented relative to each other such that: (i) a beam from the light source is reflected by the scanning reflector to the fixed reflector; (ii) reflected light from the fixed reflector is reflected again by the scanning reflector and directed along A line of sight through the lens; and (iii) the scanning reflector is moveable relative to the source, the lens and the fixed reflector, to adjust the focus of the beam along the line of sight.

Abstract translation: 提供了一种用于激光雷达系统的紧凑型光学组件，其被配置为随着激光雷达系统指向目标而与激光雷达系统一起移动，并且消除了对可移动的大扫描（指向）镜的需要 相对于激光雷达的其他部分。 光学组件包括相对于彼此定向的光源，透镜，扫描反射器和固定反射器，使得：（i）来自光源的光束被扫描反射器反射到固定反射器; （ii）来自固定反射镜的反射光再次被扫描反射器反射并沿A视线穿过透镜; 和（iii）扫描反射器相对于光源，透镜和固定反射器可移动，以便沿着视线调节光束的焦点。