公开(公告)号：US20080252954A1

公开(公告)日：2008-10-16

申请号：US11795660

申请日：2005-06-02

Applicant: Xianhua Wang ,  Hui Xu ,  Jianxin Ye ,  Yelei Sun ,  Guoliang Huang ,  Jing Cheng

Inventor： Xianhua Wang ,  Hui Xu ,  Jianxin Ye ,  Yelei Sun ,  Guoliang Huang ,  Jing Cheng

IPC: G02B26/08

CPC classification number: G01N21/6458 ,  G01N21/6428 ,  G01N21/6452 ,  G01N2021/6421 ,  G01N2201/10 ,  G01N2201/103

Abstract: The invention provides a laser microarray scanner for microarray scanning, comprising an optical system, a scanning platform, and a data processing system. During scanning, the optical system remains fixed, and the microarray placed on the scanning platform moves relative to the optical system. The microarray scanner disclosed herein has high scanning speed, high sensitivity, high resolution, and high signal-to-noise ratio, thus is ideal for use in microarray scanning

Abstract translation: 本发明提供一种用于微阵列扫描的激光微阵列扫描器，包括光学系统，扫描平台和数据处理系统。 在扫描期间，光学系统保持固定，并且放置在扫描平台上的微阵列相对于光学系统移动。 本文公开的微阵列扫描器具有高扫描速度，高灵敏度，高分辨率和高信噪比，因此是理想的用于微阵列扫描

公开(公告)号：US20060152716A1

公开(公告)日：2006-07-13

申请号：US11372556

申请日：2006-03-11

Applicant: Steven Meeks

Inventor： Steven Meeks

IPC: G01N21/88

CPC classification number: G01N21/9506 ,  G01B11/0616 ,  G01B11/0641 ,  G01B11/065 ,  G01B11/303 ,  G01B11/306 ,  G01N21/21 ,  G01N21/47 ,  G01N21/9501 ,  G01N21/958 ,  G01N2021/8427 ,  G01N2021/8841 ,  G01N2201/103 ,  G01N2201/104 ,  G01N2201/1045 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A double-sided optical inspection system is presented which may detect and classify particles, pits and scratches on thin film disks or wafers in a single scan of the surface. In one embodiment, the invention uses a pair of orthogonally oriented laser beams, one in the radial and one in the circumferential direction on both surfaces of the wafer or thin film disk. The scattered light from radial and circumferential beams is separated via their polarization or by the use of a dichroic mirror together with two different laser wavelengths.

Abstract translation: 提出了一种双面光学检测系统，其可以在表面的单次扫描中检测和分类薄膜盘或晶片上的颗粒，凹坑和划痕。 在一个实施例中，本发明使用一对正交取向的激光束，一个在径向上，一个在圆周方向上在晶片或薄膜盘的两个表面上。 来自径向和周向光束的散射光通过其偏振分离，或者通过使用二向色镜与两种不同的激光波长分离。

公开(公告)号：US07042647B2

公开(公告)日：2006-05-09

申请号：US10677587

申请日：2003-10-02

Applicant: William K. Lo

Inventor： William K. Lo

IPC: G02B3/00 ,  G02B7/02 ,  H01L3/14

CPC classification number: G01N21/9501 ,  G01N21/8806 ,  G01N21/956 ,  G01N2201/0853 ,  G01N2201/10 ,  G01N2201/101 ,  G01N2201/103

Abstract: A scanned optical system for use in optical probing applications provides a large Field of View (FOV) for objective lenses having high Numerical Aperture (NA), such as Solid Immersion Lenses (SIL's). This enables high resolution imaging of semiconductor devices for such applications as laser probing, TIVA/LIVA, OBIRCH, and photon emission timing analysis. A hybrid scanning optics configuration is disclosed to provide high resolution imaging over a small area along with low resolution imaging over a large area.

Abstract translation: 用于光学探测应用的扫描光学系统为具有高数值孔径（NA）的物镜（例如固体浸没透镜（SIL））提供了大视场（FOV）。 这样可实现用于激光探测，TIVA / LIVA，OBIRCH和光子发射时序分析等半导体器件的高分辨率成像。 公开了一种混合扫描光学配置，以在大面积上提供在小区域上的高分辨率成像以及低分辨率成像。

公开(公告)号：US20050073675A1

公开(公告)日：2005-04-07

申请号：US10677587

申请日：2003-10-02

Applicant: William Lo

Inventor： William Lo

IPC: G01N21/88 ,  G01N21/95 ,  G01N21/956 ,  G01N21/00

CPC classification number: G01N21/9501 ,  G01N21/8806 ,  G01N21/956 ,  G01N2201/0853 ,  G01N2201/10 ,  G01N2201/101 ,  G01N2201/103

Abstract: A scanned optical system for use in optical probing applications provides a large Field of View (FOV) for objective lenses having high Numerical Aperture (NA), such as Solid Immersion Lenses (SIL's). This enables high resolution imaging of semiconductor devices for such applications as laser probing, TIVA/LIVA, OBIRCH, and photon emission timing analysis. A hybrid scanning optics configuration is disclosed to provide high resolution imaging over a small area along with low resolution imaging over a large area.

Abstract translation: 用于光学探测应用的扫描光学系统为具有高数值孔径（NA）的物镜（例如固体浸没透镜（SIL））提供了大视场（FOV）。 这样可实现用于激光探测，TIVA / LIVA，OBIRCH和光子发射时序分析等半导体器件的高分辨率成像。 公开了一种混合扫描光学配置，以在大面积上提供在小区域上的高分辨率成像以及低分辨率成像。

公开(公告)号：US20040169850A1

公开(公告)日：2004-09-02

申请号：US10754275

申请日：2004-01-08

Inventor： Steven W. Meeks

IPC: G01N021/88

CPC classification number: G01N21/9506 ,  G01B11/0616 ,  G01B11/0641 ,  G01B11/065 ,  G01B11/303 ,  G01B11/306 ,  G01N21/21 ,  G01N21/47 ,  G01N21/9501 ,  G01N21/958 ,  G01N2021/8427 ,  G01N2021/8841 ,  G01N2201/103 ,  G01N2201/104 ,  G01N2201/1045 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A double-sided optical inspection system is presented which may detect and classify particles, pits and scratches on thin film disks or wafers in a single scan of the surface. In one embodiment, the invention uses a pair of orthogonally oriented laser beams, one in the radial and one in the circumferential direction on both surfaces of the wafer or thin film disk. The scattered light from radial and circumferential beams is separated via their polarization or by the use of a dichroic mirror together with two different laser wavelengths.

Abstract translation: 提出了一种双面光学检测系统，其可以在表面的单次扫描中检测和分类薄膜盘或晶片上的颗粒，凹坑和划痕。 在一个实施例中，本发明使用一对正交取向的激光束，一个在径向上，一个在圆周方向上在晶片或薄膜盘的两个表面上。 来自径向和周向光束的散射光通过其偏振分离，或者通过使用二向色镜与两种不同的激光波长分离。

公开(公告)号：US20040086171A1

公开(公告)日：2004-05-06

申请号：US10661633

申请日：2003-09-15

Inventor： Chung-Sam Jun ,  Sun-Yong Choi ,  Kwang-Soo Kim ,  Joo-Woo Kim ,  Jeong-Hyun Choi ,  Dong-Jin Park

IPC: G06K009/00

CPC classification number: H01L21/67253 ,  G01N21/9503 ,  G01N21/95607 ,  G01N2021/0162 ,  G01N2021/0187 ,  G01N2021/1736 ,  G01N2021/1772 ,  G01N2021/8411 ,  G01N2021/8896 ,  G01N2021/95615 ,  G01N2201/103 ,  G01N2201/1087

Abstract: An automated and integrated substrate inspecting apparatus for performing an EBR/EEW inspection, a defect inspection of patterns and reticle error inspection of a substrate includes a first stage for supporting a substrate; a first image acquisition unit for acquiring a first image of a peripheral portion of the substrate supported by the first stage; a second stage for supporting the substrate; a second image acquisition unit for acquiring a second image of the substrate supported by the second stage; a transfer robot for transferring the substrate between the first stage and the second stage; and a data processing unit, connected to the first image acquisition unit and the second image acquisition unit, for inspecting results of an edge bead removal process and an edge exposure process performed on the substrate using the first image, and for inspecting for defects of patterns formed on the substrate using the second image.

Abstract translation: 用于执行EBR / EEW检查的自动化和一体化的基板检查装置，对基板的图案和掩模版错误检查的缺陷检查包括用于支撑基板的第一阶段; 第一图像获取单元，用于获取由所述第一平台支撑的所述基板的周边部分的第一图像; 用于支撑衬底的第二阶段; 第二图像获取单元，用于获取由第二平台支撑的基板的第二图像; 用于在第一阶段和第二阶段之间转移衬底的传送机器人; 以及数据处理单元，连接到第一图像获取单元和第二图像获取单元，用于检查使用第一图像在基板上执行的边缘珠去除处理和边缘曝光处理的结果，并且用于检查图案的缺陷 使用第二图像在基板上形成。

公开(公告)号：US20040082252A1

公开(公告)日：2004-04-29

申请号：US10442054

申请日：2003-05-21

Inventor： Meng-Chieh Liao ,  Jiun-Haw Lee ,  Chi-Chung Chen

IPC: H01J009/50

CPC classification number: G01N21/95 ,  G01N21/94 ,  G01N2021/8864 ,  G01N2021/945 ,  G01N2021/9513 ,  G01N2201/103 ,  H01L2251/568

Abstract: A detection and repair system includes an optical microscope, an image-retrieving device, an emission detector, a data controller, and a laser beam generator. When detecting the location of a defect, the system charges a detected region of an organic electroluminescent device with a negative bias or low forward bias before the device is lighted on. Then, the emission detector detects the locations of defects, which generate emission such as photons, thermal or IR emission, in an enlarged image. The laser beam generator generates a laser beam, which is used to isolate one of the defects. Furthermore, this invention also discloses a method for detecting and repairing an organic electroluminescent device.

Abstract translation: 检测和修复系统包括光学显微镜，图像检索装置，发射检测器，数据控制器和激光束发生器。 当检测到缺陷的位置时，系统在器件点亮之前对具有负偏压或低正偏压的有机电致发光器件的检测区域进行充电。 然后，发射检测器检测在放大图像中产生诸如光子，热或IR发射的发射的缺陷的位置。 激光束发生器产生用于隔离缺陷之一的激光束。 此外，本发明还公开了一种用于检测和修复有机电致发光器件的方法。

公开(公告)号：US5127726A

公开(公告)日：1992-07-07

申请号：US354486

申请日：1989-05-19

Applicant: Kevin E. Moran

Inventor： Kevin E. Moran

IPC: G01B9/04 ,  G01B11/30 ,  G01B21/30 ,  G01N21/31 ,  G01N21/88 ,  G01N21/94 ,  G01N21/95 ,  G01N21/956 ,  G06T1/00 ,  H01L21/00 ,  H01L21/66 ,  H04N7/18

CPC classification number: H01L21/67288 ,  G01N21/88 ,  G01N2021/8887 ,  G01N2021/9513 ,  G01N21/31 ,  G01N21/9501 ,  G01N2201/103 ,  H01L22/12

Abstract: The invention relates to an inspection system for inspecting the surfaces of wafers, LCD's and film substrates for flaws. The system includes a scanning laser inspection system for quickly inspecting the surface and identifying and locating the flaws. The system generates and displays a flaw map graphically illustrating the article surface and the respective locations of the flaws for subsequent optical inspection. The operator selects a flaw and an optical inspection system is positioned over the selected flaw to provide a magnified image of the flaw. The operator may optically inspect all or any number of the flaws. The invention also includes means for spectrometrically analyzing the reflected light to further identify the flaw.

公开(公告)号：US4902132A

公开(公告)日：1990-02-20

申请号：US205725

申请日：1988-06-13

Applicant: Martin J. Murphy, Jr. ,  Jack B. Stubbs ,  Thomas A. Leonard

Inventor： Martin J. Murphy, Jr. ,  Jack B. Stubbs ,  Thomas A. Leonard

IPC: C12M1/34 ,  G01N15/12 ,  G01N15/14 ,  G01N21/51

CPC classification number: G01N15/1468 ,  C12M23/16 ,  C12M41/36 ,  G01N15/12 ,  G01N21/51 ,  G01N2201/103 ,  G01N2201/1087

Abstract: A plurality of parallel spaced cylindrical capillary tubes contain single cells and/or cell colonies in a medium and gel-like agarose, and the tubes are carried by a frame-like holder supported by a motor driven X-Y translation stage of an automated microscope. The microscope also incorporates an electronic optical detector and an object lens located under the tube holder. The entire contents of each tube are internally illuminated by a precision light beam emitted from a helium-neon laser and reflected by a set of precisely positioned mirrors so that the beam extends axially through each tube when the tube extends across the vertical axis of the object lens. The contents of the tubes are sequentially scanned under the control of special software within a personal computer, and the intensity of the light reflected outwardly from each cell or cell colony is sensed by the detector and recorded in the computer along with the axial location of the reflecting cell or cell colony. Preferably, the laser light is pure red, the optical detector is sensitive to the red light, and the object lens is focused on the wall of the tube to maximize the signal-to-noise ratio and to obtain full field detection across each tube.

Abstract translation: 多个平行间隔开的​​圆柱形毛细管在培养基和凝胶状琼脂糖中含有单个细胞和/或细胞集落，并且管由由自动显微镜的电动机驱动的X-Y平移台支撑的框架状支架承载。 显微镜还包括位于管座下方的电子光学检测器和物镜。 每个管的整个内容物由从氦氖激光器发射并由一组精确定位的反射镜反射的精确光束内部照射，使得当管延伸穿过物体的垂直轴线时，光束轴向延伸穿过每个管 镜片。 在个人计算机内的特殊软件的控制下依次扫描管内容物，并且由每个细胞或细胞集落向外反射的光的强度由检测器检测并记录在计算机中以及 反映细胞或细胞集落。 优选地，激光是纯红色，光学检测器对红光敏感，并且物镜聚焦在管的壁上以最大化信噪比并且跨越每个管获得全场检测。

公开(公告)号：US4695157A

公开(公告)日：1987-09-22

申请号：US786609

申请日：1985-10-11

Applicant: Gary L. Schoenbaum ,  Lewis A. Latanzi ,  Stephen L. Hedrick ,  Harold V. Johnson

Inventor： Gary L. Schoenbaum ,  Lewis A. Latanzi ,  Stephen L. Hedrick ,  Harold V. Johnson

IPC: G01N21/47 ,  G01N21/88 ,  G01N21/956

CPC classification number: G01N21/8806 ,  G01N21/474 ,  G01N2021/4752 ,  G01N2021/8887 ,  G01N2021/95646 ,  G01N2201/103

Abstract: An optical unit for inspecting the soldered surface of a printed circuit board incorporates a thick-walled translucent concave diffuser dome with a hollow central cavity facing the surface under inspection, lamps directing illumination on the exterior of the dome, inspection portals spaced around the diffuser dome for video camera inspection of the board surface, and X-Y maneuvering control means governing the relative scanning repositioning of the board surface and the dome. A light baffle between each camera and its inspection portal, incorporating alternately white and black conically chamfered rings, produces improved imaging of the inspected surface, and a flexible translucent skirt extending from the dome rim to the inspected surface, preferably formed of a large plurality of white plastic bristles, blocks direct illumination and assures substantially uniform diffused illumination of the inspected surface.

Abstract translation: 用于检查印刷电路板的焊接表面的光学单元包括厚壁的半透明的凹形扩散器圆顶，其具有面向被检查表面的中空中心腔，在圆顶的外部引导照明的灯，围绕漫射器圆顶间隔开的检查入口 用于电路板表面的摄像机检查，以及XY操纵控制装置，用于控制板表面和圆顶的相对扫描重新定位。 每个摄像机与其检查门口之间的光挡板，并入交替的白色和黑色锥形倒角环，产生被检查表面的改进的成像，以及从圆顶边缘延伸到被检查表面的柔性半透明裙部，优选地由多个 白色塑料刷毛，阻挡直接照明并确保被检查表面的基本均匀的漫射照明。