PARTIALLY INSULATED CATHODE
    79.
    发明申请
    PARTIALLY INSULATED CATHODE 有权
    部分绝缘阴极

    公开(公告)号:US20160042906A1

    公开(公告)日:2016-02-11

    申请号:US14456835

    申请日:2014-08-11

    CPC classification number: H01J1/025 G01C19/665 H01J9/02 H01J17/06 H01J17/16

    Abstract: A partially-insulated cathode for exciting plasma in a plasma chamber is provided. The partially-insulated cathode includes a conductive structure enclosing a cavity having a cavity surface and an insulating material contiguously covering a portion of the cavity surface from the cavity opening up to an insulation height that is less than a cavity height. Cross-sections of the cavity in X-Y planes have at least one respective cavity-width. A cavity opening has a diameter less than a minimum cavity-width of the at least one cavity-width.

    Abstract translation: 提供了用于激发等离子体室中的等离子体的部分绝缘阴极。 部分绝缘的阴极包括一个导电结构,该导电结构包围具有空腔表面的空腔和绝缘材料,绝缘材料连续地覆盖空腔表面的一部分从空腔开口直到小于空腔高度的绝缘高度。 X-Y平面中的空腔的横截面具有至少一个相应的腔宽度。 空腔开口的直径小于至少一个空腔宽度的最小腔宽度。

    Sintered electrode in a discharge tube
    80.
    发明授权
    Sintered electrode in a discharge tube 失效
    放电管中的烧结电极

    公开(公告)号:US4303846A

    公开(公告)日:1981-12-01

    申请号:US112452

    申请日:1980-01-16

    CPC classification number: H01J17/06 H01J61/06

    Abstract: A sintered electrode in a discharge tube comprises a sintered compact body and a cesium compound layer deposited on the sintered compact body. The sintered compact body comprises a gas getter such as titanium in the range of 5 to 50% by weight of the body, an additive for sintering such as silicon oxide in the range 0.1 to 1.0% by weight of the body and the remainder formed by a high melting point metal such as tantalum.

    Abstract translation: 放电管中的烧结电极包括沉积在烧结体上的烧结体和铯化合物层。 该烧结体包含气体吸收剂,例如钛的体积重量的5〜50重量%,用于烧结的添加剂,例如氧化硅,其氧化物的体积为0.1〜1.0重量%,其余由 高熔点金属如钽。

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